JP7167948B2 - 倣い装置 - Google Patents
倣い装置 Download PDFInfo
- Publication number
- JP7167948B2 JP7167948B2 JP2019570641A JP2019570641A JP7167948B2 JP 7167948 B2 JP7167948 B2 JP 7167948B2 JP 2019570641 A JP2019570641 A JP 2019570641A JP 2019570641 A JP2019570641 A JP 2019570641A JP 7167948 B2 JP7167948 B2 JP 7167948B2
- Authority
- JP
- Japan
- Prior art keywords
- fulcrum
- center
- gravity
- copying apparatus
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000005484 gravity Effects 0.000 claims description 28
- 238000005452 bending Methods 0.000 claims description 23
- 230000003287 optical effect Effects 0.000 claims description 22
- 230000007246 mechanism Effects 0.000 claims description 21
- 230000036544 posture Effects 0.000 claims description 16
- 238000005259 measurement Methods 0.000 description 19
- 238000010586 diagram Methods 0.000 description 18
- 230000004048 modification Effects 0.000 description 7
- 238000012986 modification Methods 0.000 description 7
- 238000000926 separation method Methods 0.000 description 7
- 230000008602 contraction Effects 0.000 description 4
- 230000006870 function Effects 0.000 description 4
- 238000013459 approach Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000013256 coordination polymer Substances 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/0008—Balancing devices
- B25J19/002—Balancing devices using counterweights
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/02—Sensing devices
- B25J19/021—Optical sensing devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0019—End effectors other than grippers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J17/00—Joints
- B25J17/02—Wrist joints
- B25J17/0258—Two-dimensional joints
- B25J17/0275—Universal joints, e.g. Hooke, Cardan, ball joints
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1694—Programme controls characterised by use of sensors other than normal servo-feedback from position, speed or acceleration sensors, perception control, multi-sensor controlled systems, sensor fusion
- B25J9/1697—Vision controlled systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/0266—Field-of-view determination; Aiming or pointing of a photometer; Adjusting alignment; Encoding angular position; Size of the measurement area; Position tracking; Photodetection involving different fields of view for a single detector
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/0271—Housings; Attachments or accessories for photometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0403—Mechanical elements; Supports for optical elements; Scanning arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0289—Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0291—Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/06—Scanning arrangements arrangements for order-selection
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
- G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Electrophotography Configuration And Component (AREA)
- Microscoopes, Condenser (AREA)
- Manipulator (AREA)
