JP7173909B2 - 半導体記憶装置 - Google Patents
半導体記憶装置 Download PDFInfo
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- JP7173909B2 JP7173909B2 JP2019053681A JP2019053681A JP7173909B2 JP 7173909 B2 JP7173909 B2 JP 7173909B2 JP 2019053681 A JP2019053681 A JP 2019053681A JP 2019053681 A JP2019053681 A JP 2019053681A JP 7173909 B2 JP7173909 B2 JP 7173909B2
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- 239000004065 semiconductor Substances 0.000 title claims description 92
- 239000010410 layer Substances 0.000 claims description 279
- 239000011229 interlayer Substances 0.000 claims description 31
- 229910000449 hafnium oxide Inorganic materials 0.000 claims description 29
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 claims description 29
- 229910052721 tungsten Inorganic materials 0.000 claims description 11
- 239000010937 tungsten Substances 0.000 claims description 11
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 10
- 239000013078 crystal Substances 0.000 claims description 9
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 5
- 239000010936 titanium Substances 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 claims description 2
- 229910003468 tantalcarbide Inorganic materials 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims description 2
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 2
- -1 tungsten nitride Chemical class 0.000 claims description 2
- 230000015654 memory Effects 0.000 description 49
- 229910052751 metal Inorganic materials 0.000 description 44
- 239000002184 metal Substances 0.000 description 44
- 238000000034 method Methods 0.000 description 17
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- 238000004519 manufacturing process Methods 0.000 description 13
- 229910052814 silicon oxide Inorganic materials 0.000 description 13
- 230000010287 polarization Effects 0.000 description 12
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- 229910052581 Si3N4 Inorganic materials 0.000 description 10
- 230000014759 maintenance of location Effects 0.000 description 10
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 10
- 230000002999 depolarising effect Effects 0.000 description 5
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000001039 wet etching Methods 0.000 description 4
- 238000000231 atomic layer deposition Methods 0.000 description 3
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- 238000005530 etching Methods 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000002033 PVDF binder Substances 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
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- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 230000028161 membrane depolarization Effects 0.000 description 2
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- 230000003071 parasitic effect Effects 0.000 description 2
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 2
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 2
- 230000003313 weakening effect Effects 0.000 description 2
- 229910052692 Dysprosium Inorganic materials 0.000 description 1
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- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 229910052689 Holmium Inorganic materials 0.000 description 1
- 229910052765 Lutetium Inorganic materials 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- VNSWULZVUKFJHK-UHFFFAOYSA-N [Sr].[Bi] Chemical compound [Sr].[Bi] VNSWULZVUKFJHK-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- KBQHZAAAGSGFKK-UHFFFAOYSA-N dysprosium atom Chemical compound [Dy] KBQHZAAAGSGFKK-UHFFFAOYSA-N 0.000 description 1
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- 230000005621 ferroelectricity Effects 0.000 description 1
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- KJZYNXUDTRRSPN-UHFFFAOYSA-N holmium atom Chemical compound [Ho] KJZYNXUDTRRSPN-UHFFFAOYSA-N 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- OHSVLFRHMCKCQY-UHFFFAOYSA-N lutetium atom Chemical compound [Lu] OHSVLFRHMCKCQY-UHFFFAOYSA-N 0.000 description 1
- 238000004451 qualitative analysis Methods 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- KZUNJOHGWZRPMI-UHFFFAOYSA-N samarium atom Chemical compound [Sm] KZUNJOHGWZRPMI-UHFFFAOYSA-N 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- GZCRRIHWUXGPOV-UHFFFAOYSA-N terbium atom Chemical compound [Tb] GZCRRIHWUXGPOV-UHFFFAOYSA-N 0.000 description 1
- NAWDYIZEMPQZHO-UHFFFAOYSA-N ytterbium Chemical compound [Yb] NAWDYIZEMPQZHO-UHFFFAOYSA-N 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
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Description
d2≧d1+10・・・(不等式)
d2≧d1+10・・・(式)
d2≧d1+10・・・(式)
12 層間絶縁層
14 ゲート絶縁層(第1の絶縁層)
16 金属層(導電層)
18 強誘電体層(第2の絶縁層)
18a 強誘電体領域(第1の領域)
18b 常誘電体領域(第2の領域)
30 積層体
WL ワード線(ゲート電極層)
Claims (11)
- 層間絶縁層とゲート電極層とが第1の方向に交互に積層された積層体と、
前記積層体の中に設けられ、前記第1の方向に延びる半導体層と、
前記半導体層と前記ゲート電極層との間に設けられた第1の絶縁層と、
前記第1の絶縁層と前記ゲート電極層との間に設けられた導電層と、
前記導電層と前記ゲート電極層との間に設けられ、強誘電体を含む第2の絶縁層と、
を備え、
前記第1の方向に隣り合う2つの前記導電層は、前記層間絶縁層を間に挟んで離間し、
前記ゲート電極層の前記第1の方向の第1の厚さは、前記導電層の前記第1の方向の第2の厚さより小さく、
前記第2の絶縁層は、前記導電層と前記ゲート電極層との間の第1の領域と、前記ゲート電極層と前記層間絶縁層との間の第2の領域と、を有し、
前記第1の領域が前記強誘電体を含み、前記第2の領域が常誘電体を含む、半導体記憶装置。 - 層間絶縁層とゲート電極層とが第1の方向に交互に積層された積層体と、
前記積層体の中に設けられ、前記第1の方向に延びる半導体層と、
前記半導体層と前記ゲート電極層との間に設けられた第1の絶縁層と、
前記第1の絶縁層と前記ゲート電極層との間に設けられた導電層と、
前記導電層と前記ゲート電極層との間に設けられ、強誘電体を含む第2の絶縁層と、
を備え、
前記第1の方向に隣り合う2つの前記導電層は、前記層間絶縁層を間に挟んで離間し、
前記ゲート電極層の前記第1の方向の第1の厚さは、前記導電層の前記第1の方向の第2の厚さより小さく、
前記第2の絶縁層は、前記導電層と前記ゲート電極層との間の第1の領域と、前記ゲート電極層と前記層間絶縁層との間の第2の領域と、を有し、
前記第1の領域が直方晶系の結晶を含み、前記第2の領域が単斜晶系の結晶を含む、半導体記憶装置。 - 前記第2の絶縁層は酸化ハフニウムを含む請求項1又は請求項2いずれか一項記載の半導体記憶装置。
- 前記第1の厚さをd1(nm)、前記第2の厚さをd2(nm)とした場合に、下記不等式が成立する請求項3記載の半導体記憶装置。
d2≧d1+10・・・(式) - 前記第1の絶縁層は、前記半導体層と前記層間絶縁層との間に設けられる請求項1ないし請求項4いずれか一項記載の半導体記憶装置。
- 前記第1の方向に直交する第2の方向の前記導電層の幅は、略一定である請求項1ないし請求項5いずれか一項記載の半導体記憶装置。
- 前記導電層は、チタン(Ti)、タングステン(W)、タンタル(Ta)、窒化チタン、窒化タングステン、窒化タンタル、炭化チタン、炭化タングステン、及び、炭化タンタルからなる群から選ばれる少なくとも一つの材料を含む請求項1ないし請求項6いずれか一項記載の半導体記憶装置。
- 第1の方向に離間して配置された複数のゲート電極層と、
前記第1の方向に延びる半導体層と、
前記半導体層と前記ゲート電極層との間に設けられた第1の絶縁層と、
前記第1の絶縁層と前記ゲート電極層との間に設けられた導電層と、
前記導電層と前記ゲート電極層との間に設けられ、強誘電体を含む第2の絶縁層と、
を備え、
前記第1の方向に隣り合う2つの前記導電層は離間し、
前記ゲート電極層の前記第1の方向の第1の厚さは、前記導電層の前記第1の方向の第2の厚さより小さく、
前記第2の絶縁層は、前記導電層と前記ゲート電極層との間の第1の領域と、前記ゲート電極層の前記第1の方向に位置する第2の領域と、を有し、
前記第1の領域が前記強誘電体を含み、前記第2の領域が常誘電体を含む、半導体記憶装置。 - 第1の方向に離間して配置された複数のゲート電極層と、
前記第1の方向に延びる半導体層と、
前記半導体層と前記ゲート電極層との間に設けられた第1の絶縁層と、
前記第1の絶縁層と前記ゲート電極層との間に設けられた導電層と、
前記導電層と前記ゲート電極層との間に設けられ、強誘電体を含む第2の絶縁層と、
を備え、
前記第1の方向に隣り合う2つの前記導電層は離間し、
前記ゲート電極層の前記第1の方向の第1の厚さは、前記導電層の前記第1の方向の第2の厚さより小さく、
前記第2の絶縁層は、前記導電層と前記ゲート電極層との間の第1の領域と、前記ゲート電極層の前記第1の方向に位置する第2の領域と、を有し、
前記第1の領域が直方晶系の結晶を含み、前記第2の領域が単斜晶系の結晶を含む、半導体記憶装置。 - 前記第2の絶縁層は酸化ハフニウムを含む請求項8又は請求項9記載の半導体記憶装置。
- 前記第1の厚さをd1(nm)、前記第2の厚さをd2(nm)とした場合に、下記不等式が成立する請求項10記載の半導体記憶装置。
d2≧d1+10・・・(式)
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