JP7203361B2 - 双方向スイッチ素子 - Google Patents
双方向スイッチ素子 Download PDFInfo
- Publication number
- JP7203361B2 JP7203361B2 JP2020527374A JP2020527374A JP7203361B2 JP 7203361 B2 JP7203361 B2 JP 7203361B2 JP 2020527374 A JP2020527374 A JP 2020527374A JP 2020527374 A JP2020527374 A JP 2020527374A JP 7203361 B2 JP7203361 B2 JP 7203361B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- algan layer
- bidirectional switch
- switch element
- algan
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000002457 bidirectional effect Effects 0.000 title claims description 138
- 229910002704 AlGaN Inorganic materials 0.000 claims description 340
- 239000000758 substrate Substances 0.000 claims description 70
- 239000000203 mixture Substances 0.000 claims description 63
- 230000007423 decrease Effects 0.000 claims description 3
- 230000000052 comparative effect Effects 0.000 description 16
- 239000007789 gas Substances 0.000 description 13
- 239000004065 semiconductor Substances 0.000 description 10
- 230000005533 two-dimensional electron gas Effects 0.000 description 10
- 239000012535 impurity Substances 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 9
- 239000002994 raw material Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 238000010292 electrical insulation Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 3
- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 101150092200 alx-1 gene Proteins 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 125000005842 heteroatom Chemical group 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- RGGPNXQUMRMPRA-UHFFFAOYSA-N triethylgallium Chemical compound CC[Ga](CC)CC RGGPNXQUMRMPRA-UHFFFAOYSA-N 0.000 description 2
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 2
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052792 caesium Inorganic materials 0.000 description 1
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
- 150000002429 hydrazines Chemical class 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- QBJCZLXULXFYCK-UHFFFAOYSA-N magnesium;cyclopenta-1,3-diene Chemical compound [Mg+2].C1C=CC=[C-]1.C1C=CC=[C-]1 QBJCZLXULXFYCK-UHFFFAOYSA-N 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910052700 potassium Inorganic materials 0.000 description 1
- 239000011591 potassium Substances 0.000 description 1
- 229910052701 rubidium Inorganic materials 0.000 description 1
- IGLNJRXAVVLDKE-UHFFFAOYSA-N rubidium atom Chemical compound [Rb] IGLNJRXAVVLDKE-UHFFFAOYSA-N 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000000682 scanning probe acoustic microscopy Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 238000000927 vapour-phase epitaxy Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1066—Gate region of field-effect devices with PN junction gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/432—Heterojunction gate for field effect devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7782—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with confinement of carriers by at least two heterojunctions, e.g. DHHEMT, quantum well HEMT, DHMODFET
