JP7207560B2 - 熱流センサおよび熱流計測システム - Google Patents

熱流センサおよび熱流計測システム Download PDF

Info

Publication number
JP7207560B2
JP7207560B2 JP2021548039A JP2021548039A JP7207560B2 JP 7207560 B2 JP7207560 B2 JP 7207560B2 JP 2021548039 A JP2021548039 A JP 2021548039A JP 2021548039 A JP2021548039 A JP 2021548039A JP 7207560 B2 JP7207560 B2 JP 7207560B2
Authority
JP
Japan
Prior art keywords
heat flow
layer
magnetic field
field applying
flow detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021548039A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2021059391A5 (https=
JPWO2021059391A1 (https=
Inventor
明宏 桐原
真彦 石田
悠真 岩崎
康智 大森
浩子 染谷
貞則 服部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Publication of JPWO2021059391A1 publication Critical patent/JPWO2021059391A1/ja
Publication of JPWO2021059391A5 publication Critical patent/JPWO2021059391A5/ja
Application granted granted Critical
Publication of JP7207560B2 publication Critical patent/JP7207560B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K17/00—Measuring quantity of heat
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/36—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using magnetic elements, e.g. magnets, coils
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K17/00—Measuring quantity of heat
    • G01K17/06—Measuring quantity of heat conveyed by flowing media, e.g. in heating systems e.g. the quantity of heat in a transporting medium, delivered to or consumed in an expenditure device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Measuring Volume Flow (AREA)
  • Measuring Magnetic Variables (AREA)
JP2021548039A 2019-09-25 2019-09-25 熱流センサおよび熱流計測システム Active JP7207560B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/037557 WO2021059391A1 (ja) 2019-09-25 2019-09-25 熱流センサ

Publications (3)

Publication Number Publication Date
JPWO2021059391A1 JPWO2021059391A1 (https=) 2021-04-01
JPWO2021059391A5 JPWO2021059391A5 (https=) 2022-03-14
JP7207560B2 true JP7207560B2 (ja) 2023-01-18

Family

ID=75164886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021548039A Active JP7207560B2 (ja) 2019-09-25 2019-09-25 熱流センサおよび熱流計測システム

Country Status (3)

Country Link
US (1) US12352637B2 (https=)
JP (1) JP7207560B2 (https=)
WO (1) WO2021059391A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022165185A (ja) * 2021-04-19 2022-10-31 国立大学法人 東京大学 センサ素子及びセンサ装置
US12474223B2 (en) 2021-09-24 2025-11-18 Apple Inc. Temperature sensing systems and methods including multiple temperature sensors
US20230099638A1 (en) * 2021-09-24 2023-03-30 Apple Inc. System and method for temperature sensing using thermopile integrated with rigid printed circuit board
US20260107687A1 (en) * 2022-09-29 2026-04-16 Nitto Denko Corporation Thermoelectric conversion element and sensor
WO2024143143A1 (ja) * 2022-12-27 2024-07-04 ＴｏｐｏＬｏｇｉｃ株式会社 熱流測定装置及び熱流測定方法
CN120419341A (zh) * 2022-12-27 2025-08-01 拓扑逻辑株式会社 信号处理方法、信号处理系统以及信号处理程序
EP4727320A1 (en) * 2023-06-08 2026-04-15 Topologic Inc. Semiconductor module, abnormality determination system, and abnormality determination method
WO2025094582A1 (ja) * 2023-10-30 2025-05-08 ＴｏｐｏＬｏｇｉｃ株式会社 計測システム及びウエハの温度分布の調整方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019009308A1 (ja) 2017-07-03 2019-01-10 国立大学法人東京大学 熱電変換素子及び熱電変換デバイス

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000067416A (ja) * 1998-08-21 2000-03-03 Read Rite Smi Kk 磁気ヘッドの製造方法、並びに、スピンバルブ磁気ヘッドの特性安定化方法及び装置
JP6079995B2 (ja) 2012-09-28 2017-02-15 国立大学法人東北大学 熱電発電デバイス
JP6791116B2 (ja) * 2015-02-26 2020-11-25 日本電気株式会社 スピン流−電流変換構造、それを用いた熱電変換素子、およびその製造方法
JP6819549B2 (ja) 2017-11-16 2021-01-27 株式会社デンソー 熱流束センサおよび熱量計測装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019009308A1 (ja) 2017-07-03 2019-01-10 国立大学法人東京大学 熱電変換素子及び熱電変換デバイス

Also Published As

Publication number Publication date
US12352637B2 (en) 2025-07-08
WO2021059391A1 (ja) 2021-04-01
US20220326094A1 (en) 2022-10-13
JPWO2021059391A1 (https=) 2021-04-01

Similar Documents

Publication Publication Date Title
JP7207560B2 (ja) 熱流センサおよび熱流計測システム
JP6220971B2 (ja) 多成分磁場センサー
JP6590422B2 (ja) 温度補償機能付センサ素子とそれを用いた磁気センサおよび電力測定装置
US4385273A (en) Transducer for measuring a current-generated magnetic field
US9983273B2 (en) Magnetic field detecting sensor and magnetic field detecting apparatus using the same
JP5888402B2 (ja) 磁気センサ素子
JP5641276B2 (ja) 電流センサ
CN103477235A (zh) 功率测量装置
JP2016001118A (ja) 電流検出装置、磁界検出装置及びこれらの方法
JPWO2018139233A1 (ja) 磁気抵抗効果素子デバイスおよび磁気抵抗効果素子装置
JP2015219227A (ja) 磁気センサ
JP6228663B2 (ja) 電流検知装置
JP2014089088A (ja) 磁気抵抗効果素子
CN110857952A (zh) 电流传感器
JP7818270B2 (ja) 異常ネルンスト効果を利用した熱流センサおよびその製造方法
JP5458319B2 (ja) 電流センサ
RU2495514C1 (ru) Магниторезистивный датчик
JP5793682B2 (ja) 電力計測装置
CN110857951B (zh) 电流传感器
TWI703338B (zh) 電流感測器
CN120380882A (zh) 热流测定装置及热流测定方法
JP2012159309A (ja) 磁気センサおよび磁気センサ装置
JP2013205201A (ja) 電流センサ及び電流センサパッケージ
JP2012093267A (ja) 電流検出装置
JPH0666592A (ja) 磁気検出ヘッド

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20211217

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20211217

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20220809

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220929

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20221206

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20221219

R151 Written notification of patent or utility model registration

Ref document number: 7207560

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151