JP7068356B2 - 画像センサ構体 - Google Patents
画像センサ構体 Download PDFInfo
- Publication number
- JP7068356B2 JP7068356B2 JP2019571425A JP2019571425A JP7068356B2 JP 7068356 B2 JP7068356 B2 JP 7068356B2 JP 2019571425 A JP2019571425 A JP 2019571425A JP 2019571425 A JP2019571425 A JP 2019571425A JP 7068356 B2 JP7068356 B2 JP 7068356B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- passivation
- image sensor
- stack
- crosstalk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000010410 layer Substances 0.000 claims description 336
- 238000002161 passivation Methods 0.000 claims description 236
- 229910052751 metal Inorganic materials 0.000 claims description 128
- 239000002184 metal Substances 0.000 claims description 128
- 230000003287 optical effect Effects 0.000 claims description 104
- 239000000126 substance Substances 0.000 claims description 71
- 230000000903 blocking effect Effects 0.000 claims description 59
- 238000000034 method Methods 0.000 claims description 52
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 13
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 13
- 238000005530 etching Methods 0.000 claims description 12
- 238000000926 separation method Methods 0.000 claims description 6
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 5
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims description 5
- 239000010949 copper Substances 0.000 claims description 4
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 239000010937 tungsten Substances 0.000 claims description 4
- 239000011241 protective layer Substances 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- 230000008569 process Effects 0.000 description 37
- 238000005240 physical vapour deposition Methods 0.000 description 22
- 238000005229 chemical vapour deposition Methods 0.000 description 21
- 238000000151 deposition Methods 0.000 description 19
- 239000000463 material Substances 0.000 description 13
- 238000000231 atomic layer deposition Methods 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 9
- 230000001681 protective effect Effects 0.000 description 9
- 230000005284 excitation Effects 0.000 description 8
- 239000011295 pitch Substances 0.000 description 8
- 238000005498 polishing Methods 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000009713 electroplating Methods 0.000 description 5
- 239000007850 fluorescent dye Substances 0.000 description 5
- 238000001020 plasma etching Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 239000012530 fluid Substances 0.000 description 4
- 238000001459 lithography Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 230000000295 complement effect Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003090 exacerbative effect Effects 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 150000007523 nucleic acids Chemical class 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000007261 regionalization Effects 0.000 description 2
- 238000001712 DNA sequencing Methods 0.000 description 1
- 108091034117 Oligonucleotide Proteins 0.000 description 1
- JLCPHMBAVCMARE-UHFFFAOYSA-N [3-[[3-[[3-[[3-[[3-[[3-[[3-[[3-[[3-[[3-[[3-[[5-(2-amino-6-oxo-1H-purin-9-yl)-3-[[3-[[3-[[3-[[3-[[3-[[5-(2-amino-6-oxo-1H-purin-9-yl)-3-[[5-(2-amino-6-oxo-1H-purin-9-yl)-3-hydroxyoxolan-2-yl]methoxy-hydroxyphosphoryl]oxyoxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(5-methyl-2,4-dioxopyrimidin-1-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(6-aminopurin-9-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(6-aminopurin-9-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(6-aminopurin-9-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(6-aminopurin-9-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxyoxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(5-methyl-2,4-dioxopyrimidin-1-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(4-amino-2-oxopyrimidin-1-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(5-methyl-2,4-dioxopyrimidin-1-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(5-methyl-2,4-dioxopyrimidin-1-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(6-aminopurin-9-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(6-aminopurin-9-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(4-amino-2-oxopyrimidin-1-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(4-amino-2-oxopyrimidin-1-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(4-amino-2-oxopyrimidin-1-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(6-aminopurin-9-yl)oxolan-2-yl]methoxy-hydroxyphosphoryl]oxy-5-(4-amino-2-oxopyrimidin-1-yl)oxolan-2-yl]methyl [5-(6-aminopurin-9-yl)-2-(hydroxymethyl)oxolan-3-yl] hydrogen phosphate Polymers Cc1cn(C2CC(OP(O)(=O)OCC3OC(CC3OP(O)(=O)OCC3OC(CC3O)n3cnc4c3nc(N)[nH]c4=O)n3cnc4c3nc(N)[nH]c4=O)C(COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3COP(O)(=O)OC3CC(OC3CO)n3cnc4c(N)ncnc34)n3ccc(N)nc3=O)n3cnc4c(N)ncnc34)n3ccc(N)nc3=O)n3ccc(N)nc3=O)n3ccc(N)nc3=O)n3cnc4c(N)ncnc34)n3cnc4c(N)ncnc34)n3cc(C)c(=O)[nH]c3=O)n3cc(C)c(=O)[nH]c3=O)n3ccc(N)nc3=O)n3cc(C)c(=O)[nH]c3=O)n3cnc4c3nc(N)[nH]c4=O)n3cnc4c(N)ncnc34)n3cnc4c(N)ncnc34)n3cnc4c(N)ncnc34)n3cnc4c(N)ncnc34)O2)c(=O)[nH]c1=O JLCPHMBAVCMARE-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 229920002100 high-refractive-index polymer Polymers 0.000 description 1
- 108020004707 nucleic acids Proteins 0.000 description 1
- 102000039446 nucleic acids Human genes 0.000 description 1
- 239000002773 nucleotide Substances 0.000 description 1
- 125000003729 nucleotide group Chemical group 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000012163 sequencing technique Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910000314 transition metal oxide Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14636—Interconnect structures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/0204—Compact construction
- G01J1/0209—Monolithic
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/0214—Constructional arrangements for removing stray light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/44—Electric circuits
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/03—Cuvette constructions
- G01N21/05—Flow-through cuvettes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/6428—Measuring fluorescence of fluorescent products of reactions or of fluorochrome labelled reactive substances, e.g. measuring quenching effects, using measuring "optrodes"
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/64—Fluorescence; Phosphorescence
- G01N21/645—Specially adapted constructive features of fluorimeters