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/778—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface
- H01L29/7782—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with confinement of carriers by at least two heterojunctions, e.g. DHHEMT, quantum well HEMT, DHMODFET
- H01L29/7783—Field effect transistors with two-dimensional charge carrier gas channel, e.g. HEMT ; with two-dimensional charge-carrier layer formed at a heterojunction interface with confinement of carriers by at least two heterojunctions, e.g. DHHEMT, quantum well HEMT, DHMODFET using III-V semiconductor material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/80—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier
- H01L29/808—Field effect transistors with field effect produced by a PN or other rectifying junction gate, i.e. potential-jump barrier with a PN junction gate, e.g. PN homojunction gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Junction Field-Effect Transistors (AREA)
- Chemical Vapour Deposition (AREA)
Description
本開示に係る別の一態様の双方向スイッチ素子は、基板と、Al z Ga 1-z N層(ここで、0≦z<1)と、Al b Ga 1-b N層(ここで、0<b<1)と、第1のソース電極と、第1のゲート電極と、第2のゲート電極と、第2のソース電極と、p型Al x1 Ga 1-x1 N層(ここで、0≦x1≦1)と、p型Al x2 Ga 1-x2 N層(ここで、0≦x2≦1)と、Al y Ga 1-y N層(ここで、0<y<1、かつ、z<y<b)と、Al w Ga 1-w N層(ここで、0<w<1、かつ、z<w<b)と、を備える。前記Al z Ga 1-z N層は、前記基板上に形成されている。前記Al b Ga 1-b N層は、前記Al z Ga 1-z N層上に形成されている。前記第1のソース電極、前記1のゲート電極、前記第2のゲート電極、及び、前記第2のソース電極は、前記Al b Ga 1-b N層上に形成されている。前記p型Al x1 Ga 1-x1 N層は、前記第1のゲート電極と前記Al b Ga 1-b N層との間に介在している。前記p型Al x2 Ga 1-x2 N層は、前記第2のゲート電極と前記Al b Ga 1-b N層との間に介在している。前記Al y Ga 1-y N層は、前記基板と前記Al z Ga 1-z N層との間に介在している。前記Al w Ga 1-w N層は、前記基板と前記Al y Ga 1-y N層との間に介在している。前記Al w Ga 1-w N層のCの濃度は、前記Al y Ga 1-y N層のCの濃度よりも高い。前記双方向スイッチは、前記基板が前記第1のソース電極、前記第2のソース電極、前記第1のゲート電極及び前記第2のゲート電極のいずれとも電気的に絶縁された状態で使用される。
以下では、実施形態1に係る双方向スイッチ素子1について、図1に基づいて説明する。
以下では、実施形態2に係る双方向スイッチ素子1bについて、図5に基づいて説明する。
以下では、実施形態3に係る双方向スイッチ素子1cについて、図7に基づいて説明する。
以上説明した実施形態等から本明細書には以下の態様が開示されている。
2 基板
4、4a、4b、4c 第3のAlGaN層(AlwGa1-wN層)
5、5a、5b、5c 第2のAlGaN層(AlyGa1-yN層)
6 GaN層(AlzGa1-zN層)
61 第4のAlGaN層(AlzGa1-zN層)
7 第1のAlGaN層(AlbGa1-bN層)
81 第1のp型AlGaN層(p型Alx1Ga1-x1N層)
82 第2のp型AlGaN層(p型Alx2Ga1-x2N層)
G1 第1のゲート電極
G2 第2のゲート電極
S1 第1のソース電極
S2 第2のソース電極
Claims (8)
- 基板と、
前記基板上に形成されているAlzGa1-zN層(ここで、0≦z<1)と、
前記AlzGa1-zN層上に形成されているAlbGa1-bN層(ここで、0<b<1)と、
前記AlbGa1-bN層上に形成されている第1のソース電極、第1のゲート電極、第2のゲート電極、及び、第2のソース電極と、
前記第1のゲート電極と前記AlbGa1-bN層との間に介在しているp型Alx1Ga1-x1N層(ここで、0≦x1≦1)と、
前記第2のゲート電極と前記AlbGa1-bN層との間に介在しているp型Alx2Ga1-x2N層(ここで、0≦x2≦1)と、
前記基板と前記AlzGa1-zN層との間に介在しているAlyGa1-yN層(ここで、0<y<1、かつ、z<y<b)と、
前記基板と前記AlyGa1-yN層との間に介在し、前記AlyGa1-yN層よりもCの濃度が高いAlwGa1-wN層(ここで、0<w<1、かつ、z<w<b)と、を備え、
