JP7113525B2 - センサ付き継手及びこれを用いた監視システム - Google Patents
センサ付き継手及びこれを用いた監視システム Download PDFInfo
- Publication number
- JP7113525B2 JP7113525B2 JP2019514516A JP2019514516A JP7113525B2 JP 7113525 B2 JP7113525 B2 JP 7113525B2 JP 2019514516 A JP2019514516 A JP 2019514516A JP 2019514516 A JP2019514516 A JP 2019514516A JP 7113525 B2 JP7113525 B2 JP 7113525B2
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- Prior art keywords
- plane
- sensor
- joint
- gasket
- joint member
- Prior art date
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- 238000012544 monitoring process Methods 0.000 title description 16
- 238000007789 sealing Methods 0.000 claims description 10
- 239000012530 fluid Substances 0.000 description 23
- 230000002265 prevention Effects 0.000 description 9
- 238000012423 maintenance Methods 0.000 description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 230000007423 decrease Effects 0.000 description 5
- 229910052739 hydrogen Inorganic materials 0.000 description 5
- 239000001257 hydrogen Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000446 fuel Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000004663 powder metallurgy Methods 0.000 description 1
- 230000003449 preventive effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D5/00—Protection or supervision of installations
- F17D5/02—Preventing, monitoring, or locating loss
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/064—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces the packing combining the sealing function with other functions
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/08—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with exclusively metal packing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L19/00—Joints in which sealing surfaces are pressed together by means of a member, e.g. a swivel nut, screwed on or into one of the joint parts
- F16L19/02—Pipe ends provided with collars or flanges, integral with the pipe or not, pressed together by a screwed member
- F16L19/0206—Pipe ends provided with collars or flanges, integral with the pipe or not, pressed together by a screwed member the collar not being integral with the pipe
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L19/00—Joints in which sealing surfaces are pressed together by means of a member, e.g. a swivel nut, screwed on or into one of the joint parts
- F16L19/02—Pipe ends provided with collars or flanges, integral with the pipe or not, pressed together by a screwed member
- F16L19/0212—Pipe ends provided with collars or flanges, integral with the pipe or not, pressed together by a screwed member using specially adapted sealing means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L23/00—Flanged joints
- F16L23/006—Attachments
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L23/00—Flanged joints
- F16L23/16—Flanged joints characterised by the sealing means
- F16L23/18—Flanged joints characterised by the sealing means the sealing means being rings
- F16L23/20—Flanged joints characterised by the sealing means the sealing means being rings made exclusively of metal
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L27/00—Adjustable joints, Joints allowing movement
- F16L27/08—Adjustable joints, Joints allowing movement allowing adjustment or movement only about the axis of one pipe
- F16L27/0804—Adjustable joints, Joints allowing movement allowing adjustment or movement only about the axis of one pipe the fluid passing axially from one joint element to another
- F16L27/0808—Adjustable joints, Joints allowing movement allowing adjustment or movement only about the axis of one pipe the fluid passing axially from one joint element to another the joint elements extending coaxially for some distance from their point of separation
- F16L27/0824—Adjustable joints, Joints allowing movement allowing adjustment or movement only about the axis of one pipe the fluid passing axially from one joint element to another the joint elements extending coaxially for some distance from their point of separation with ball or roller bearings
- F16L27/0832—Adjustable joints, Joints allowing movement allowing adjustment or movement only about the axis of one pipe the fluid passing axially from one joint element to another the joint elements extending coaxially for some distance from their point of separation with ball or roller bearings having axial bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems
- F16L55/07—Arrangement or mounting of devices, e.g. valves, for venting or aerating or draining
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L55/00—Devices or appurtenances for use in, or in connection with, pipes or pipe systems
- F16L55/10—Means for stopping flow from or in pipes or hoses
- F16L55/115—Caps
- F16L55/1152—Caps fixed by screwing or by means of a screw-threaded ring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/02—Special adaptations of indicating, measuring, or monitoring equipment
- F17C13/025—Special adaptations of indicating, measuring, or monitoring equipment having the pressure as the parameter
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D1/00—Pipe-line systems
- F17D1/02—Pipe-line systems for gases or vapours
- F17D1/04—Pipe-line systems for gases or vapours for distribution of gas
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
- F16L2201/00—Special arrangements for pipe couplings
- F16L2201/30—Detecting leaks
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2221/00—Handled fluid, in particular type of fluid
- F17C2221/01—Pure fluids
- F17C2221/012—Hydrogen
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Gasket Seals (AREA)
- Joints With Sleeves (AREA)
- Alarm Systems (AREA)
Description
上記継手に限らず、継手は、流体の輸送、振動等により時間の経過とともに緩みが発生し、特に水素ステーションにおいては大きな問題となっている。
2 :第2管状継手部材
3 :ガスケット
3b:抜止め部
4 :ナット
5 :リテーナ
6 :玉軸受
7,8:シール突起
7a,8a:直線部
7b,8b:円弧部
9,10:締過ぎ防止用突起
11:フランジ
12:めねじ
S :センサ
15,16:内側平坦面(第一の平面)
17,18:外側平坦面(第二の平面)
G1:第1隙間
G2:第2隙間
G3:第3隙間
21:閉止板
31,32:ブロック状継手部材
31a,32a:流体通路
33:ボルト
Claims (6)
- 流路を形成する継手部材と、
前記継手部材に対向し、前記継手部材との間にシールを形成する金属製ガスケットと、
前記継手部材をねじ合わせにより締結する締結手段とを備え、
前記継手部材のガスケットとの対向面が、第一の平面と、前記第一の平面より突出した環状のシール突起と、前記第一の平面と比べ前記ガスケットとの距離が離れた位置に形成された第二の平面と、からなり、
前記第二の平面又は前記ガスケットの第二の平面との対向部の少なくとも何れか一方にセンサが設けられているシール構造。 - 前記センサは、歪みセンサ又は圧力センサであることを特徴とする請求項1に記載のシール構造。
- 前記第一の平面が前記環状のシール突起より内側にあり、前記第2の平面が前記環状のシール突起より外側にあることを特徴とする請求項1又は2に記載のシール構造。
- 流路を形成する継手部材と、
前記継手部材に対向する円板状の閉止板と、
前記継手部材と前記閉止板とをねじ合わせにより連結する締結手段を備えた閉止栓において、
前記継手部材の前記閉止板との対向面が、第一の平面と、前記第一の平面より突出した環状のシール突起と、前記第一の平面と比べ前記円盤状の閉止板との距離が離れた位置に形成された第二の平面と、からなり、
前記第二の平面及び前記ガスケットの前記第二の平面との対向位置の少なくとも何れか一方にセンサが設けられている閉止栓。 - 前記センサは歪みセンサ又は圧力センサであることを特徴とする請求項4に記載の閉止栓。
- 前記第一の平面が前記環状のシール突起より内側にあり、前記第2の平面が前記環状のシール突起より外側にあることを特徴とする請求項4又は5に記載の閉止栓。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017090552 | 2017-04-28 | ||
JP2017090552 | 2017-04-28 | ||
PCT/JP2018/016551 WO2018199063A1 (ja) | 2017-04-28 | 2018-04-24 | センサ付き継手及びこれを用いた監視システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2018199063A1 JPWO2018199063A1 (ja) | 2020-03-12 |
JP7113525B2 true JP7113525B2 (ja) | 2022-08-05 |
Family
ID=63919807
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019514516A Active JP7113525B2 (ja) | 2017-04-28 | 2018-04-24 | センサ付き継手及びこれを用いた監視システム |
Country Status (5)
Country | Link |
---|---|
US (1) | US20200050221A1 (ja) |
JP (1) | JP7113525B2 (ja) |
KR (1) | KR102444480B1 (ja) |
CN (1) | CN110546412B (ja) |
WO (1) | WO2018199063A1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA3039016C (en) * | 2016-12-09 | 2021-09-07 | Oetiker Ny, Inc. | Method and apparatus for installing an assurance cap onto a fluid connector using optical and induction sensors |
WO2020110413A1 (ja) * | 2018-11-28 | 2020-06-04 | ダイキン工業株式会社 | 流体ユニット、冷凍装置用ユニット、熱源ユニット、利用ユニット、及び冷凍装置 |
JP6822513B2 (ja) * | 2018-11-28 | 2021-01-27 | ダイキン工業株式会社 | 流体ユニット、冷凍装置用ユニット、熱源ユニット、利用ユニット、及び冷凍装置 |
JP7341469B2 (ja) * | 2019-10-29 | 2023-09-11 | 株式会社フジキン | 継手構造及び継手構造の組み付け方法 |
KR102164831B1 (ko) * | 2020-02-28 | 2020-10-13 | 에스케이하이닉스 주식회사 | 나사 풀림 알람 센서를 구비한 반도체 제조 장치의 밸브 시스템 및 이를 구비하는 반도체 제조 장치 |
US20230392741A1 (en) | 2020-10-30 | 2023-12-07 | Fujikin Incorporated | Closing plug and fluid control device |
CN113847937B (zh) * | 2021-09-24 | 2024-01-12 | 张恒 | 一种可360度旋转的密封性传感器接头安装显示结构 |
KR102563106B1 (ko) * | 2021-10-07 | 2023-08-03 | 영도산업 주식회사 | 고압유체 제어밸브의 기밀구조 |
KR102669200B1 (ko) * | 2021-10-26 | 2024-05-27 | 주식회사 에스피에스글로벌 | 반도체 장비용 에어밸브의 원격 모니터링 장치 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002286190A (ja) | 2001-03-26 | 2002-10-03 | Toshiba Corp | 配管フランジ接続診断装置およびその方法 |
JP2011112065A (ja) | 2009-11-24 | 2011-06-09 | Kirin Engineering Co Ltd | 継手の接続判別装置及び方法 |
JP2012212854A (ja) | 2011-03-22 | 2012-11-01 | Hitachi Kokusai Electric Inc | 基板処理装置および固体原料補充方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE754495A (fr) | 1969-08-06 | 1971-01-18 | Bayer Ag | Compositions a mouler fortement resistantes au choc a base de copolymeres caoutchouteux greffes et leur procede de preparation |
FR2304880A1 (fr) * | 1975-03-20 | 1976-10-15 | Fluxo | Vanne de coulee pour metaux liquides |
JPS606446B2 (ja) | 1977-09-29 | 1985-02-18 | 株式会社東芝 | 火力発電所のランバツク制御装置 |
JP3517719B2 (ja) * | 1995-05-18 | 2004-04-12 | 忠弘 大見 | 管継手 |
IL118267A (en) * | 1995-08-09 | 2000-02-17 | Ohmi Tadahiro | Pipe joint |
JP3928092B2 (ja) * | 1996-10-15 | 2007-06-13 | 忠弘 大見 | 流体継手 |
CA2218318C (en) * | 1996-10-15 | 2006-12-12 | Tadahiro Ohmi | Fluid coupling |
JP2002310333A (ja) * | 2001-04-17 | 2002-10-23 | Hitachi Ltd | 弁のメンテナンス時期予測方法及びその装置 |
JP2012117600A (ja) * | 2010-11-30 | 2012-06-21 | Toki Engineering Kk | セキュリティシステム |
-
2018
- 2018-04-24 JP JP2019514516A patent/JP7113525B2/ja active Active
- 2018-04-24 US US16/606,328 patent/US20200050221A1/en not_active Abandoned
- 2018-04-24 WO PCT/JP2018/016551 patent/WO2018199063A1/ja active Application Filing
- 2018-04-24 CN CN201880027589.0A patent/CN110546412B/zh not_active Expired - Fee Related
- 2018-04-24 KR KR1020197031051A patent/KR102444480B1/ko active IP Right Grant
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002286190A (ja) | 2001-03-26 | 2002-10-03 | Toshiba Corp | 配管フランジ接続診断装置およびその方法 |
JP2011112065A (ja) | 2009-11-24 | 2011-06-09 | Kirin Engineering Co Ltd | 継手の接続判別装置及び方法 |
JP2012212854A (ja) | 2011-03-22 | 2012-11-01 | Hitachi Kokusai Electric Inc | 基板処理装置および固体原料補充方法 |
Also Published As
Publication number | Publication date |
---|---|
US20200050221A1 (en) | 2020-02-13 |
KR20190126426A (ko) | 2019-11-11 |
CN110546412A (zh) | 2019-12-06 |
CN110546412B (zh) | 2021-08-31 |
WO2018199063A1 (ja) | 2018-11-01 |
KR102444480B1 (ko) | 2022-09-16 |
JPWO2018199063A1 (ja) | 2020-03-12 |
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