- Eye Examination Apparatus (AREA)
Description
式form-2;L1・F1=L2・F3
式form-3;F2={(L1・L3)/(L2・L4)}・F1
Claims (8)
- 対象物の対象面に、目的物の目的面を倣わせる倣い装置であって、
第1支点周りに回動し、前記目的物を保持する保持部と、
前記保持部に一方端で連結され、連結方向を除いて自由度を持つ中間部と、
前記中間部の他方端に連結され、前記第1支点と異なる第2支点周りに回動するバランサ部とを備え、
前記第1支点の第1支点位置、前記目的物を保持している場合における前記目的物および前記保持部のうちの前記第1支点周りに回動する部分の重心の第1重心位置、前記中間部の屈曲点の屈曲位置、第2支点位置および前記バランサ部のうちの前記第2支点周りに回動する部分の重心の第2重心位置は、この順で並んで位置する、
倣い装置。 - 前記第1支点の第1支点位置、前記目的物を保持している場合における前記目的物および前記保持部のうちの前記第1支点周りに回動する部分の重心の第1重心位置、前記中間部の屈曲点の屈曲位置、第2支点位置および前記バランサ部のうちの前記第2支点周りに回動する部分の重心の第2重心位置は、それぞれバランスのとれる位置関係に設定されている、
請求項1に記載の倣い装置。 - 前記第1重心位置に作用する負荷をF1とし、前記第1支点位置から前記第1重心位置までの第1距離をL1とし、前記第1支点位置から前記屈曲位置までの第2距離をL2とし、前記屈曲位置から前記第2支点位置までの第3距離をL3とし、前記第2支点位置から前記第2重心位置までの第4距離をL4とし、前記目的物を保持している場合における前記目的物および前記保持部のうちの第1支点周りに回動する部分の質量をm1とした場合に、前記バランサ部のうちの前記第2支点周りに回動する部分の質量m2は、次式1を満たす、
請求項2に記載の倣い装置。
式1;m2={(L1・L3)/(L2・L4)}・m1 - 前記第1および第2支点は、それぞれ、第1軸回りの回動および第2軸回りの回動を行うための線形独立な2方向の2軸である、
請求項1ないし請求項3のいずれか1項に記載の倣い装置。 - 前記中間部は、屈曲姿勢から元の姿勢に復帰させる復帰部をさらに備える、
請求項1ないし請求項4のいずれか1項に記載の倣い装置。 - 前記対象面と前記目的面とを離接する離接方向に前記保持部を移動させる移動機構をさらに備える、
請求項1ないし請求項5のいずれか1項に記載の倣い装置。 - 前記目的物を保持している場合における前記目的物および前記保持部、前記中間部ならびに前記バランサ部における姿勢に応じて重力によって生じる負荷を一定にするための第2バランサ部をさらに備える、
請求項1ないし請求項6のいずれか1項に記載の倣い装置。 - 前記目的物をさらに備え、
前記目的物は、所定の光学特性を測定する光学特性測定器である、
請求項1ないし請求項7のいずれか1項に記載の倣い装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018021585 | 2018-02-09 | ||
JP2018021585 | 2018-02-09 | ||
PCT/JP2019/001368 WO2019155845A1 (ja) | 2018-02-09 | 2019-01-18 | 倣い装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2019155845A1 JPWO2019155845A1 (ja) | 2021-01-28 |
JP7167948B2 true JP7167948B2 (ja) | 2022-11-09 |
Family
ID=67549584
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019570641A Active JP7167948B2 (ja) | 2018-02-09 | 2019-01-18 | 倣い装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US11806867B2 (ja) |
JP (1) | JP7167948B2 (ja) |
WO (1) | WO2019155845A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20230211513A1 (en) * | 2021-12-30 | 2023-07-06 | David Thompson | Apparatus for translating movement of a rotating shaft to rotational movement in two dimensions of a lever arm |
JP7392014B2 (ja) | 2022-03-01 | 2023-12-05 | 三菱電線工業株式会社 | 汚れの検出方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001239447A (ja) | 1999-12-21 | 2001-09-04 | Mitsubishi Heavy Ind Ltd | 荷重バランス型フローティング装置 |
JP2002359263A (ja) | 2001-05-31 | 2002-12-13 | Ckd Corp | 倣い装置及び倣い装置における倣い状態保持方法 |
JP2009115782A (ja) | 2007-10-19 | 2009-05-28 | Toshiba Corp | 倣い装置 |
JP2010276432A (ja) | 2009-05-28 | 2010-12-09 | Mitsubishi Electric Corp | 倣い機構 |
JP2012235236A (ja) | 2011-04-28 | 2012-11-29 | Canon Inc | 撮像装置 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4377911A (en) * | 1981-02-18 | 1983-03-29 | Mitutoyo Mfg. Co., Ltd. | Contour measuring instrument |
GB2281779B (en) * | 1993-09-14 | 1997-04-23 | Rank Taylor Hobson Ltd | Metrological instrument |
JP3640201B2 (ja) * | 1997-12-26 | 2005-04-20 | 株式会社ミツトヨ | 表面性状測定機 |
IT1299902B1 (it) * | 1998-03-13 | 2000-04-04 | Marposs Spa | Testa, apparecchiatura e metodo per il controllo di dimensioni lineari di pezzi meccanici. |