前記Al y Ga 1-y N層のAlの組成比yが0.05未満であり、
前記Al w Ga 1-w N層のAlの組成比wが0.05未満である、
双方向スイッチ素子。 - 前記Al y Ga 1-y N層のAlの組成比yが0.03未満であり、
前記Al w Ga 1-w N層のAlの組成比wが0.03未満である、
請求項1に記載の双方向スイッチ素子。 - 前記基板が前記第1のソース電極、前記第2のソース電極、前記第1のゲート電極及び前記第2のゲート電極のいずれとも電気的に絶縁された状態で使用される、
請求項1又は2に記載の双方向スイッチ素子。 - 基板と、
前記基板上に形成されているAl z Ga 1-z N層(ここで、0≦z<1)と、
前記Al z Ga 1-z N層上に形成されているAl b Ga 1-b N層(ここで、0<b<1)と、
前記Al b Ga 1-b N層上に形成されている第1のソース電極、第1のゲート電極、第2のゲート電極、及び、第2のソース電極と、
前記第1のゲート電極と前記Al b Ga 1-b N層との間に介在しているp型Al x1 Ga 1-x1 N層(ここで、0≦x1≦1)と、
前記第2のゲート電極と前記Al b Ga 1-b N層との間に介在しているp型Al x2 Ga 1-x2 N層(ここで、0≦x2≦1)と、
前記基板と前記Al z Ga 1-z N層との間に介在しているAl y Ga 1-y N層(ここで、0<y<1、かつ、z<y<b)と、
前記基板と前記Al y Ga 1-y N層との間に介在し、前記Al y Ga 1-y N層よりもCの濃度が高いAl w Ga 1-w N層(ここで、0<w<1、かつ、z<w<b)と、を備え、
前記基板が前記第1のソース電極、前記第2のソース電極、前記第1のゲート電極及び前記第2のゲート電極のいずれとも電気的に絶縁された状態で使用される、
双方向スイッチ素子。 - 前記Al y Ga 1-y N層のAlの組成比yが0.05未満である、
請求項4に記載の双方向スイッチ素子。 - 前記Al y Ga 1-y N層のAlの組成比yは、前記Al w Ga 1-w N層のAlの組成比wよりも小さく、
前記Al y Ga 1-y N層では、前記Al y Ga 1-y N層の厚み方向において前記Al w Ga 1-w N層から離れるにつれてAlの組成比yが小さくなっている、
請求項4又は5に記載の双方向スイッチ素子。 - 前記Al y Ga 1-y N層は、互いにAlの組成比の異なる3層以上のAlGaN層の積層膜である、
請求項4~6のいずれか一項に記載の双方向スイッチ素子。 - 前記Al w Ga 1-w N層の厚さが、前記Al y Ga 1-y N層の厚さよりも厚い、
請求項1~7のいずれか一項に記載の双方向スイッチ素子。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018125452 | 2018-06-29 | ||
JP2018125452 | 2018-06-29 | ||
PCT/JP2019/023188 WO2020004021A1 (ja) | 2018-06-29 | 2019-06-12 | 双方向スイッチ素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2020004021A1 JPWO2020004021A1 (ja) | 2021-08-02 |
JP7203361B2 true JP7203361B2 (ja) | 2023-01-13 |
Family
ID=68986372
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020527374A Active JP7203361B2 (ja) | 2018-06-29 | 2019-06-12 | 双方向スイッチ素子 |
Country Status (4)
Country | Link |
---|---|
US (1) | US11605715B2 (ja) |
JP (1) | JP7203361B2 (ja) |
DE (1) | DE112019003283T5 (ja) |
WO (1) | WO2020004021A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7261196B2 (ja) | 2020-04-06 | 2023-04-19 | 株式会社東芝 | 半導体装置 |
US20220416777A1 (en) | 2021-06-29 | 2022-12-29 | Navitas Semiconductor Limited | Circuits and methods for controlling a voltage of a semiconductor substrate |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001196575A (ja) | 2000-01-13 | 2001-07-19 | Matsushita Electric Ind Co Ltd | 半導体装置 |
WO2008062800A1 (fr) | 2006-11-20 | 2008-05-29 | Panasonic Corporation | Dispositif à semi-conducteur et son procédé d'entraînement |
JP2012243871A (ja) | 2011-05-17 | 2012-12-10 | Advanced Power Device Research Association | 半導体素子及びその製造方法 |
JP2015115582A (ja) | 2013-12-16 | 2015-06-22 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
JP2017521869A (ja) | 2014-07-21 | 2017-08-03 | トランスフォーム インコーポレーテッド | エンハンスメントモードiii族窒化物デバイスの形成 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPWO2011064955A1 (ja) * | 2009-11-30 | 2013-04-11 | パナソニック株式会社 | 双方向スイッチ |
