JP7079604B2 - 不等リンク長を有するアームを有するロボット - Google Patents

不等リンク長を有するアームを有するロボット Download PDF

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Publication number
JP7079604B2
JP7079604B2 JP2017541311A JP2017541311A JP7079604B2 JP 7079604 B2 JP7079604 B2 JP 7079604B2 JP 2017541311 A JP2017541311 A JP 2017541311A JP 2017541311 A JP2017541311 A JP 2017541311A JP 7079604 B2 JP7079604 B2 JP 7079604B2
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Japan
Prior art keywords
arm
forearm
robot
upper arm
end effector
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JP2017541311A
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English (en)
Japanese (ja)
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JP2018505065A (ja
Inventor
マルチン ホシェク
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Persimmon Technologies Corp
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Persimmon Technologies Corp
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Publication of JP2018505065A publication Critical patent/JP2018505065A/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0095—Manipulators transporting wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J17/00—Joints
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/02—Arms extensible
    • B25J18/04—Arms extensible rotatable
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B25J9/043—Cylindrical coordinate type comprising an articulated arm double selective compliance articulated robot arms [SCARA]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68707—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)
JP2017541311A 2015-02-06 2016-02-08 不等リンク長を有するアームを有するロボット Active JP7079604B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201562112820P 2015-02-06 2015-02-06
US62/112,820 2015-02-06
PCT/US2016/016946 WO2016127160A1 (en) 2015-02-06 2016-02-08 Robot having arm with unequal link lengths

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2020134255A Division JP2020192680A (ja) 2015-02-06 2020-08-07 不等リンク長を有するアームを有するロボット

Publications (2)

Publication Number Publication Date
JP2018505065A JP2018505065A (ja) 2018-02-22
JP7079604B2 true JP7079604B2 (ja) 2022-06-02

Family

ID=56564808

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2017541311A Active JP7079604B2 (ja) 2015-02-06 2016-02-08 不等リンク長を有するアームを有するロボット
JP2020134255A Pending JP2020192680A (ja) 2015-02-06 2020-08-07 不等リンク長を有するアームを有するロボット
JP2023042459A Pending JP2023072085A (ja) 2015-02-06 2023-03-17 不等リンク長を有するアームを有するロボット

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2020134255A Pending JP2020192680A (ja) 2015-02-06 2020-08-07 不等リンク長を有するアームを有するロボット
JP2023042459A Pending JP2023072085A (ja) 2015-02-06 2023-03-17 不等リンク長を有するアームを有するロボット

Country Status (4)

Country Link
JP (3) JP7079604B2 (zh)
KR (5) KR20230080488A (zh)
CN (3) CN117621011A (zh)
WO (1) WO2016127160A1 (zh)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102373081B1 (ko) * 2017-02-15 2022-03-11 퍼시몬 테크놀로지스 코포레이션 다수의 엔드-이펙터들을 가진 재료-핸들링 로봇
US10629472B2 (en) 2017-08-17 2020-04-21 Persimmon Technologies Corporation Material handling robot
WO2020185841A1 (en) * 2019-03-11 2020-09-17 Persimmon Technologies Corporation Asymmetric dual end effector robot arm
US11735466B2 (en) 2019-05-21 2023-08-22 Persimmon Technologies Corporation Asymmetric dual end effector robot arm
US11569111B2 (en) * 2019-12-02 2023-01-31 Brooks Automation Us, Llc Substrate processing apparatus
CN112635378B (zh) * 2020-12-25 2023-05-16 上海广川科技有限公司 一种晶圆传输系统
KR102350673B1 (ko) * 2021-03-05 2022-01-12 (주)볼타오토메이션 반송로봇용 쿼드블레이드 타입의 반송암모듈
CN114474026A (zh) * 2022-02-15 2022-05-13 上海广川科技有限公司 双臂机械手

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000100894A (ja) 1998-09-18 2000-04-07 Nsk Ltd 半導体部品の搬送装置
JP2001157974A (ja) 1999-11-30 2001-06-12 Assist Japan Kk ダブルアーム型基板搬送ロボット
JP2003285382A (ja) 2002-03-28 2003-10-07 Dainippon Screen Mfg Co Ltd 複合構造部材および該部材の製造方法
JP2008264980A (ja) 2007-04-24 2008-11-06 Kawasaki Heavy Ind Ltd 基板搬送ロボット
JP2010531739A (ja) 2007-04-06 2010-09-30 ブルックス オートメーション インコーポレイテッド 複数の独立可動関節アームを伴う基板搬送装置
US20130121798A1 (en) 2011-11-07 2013-05-16 Martin Hosek Robot system with independent arms
JP2013230555A (ja) 2013-07-09 2013-11-14 Kawasaki Heavy Ind Ltd 基板搬送装置および基板搬送ロボット
WO2014113364A1 (en) 2013-01-18 2014-07-24 Persimmon Technologies, Corp. Robot having arm with unequal link lengths
JP2014135340A (ja) 2013-01-09 2014-07-24 Dainippon Screen Mfg Co Ltd 熱処理装置
JP2014136263A (ja) 2013-01-15 2014-07-28 Sinfonia Technology Co Ltd 吸着装置及びこれを備えた搬送装置

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5382803A (en) * 1991-05-28 1995-01-17 Tokyo Electron Limited Ion injection device
JP3369255B2 (ja) * 1993-05-28 2003-01-20 株式会社日立国際電気 半導体製造方法及び半導体製造装置
US6360144B1 (en) * 1995-07-10 2002-03-19 Newport Corporation Self-teaching robot arm position method
JPH1138909A (ja) * 1997-07-18 1999-02-12 Toa Resin Kk 看 板
JP4178534B2 (ja) * 1997-12-24 2008-11-12 株式会社安川電機 基板搬送用ロボット
JPH11354480A (ja) * 1998-06-11 1999-12-24 Sumitomo Metal Ind Ltd ウエハ洗浄方法及びウエハ洗浄装置
JP2000072248A (ja) * 1998-08-27 2000-03-07 Rorze Corp 基板搬送装置
JP4262064B2 (ja) * 2003-11-28 2009-05-13 株式会社ダイヘン 搬送ロボット
TW200910505A (en) * 2007-05-08 2009-03-01 Brooks Automation Inc Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
CN101678974A (zh) * 2007-05-31 2010-03-24 应用材料股份有限公司 延伸scara机械手臂连接的方法及设备
JP5304601B2 (ja) * 2009-11-10 2013-10-02 株式会社安川電機 アーム機構およびそれを備えた真空ロボット
CN101908497B (zh) * 2010-07-14 2013-04-10 哈尔滨工业大学 一种应用于高洁净度环境下的双臂传输机器人
JP5177706B2 (ja) * 2010-07-15 2013-04-10 村田機械株式会社 ダブルスカラーアーム
WO2012064949A1 (en) * 2010-11-10 2012-05-18 Brooks Automation, Inc. Dual arm robot
US8961099B2 (en) * 2012-01-13 2015-02-24 Novellus Systems, Inc. Dual arm vacuum robot with common drive pulley
KR102094390B1 (ko) * 2012-11-30 2020-03-27 어플라이드 머티어리얼스, 인코포레이티드 모터 모듈들, 다중-축 모터 구동 조립체들, 다중-축 로봇 장치, 및 전자 디바이스 제조 시스템들 및 방법들
US9149936B2 (en) * 2013-01-18 2015-10-06 Persimmon Technologies, Corp. Robot having arm with unequal link lengths

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000100894A (ja) 1998-09-18 2000-04-07 Nsk Ltd 半導体部品の搬送装置
JP2001157974A (ja) 1999-11-30 2001-06-12 Assist Japan Kk ダブルアーム型基板搬送ロボット
JP2003285382A (ja) 2002-03-28 2003-10-07 Dainippon Screen Mfg Co Ltd 複合構造部材および該部材の製造方法
JP2010531739A (ja) 2007-04-06 2010-09-30 ブルックス オートメーション インコーポレイテッド 複数の独立可動関節アームを伴う基板搬送装置
JP2008264980A (ja) 2007-04-24 2008-11-06 Kawasaki Heavy Ind Ltd 基板搬送ロボット
US20130121798A1 (en) 2011-11-07 2013-05-16 Martin Hosek Robot system with independent arms
JP2014135340A (ja) 2013-01-09 2014-07-24 Dainippon Screen Mfg Co Ltd 熱処理装置
JP2014136263A (ja) 2013-01-15 2014-07-28 Sinfonia Technology Co Ltd 吸着装置及びこれを備えた搬送装置
WO2014113364A1 (en) 2013-01-18 2014-07-24 Persimmon Technologies, Corp. Robot having arm with unequal link lengths
JP2013230555A (ja) 2013-07-09 2013-11-14 Kawasaki Heavy Ind Ltd 基板搬送装置および基板搬送ロボット

Also Published As

Publication number Publication date
KR20220048053A (ko) 2022-04-19
KR20230080488A (ko) 2023-06-07
WO2016127160A1 (en) 2016-08-11
CN117621011A (zh) 2024-03-01
CN113601482A (zh) 2021-11-05
KR20220139430A (ko) 2022-10-14
JP2020192680A (ja) 2020-12-03
CN107428001A (zh) 2017-12-01
KR20170138395A (ko) 2017-12-15
CN107428001B (zh) 2021-07-13
JP2018505065A (ja) 2018-02-22
CN113601482B (zh) 2024-04-26
KR102430044B1 (ko) 2022-08-05
KR20180001602A (ko) 2018-01-04
JP2023072085A (ja) 2023-05-23
KR102451144B1 (ko) 2022-10-05
KR102386346B1 (ko) 2022-04-13

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