JP3967274B2 (ja) * | 2003-02-27 | 2007-08-29 | 株式会社ミツトヨ | 測定装置 |
JP3834817B2 (ja) * | 2003-05-30 | 2006-10-18 | 株式会社東京精密 | 測定ヘッド |
JP5185886B2 (ja) | 2009-05-28 | 2013-04-17 | 三菱電機株式会社 | 倣い機構 |
JP6807821B2 (ja) * | 2017-10-31 | 2021-01-06 | 株式会社東芝 | 検査システム |
EP4028223B1 (en) * | 2019-09-12 | 2023-10-18 | Syddansk Universitet | End effector comprising resilient members between adjacent holding tools |
-
2019
- 2019-01-18 US US16/968,497 patent/US11806867B2/en active Active
- 2019-01-18 JP JP2019570641A patent/JP7167948B2/ja active Active
- 2019-01-18 WO PCT/JP2019/001368 patent/WO2019155845A1/ja active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001239447A (ja) | 1999-12-21 | 2001-09-04 | Mitsubishi Heavy Ind Ltd | 荷重バランス型フローティング装置 |
JP2002359263A (ja) | 2001-05-31 | 2002-12-13 | Ckd Corp | 倣い装置及び倣い装置における倣い状態保持方法 |
JP2009115782A (ja) | 2007-10-19 | 2009-05-28 | Toshiba Corp | 倣い装置 |
JP2010276432A (ja) | 2009-05-28 | 2010-12-09 | Mitsubishi Electric Corp | 倣い機構 |
JP2012235236A (ja) | 2011-04-28 | 2012-11-29 | Canon Inc | 撮像装置 |
Also Published As
Publication number | Publication date |
---|---|
WO2019155845A1 (ja) | 2019-08-15 |
US11806867B2 (en) | 2023-11-07 |
JPWO2019155845A1 (ja) | 2021-01-28 |
US20200406484A1 (en) | 2020-12-31 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7167948B2 (ja) | 倣い装置 | |
JP4417114B2 (ja) | 座標測定器用プローブヘッド | |
Henselmans et al. | The NANOMEFOS non-contact measurement machine for freeform optics | |
EP3167517B1 (en) | Laser tracker calibration system and methods | |
JP4659476B2 (ja) | 干渉計の被検レンズ支持装置 | |
JP4905091B2 (ja) | ミラー取付構造 | |
US20060249675A1 (en) | Surface roughness and/or contour shape measuring apparatus | |
JP5795844B2 (ja) | プロジェクタ支持装置 | |
WO2005081060A2 (en) | Device consisting of at least one optical element | |
TW200944955A (en) | Exposure apparatus and device manufacturing method | |
JP6955117B2 (ja) | 振動絶縁システムおよびリソグラフィ装置 | |
US20210311177A1 (en) | Laser tracker calibration system and methods | |
JP5950639B2 (ja) | ホルダーおよびホルダーを有するプロジェクタ | |
CN112394471A (zh) | 光学元件驱动装置、照相机装置以及电子设备 | |
Werner et al. | Design of a long stroke translation stage for AFM | |
KR101873265B1 (ko) | 센터정렬기능을 갖는 스테빌라이저바 형상검사장치 | |
TW201312158A (zh) | 具有可撓性聯軸器之投射系統 | |
CN113574435A (zh) | 用于光学成像系统的可倾斜折叠反射镜 | |
JP2020190658A (ja) | 光学素子駆動装置、カメラ装置、及び電子機器 | |
JP2020190655A (ja) | 光学素子駆動装置、カメラ装置、及び電子機器 | |
JP3265360B2 (ja) | 反射光学系の支持調整装置 | |
KR20230009492A (ko) | 스테이지 장치, 노광 장치, 플랫 패널 디스플레이의 제조 방법, 및 디바이스 제조 방법 | |
JPH1062136A (ja) | 形状測定方法及び形状測定装置 | |
EP0353980B1 (en) | A mounting method | |
JP3873723B2 (ja) | レーザー墨出し装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210628 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20220517 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220621 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20220927 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20221010 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7167948 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |