JP7079638B2 - 半導体素子 - Google Patents
半導体素子 Download PDFInfo
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- JP7079638B2 JP7079638B2 JP2018063618A JP2018063618A JP7079638B2 JP 7079638 B2 JP7079638 B2 JP 7079638B2 JP 2018063618 A JP2018063618 A JP 2018063618A JP 2018063618 A JP2018063618 A JP 2018063618A JP 7079638 B2 JP7079638 B2 JP 7079638B2
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- 239000004065 semiconductor Substances 0.000 title claims description 203
- 230000001681 protective effect Effects 0.000 claims description 94
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 19
- 239000000470 constituent Substances 0.000 claims description 16
- 239000010410 layer Substances 0.000 description 333
- 239000002019 doping agent Substances 0.000 description 54
- 238000009792 diffusion process Methods 0.000 description 26
- 239000011241 protective layer Substances 0.000 description 24
- 239000000758 substrate Substances 0.000 description 16
- 238000005468 ion implantation Methods 0.000 description 13
- 230000005611 electricity Effects 0.000 description 11
- 230000003068 static effect Effects 0.000 description 11
- 230000002093 peripheral effect Effects 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 230000015556 catabolic process Effects 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000010931 gold Substances 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
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Description
図1~図11に基づき、本発明の第1実施形態にかかる半導体素子A10について説明する。半導体素子A10は、コレクタ層11、ベース層12、エミッタ層13、第1電極31、第2電極32、第1抵抗素子41および保護素子50を備える。半導体素子A10は、基板10、絶縁層20、第3電極33、第1配線層34、第2抵抗素子42および保護層60をさらに備える。なお、理解の便宜上、図1は、保護層60を透過して示しており、図2は、上部絶縁層22(絶縁層20の一部を構成するものであり、詳細は後述)および保護層60を透過して示している。図3は、第1電極31を透過して示している。図3において透過した第1電極31は、想像線(二点鎖線)で示している。
図12~図18に基づき、本発明の第2実施形態にかかる半導体素子A20について説明する。これらの図において、先述した半導体素子A10と同一または類似の要素には同一の符号を付して、重複する説明を省略する。なお、理解の便宜上、図12は、保護層60を透過して示しており、図13は、上部絶縁層22および保護層60を透過して示している。
次に、図19に基づき、半導体素子A20の第1変形例にかかる半導体素子A21について説明する。
次に、図20および図21に基づき、半導体素子A20の第2変形例にかかる半導体素子A22について説明する。
図22~図28に基づき、本発明の第3実施形態にかかる半導体素子A30について説明する。これらの図において、先述した半導体素子A10と同一または類似の要素には同一の符号を付して、重複する説明を省略する。なお、理解の便宜上、図22は、保護層60を透過して示しており、図23は、上部絶縁層22および保護層60を透過して示している。図24は、第1電極31を透過して示している。図24において透過した第1電極31は、想像線で示している。
10:基板
11:コレクタ層
11A:コレクタ主面
12:ベース層
12A:ベース主面
13:エミッタ層
13A:エミッタ主面
131:凸状部
20:絶縁層
21:下部絶縁層
21A:第1段差
21B:第2段差
211:下部第1開口
212:下部第2開口
213:下部第3開口
22:上部絶縁層
221:上部第1開口
222:上部第2開口
223:上部第3開口
224:上部第4開口
225:上部第5開口
31:第1電極
311:第1端子部
312:第1導通部
313:第1パッド部
314:凸部
315A:第1凹部
315B:第2凹部
32:第2電極
321:第2端子部
322:第2導通部
323:第2パッド部
324:凹部
33:第3電極
34:第1配線層
341:本体部
342:第3導通部
343:第3パッド部
344:凹部
35:第2配線層
351:帯状部
352:エミッタ接続部
41:第1抵抗素子
42:第2抵抗素子
50:保護素子
51:コンタクト部
52:環状部
521:第1環状部
522:第2環状部
531:第1拡散層
532:第2拡散層
60:保護層
70:補助保護素子
71:補助コンタクト部
72:補助環状部
721:第1補助環状部
722:第2補助環状部
z:厚さ方向
x:第1方向
y:第2方向
Claims (14)
- 第1導電型半導体であるコレクタ層と、
第2導電型半導体であり、かつ前記コレクタ層に接するベース層と、
前記第1導電型半導体であり、かつ前記ベース層に接するエミッタ層と、
前記ベース層に導通する第1電極と、
前記第1電極と前記ベース層との導電経路において、前記第1電極に直列接続された第1抵抗素子と、
前記エミッタ層および前記第1抵抗素子の双方に導通する第2電極と、
前記第1抵抗素子と前記第2電極との導電経路において、前記第1抵抗素子に直列接続された第2抵抗素子と、
前記第1抵抗素子に対して前記第1電極に並列接続された保護素子と、を備え、
前記保護素子は、導電経路における両端が互いに同一極性となるようにpn接合により構成された一対のダイオードを含み、
厚さ方向の一方側に配置され、かつ前記コレクタ層、前記ベース層および前記エミッタ層の各々に接する絶縁層と、
前記第1抵抗素子に直列接続され、かつ前記絶縁層の上に配置された第1配線層と、をさらに備え、
前記第1配線層は、前記ベース層に接しており、
前記第1電極は、前記絶縁層の上に配置され、かつ前記厚さ方向に視て前記ベース層に重なり、
前記保護素子は、前記ベース層と前記第1電極との間に位置し、かつ前記ベース層および前記第1電極の双方に接している、半導体素子。 - 前記保護素子は、前記第2導電型半導体であり、かつ前記ベース層に接するコンタクト部と、前記厚さ方向に視て各々が前記コンタクト部を囲む複数の環状部と、を有し、
前記複数の環状部は、前記第1導電型半導体である複数の第1環状部と、前記第2導電型半導体である複数の第2環状部と、を含み、
前記複数の環状部においては、前記複数の第1環状部および前記複数の第2環状部の各々が交互に配置されており、
前記厚さ方向に視て最も内側に位置する前記複数の環状部のいずれかは、前記コンタクト部に接する前記複数の第1環状部のいずれかであり、
前記厚さ方向に視て最も外側に位置する前記複数の環状部のいずれかは、前記第1電極および前記第1抵抗素子の双方に接する前記複数の第2環状部のいずれかである、請求項1に記載の半導体素子。 - 前記ベース層は、前記保護素子の一部を兼ね備える、請求項2に記載の半導体素子。
- 第1導電型半導体であるコレクタ層と、
第2導電型半導体であり、かつ前記コレクタ層に接するベース層と、
前記第1導電型半導体であり、かつ前記ベース層に接するエミッタ層と、
前記ベース層に導通する第1電極と、
前記第1電極と前記ベース層との導電経路において、前記第1電極に直列接続された第1抵抗素子と、
前記エミッタ層および前記第1抵抗素子の双方に導通する第2電極と、
前記第1抵抗素子と前記第2電極との導電経路において、前記第1抵抗素子に直列接続された第2抵抗素子と、
前記第1抵抗素子に対して前記第1電極に並列接続された保護素子と、を備え、
前記保護素子は、導電経路における両端が互いに同一極性となるようにpn接合により構成された一対のダイオードを含み、
厚さ方向の一方側に配置され、かつ前記コレクタ層、前記ベース層および前記エミッタ層の各々に接する絶縁層と、
前記第1抵抗素子に直列接続され、かつ前記絶縁層の上に配置された第1配線層と、
前記保護素子および前記第2電極を相互に導通させる第2配線層と、をさらに備え、
前記第1配線層は、前記ベース層に接しており、
前記第1電極は、前記絶縁層の上に配置されており、
前記保護素子は、前記コレクタ層と前記第1電極との間に位置し、かつ前記第1電極に接しており、
前記第2配線層は、前記第2導電型半導体であり、かつ前記保護素子の一部を兼ね備える、半導体素子。 - 前記保護素子は、前記第2導電型半導体であり、かつ前記第1電極に接するコンタクト部と、前記厚さ方向に視て各々が前記コンタクト部を囲む複数の環状部と、を有し、
前記複数の環状部は、前記第1導電型半導体である複数の第1環状部と、前記第2導電型半導体である複数の第2環状部と、を有し、
前記複数の環状部においては、前記複数の第1環状部および前記複数の第2環状部の各々が交互に配置されており、
前記厚さ方向に視て最も内側に位置する前記複数の環状部のいずれかは、前記コンタクト部に接する前記複数の第1環状部のいずれかであり、
前記厚さ方向に視て最も外側に位置する前記複数の環状部のいずれかは、前記第2配線層に接する前記複数の第1環状部のいずれかである、請求項4に記載の半導体素子。 - 前記第2配線層は、前記厚さ方向に視て前記第1配線層に交差する帯状部を有し、
前記帯状部は、前記絶縁層に覆われている、請求項5に記載の半導体素子。 - 前記第1抵抗素子および前記保護素子は、前記絶縁層に覆われている、請求項1ないし6のいずれかに記載の半導体素子。
- 前記保護素子の構成材料は、多結晶シリコンを含む、請求項7に記載の半導体素子。
- 第1導電型半導体であるコレクタ層と、
第2導電型半導体であり、かつ前記コレクタ層に接するベース層と、
前記第1導電型半導体であり、かつ前記ベース層に接するエミッタ層と、
前記ベース層に導通する第1電極と、
前記第1電極と前記ベース層との導電経路において、前記第1電極に直列接続された第1抵抗素子と、
前記エミッタ層および前記第1抵抗素子の双方に導通する第2電極と、
前記第1抵抗素子と前記第2電極との導電経路において、前記第1抵抗素子に直列接続された第2抵抗素子と、
前記第1抵抗素子に対して前記第1電極に並列接続された保護素子と、を備え、
前記保護素子は、導電経路における両端が互いに同一極性となるようにpn接合により構成された一対のダイオードを含み、
厚さ方向の一方側に配置され、かつ前記コレクタ層、前記ベース層および前記エミッタ層の各々に接する絶縁層と、
前記第1抵抗素子に直列接続され、かつ前記絶縁層の上に配置された第1配線層と、
前記保護素子および前記第2電極を相互に導通させる第2配線層と、をさらに備え、
前記第1配線層は、前記ベース層に接しており、
前記第1電極は、前記絶縁層の上に配置されており、
前記保護素子は、前記コレクタ層に接しており、
前記コレクタ層は、前記保護素子の一部を兼ね備える、半導体素子。 - 前記保護素子と前記第1電極との間に位置し、かつ前記保護素子および前記第1電極の双方に接する補助保護素子をさらに備え、
前記補助保護素子は、前記第1導電型半導体であり、かつ前記保護素子に接する補助コンタクト部と、前記厚さ方向に視て各々が前記補助コンタクト部を囲む複数の補助環状部と、を有し、
前記複数の補助環状部は、前記第2導電型半導体である複数の第1補助環状部と、前記第1導電型半導体である複数の第2補助環状部と、を有し、
前記複数の補助環状部においては、前記複数の第1補助環状部および前記複数の第2補助環状部の各々が交互に配置されており、
前記厚さ方向に視て最も内側に位置する前記複数の補助環状部のいずれかは、前記補助コンタクト部に接する前記複数の第1補助環状部のいずれかであり、
前記厚さ方向に視て最も外側に位置する前記複数の補助環状部のいずれかは、前記第1電極および前記第1抵抗素子の双方に接する前記複数の第1補助環状部のいずれかである、請求項9に記載の半導体素子。 - 前記第1抵抗素子および前記補助保護素子は、前記絶縁層に覆われている、請求項10に記載の半導体素子。
- 前記補助保護素子の構成材料は、多結晶シリコンを含む、請求項11に記載の半導体素子。
- 前記第1抵抗素子および前記第2抵抗素子の各々の構成材料は、多結晶シリコンを含む、請求項1ないし12のいずれかに記載の半導体素子。
- 前記厚さ方向の他方側に配置され、かつ前記コレクタ層に導通する第3電極をさらに備える、請求項1ないし13のいずれかに記載の半導体素子。
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