JP7036604B2 - 積層圧電セラミック部品及び圧電デバイス - Google Patents

積層圧電セラミック部品及び圧電デバイス Download PDF

Info

Publication number
JP7036604B2
JP7036604B2 JP2018013962A JP2018013962A JP7036604B2 JP 7036604 B2 JP7036604 B2 JP 7036604B2 JP 2018013962 A JP2018013962 A JP 2018013962A JP 2018013962 A JP2018013962 A JP 2018013962A JP 7036604 B2 JP7036604 B2 JP 7036604B2
Authority
JP
Japan
Prior art keywords
internal electrode
piezoelectric ceramic
electrode
face
ceramic body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2018013962A
Other languages
English (en)
Japanese (ja)
Other versions
JP2019134035A (ja
JP2019134035A5 (enExample
Inventor
隆幸 後藤
寛之 清水
純明 岸本
幸宏 小西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Taiyo Yuden Co Ltd
Original Assignee
Taiyo Yuden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiyo Yuden Co Ltd filed Critical Taiyo Yuden Co Ltd
Priority to JP2018013962A priority Critical patent/JP7036604B2/ja
Priority to US16/258,376 priority patent/US11362261B2/en
Priority to CN201910090497.3A priority patent/CN110098316B/zh
Publication of JP2019134035A publication Critical patent/JP2019134035A/ja
Publication of JP2019134035A5 publication Critical patent/JP2019134035A5/ja
Application granted granted Critical
Publication of JP7036604B2 publication Critical patent/JP7036604B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/085—Shaping or machining of piezoelectric or electrostrictive bodies by machining
    • H10N30/088—Shaping or machining of piezoelectric or electrostrictive bodies by machining by cutting or dicing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings
    • H10N30/883—Additional insulation means preventing electrical, physical or chemical damage, e.g. protective coatings

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2018013962A 2018-01-30 2018-01-30 積層圧電セラミック部品及び圧電デバイス Active JP7036604B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2018013962A JP7036604B2 (ja) 2018-01-30 2018-01-30 積層圧電セラミック部品及び圧電デバイス
US16/258,376 US11362261B2 (en) 2018-01-30 2019-01-25 Multi-layer piezoelectric ceramic component and piezoelectric device
CN201910090497.3A CN110098316B (zh) 2018-01-30 2019-01-30 层叠压电陶瓷部件和压电器件

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018013962A JP7036604B2 (ja) 2018-01-30 2018-01-30 積層圧電セラミック部品及び圧電デバイス

Publications (3)

Publication Number Publication Date
JP2019134035A JP2019134035A (ja) 2019-08-08
JP2019134035A5 JP2019134035A5 (enExample) 2021-02-04
JP7036604B2 true JP7036604B2 (ja) 2022-03-15

Family

ID=67392402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018013962A Active JP7036604B2 (ja) 2018-01-30 2018-01-30 積層圧電セラミック部品及び圧電デバイス

Country Status (3)

Country Link
US (1) US11362261B2 (enExample)
JP (1) JP7036604B2 (enExample)
CN (1) CN110098316B (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7128628B2 (ja) * 2018-01-30 2022-08-31 太陽誘電株式会社 積層圧電セラミック部品及び圧電デバイス

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001085753A (ja) 1999-09-16 2001-03-30 Murata Mfg Co Ltd 圧電アクチュエータ
JP2002094134A (ja) 2000-09-14 2002-03-29 Ngk Insulators Ltd 薄型積層圧電／電歪素子および同積層圧電／電歪素子の製造方法
JP2002280630A (ja) 2001-03-06 2002-09-27 Ceramtec Ag Innov Ceramic Eng 圧電セラミック多層アクチュエーターおよびその製造方法
WO2006087871A1 (ja) 2005-02-15 2006-08-24 Murata Manufacturing Co., Ltd. 積層型圧電素子
JP2007150200A (ja) 2005-11-30 2007-06-14 Murata Mfg Co Ltd 電子部品の製造方法
JP2011066308A (ja) 2009-09-18 2011-03-31 Tdk Corp セラミック電子部品およびその製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61239682A (ja) * 1985-04-16 1986-10-24 Tohoku Metal Ind Ltd 積層型圧電バイモルフ素子の製造方法
JP3185226B2 (ja) * 1991-01-30 2001-07-09 株式会社村田製作所 圧電バイモルフ素子の駆動方法及び圧電バイモルフ素子
DE602004029076D1 (de) * 2003-10-27 2010-10-21 Kyocera Corp Mehrschichtiges piezoelektrisches bauelement
JP2007335485A (ja) * 2006-06-13 2007-12-27 Funai Electric Co Ltd 積層型圧電アクチュエータおよびその製造方法
JP5558577B2 (ja) 2011-10-03 2014-07-23 京セラ株式会社 圧電振動装置およびそれを用いた携帯端末