JP5666157B2 (ja) | 2010-03-26 | 2015-02-12 | パナソニック株式会社 | 双方向スイッチ素子及びそれを用いた双方向スイッチ回路 |
-
2019
- 2019-06-12 JP JP2020527374A patent/JP7203361B2/ja active Active
- 2019-06-12 DE DE112019003283.6T patent/DE112019003283T5/de active Pending
- 2019-06-12 US US17/256,475 patent/US11605715B2/en active Active
- 2019-06-12 WO PCT/JP2019/023188 patent/WO2020004021A1/ja active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001196575A (ja) | 2000-01-13 | 2001-07-19 | Matsushita Electric Ind Co Ltd | 半導体装置 |
WO2008062800A1 (fr) | 2006-11-20 | 2008-05-29 | Panasonic Corporation | Dispositif à semi-conducteur et son procédé d'entraînement |
JP2012243871A (ja) | 2011-05-17 | 2012-12-10 | Advanced Power Device Research Association | 半導体素子及びその製造方法 |
JP2015115582A (ja) | 2013-12-16 | 2015-06-22 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
JP2017521869A (ja) | 2014-07-21 | 2017-08-03 | トランスフォーム インコーポレーテッド | エンハンスメントモードiii族窒化物デバイスの形成 |
Also Published As
Publication number | Publication date |
---|---|
US20210134963A1 (en) | 2021-05-06 |
JPWO2020004021A1 (ja) | 2021-08-02 |
US11605715B2 (en) | 2023-03-14 |
WO2020004021A1 (ja) | 2020-01-02 |
DE112019003283T5 (de) | 2021-04-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20210057564A1 (en) | Semiconductor device | |
US9343542B2 (en) | Method for fabricating enhancement mode transistor | |
JP5793120B2 (ja) | 集積されたダイオードを有するsoi基板を備える複合半導体装置 | |
JP4761319B2 (ja) | 窒化物半導体装置とそれを含む電力変換装置 | |
US9093366B2 (en) | N-polar III-nitride transistors | |
US8519439B2 (en) | Nitride semiconductor element with N-face semiconductor crystal layer | |
US20140110759A1 (en) | Semiconductor device | |
JP6189235B2 (ja) | 半導体装置 | |
JP5383652B2 (ja) | 電界効果トランジスタ及びその製造方法 | |
JP5564842B2 (ja) | 半導体装置 | |
US8816399B2 (en) | Semiconductor device | |
JP2010135640A (ja) | 電界効果トランジスタ | |
US20110233615A1 (en) | Semiconductor device | |
US9076850B2 (en) | High electron mobility transistor | |
JP5779284B2 (ja) | スイッチング素子 | |
US9087890B2 (en) | Semiconductor device | |
JP5997234B2 (ja) | 半導体装置、電界効果トランジスタおよび電子装置 | |
US20150263155A1 (en) | Semiconductor device | |
JP4474292B2 (ja) | 半導体装置 | |
JP2011009493A (ja) | 半導体装置およびその製造方法 | |
CN106206708A (zh) | 半导体装置 | |
JP7203361B2 (ja) | 双方向スイッチ素子 | |
US20220385203A1 (en) | Nitride-based semiconductor bidirectional switching device and method for manufacturing the same | |
WO2012029292A1 (ja) | 半導体基板、絶縁ゲート型電界効果トランジスタおよび半導体基板の製造方法 | |
JPWO2018181237A1 (ja) | 半導体装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20211213 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220809 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20221011 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20221122 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20221216 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 7203361 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |