JP7090068B2 - 非接触式プローブおよび動作の方法 - Google Patents

非接触式プローブおよび動作の方法 Download PDF

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Publication number
JP7090068B2
JP7090068B2 JP2019504757A JP2019504757A JP7090068B2 JP 7090068 B2 JP7090068 B2 JP 7090068B2 JP 2019504757 A JP2019504757 A JP 2019504757A JP 2019504757 A JP2019504757 A JP 2019504757A JP 7090068 B2 JP7090068 B2 JP 7090068B2
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JP
Japan
Prior art keywords
contact probe
interest
point
relative configuration
inspection system
Prior art date
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Active
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JP2019504757A
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English (en)
Japanese (ja)
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JP2019522213A5 (enExample
JP2019522213A (ja
Inventor
ジョン ウェストン ニコラス
ルース ハダート イボンヌ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
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Renishaw PLC
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Publication date
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Publication of JP2019522213A5 publication Critical patent/JP2019522213A5/ja
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/042—Calibration or calibration artifacts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Textile Engineering (AREA)
  • Quality & Reliability (AREA)
  • Theoretical Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2019504757A 2016-07-28 2017-07-26 非接触式プローブおよび動作の方法 Active JP7090068B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP16275107 2016-07-28
EP16275107.7 2016-07-28
PCT/GB2017/052182 WO2018020244A1 (en) 2016-07-28 2017-07-26 Non-contact probe and method of operation

Publications (3)

Publication Number Publication Date
JP2019522213A JP2019522213A (ja) 2019-08-08
JP2019522213A5 JP2019522213A5 (enExample) 2020-09-10
JP7090068B2 true JP7090068B2 (ja) 2022-06-23

Family

ID=56555347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019504757A Active JP7090068B2 (ja) 2016-07-28 2017-07-26 非接触式プローブおよび動作の方法

Country Status (5)

Country Link
US (1) US11105607B2 (enExample)
EP (1) EP3491333B1 (enExample)
JP (1) JP7090068B2 (enExample)
CN (1) CN109477714B (enExample)
WO (1) WO2018020244A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA3155008A1 (en) * 2019-09-18 2021-03-25 DWFritz Automation, Inc. Non-contact optical measurement devices and exchangeable optical probes
EP3839418A1 (en) 2019-12-18 2021-06-23 Hexagon Technology Center GmbH Optical sensor with overview camera
US11763491B2 (en) 2020-10-21 2023-09-19 Faro Technologies, Inc. Compensation of three-dimensional measuring instrument having an autofocus camera
US11481917B2 (en) * 2020-10-21 2022-10-25 Faro Technologies, Inc. Compensation of three-dimensional measuring instrument having an autofocus camera
CN114018816B (zh) * 2021-12-03 2025-08-19 北京中车重工机械有限公司 车顶检测系统的检测相机连接装置

Family Cites Families (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4847687A (en) 1988-04-18 1989-07-11 General Electric Company Video ranging system
GB8908854D0 (en) 1989-04-19 1989-06-07 Renishaw Plc Method of and apparatus for scanning the surface of a workpiece
US5025665A (en) * 1989-06-01 1991-06-25 Elsag International B.V. Non-contacting on-line paper strength measuring system
GB9705105D0 (en) 1997-03-12 1997-04-30 Brown & Sharpe Limited Optical surface measurement apparatus and methods
IT1303239B1 (it) * 1998-08-07 2000-11-02 Brown & Sharpe Dea Spa Dispositivo e metodo per il posizionamento di una testa di misura inuna macchina per la misura tridimensionale senza contatto.
JP2001033306A (ja) 1999-07-16 2001-02-09 Seiko Precision Inc 反射型光センサ
JP3792679B2 (ja) 2003-06-23 2006-07-05 Ｎｅｃビューテクノロジー株式会社 投射面距離測定装置を有するプロジェクタ
US7301133B2 (en) 2005-01-21 2007-11-27 Photon Dynamics, Inc. Tracking auto focus system
US7299145B2 (en) * 2005-08-16 2007-11-20 Metris N.V. Method for the automatic simultaneous synchronization, calibration and qualification of a non-contact probe
US7652275B2 (en) * 2006-07-28 2010-01-26 Mitutoyo Corporation Non-contact probe control interface
DE102006049695A1 (de) * 2006-10-16 2008-04-24 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zum berührungslosen Erfassen einer dreidimensionalen Kontur
GB0707720D0 (en) 2007-04-23 2007-05-30 Renishaw Plc Apparatus and method for controlling or programming a measurement routine
EP2183546B1 (en) * 2007-08-17 2015-10-21 Renishaw PLC Non-contact probe
GB0716218D0 (en) 2007-08-20 2007-09-26 Renishaw Plc Measurement path generation
CN101261118A (zh) 2008-04-17 2008-09-10 天津大学 基于机器人的快速自动化三维形貌在线测量方法和系统
GB0915904D0 (en) * 2009-09-11 2009-10-14 Renishaw Plc Non-contact object inspection
GB201013938D0 (en) * 2010-08-20 2010-10-06 Renishaw Plc Method for recalibrating coordinate positioning apparatus
BR112013000874A2 (pt) * 2010-07-16 2016-05-17 3M Innovative Properties Co sistema de inspeção de foco automático de alta resolução
JP5218514B2 (ja) 2010-09-30 2013-06-26 オムロン株式会社 受光レンズの配置方法、および光学式変位センサ
US8826719B2 (en) * 2010-12-16 2014-09-09 Hexagon Metrology, Inc. Machine calibration artifact
CN102445183B (zh) 2011-10-09 2013-12-18 福建汇川数码技术科技有限公司 基于激光与摄像机平行实现的远程测距系统测距激光点的定位方法
JP2014130091A (ja) * 2012-12-28 2014-07-10 Canon Inc 測定装置および測定方法
JP2016513257A (ja) * 2013-02-25 2016-05-12 ニコン メトロロジー エン ヴェー 投影システム
CN104165599B (zh) * 2014-08-20 2017-01-25 南京理工大学 偏摆工件非球面的非接触式测量系统与方法
GB201603496D0 (en) * 2016-02-29 2016-04-13 Renishaw Plc Method and apparatus for calibrating a scanning probe
DE202016006669U1 (de) * 2016-10-26 2017-08-29 Tesa Sa Optischer Sensor mit variierbaren Messkanälen

Also Published As

Publication number Publication date
EP3491333B1 (en) 2022-03-30
JP2019522213A (ja) 2019-08-08
CN109477714B (zh) 2022-02-18
US20190154430A1 (en) 2019-05-23
US11105607B2 (en) 2021-08-31
EP3491333A1 (en) 2019-06-05
CN109477714A (zh) 2019-03-15
WO2018020244A1 (en) 2018-02-01

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