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001085753A (ja) 1999-09-16 2001-03-30 Murata Mfg Co Ltd 圧電アクチュエータ
JP2002094134A (ja) 2000-09-14 2002-03-29 Ngk Insulators Ltd 薄型積層圧電／電歪素子および同積層圧電／電歪素子の製造方法
JP2002280630A (ja) 2001-03-06 2002-09-27 Ceramtec Ag Innov Ceramic Eng 圧電セラミック多層アクチュエーターおよびその製造方法
WO2006087871A1 (ja) 2005-02-15 2006-08-24 Murata Manufacturing Co., Ltd. 積層型圧電素子
JP2007150200A (ja) 2005-11-30 2007-06-14 Murata Mfg Co Ltd 電子部品の製造方法
JP2011066308A (ja) 2009-09-18 2011-03-31 Tdk Corp セラミック電子部品およびその製造方法

Also Published As

Publication number Publication date
CN110098316A (zh) 2019-08-06
JP2019134035A (ja) 2019-08-08
US20190237656A1 (en) 2019-08-01
CN110098316B (zh) 2023-12-29
US11362261B2 (en) 2022-06-14

Similar Documents

Publication Publication Date Title
CN110098317B (zh) 层叠压电陶瓷部件和压电器件
US20070236107A1 (en) Stacked piezoelectric element and vibration wave driving apparatus
US10069440B2 (en) Vibrator and ultrasonic motor
JPH08242025A (ja) 圧電アクチュエータ
US11571712B2 (en) Vibration panel and electronic apparatus
JP7163570B2 (ja) 積層型圧電素子及び振動デバイス
JP7036604B2 (ja) 積層圧電セラミック部品及び圧電デバイス
CN110098315B (zh) 层叠压电陶瓷部件和压电器件
JP5429141B2 (ja) 圧電アクチュエータ及び圧電アクチュエータの製造方法
JP6998223B2 (ja) 圧電デバイス
JP6952393B2 (ja) 圧電アクチュエータ
JP3535111B2 (ja) 圧電アクチュエータ
JP4673418B2 (ja) 振動式搬送装置
JP7158151B2 (ja) 積層圧電セラミック部品及び圧電デバイス
JP7087942B2 (ja) 振動デバイス、電子機器、及び、振動デバイスの駆動方法
JP2005287100A (ja) 圧電素子、圧電アクチュエータ及び圧電アクチュエータ装置
JP7003741B2 (ja) 振動デバイス及び圧電素子
JP7003415B2 (ja) 振動デバイス
JP6699740B2 (ja) 圧電発電装置
JP6772728B2 (ja) 圧電素子
JP7005913B2 (ja) 圧電素子
JP5589395B2 (ja) 圧電アクチュエータ
JP3853957B2 (ja) バイモルフ圧電素子
JP2003101093A (ja) 圧電アクチュエータ
JP2019134037A (ja) 積層圧電セラミック部品の製造方法、積層圧電セラミック部品及び圧電デバイス

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20201217

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20201217

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20210914

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20210916

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20211026

RD02 Notification of acceptance of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7422

Effective date: 20211026

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20211214

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220105

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20220215

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20220303

R150 Certificate of patent or registration of utility model

Ref document number: 7036604

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250