JP7123942B2 - 集積回路のウェハレベルパッケージングにおける銅堆積 - Google Patents
集積回路のウェハレベルパッケージングにおける銅堆積 Download PDFInfo
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- JP7123942B2 JP7123942B2 JP2019537031A JP2019537031A JP7123942B2 JP 7123942 B2 JP7123942 B2 JP 7123942B2 JP 2019537031 A JP2019537031 A JP 2019537031A JP 2019537031 A JP2019537031 A JP 2019537031A JP 7123942 B2 JP7123942 B2 JP 7123942B2
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- Prior art keywords
- copper
- repeat units
- dipyridyl
- bumps
- electrodeposition
- Prior art date
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- 239000010949 copper Substances 0.000 title description 48
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title description 46
- 229910052802 copper Inorganic materials 0.000 title description 46
- 238000004806 packaging method and process Methods 0.000 title description 9
- 230000008021 deposition Effects 0.000 title description 4
- 239000000203 mixture Substances 0.000 claims description 49
- 239000003112 inhibitor Substances 0.000 claims description 40
- GOOHAUXETOMSMM-UHFFFAOYSA-N Propylene oxide Chemical compound CC1CO1 GOOHAUXETOMSMM-UHFFFAOYSA-N 0.000 claims description 37
- 150000001875 compounds Chemical class 0.000 claims description 30
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 claims description 28
- 229920000570 polyether Polymers 0.000 claims description 26
- 239000004721 Polyphenylene oxide Substances 0.000 claims description 25
- 239000002253 acid Substances 0.000 claims description 13
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 claims description 12
- 150000001412 amines Chemical class 0.000 claims description 12
- 229910001431 copper ion Inorganic materials 0.000 claims description 12
- 150000002898 organic sulfur compounds Chemical class 0.000 claims description 11
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 7
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 claims description 3
- 150000001768 cations Chemical class 0.000 claims description 3
- 229910001413 alkali metal ion Inorganic materials 0.000 claims description 2
- 238000004070 electrodeposition Methods 0.000 description 43
- 238000000034 method Methods 0.000 description 34
- ROFVEXUMMXZLPA-UHFFFAOYSA-N Bipyridyl Chemical group N1=CC=CC=C1C1=CC=CC=N1 ROFVEXUMMXZLPA-UHFFFAOYSA-N 0.000 description 33
- 230000008569 process Effects 0.000 description 30
- 238000006243 chemical reaction Methods 0.000 description 29
- 229920000642 polymer Polymers 0.000 description 28
- -1 levelers Substances 0.000 description 27
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical group C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 25
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 23
- 229910000679 solder Inorganic materials 0.000 description 23
- 239000002168 alkylating agent Substances 0.000 description 22
- 229940100198 alkylating agent Drugs 0.000 description 22
- 125000002947 alkylene group Chemical group 0.000 description 22
- 125000004432 carbon atom Chemical group C* 0.000 description 21
- 239000000376 reactant Substances 0.000 description 21
- 125000000217 alkyl group Chemical group 0.000 description 20
- 229910052751 metal Inorganic materials 0.000 description 20
- 239000002184 metal Substances 0.000 description 20
- 229910052799 carbon Inorganic materials 0.000 description 19
- 239000001257 hydrogen Substances 0.000 description 16
- 229910052739 hydrogen Inorganic materials 0.000 description 16
- QAOWNCQODCNURD-UHFFFAOYSA-N sulfuric acid group Chemical group S(O)(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 16
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 15
- 238000005956 quaternization reaction Methods 0.000 description 14
- 150000003512 tertiary amines Chemical class 0.000 description 14
- VILCJCGEZXAXTO-UHFFFAOYSA-N 2,2,2-tetramine Chemical class NCCNCCNCCN VILCJCGEZXAXTO-UHFFFAOYSA-N 0.000 description 13
- 150000001721 carbon Chemical group 0.000 description 13
- 229910052757 nitrogen Inorganic materials 0.000 description 13
- 238000007747 plating Methods 0.000 description 13
- 125000002091 cationic group Chemical group 0.000 description 12
- 239000004065 semiconductor Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 12
- 239000000243 solution Substances 0.000 description 11
- 125000001424 substituent group Chemical group 0.000 description 11
- 125000003277 amino group Chemical group 0.000 description 10
- 125000003118 aryl group Chemical group 0.000 description 10
- 229940098779 methanesulfonic acid Drugs 0.000 description 10
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 9
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 9
- 239000007795 chemical reaction product Substances 0.000 description 8
- 229910000365 copper sulfate Inorganic materials 0.000 description 8
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 8
- 229920002755 poly(epichlorohydrin) Polymers 0.000 description 8
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 7
- 125000003710 aryl alkyl group Chemical group 0.000 description 7
- BSXVKCJAIJZTAV-UHFFFAOYSA-L copper;methanesulfonate Chemical compound [Cu+2].CS([O-])(=O)=O.CS([O-])(=O)=O BSXVKCJAIJZTAV-UHFFFAOYSA-L 0.000 description 7
- 125000000623 heterocyclic group Chemical group 0.000 description 7
- 229920005862 polyol Polymers 0.000 description 7
- 150000003077 polyols Chemical class 0.000 description 7
- MWVTWFVJZLCBMC-UHFFFAOYSA-N 4,4'-bipyridine Chemical group C1=NC=CC(C=2C=CN=CC=2)=C1 MWVTWFVJZLCBMC-UHFFFAOYSA-N 0.000 description 6
- SJRJJKPEHAURKC-UHFFFAOYSA-N N-Methylmorpholine Chemical compound CN1CCOCC1 SJRJJKPEHAURKC-UHFFFAOYSA-N 0.000 description 6
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 6
- 239000003792 electrolyte Substances 0.000 description 6
- 238000009713 electroplating Methods 0.000 description 6
- 125000001931 aliphatic group Chemical group 0.000 description 5
- 239000002585 base Substances 0.000 description 5
- 150000002431 hydrogen Chemical class 0.000 description 5
- 125000001570 methylene group Chemical group [H]C([H])([*:1])[*:2] 0.000 description 5
- 239000000178 monomer Substances 0.000 description 5
- 125000004433 nitrogen atom Chemical group N* 0.000 description 5
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 239000002798 polar solvent Substances 0.000 description 5
- 238000006116 polymerization reaction Methods 0.000 description 5
- UMGDCJDMYOKAJW-UHFFFAOYSA-N thiourea Chemical compound NC(N)=S UMGDCJDMYOKAJW-UHFFFAOYSA-N 0.000 description 5
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 description 4
- BRLQWZUYTZBJKN-UHFFFAOYSA-N Epichlorohydrin Chemical compound ClCC1CO1 BRLQWZUYTZBJKN-UHFFFAOYSA-N 0.000 description 4
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 241000724291 Tobacco streak virus Species 0.000 description 4
- 150000001450 anions Chemical class 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000009835 boiling Methods 0.000 description 4
- 150000001805 chlorine compounds Chemical class 0.000 description 4
- 150000001879 copper Chemical class 0.000 description 4
- PAFZNILMFXTMIY-UHFFFAOYSA-N cyclohexylamine Chemical compound NC1CCCCC1 PAFZNILMFXTMIY-UHFFFAOYSA-N 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 150000004820 halides Chemical group 0.000 description 4
- XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical compound I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 description 4
- 230000002209 hydrophobic effect Effects 0.000 description 4
- 239000002609 medium Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- QLAJNZSPVITUCQ-UHFFFAOYSA-N 1,3,2-dioxathietane 2,2-dioxide Chemical compound O=S1(=O)OCO1 QLAJNZSPVITUCQ-UHFFFAOYSA-N 0.000 description 3
- JFJNVIPVOCESGZ-UHFFFAOYSA-N 2,3-dipyridin-2-ylpyridine Chemical compound N1=CC=CC=C1C1=CC=CN=C1C1=CC=CC=N1 JFJNVIPVOCESGZ-UHFFFAOYSA-N 0.000 description 3
- PYSGFFTXMUWEOT-UHFFFAOYSA-N 3-(dimethylamino)propan-1-ol Chemical compound CN(C)CCCO PYSGFFTXMUWEOT-UHFFFAOYSA-N 0.000 description 3
- OFDVABAUFQJWEZ-UHFFFAOYSA-N 3-pyridin-3-ylpyridine Chemical group C1=CN=CC(C=2C=NC=CC=2)=C1 OFDVABAUFQJWEZ-UHFFFAOYSA-N 0.000 description 3
- PXACTUVBBMDKRW-UHFFFAOYSA-M 4-bromobenzenesulfonate Chemical compound [O-]S(=O)(=O)C1=CC=C(Br)C=C1 PXACTUVBBMDKRW-UHFFFAOYSA-M 0.000 description 3
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- DJEQZVQFEPKLOY-UHFFFAOYSA-N N,N-dimethylbutylamine Chemical compound CCCCN(C)C DJEQZVQFEPKLOY-UHFFFAOYSA-N 0.000 description 3
- UEEJHVSXFDXPFK-UHFFFAOYSA-N N-dimethylaminoethanol Chemical compound CN(C)CCO UEEJHVSXFDXPFK-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 125000003342 alkenyl group Chemical group 0.000 description 3
- 150000003973 alkyl amines Chemical class 0.000 description 3
- 125000000304 alkynyl group Chemical group 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 3
- 239000000956 alloy Substances 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000010953 base metal Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 description 3
- 230000000295 complement effect Effects 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- NISGSNTVMOOSJQ-UHFFFAOYSA-N cyclopentanamine Chemical class NC1CCCC1 NISGSNTVMOOSJQ-UHFFFAOYSA-N 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- UQSQSQZYBQSBJZ-UHFFFAOYSA-M fluorosulfonate Chemical compound [O-]S(F)(=O)=O UQSQSQZYBQSBJZ-UHFFFAOYSA-M 0.000 description 3
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 3
- 230000000670 limiting effect Effects 0.000 description 3
- VUQUOGPMUUJORT-UHFFFAOYSA-N methyl 4-methylbenzenesulfonate Chemical compound COS(=O)(=O)C1=CC=C(C)C=C1 VUQUOGPMUUJORT-UHFFFAOYSA-N 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 239000003495 polar organic solvent Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 241000894007 species Species 0.000 description 3
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 3
- 229910052718 tin Inorganic materials 0.000 description 3
- 125000002088 tosyl group Chemical group [H]C1=C([H])C(=C([H])C([H])=C1C([H])([H])[H])S(*)(=O)=O 0.000 description 3
- ITMCEJHCFYSIIV-UHFFFAOYSA-M triflate Chemical compound [O-]S(=O)(=O)C(F)(F)F ITMCEJHCFYSIIV-UHFFFAOYSA-M 0.000 description 3
- ZZHIDJWUJRKHGX-UHFFFAOYSA-N 1,4-bis(chloromethyl)benzene Chemical compound ClCC1=CC=C(CCl)C=C1 ZZHIDJWUJRKHGX-UHFFFAOYSA-N 0.000 description 2
- KKKDZZRICRFGSD-UHFFFAOYSA-N 1-benzylimidazole Chemical compound C1=CN=CN1CC1=CC=CC=C1 KKKDZZRICRFGSD-UHFFFAOYSA-N 0.000 description 2
- MCTWTZJPVLRJOU-UHFFFAOYSA-N 1-methyl-1H-imidazole Chemical compound CN1C=CN=C1 MCTWTZJPVLRJOU-UHFFFAOYSA-N 0.000 description 2
- YSAANLSYLSUVHB-UHFFFAOYSA-N 2-[2-(dimethylamino)ethoxy]ethanol Chemical compound CN(C)CCOCCO YSAANLSYLSUVHB-UHFFFAOYSA-N 0.000 description 2
- KDSNLYIMUZNERS-UHFFFAOYSA-N 2-methylpropanamine Chemical compound CC(C)CN KDSNLYIMUZNERS-UHFFFAOYSA-N 0.000 description 2
- NURQLCJSMXZBPC-UHFFFAOYSA-N 3,4-dimethylpyridine Chemical compound CC1=CC=NC=C1C NURQLCJSMXZBPC-UHFFFAOYSA-N 0.000 description 2
- LMPMFQXUJXPWSL-UHFFFAOYSA-N 3-(3-sulfopropyldisulfanyl)propane-1-sulfonic acid Chemical compound OS(=O)(=O)CCCSSCCCS(O)(=O)=O LMPMFQXUJXPWSL-UHFFFAOYSA-N 0.000 description 2
- MFEIKQPHQINPRI-UHFFFAOYSA-N 3-Ethylpyridine Chemical compound CCC1=CC=CN=C1 MFEIKQPHQINPRI-UHFFFAOYSA-N 0.000 description 2
- DQRKTVIJNCVZAX-UHFFFAOYSA-N 4-(2-pyridin-4-ylethyl)pyridine Chemical compound C=1C=NC=CC=1CCC1=CC=NC=C1 DQRKTVIJNCVZAX-UHFFFAOYSA-N 0.000 description 2
- FKNQCJSGGFJEIZ-UHFFFAOYSA-N 4-methylpyridine Chemical compound CC1=CC=NC=C1 FKNQCJSGGFJEIZ-UHFFFAOYSA-N 0.000 description 2
- SPXOTSHWBDUUMT-UHFFFAOYSA-M 4-nitrobenzenesulfonate Chemical compound [O-][N+](=O)C1=CC=C(S([O-])(=O)=O)C=C1 SPXOTSHWBDUUMT-UHFFFAOYSA-M 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical group [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 2
- 229910015900 BF3 Inorganic materials 0.000 description 2
- QUSNBJAOOMFDIB-UHFFFAOYSA-N Ethylamine Chemical compound CCN QUSNBJAOOMFDIB-UHFFFAOYSA-N 0.000 description 2
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- BAVYZALUXZFZLV-UHFFFAOYSA-N Methylamine Chemical compound NC BAVYZALUXZFZLV-UHFFFAOYSA-N 0.000 description 2
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- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 2
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- XSQUKJJJFZCRTK-UHFFFAOYSA-N Urea Natural products NC(N)=O XSQUKJJJFZCRTK-UHFFFAOYSA-N 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
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- 125000003545 alkoxy group Chemical group 0.000 description 2
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- MTHSVFCYNBDYFN-UHFFFAOYSA-N anhydrous diethylene glycol Natural products OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 2
- 239000012736 aqueous medium Substances 0.000 description 2
- 125000004104 aryloxy group Chemical group 0.000 description 2
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- IAQRGUVFOMOMEM-UHFFFAOYSA-N but-2-ene Chemical compound CC=CC IAQRGUVFOMOMEM-UHFFFAOYSA-N 0.000 description 2
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- 125000004093 cyano group Chemical group *C#N 0.000 description 2
- XXBDWLFCJWSEKW-UHFFFAOYSA-N dimethylbenzylamine Chemical compound CN(C)CC1=CC=CC=C1 XXBDWLFCJWSEKW-UHFFFAOYSA-N 0.000 description 2
- CCIVGXIOQKPBKL-UHFFFAOYSA-M ethanesulfonate Chemical compound CCS([O-])(=O)=O CCIVGXIOQKPBKL-UHFFFAOYSA-M 0.000 description 2
- 238000009472 formulation Methods 0.000 description 2
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- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
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- 150000002739 metals Chemical class 0.000 description 2
- KDWIKPVYQSPYIX-UHFFFAOYSA-N n-pyridin-4-ylpyridin-4-amine Chemical compound C=1C=NC=CC=1NC1=CC=NC=C1 KDWIKPVYQSPYIX-UHFFFAOYSA-N 0.000 description 2
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- WGYKZJWCGVVSQN-UHFFFAOYSA-N propylamine Chemical compound CCCN WGYKZJWCGVVSQN-UHFFFAOYSA-N 0.000 description 2
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- PTMBWNZJOQBTBK-UHFFFAOYSA-N pyridin-4-ylmethanol Chemical compound OCC1=CC=NC=C1 PTMBWNZJOQBTBK-UHFFFAOYSA-N 0.000 description 2
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- UHPWYBATPHCMGD-UHFFFAOYSA-N 2-(3-pyridin-2-ylpropyl)pyridine Chemical compound C=1C=CC=NC=1CCCC1=CC=CC=N1 UHPWYBATPHCMGD-UHFFFAOYSA-N 0.000 description 1
- LCDMOYIZFIQLRW-UHFFFAOYSA-N 2-(4-pyridin-2-ylbutyl)pyridine Chemical compound C=1C=CC=NC=1CCCCC1=CC=CC=N1 LCDMOYIZFIQLRW-UHFFFAOYSA-N 0.000 description 1
- CQURZEFNBDJAOR-UHFFFAOYSA-N 2-(5-pyridin-2-ylpentyl)pyridine Chemical compound C=1C=CC=NC=1CCCCCC1=CC=CC=N1 CQURZEFNBDJAOR-UHFFFAOYSA-N 0.000 description 1
- VAMTXPFDKXGZRO-UHFFFAOYSA-N 2-(6-pyridin-2-ylhexyl)pyridine Chemical compound C=1C=CC=NC=1CCCCCCC1=CC=CC=N1 VAMTXPFDKXGZRO-UHFFFAOYSA-N 0.000 description 1
- AVSUMWIDHQEMPD-UHFFFAOYSA-N 2-(oxiran-2-yl)ethanol Chemical compound OCCC1CO1 AVSUMWIDHQEMPD-UHFFFAOYSA-N 0.000 description 1
- JVYGSYTXAREMJK-UHFFFAOYSA-N 2-(pyridin-2-ylmethyl)pyridine Chemical compound C=1C=CC=NC=1CC1=CC=CC=N1 JVYGSYTXAREMJK-UHFFFAOYSA-N 0.000 description 1
- XNWFRZJHXBZDAG-UHFFFAOYSA-N 2-METHOXYETHANOL Chemical compound COCCO XNWFRZJHXBZDAG-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- IWTFOFMTUOBLHG-UHFFFAOYSA-N 2-methoxypyridine Chemical compound COC1=CC=CC=N1 IWTFOFMTUOBLHG-UHFFFAOYSA-N 0.000 description 1
- YEYKMVJDLWJFOA-UHFFFAOYSA-N 2-propoxyethanol Chemical compound CCCOCCO YEYKMVJDLWJFOA-UHFFFAOYSA-N 0.000 description 1
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
- H01L21/76879—Filling of holes, grooves or trenches, e.g. vias, with conductive material by selective deposition of conductive material in the vias, e.g. selective C.V.D. on semiconductor material, plating
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/11—Manufacturing methods
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C333/00—Derivatives of thiocarbamic acids, i.e. compounds containing any of the groups, the nitrogen atom not being part of nitro or nitroso groups
- C07C333/14—Dithiocarbamic acids; Derivatives thereof
- C07C333/18—Esters of dithiocarbamic acids
- C07C333/20—Esters of dithiocarbamic acids having nitrogen atoms of dithiocarbamate groups bound to hydrogen atoms or to acyclic carbon atoms
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D213/00—Heterocyclic compounds containing six-membered rings, not condensed with other rings, with one nitrogen atom as the only ring hetero atom and three or more double bonds between ring members or between ring members and non-ring members
- C07D213/02—Heterocyclic compounds containing six-membered rings, not condensed with other rings, with one nitrogen atom as the only ring hetero atom and three or more double bonds between ring members or between ring members and non-ring members having three double bonds between ring members or between ring members and non-ring members
- C07D213/04—Heterocyclic compounds containing six-membered rings, not condensed with other rings, with one nitrogen atom as the only ring hetero atom and three or more double bonds between ring members or between ring members and non-ring members having three double bonds between ring members or between ring members and non-ring members having no bond between the ring nitrogen atom and a non-ring member or having only hydrogen or carbon atoms directly attached to the ring nitrogen atom
- C07D213/06—Heterocyclic compounds containing six-membered rings, not condensed with other rings, with one nitrogen atom as the only ring hetero atom and three or more double bonds between ring members or between ring members and non-ring members having three double bonds between ring members or between ring members and non-ring members having no bond between the ring nitrogen atom and a non-ring member or having only hydrogen or carbon atoms directly attached to the ring nitrogen atom containing only hydrogen and carbon atoms in addition to the ring nitrogen atom
- C07D213/22—Heterocyclic compounds containing six-membered rings, not condensed with other rings, with one nitrogen atom as the only ring hetero atom and three or more double bonds between ring members or between ring members and non-ring members having three double bonds between ring members or between ring members and non-ring members having no bond between the ring nitrogen atom and a non-ring member or having only hydrogen or carbon atoms directly attached to the ring nitrogen atom containing only hydrogen and carbon atoms in addition to the ring nitrogen atom containing two or more pyridine rings directly linked together, e.g. bipyridyl
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G65/00—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule
- C08G65/02—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from cyclic ethers by opening of the heterocyclic ring
- C08G65/04—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from cyclic ethers by opening of the heterocyclic ring from cyclic ethers only
- C08G65/22—Cyclic ethers having at least one atom other than carbon and hydrogen outside the ring
- C08G65/24—Epihalohydrins
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
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Description
本願は、2016年9月22日出願の米国仮出願第62/398,316号の利益を主張し、その主題の全体を参照により本明細書中に援用する。
a)銅イオン源
b)酸成分
c)抑制剤
d)四級化ジピリジル化合物又は四級化ポリ(エピハロヒドリン)を含有するレベラー
e)促進剤
を含む。
好ましくは、酸の共役塩基は、銅塩の対アニオンと同じであるが、例えば、硫酸銅とメタンスルホン酸、又は銅メタンスルホン酸塩と硫酸などの混合物も有効となりうる。
5のCu2+はCuMSAに由来し、その他のCu2+はCuSO4に由来する。
hは0~6の整数であり、R2及びR3はそれぞれ、水素、及び1~約3個の炭素原子を有する短いアルキル鎖から独立して選択される。構造(Ia)において、アルキレン鎖中の炭素からピリジン環の1個までの各線は、アルキレン鎖中の炭素原子とピリジン環の5個の炭素原子のうちの1個との間の結合を表す。hが0である実施形態では、結合部位は単結合であり、ピリジン環のうちの1個における1個の炭素原子は他のピリジン環における1個の炭素原子に直接結合する。
i及びjは0~6の整数であり、R4、R5、R6、及びR7はそれぞれ、水素、及び1~約3個の炭素原子を有する短いアルキル鎖から独立して選択される。構造(Ib)において、結合部位の炭素からピリジン環の1個までの各線は、結合部位の炭素原子とピリジン環の5個の炭素原子のうちの1個との間の結合を表す。i及びjが両方とも0である実施形態では、カルボニルの炭素原子は各ピリジン環における1個の炭素原子に直接結合する。
k及びlは0~6の整数であり、R8、R9、R10、R11、及びR12はそれぞれ、水素、及び1~約3個の炭素原子を有する短いアルキル鎖から独立して選択される。構造(Ic)において、結合部位の炭素からピリジン環の1個までの各線は、結合部位の炭素原子とピリジン環の5個の炭素原子のうちの1個との間の結合を表す。k及びlが両方とも0である実施形態では、窒素が各ピリジン環における1個の炭素原子に直接結合する。
mは0~6の整数である。構造(IIa)において、アルキレン鎖中の炭素原子からピリジン環の1個までの各線は、アルキレン鎖中の炭素原子とピリジン環における5個の炭素原子のうちの1個との間の結合を表す。mが0である実施形態では、結合部位は単結合であり、ピリジン環の1個における1個の炭素原子は他のピリジン環における1個の炭素原子に直接結合する。
mは0~6の整数である。mが0のとき、2個のピリジン環は、単結合により直接互いに結合する。
Bは、下記:
p及びqは、同じでも異なっていてもよく、0~6、好ましくは0~2の整数であり、p及びqの少なくとも一方は少なくとも1である。
Xは、1~約4の整数、好ましくは1又は2である。
Y及びZは、脱離基である。脱離基は、例えば、塩化物、臭化物、ヨウ化物、トシル、トリフレート、スルホネート、メシレート、メトサルフェート、フルオロスルホネート、メチルトシレート、ブロシレート、又はノシレートの中から選択してよい。
R11、R12、及びR13は、水素又は1~6個の炭素原子、好ましくは1~3個の炭素原子を有する置換若しくは非置換アルキルである。
oは、1~6の整数であり、好ましくは1又は2である。
Yは、脱離基である。脱離基は、例えば、塩化物、臭化物、ヨウ化物、トシル、トリフレート、スルホネート、メシレート、メトサルフェート、フルオロスルホネート、メチルトシレート、ブロシレート、又はノシレートの中から選択してよい。
B、m、p、q、Y、及びZは構造(IIa)及び(IIIb)に関して定義した通りであり、Xは少なくとも2である整数である。好ましくは、Xは、約2~約50、約2~約25、更により好ましくは約4から約20など、2~約100までの範囲である。
B、p、q、Y、及びZは、構造(IIIb)に関して定義した通りであり、Xは、少なくとも2、好ましくは2~100、例えば2~50、更に好ましくは3~約20の整数である。
が挙げられる。
nの値は、好ましくは約5~約20、例えば低分子量の実施形態では6~9、又はより高分子量の実施形態では10~15であり、及び/又はポリマー若しくはオリゴマーが約1,000~約5,000の数平均分子量を有するような値である。
Xは、少なくとも2、好ましくは2~100、例えば2~50、より好ましくは3~約20、更により好ましくは約5~約20、最も好ましくは約10~約15の整数である。
Y-(CR26R27)i-Ar-(CR28R29)j-Z 構造A1
Y及びZはそれぞれ、塩化物、臭化物、ヨウ化物、トシル、トリフレート、スルホネート、メシレート、メトサルフェート、フルオロスルホネート、メチルトシレート、及びブロシレートからなる群から独立して選択される脱離基であり、Arは、例えば、ベンゼン、トルエン、キシレン、ナフタレンなどから誘導される二価のアリール残基であり、i及びjはそれぞれ1以上12以下の整数であり、R26、R27、R28、及びR29はそれぞれ、水素、及び1~4個の炭素原子を有する低級アルキルから独立して選択される。反応物質Aを構成することができる例示的な化合物としては、p-ジ(クロロメチル)ベンゼン、1,4-ビス(2-クロロエチル)ベンゼン、m-ジ(クロロメチル)ベンゼン、及びo-ジ(クロロメチル)ベンゼンが挙げられる。または、Aは、構造(I)によって記載することもできる。
-[-(ジ(t-アミン)残基))-(CR26R27)i-Ar-(CR28R29)j-]n-S-C(=NR38R39)+-NR40R41 構造D1
又は
-[-(ジ-(t-アミン)残基))-(CR1R27)p-G-(CR5R6)q-]n-S-C(=NR38R39)+-NR40R41 構造D2
R40及びR41はそれぞれ、水素、及びC1~C4アルキルからなる群から独立して選択され、i、j、p、q、R1、R2、R5、R6、R26、R27、R28、R29、Ar、及びGは、それぞれ上に定義された通りであり、ジ(t-アミン)残基は、例えば、上に挙げたのジピリジル又は他のジ-(t-アミン)化合物のいずれかから誘導される。上記のように反応物質A、B、及びCから調製される場合、高分子レベラーは、典型的にはポリマー、オリゴマー、及び非高分子種の混合物を含んでよい。
Xは、O又はS、好ましくはSである。
nは、1~6である。
Mは、原子価を満たべく必要に応じて、水素、アルカリ金属、又はアンモニウムである。
R1は、炭素数1~8のアルキレン又は環状アルキレン基、炭素数6~12の芳香族炭化水素又は脂肪族芳香族炭化水素である。
R2は、M及びR1が上に定義した通りであるMO3SR1、下記式:
R3,R4,R5,R6,及びR7は、独立して水素、炭素数1~4のアルキル基、複素環基、又は芳香族基である。一つの好ましい実施形態では、Xは硫黄であり、nは2である。
Mは、酸素原子上の負電荷と釣り合うのに十分な電荷を有する対イオンである。Mは、例えば、プロトン、ナトリウム及びカリウムのようなアルカリ金属イオン、又はアンモニウム若しくは四級アミンのような他の電荷平衡カチオンであってよい。
達成可能な成長速度は、最大約10μm/分以上までの範囲であり、少なくとも約1A/dm2、少なくとも約12A/dm2、又は少なくとも約20A/dm2、最大約30A/dm2以上までの範囲の電流密度に相当する。
実施例1
実施例2
実施例3
実施例4
実施例6
実施例7
平均H=めっきしたバンプの平均高さ
WIF=バンプがどれだけドーム化しているかを示す。正の値はドーミング、負の値はディッシング、0は平坦
本発明の要素又はその好ましい実施形態を紹介するとき、冠詞「a」、「an」、「the」、及び「said」は、それらの要素が1以上あることを意味することを意図している。「含む(comprising)」、「含む(including)」、及び「有する(having)」という用語は、包括的であることを意図しており、挙げられた要素以外にも更に要素がありうることを意味している。本明細書で使用される用語「約(about)」は、パラメータ、量、持続時間などの測定可能な値を指し、本明細書に記載される発明において実施するのに適切である限り、特定の挙げた値の±15%以下の変動、好ましくは±10%以下の変動、より好ましくは±5%以下の変動、更により好ましくは±1%以下の変動、更により好ましくは±0.1%以下の変動を含むことを意味する。更に、修飾語句「約(about)」が指す値自体が本明細書に具体的に開示されていることも理解されるべきである。
Claims (6)
- nの値が、10~15である請求項1に記載の組成物。
- 前記抑制剤が、
a)アルコキシル化アミンと、
b)1:9~9:1のPO:EO比で存在し、且つ窒素含有種に結合したプロピレンオキシド(PO)繰り返し単位とエチレンオキシド(EO)繰り返し単位との組合せを含むポリエーテル化合物と、
からなる群から選択される化合物を含む請求項1に記載の組成物。 - 前記抑制剤がポリエーテル化合物であり、前記PO繰り返し単位と前記EO繰り返し単位とが2:3~2:1のPO:EO比で存在する請求項4に記載の組成物。
- 前記抑制剤が、アルコキシル化アミンであり、前記アルコキシル化アミンが、アルコキシル化ジエチレントリアミンである請求項4に記載の組成物。
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