JP7151864B2 - 振動装置 - Google Patents
振動装置 Download PDFInfo
- Publication number
- JP7151864B2 JP7151864B2 JP2021501914A JP2021501914A JP7151864B2 JP 7151864 B2 JP7151864 B2 JP 7151864B2 JP 2021501914 A JP2021501914 A JP 2021501914A JP 2021501914 A JP2021501914 A JP 2021501914A JP 7151864 B2 JP7151864 B2 JP 7151864B2
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- JP
- Japan
- Prior art keywords
- diaphragm
- conductor wiring
- piezoelectric element
- view
- vibrating device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000004020 conductor Substances 0.000 claims description 65
- 230000004048 modification Effects 0.000 description 13
- 238000012986 modification Methods 0.000 description 13
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 238000005452 bending Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 230000007935 neutral effect Effects 0.000 description 4
- 229910000679 solder Inorganic materials 0.000 description 3
- 238000005476 soldering Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 238000004873 anchoring Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Description
2…ケース
3…ベース部材
4…ケース部材
5…蓋材
6…第1の振動板
6a…第1の端部
6b…第2の端部
6c…屈曲連結部
7…第2の振動板
7a…第1の端部
7b…第2の端部
7c…屈曲連結部
9…質量付加部材
9a…上面
9b,9c…傾斜部
10…支持部
10A~10D…固定端子部
10a…第1の辺部分
10b…第2の辺部分
11,12…第1,第2の圧電素子
11a…圧電板
11b…第1の電極
11c…第2の電極
13…第1の導体配線
13A…第1の導体配線
13a…第1の部分
13b…第2の部分
13c,13d…突出部
13e…接合部
13f…貫通孔
13x,14x…接合部
14…第2の導体配線
17…第1の固定部材
17A…第2の固定部材
21…振動装置
31…はんだ
A~H…屈曲部
Claims (4)
- 長さ方向を有し、前記長さ方向一端側の第1の端部と他端側の第2の端部とを有し、該第2の端部が自由端である第1の振動板と、
前記長さ方向と逆方向一端側の第1の端部と他端側の第2の端部とを有し、該第2の端部が自由端である第2の振動板と、
対向し合う第1,第2の辺部分を有し、前記第1の振動板の前記第1の端部が前記第1の辺部分に接続されており、前記第2の振動板の前記第1の端部が前記第2の辺部分に接続されている支持部と、
前記第1の振動板に設けられた第1の圧電素子と、
前記第2の振動板に設けられた第2の圧電素子と、
前記第1の振動板の中央よりも前記第1の振動板の前記第1の端部側で前記第1の圧電素子に接合された第1の導体配線と、
前記第2の振動板の中央よりも前記第2の振動板の前記第1の端部側で前記第2の圧電素子に接合された第2の導体配線と、
前記第1の導体配線に接続された第1の固定部材と、
前記第2の導体配線に接続された第2の固定部材と、
側面に前記第1の固定部材及び前記第2の固定部材が固定されている矩形枠状のケース部材と、
前記第1の振動板の中央よりも前記第1の振動板の前記第2の端部側で前記第1の振動板に接合されるとともに、前記第2の振動板の中央よりも前記第2の振動板の前記第2の端部側で前記第2の振動板に接合される質量付加部材と、
を備え、
前記第1の導体配線及び前記第2の導体配線が屈曲部を有する、振動装置。 - 前記第1の導体配線が、複数の前記屈曲部を有する、請求項1に記載の振動装置。
- 前記第1の導体配線が、ミアンダ形状である、請求項1または2に記載の振動装置。
- 前記第1の導体配線が、ジグザグ形状である、請求項1または2に記載の振動装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019030108 | 2019-02-22 | ||
JP2019030108 | 2019-02-22 | ||
PCT/JP2020/005583 WO2020170938A1 (ja) | 2019-02-22 | 2020-02-13 | 振動装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2020170938A1 JPWO2020170938A1 (ja) | 2021-10-21 |
JP7151864B2 true JP7151864B2 (ja) | 2022-10-12 |
Family
ID=72144696
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021501914A Active JP7151864B2 (ja) | 2019-02-22 | 2020-02-13 | 振動装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US12017252B2 (ja) |
JP (1) | JP7151864B2 (ja) |
CN (1) | CN113348039B (ja) |
WO (1) | WO2020170938A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111032239B (zh) * | 2017-09-04 | 2021-09-24 | 株式会社村田制作所 | 振动装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012153593A1 (ja) | 2011-05-09 | 2012-11-15 | 株式会社村田製作所 | 圧電発電装置 |
WO2015163166A1 (ja) | 2014-04-24 | 2015-10-29 | 株式会社村田製作所 | 振動装置 |
JP2018025756A (ja) | 2016-06-24 | 2018-02-15 | 株式会社半導体エネルギー研究所 | 表示装置、電子機器 |
CN207304408U (zh) | 2017-08-25 | 2018-05-01 | 青岛因菲尼思微电子科技有限公司 | 一种基于宽频振动能量收集器的无线传感模块 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03175425A (ja) * | 1989-12-04 | 1991-07-30 | Nec Corp | 液晶パネル装置 |
JPH09201080A (ja) | 1996-01-18 | 1997-07-31 | Canon Inc | 振動装置 |
JP2003340371A (ja) * | 2002-05-30 | 2003-12-02 | Nec Tokin Corp | 圧電アクチュエータ |
JP4660738B2 (ja) * | 2005-02-28 | 2011-03-30 | 学校法人東京理科大学 | プリント配線板及び電子機器 |
JP4412506B2 (ja) * | 2007-09-07 | 2010-02-10 | エプソントヨコム株式会社 | 圧電デバイスおよびその製造方法 |
US7948153B1 (en) * | 2008-05-14 | 2011-05-24 | Sandia Corporation | Piezoelectric energy harvester having planform-tapered interdigitated beams |
JP5609244B2 (ja) * | 2010-04-28 | 2014-10-22 | パナソニック株式会社 | 振動発電デバイス |
US9826315B2 (en) * | 2014-09-26 | 2017-11-21 | Kyocera Corporation | Acoustic generator, acoustic generation device, and electronic apparatus |
US9523940B2 (en) * | 2014-12-15 | 2016-12-20 | Ricoh Company, Ltd. | Powder detector, developing device, process cartridge, image forming apparatus, and powder detecting method |
CN108472687A (zh) * | 2016-01-29 | 2018-08-31 | 株式会社村田制作所 | 振动装置 |
WO2019021815A1 (ja) * | 2017-07-28 | 2019-01-31 | 株式会社村田製作所 | 振動装置及びその駆動方法 |
-
2020
- 2020-02-13 JP JP2021501914A patent/JP7151864B2/ja active Active
- 2020-02-13 WO PCT/JP2020/005583 patent/WO2020170938A1/ja active Application Filing
- 2020-02-13 CN CN202080011038.2A patent/CN113348039B/zh active Active
-
2021
- 2021-07-09 US US17/371,183 patent/US12017252B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2012153593A1 (ja) | 2011-05-09 | 2012-11-15 | 株式会社村田製作所 | 圧電発電装置 |
WO2015163166A1 (ja) | 2014-04-24 | 2015-10-29 | 株式会社村田製作所 | 振動装置 |
JP2018025756A (ja) | 2016-06-24 | 2018-02-15 | 株式会社半導体エネルギー研究所 | 表示装置、電子機器 |
CN207304408U (zh) | 2017-08-25 | 2018-05-01 | 青岛因菲尼思微电子科技有限公司 | 一种基于宽频振动能量收集器的无线传感模块 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2020170938A1 (ja) | 2021-10-21 |
US12017252B2 (en) | 2024-06-25 |
US20210331206A1 (en) | 2021-10-28 |
CN113348039B (zh) | 2022-05-13 |
CN113348039A (zh) | 2021-09-03 |
WO2020170938A1 (ja) | 2020-08-27 |
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