- G01N21/6452—Individual samples arranged in a regular 2D-array, e.g. multiwell plates
- G01N21/6454—Individual samples arranged in a regular 2D-array, e.g. multiwell plates using an integrated detector array
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14609—Pixel-elements with integrated switching, control, storage or amplification elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14623—Optical shielding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
- H01L27/14629—Reflectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1463—Pixel isolation structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14685—Process for coatings or optical elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/06—Illumination; Optics
- G01N2201/064—Stray light conditioning
- G01N2201/0642—Light traps; baffles
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Immunology (AREA)
- Chemical & Material Sciences (AREA)
- Pathology (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Molecular Biology (AREA)
- Biomedical Technology (AREA)
- Hematology (AREA)
- Urology & Nephrology (AREA)
- Microbiology (AREA)
- Cell Biology (AREA)
- Optics & Photonics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Food Science & Technology (AREA)
- Biotechnology (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Measuring Pulse, Heart Rate, Blood Pressure Or Blood Flow (AREA)
- Glass Compositions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Facsimile Heads (AREA)
Description
本件特許出願は、2017年12月26日出願の米国仮出願第62/610,354号、及び2018年3月19日出願のオランダ国特許出願第2020615号の優先権を主張し、これら特許出願それぞれの内容全体は参照により本明細書に組み入れられるものとする。
本発明開示は画像センサ構体に関する。
・光ガイド130上に配置されている第1不動態化層142、
・第1不動態化層142上に配置されている第1化学保護層144、
・第1化学保護層144上に配置されている第2不動態化層204、
・第2不動態化層204上に配置されている第2化学保護層206
がある。
・4層不動態化スタックは、より大型かつより幾何学形状(ジオメトリ)的に複雑なクロストーク遮断金属構体の堆積を可能にし、2層不動態化スタックとして配置できるクロストーク遮断金属構体よりも一層効果的にクロストークを減少することができる、
・4層不動態化スタックは、ナノウェルのジオメトリが付加された層に起因して下層の光ガイドによる制約を受けるのが少ないため、ナノウェル設計におけるより高い融通性を可能にする、
・4層不動態化スタックは、不動態化スタックの厚さ並びに付加層の増加に起因して、任意な化学的又は機械的損傷に対してより堅牢さをもたらす
点がある。
・光ガイド130上に配置されている第1不動態化層142、
・第1不動態化層142上に配置されている第1化学保護層144、
・第1化学保護層144上に配置されている第2不動態化層204、
・第2不動態化層204上に配置されている第2化学保護層206
がある。
・光ガイド130上に配置されている第1不動態化層142、
・第1不動態化層142上に配置されている第1化学保護層144、
・第1化学保護層144上に配置されている第2不動態化層204、
・第2不動態化層204上に配置されている第2化学保護層206
がある。
Claims (21)
- 画像センサ構体において、
画像層であり、該層内に配置された光検出器のアレイを有する、該画像層と、
前記画像層上に配置されたデバイススタックと、
前記デバイススタック内に配置された光ガイドのアレイであり、各光ガイドは前記光検出器のアレイにおける少なくとも1つの光検出器に関連付けられる、該光ガイドのアレイと、
前記デバイススタック上に配置された不動態化スタックであり、前記光ガイドの頂面に直接接触する底面を有する、該不動態化スタックと、
前記不動態化スタックの頂部層に配置されたナノウェルのアレイであり、各ナノウェルは前記光ガイドのアレイにおける光ガイドに関連付けられる、該ナノウェルのアレイと、及び
前記不動態化スタック内に配置されたクロストーク遮断金属構体であり、前記不動態化スタック内のクロストークを減少する、該クロストーク遮断金属構体と、
を備え、
前記クロストーク遮断金属構体は、少なくとも前記不動態化スタック内の層の底面から頂面まで延在する、画像センサ構体。 - 請求項1記載の画像センサ構体において、
前記不動態化スタックは複数の層を有し、前記複数の層は、前記光ガイド上に配置された第1不動態化層、及び前記第1不動態化層上に配置された第1化学保護層を含む、該不動態化スタックを備える、画像センサ構体。 - 請求項2記載の画像センサ構体において、前記クロストーク遮断金属構体は、前記第1不動態化層に配置された金属ピラーを有する、画像センサ構体。
- 請求項2記載の画像センサ構体において、前記クロストーク遮断金属構体は、前記第1不動態化層に配置された平行金属層を有する、画像センサ構体。
- 請求項2記載の画像センサ構体において、前記複数の層は、
前記第1化学保護層上に配置された第2不動態化層、
前記第2不動態化層上に配置された第2化学保護層
を有し、
前記ナノウェルは前記第2化学保護層の頂部層に配置される、画像センサ構体。 - 請求項5記載の画像センサ構体において、前記クロストーク遮断金属構体は、前記第2不動態化層に配置された平行金属層を有する、画像センサ構体。
- 請求項5記載の画像センサ構体において、前記クロストーク遮断金属構体は、前記第1不動態化層に配置された金属ピラーを有する、画像センサ構体。
- 請求項5記載の画像センサ構体において、前記クロストーク遮断金属構体は、前記第1不動態化層の底面から前記第2不動態化層の頂面まで延在する金属ピラーを有し、前記金属ピラーは前記ナノウェル相互間に配置される、画像センサ構体。
- 請求項1記載の画像センサ構体において、前記クロストーク遮断金属構体は、
タンタル(Ta)、タングステン(W)、アルミニウム(Al)及び銅(Cu)のうち1つから成る、画像センサ構体。 - 請求項2記載の画像センサ構体において、前記第1不動態化層は窒化ケイ素(SiN)から成り、前記第1化学保護層は五酸化タンタル(Ta2O5)から成る、画像センサ構体。
- 請求項1記載の画像センサ構体において、前記デバイススタックと前記不動態化スタックとの間に配置された光遮蔽層を備える、画像センサ構体。
- 請求項5記載の画像センサ構体において、前記第2不動態化層は窒化ケイ素(SiN)から成り、前記第2化学保護層は五酸化タンタル(Ta2O5)から成る、画像センサ構体。
- 請求項4記載の画像センサ構体において、前記平行金属層は、
前記平行金属層間の分離距離が前記クロストーク波長の1/2以下である、
前記平行金属層の幅が前記クロストーク波長の1/2以上である、
のうち少なくとも1つの特性を有する、画像センサ構体。 - 請求項6記載の画像センサ構体において、前記平行金属層は、
前記平行金属層間の分離距離が前記クロストーク波長の1/2以下である、
前記平行金属層の幅が前記クロストーク波長の1/2以上である、
のうち少なくとも1つの特性を有する、画像センサ構体。 - 画像センサ構体において、
画像層であり、該層内に配置された光検出器のアレイを有する、該画像層と、
前記画像層上に配置されたデバイススタックと、
前記デバイススタック内に配置された光ガイドのアレイであり、各光ガイドは前記光検出器のアレイにおける少なくとも1つの光検出器に関連付けられる、該光ガイドのアレイと、
前記デバイススタック上に配置された不動態化スタックであり、
前記光ガイドの頂面に直接接触する底面を有する第1不動態化層、
前記第1不動態化層上に配置された第1化学保護層、
前記第1化学保護層上に配置された第2不動態化層、及び
前記第2不動態化層上に配置された第2化学保護層
を含む、該不動態化スタックと、
前記不動態化スタックの頂部層に配置されたナノウェルのアレイであり、各ナノウェルは前記光ガイドのアレイにおける光ガイドに関連付けられる、該ナノウェルのアレイと、並びに
前記不動態化スタック内に配置されたクロストーク遮断金属構体であり、前記不動態化スタック内のクロストークを減少する、該クロストーク遮断金属構体と、
を備え、
前記クロストーク遮断金属構体は、少なくとも前記不動態化スタック内の層の底面から頂面まで延在する、画像センサ構体。 - 請求項15記載の画像センサ構体において、前記クロストーク遮断金属構体は、前記ナノウェル相互間に配置された金属ピラー及び平行金属層のうち少なくとも1つを有する、画像センサ構体。
- 画像層であって、該層内に配置された光検出器のアレイを有するものである、該画像層上に配置されたデバイススタック内に光ガイド開孔のアレイをエッチングするステップと、
前記光ガイド開孔に光ガイドのアレイを形成し、各光ガイドは前記光検出器のアレイにおける少なくとも1つの光検出器に関連付けられるよう形成するステップと、
前記光ガイドのアレイ上に第1不動態化層を配置し、前記第1不動態化層の底面が前記光ガイドの頂面に直接するよう配置するステップと、
前記第1不動態化層上に第1化学保護層を配置し、前記第1化学保護層及び前記第1不動態化層が不動態化スタックの少なくとも一部分をなすよう配置するステップと、
前記不動態化スタックの頂部層にナノウェルのアレイを形成し、各ナノウェルは前記光ガイドのアレイにおける光ガイドに関連付けられるよう形成するステップと、並びに
前記不動態化スタック内のクロストークを減少するクロストーク遮断金属構体であって、該クロストーク遮断金属構体を前記不動態化スタック内に配置するステップと、
を備え、
前記クロストーク遮断金属構体は、少なくとも前記不動態化スタック内の層の底面から頂面まで延在する、方法。 - 請求項17記載の方法において、
前記光ガイド開孔内に前記光ガイドを窪ませ、前記光ガイド開孔の内側壁の上方部分が露出し、また前記光ガイドの頂面が前記光ガイド開孔の頂部開口の下方に所定深さまで窪ませるステップ、
を備え、
前記第1不動態化層を配置するステップは、さらに、前記光ガイド開孔の前記内側壁の上方部分に前記第1不動態化層を共形適合させ、前記第1不動態化層の頂部層にナノウェルのアレイを形成し、各ナノウェルが単一の光ガイドに関連付けられるよう形成するステップを含む、方法。 - 請求項18記載の方法において、前記クロストーク遮蔽構体を配置するステップは、ナノウェル相互間で前記第1不動態化層内に金属ピラーを配置するステップを含む、方法。
- 請求項17記載の方法において、
前記第1化学保護層上に第2不動態化層を配置するステップと、
前記第2不動態化層上に第2化学保護層を配置し、前記第2化学保護層及び前記第2不動態化層がさらに前記不動態化スタックをなすように配置するステップと
を備える、方法。 - 請求項17記載の方法において、前記クロストーク遮蔽構体を配置するステップは、ナノウェル相互間で前記不動態化スタック内に金属ピラー及び平行金属層のうち一方を配置するステップを含む、方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201762610354P | 2017-12-26 | 2017-12-26 | |
US62/610,354 | 2017-12-26 | ||
NL2020615 | 2018-03-19 | ||
NL2020615A NL2020615B1 (en) | 2017-12-26 | 2018-03-19 | Image sensor structure |
PCT/US2018/058890 WO2019133105A1 (en) | 2017-12-26 | 2018-11-02 | Image sensor structure |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020533782A JP2020533782A (ja) | 2020-11-19 |
JP7068356B2 true JP7068356B2 (ja) | 2022-05-16 |
Family
ID=64650329
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019571425A Active JP7068356B2 (ja) | 2017-12-26 | 2018-11-02 | 画像センサ構体 |
Country Status (23)
Country | Link |
---|---|
US (3) | US10879296B2 (ja) |
EP (2) | EP4050327A1 (ja) |
JP (1) | JP7068356B2 (ja) |
KR (2) | KR20200023286A (ja) |
CN (2) | CN209150117U (ja) |
AU (2) | AU2018397303B2 (ja) |
CA (1) | CA3066714C (ja) |
CL (1) | CL2019003780A1 (ja) |
CO (1) | CO2019014438A2 (ja) |
CR (1) | CR20190586A (ja) |
DK (1) | DK3505914T3 (ja) |
ES (1) | ES2914304T3 (ja) |
IL (1) | IL271227B2 (ja) |
MX (1) | MX2019015846A (ja) |
NL (1) | NL2020615B1 (ja) |
PE (1) | PE20201070A1 (ja) |
PH (1) | PH12019502902A1 (ja) |
RU (1) | RU2744399C1 (ja) |
SA (1) | SA519410860B1 (ja) |
SG (1) | SG11201911653UA (ja) |
TW (2) | TWI697114B (ja) |
WO (1) | WO2019133105A1 (ja) |
ZA (2) | ZA201908211B (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8906320B1 (en) | 2012-04-16 | 2014-12-09 | Illumina, Inc. | Biosensors for biological or chemical analysis and systems and methods for same |
NL2020625B1 (en) * | 2017-12-22 | 2019-07-02 | Illumina Inc | Two-filter light detection devices and methods of manufacturing same |
NL2020615B1 (en) * | 2017-12-26 | 2019-07-02 | Illumina Inc | Image sensor structure |
MY194772A (en) * | 2017-12-26 | 2022-12-15 | Illumina Inc | Sensor System |
CN112740016B (zh) * | 2018-09-14 | 2024-06-18 | 亿明达股份有限公司 | 流动池及与其相关的方法 |
JP2022553465A (ja) * | 2019-10-09 | 2022-12-23 | イルミナ インコーポレイテッド | 画像センサ構造 |
US11105745B2 (en) * | 2019-10-10 | 2021-08-31 | Visera Technologies Company Limited | Biosensor |
TWI725765B (zh) * | 2020-03-10 | 2021-04-21 | 力晶積成電子製造股份有限公司 | 具有表面微柱體結構的固態影像感測器暨其製作方法 |
WO2021184374A1 (en) * | 2020-03-20 | 2021-09-23 | Genesense Technology Inc | High throughput analytical system for molecule detection and sensing |
TWI751893B (zh) * | 2021-01-21 | 2022-01-01 | 晶相光電股份有限公司 | 影像感測裝置 |
US20220238733A1 (en) * | 2021-01-28 | 2022-07-28 | Texas Instruments Incorporated | Sensor packages with wavelength-specific light filters |
TWI773355B (zh) * | 2021-06-02 | 2022-08-01 | 晶相光電股份有限公司 | 影像感測器及其製造方法 |
US20230333017A1 (en) * | 2022-04-13 | 2023-10-19 | Illumina, Inc. | Sensor with light filter and crosstalk reduction medium |
CN117250343A (zh) * | 2022-06-10 | 2023-12-19 | 广州印芯半导体技术有限公司 | 载体均匀地分散的生物检测装置 |
CN116884984B (zh) * | 2023-09-04 | 2023-12-29 | 合肥海图微电子有限公司 | 一种图像传感器及其制作方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120156100A1 (en) | 2010-12-20 | 2012-06-21 | Industrial Technology Research Institute | Apparatus for single molecule detection and method thereof |
JP2014036037A (ja) | 2012-08-07 | 2014-02-24 | Canon Inc | 撮像装置、撮像システム、および撮像装置の製造方法。 |
US20170016830A1 (en) | 2015-07-15 | 2017-01-19 | Powerchip Technology Corporation | Integrated bio-sensor with nanocavity and fabrication method thereof |
JP2017504789A (ja) | 2013-12-10 | 2017-02-09 | イラミーナ インコーポレーテッド | 生物学的または化学的な分析のためのバイオセンサおよびその製造方法 |
US20170322156A1 (en) | 2012-06-17 | 2017-11-09 | Pacific Biosciences Of California, Inc. | Arrays of integrated analytical devices and methods for production |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5846708A (en) | 1991-11-19 | 1998-12-08 | Massachusetts Institiute Of Technology | Optical and electrical methods and apparatus for molecule detection |
FR2906079B1 (fr) * | 2006-09-19 | 2009-02-20 | E2V Semiconductors Soc Par Act | Capteur d'image en couleur a colorimetrie amelioree |
KR20090037004A (ko) * | 2007-10-11 | 2009-04-15 | 주식회사 동부하이텍 | 이미지센서 및 그 제조방법 |
US8319301B2 (en) * | 2008-02-11 | 2012-11-27 | Omnivision Technologies, Inc. | Self-aligned filter for an image sensor |
US9410891B2 (en) * | 2010-02-19 | 2016-08-09 | Pacific Biosciences Of California, Inc. | Optics collection and detection system and method |
RU105744U1 (ru) * | 2010-06-11 | 2011-06-20 | Федеральное государственное учреждение науки "Санкт-Петербургский научно-исследовательский институт эпидемиологии и микробиологии имени Пастера" Федеральной службы по надзору в сфере защиты прав потребителей и благополучия человека | Устройство для микробиологических исследований |
US9373732B2 (en) | 2012-02-07 | 2016-06-21 | Semiconductor Components Industries, Llc | Image sensors with reflective optical cavity pixels |
US8906320B1 (en) * | 2012-04-16 | 2014-12-09 | Illumina, Inc. | Biosensors for biological or chemical analysis and systems and methods for same |
US8941204B2 (en) * | 2012-04-27 | 2015-01-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus and method for reducing cross talk in image sensors |
US8530266B1 (en) * | 2012-07-18 | 2013-09-10 | Omnivision Technologies, Inc. | Image sensor having metal grid with a triangular cross-section |
US9478574B2 (en) * | 2012-09-19 | 2016-10-25 | Semiconductor Components Industries, Llc | Image sensor pixels with light guides and light shield structures |
US9356060B2 (en) * | 2013-03-12 | 2016-05-31 | Taiwan Semiconductor Manufacturing Company, Ltd. | Image sensor device and method |
US9683937B2 (en) * | 2013-08-23 | 2017-06-20 | Semiconductor Components Industries, Llc | Imaging devices for molecule detection |
US10191213B2 (en) * | 2014-01-09 | 2019-01-29 | Globalfoundries Inc. | Shielding structures between optical waveguides |
US9130072B1 (en) * | 2014-04-15 | 2015-09-08 | Taiwan Semiconductor Manufacturing Company Ltd. | Backside illuminated image sensor and method of manufacturing the same |
BR112017002489B1 (pt) * | 2014-08-08 | 2023-02-14 | Quantum-Si Incorporated | Instrumento configurado para fazer interface com um chip de teste, aparelho, método de análise de um espécime, método para sequenciar uma molécula-alvo de ácido nucleico e método para sequenciamento de ácido nucleico |
US9825078B2 (en) * | 2014-11-13 | 2017-11-21 | Visera Technologies Company Limited | Camera device having an image sensor comprising a conductive layer and a reflection layer stacked together to form a light pipe structure accommodating a filter unit |
US9739938B2 (en) * | 2015-12-09 | 2017-08-22 | Elenion Technologies, Llc | Shielded photonic integrated circuit |
NL2020615B1 (en) * | 2017-12-26 | 2019-07-02 | Illumina Inc | Image sensor structure |
-
2018
- 2018-03-19 NL NL2020615A patent/NL2020615B1/en not_active IP Right Cessation
- 2018-11-02 RU RU2019140605A patent/RU2744399C1/ru active
- 2018-11-02 CA CA3066714A patent/CA3066714C/en active Active
- 2018-11-02 WO PCT/US2018/058890 patent/WO2019133105A1/en active Application Filing
- 2018-11-02 JP JP2019571425A patent/JP7068356B2/ja active Active
- 2018-11-02 IL IL271227A patent/IL271227B2/en unknown
- 2018-11-02 SG SG11201911653UA patent/SG11201911653UA/en unknown
- 2018-11-02 CR CR20190586A patent/CR20190586A/es unknown
- 2018-11-02 AU AU2018397303A patent/AU2018397303B2/en active Active
- 2018-11-02 PE PE2019002640A patent/PE20201070A1/es unknown
- 2018-11-02 KR KR1020197036784A patent/KR20200023286A/ko not_active Application Discontinuation
- 2018-11-02 MX MX2019015846A patent/MX2019015846A/es unknown
- 2018-11-02 KR KR1020217040853A patent/KR102521299B1/ko active IP Right Grant
- 2018-11-08 TW TW107139670A patent/TWI697114B/zh active
- 2018-11-08 TW TW109116396A patent/TWI738344B/zh active
- 2018-12-04 US US16/208,862 patent/US10879296B2/en active Active
- 2018-12-13 CN CN201822092596.9U patent/CN209150117U/zh active Active
- 2018-12-13 CN CN201811524210.5A patent/CN109962079A/zh active Pending
- 2018-12-17 EP EP22168476.4A patent/EP4050327A1/en active Pending
- 2018-12-17 ES ES18213239T patent/ES2914304T3/es active Active
- 2018-12-17 EP EP18213239.9A patent/EP3505914B1/en active Active
- 2018-12-17 DK DK18213239.9T patent/DK3505914T3/da active
-
2019
- 2019-12-10 ZA ZA2019/08211A patent/ZA201908211B/en unknown
- 2019-12-19 CO CONC2019/0014438A patent/CO2019014438A2/es unknown
- 2019-12-19 SA SA519410860A patent/SA519410860B1/ar unknown
- 2019-12-20 PH PH12019502902A patent/PH12019502902A1/en unknown
- 2019-12-20 CL CL2019003780A patent/CL2019003780A1/es unknown
-
2020
- 2020-12-11 US US17/119,909 patent/US11610928B2/en active Active
-
2021
- 2021-05-28 AU AU2021203485A patent/AU2021203485B2/en active Active
- 2021-09-27 ZA ZA2021/07199A patent/ZA202107199B/en unknown
-
2023
- 2023-02-28 US US18/175,836 patent/US20230207601A1/en active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120156100A1 (en) | 2010-12-20 | 2012-06-21 | Industrial Technology Research Institute | Apparatus for single molecule detection and method thereof |
US20170322156A1 (en) | 2012-06-17 | 2017-11-09 | Pacific Biosciences Of California, Inc. | Arrays of integrated analytical devices and methods for production |
JP2014036037A (ja) | 2012-08-07 | 2014-02-24 | Canon Inc | 撮像装置、撮像システム、および撮像装置の製造方法。 |
JP2017504789A (ja) | 2013-12-10 | 2017-02-09 | イラミーナ インコーポレーテッド | 生物学的または化学的な分析のためのバイオセンサおよびその製造方法 |
US20170016830A1 (en) | 2015-07-15 | 2017-01-19 | Powerchip Technology Corporation | Integrated bio-sensor with nanocavity and fabrication method thereof |
Also Published As
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7068356B2 (ja) | 画像センサ構体 | |
KR102466365B1 (ko) | 센서 시스템 | |
TW202309504A (zh) | 用於生物或化學分析的生物感測器以及製造其的方法 | |
KR20210158299A (ko) | 활성 표면을 갖는 센서 | |
TW202115894A (zh) | 影像感測器結構 | |
NZ759861B2 (en) | Image sensor structure | |
BR112019027632B1 (pt) | Estrutura de sensor de imagem | |
US10126168B1 (en) | Optical sensor | |
TW202231156A (zh) | 實現感測器頂側打線接合 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20200305 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20210413 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210615 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210729 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20211207 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20220303 |
|
C60 | Trial request (containing other claim documents, opposition documents) |
Free format text: JAPANESE INTERMEDIATE CODE: C60 Effective date: 20220303 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20220314 |
|
C21 | Notice of transfer of a case for reconsideration by examiners before appeal proceedings |
Free format text: JAPANESE INTERMEDIATE CODE: C21 Effective date: 20220315 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20220426 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20220428 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7068356 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |