JP7046746B2 - Ｘ線生成のための薄片成形されたターゲット - Google Patents

Ｘ線生成のための薄片成形されたターゲット Download PDF

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JP7046746B2
JP7046746B2 JP2018130470A JP2018130470A JP7046746B2 JP 7046746 B2 JP7046746 B2 JP 7046746B2 JP 2018130470 A JP2018130470 A JP 2018130470A JP 2018130470 A JP2018130470 A JP 2018130470A JP 7046746 B2 JP7046746 B2 JP 7046746B2
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target
axis
sample
ray
electron beam
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JP2019021625A5 (enExample
JP2019021625A (ja
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フィレヴィッチ ホルヘ
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/046—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K7/00—Gamma- or X-ray microscopes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/20—Sources of radiation
    • G01N2223/204—Sources of radiation source created from radiated target
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/40—Imaging
    • G01N2223/401—Imaging image processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/40—Imaging
    • G01N2223/419—Imaging computed tomograph
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/081—Target material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/086—Target geometry

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Biochemistry (AREA)
  • Radiology & Medical Imaging (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pulmonology (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • X-Ray Techniques (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2018130470A 2017-07-11 2018-07-10 Ｘ線生成のための薄片成形されたターゲット Active JP7046746B2 (ja)

Applications Claiming Priority (2)

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US201762531097P 2017-07-11 2017-07-11
US62/531,097 2017-07-11

Publications (3)

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JP2019021625A JP2019021625A (ja) 2019-02-07
JP2019021625A5 JP2019021625A5 (enExample) 2021-05-13
JP7046746B2 true JP7046746B2 (ja) 2022-04-04

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JP2018130470A Active JP7046746B2 (ja) 2017-07-11 2018-07-10 Ｘ線生成のための薄片成形されたターゲット

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US (1) US10746672B2 (enExample)
EP (1) EP3428928A1 (enExample)
JP (1) JP7046746B2 (enExample)
CN (1) CN109243947B (enExample)

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US20150117599A1 (en) 2013-10-31 2015-04-30 Sigray, Inc. X-ray interferometric imaging system
US10295485B2 (en) 2013-12-05 2019-05-21 Sigray, Inc. X-ray transmission spectrometer system
US10416099B2 (en) 2013-09-19 2019-09-17 Sigray, Inc. Method of performing X-ray spectroscopy and X-ray absorption spectrometer system
USRE48612E1 (en) 2013-10-31 2021-06-29 Sigray, Inc. X-ray interferometric imaging system
US10401309B2 (en) 2014-05-15 2019-09-03 Sigray, Inc. X-ray techniques using structured illumination
US10247683B2 (en) 2016-12-03 2019-04-02 Sigray, Inc. Material measurement techniques using multiple X-ray micro-beams
US10578566B2 (en) 2018-04-03 2020-03-03 Sigray, Inc. X-ray emission spectrometer system
WO2019236384A1 (en) 2018-06-04 2019-12-12 Sigray, Inc. Wavelength dispersive x-ray spectrometer
DE112019003777B4 (de) 2018-07-26 2025-09-11 Sigray, Inc. Röntgenreflexionsquelle mit hoher helligkeit
US10656105B2 (en) 2018-08-06 2020-05-19 Sigray, Inc. Talbot-lau x-ray source and interferometric system
US10962491B2 (en) 2018-09-04 2021-03-30 Sigray, Inc. System and method for x-ray fluorescence with filtering
WO2020051221A2 (en) 2018-09-07 2020-03-12 Sigray, Inc. System and method for depth-selectable x-ray analysis
US11152183B2 (en) 2019-07-15 2021-10-19 Sigray, Inc. X-ray source with rotating anode at atmospheric pressure
CN114902080A (zh) 2020-02-26 2022-08-12 深圳帧观德芯科技有限公司 成像系统及其操作方法
CN113764246B (zh) * 2020-06-03 2025-04-18 宁波伯锐锶电子束科技有限公司 一种显微镜
CN112213343B (zh) * 2020-12-03 2021-03-16 中国科学院自动化研究所 塑料条带承载生物超薄切片快速成像方法、系统、装置
CN118541772A (zh) 2022-01-13 2024-08-23 斯格瑞公司 用于生成高通量低能量x射线的微焦x射线源
US12360067B2 (en) 2022-03-02 2025-07-15 Sigray, Inc. X-ray fluorescence system and x-ray source with electrically insulative target material
US12181423B1 (en) 2023-09-07 2024-12-31 Sigray, Inc. Secondary image removal using high resolution x-ray transmission sources

Citations (4)

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WO2007141868A1 (ja) 2006-06-02 2007-12-13 Hitachi, Ltd. Ｘ線顕微鏡およびｘ線顕微方法
JP2015207559A (ja) 2014-04-18 2015-11-19 エフ・イ−・アイ・カンパニー 高アスペクト比ｘ線ターゲットおよびその使用
JP2016090486A (ja) 2014-11-07 2016-05-23 浜松ホトニクス株式会社 Ｘ線像撮像用ユニット、電子顕微鏡及び試料像取得方法
US20160351370A1 (en) 2013-09-19 2016-12-01 Sigray, Inc. Diverging x-ray sources using linear accumulation

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JPS5515250Y2 (enExample) * 1975-07-29 1980-04-08
US5044001A (en) * 1987-12-07 1991-08-27 Nanod Ynamics, Inc. Method and apparatus for investigating materials with X-rays
JPH03273200A (ja) * 1990-03-23 1991-12-04 Elionix Kk 端部放出型ｘ線顕微鏡
US5148462A (en) * 1991-04-08 1992-09-15 Moltech Corporation High efficiency X-ray anode sources
AUPQ831200A0 (en) * 2000-06-22 2000-07-13 X-Ray Technologies Pty Ltd X-ray micro-target source
FR2882886B1 (fr) * 2005-03-02 2007-11-23 Commissariat Energie Atomique Source monochromatique de rayons x et microscope a rayons x mettant en oeuvre une telle source
JP4954526B2 (ja) * 2005-10-07 2012-06-20 浜松ホトニクス株式会社 Ｘ線管
DE102005053386A1 (de) * 2005-11-07 2007-05-16 Comet Gmbh Nanofocus-Röntgenröhre
US7336760B2 (en) * 2006-07-28 2008-02-26 Varian Medical Systems Technologies, Inc. Methods, systems, and computer-program products to estimate scattered radiation in cone-beam computerized tomographic images and the like
US8068579B1 (en) * 2008-04-09 2011-11-29 Xradia, Inc. Process for examining mineral samples with X-ray microscope and projection systems
JP5317120B2 (ja) * 2009-05-22 2013-10-16 独立行政法人産業技術総合研究所 Ｘ線顕微鏡用試料収容セル、ｘ線顕微鏡、およびｘ線顕微鏡像の観察方法
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US20160351370A1 (en) 2013-09-19 2016-12-01 Sigray, Inc. Diverging x-ray sources using linear accumulation
JP2015207559A (ja) 2014-04-18 2015-11-19 エフ・イ−・アイ・カンパニー 高アスペクト比ｘ線ターゲットおよびその使用
JP2016090486A (ja) 2014-11-07 2016-05-23 浜松ホトニクス株式会社 Ｘ線像撮像用ユニット、電子顕微鏡及び試料像取得方法

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Publication number Publication date
CN109243947B (zh) 2023-05-02
US10746672B2 (en) 2020-08-18
JP2019021625A (ja) 2019-02-07
EP3428928A1 (en) 2019-01-16
CN109243947A (zh) 2019-01-18
US20190017942A1 (en) 2019-01-17

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