JP7028418B2 - 貫通孔を有するガラス基板製造方法および表示装置製造方法 - Google Patents
貫通孔を有するガラス基板製造方法および表示装置製造方法 Download PDFInfo
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- JP7028418B2 JP7028418B2 JP2020078019A JP2020078019A JP7028418B2 JP 7028418 B2 JP7028418 B2 JP 7028418B2 JP 2020078019 A JP2020078019 A JP 2020078019A JP 2020078019 A JP2020078019 A JP 2020078019A JP 7028418 B2 JP7028418 B2 JP 7028418B2
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- glass substrate
- main surface
- recess
- hole
- etching
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- 239000011521 glass Substances 0.000 title claims description 133
- 239000000758 substrate Substances 0.000 title claims description 117
- 238000000034 method Methods 0.000 title claims description 46
- 238000004519 manufacturing process Methods 0.000 title claims description 33
- 238000005530 etching Methods 0.000 claims description 71
- 239000010410 layer Substances 0.000 claims description 55
- 239000000463 material Substances 0.000 claims description 51
- 239000011241 protective layer Substances 0.000 claims description 15
- 230000004048 modification Effects 0.000 claims description 8
- 238000012986 modification Methods 0.000 claims description 8
- 238000010030 laminating Methods 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 239000002585 base Substances 0.000 description 48
- 239000004973 liquid crystal related substance Substances 0.000 description 26
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- 230000002093 peripheral effect Effects 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 3
- 239000003566 sealing material Substances 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000013532 laser treatment Methods 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910001182 Mo alloy Inorganic materials 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 1
- 239000002313 adhesive film Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000005354 aluminosilicate glass Substances 0.000 description 1
- 239000005388 borosilicate glass Substances 0.000 description 1
- 239000002041 carbon nanotube Substances 0.000 description 1
- 229910021393 carbon nanotube Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000007522 mineralic acids Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/02—Details
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/87—Passivation; Containers; Encapsulations
- H10K59/871—Self-supporting sealing arrangements
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Nonlinear Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Mathematical Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Optics & Photonics (AREA)
- Surface Treatment Of Glass (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Liquid Crystal (AREA)
- Electroluminescent Light Sources (AREA)
Description
12-貫通孔
20-第1の主面
22-第2の主面
24-改質領域
26-凹部
30-導電層
40-エッチング装置
50-液晶パネル
52-アレイ基板
54-カラーフィルタ基板
62-貫通孔
Claims (3)
- 貫通孔を有するガラス基板製造方法であって、
前記ガラス基板よりも板厚が厚いガラス母材の第1の主面において、貫通孔形成予定領域に、前記ガラス基板の板厚以上の深さの有底孔である凹部を形成する凹部形成ステップと、
前記凹部が、前記第1の主面と対向する第2の主面まで貫通するように前記ガラス母材の前記第2の主面を前記凹部の底面までエッチングする薄型化ステップと、
を少なくとも含み、
前記凹部形成ステップは、
レーザビームを照射することによって、前記第1の主面から前記深さまでエッチング液でエッチングされやすい性質を有する改質領域を形成する改質ステップと、
前記改質領域をエッチングするエッチングステップと、
を含むことを特徴とする貫通孔を有するガラス基板製造方法。 - 前記薄型化ステップの前に、少なくとも前記凹部を被覆する保護層を形成する基板処理ステップと、
をさらに含み、
前記薄型化ステップは、前記保護層が前記第2の主面側に露出するようにエッチングすることを特徴とする請求項1に記載の貫通孔を有するガラス基板製造方法。 - ガラス基板および前記ガラス基板と対向する対向基板を備える表示装置製造方法であって、
前記ガラス基板の第1の主面に凹部を形成する凹部形成ステップと、
少なくとも前記凹部に導電層を形成する導電層形成ステップと、
前記導電層形成ステップの後に前記ガラス基板の前記第1の主面が前記対向基板と対向するように前記ガラス基板と前記対向基板を貼り合わせる積層ステップと、
前記導電層が前記ガラス基板の第2の主面側に露出するように前記ガラス基板をエッチングする薄型化ステップと、
を含む表示装置製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020078019A JP7028418B2 (ja) | 2020-04-27 | 2020-04-27 | 貫通孔を有するガラス基板製造方法および表示装置製造方法 |
PCT/JP2021/016066 WO2021220890A1 (ja) | 2020-04-27 | 2021-04-20 | 貫通孔を有するガラス基板製造方法および表示装置製造方法 |
TW110114864A TW202209927A (zh) | 2020-04-27 | 2021-04-26 | 具有貫通孔的玻璃基板製造方法及顯示裝置製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020078019A JP7028418B2 (ja) | 2020-04-27 | 2020-04-27 | 貫通孔を有するガラス基板製造方法および表示装置製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021172562A JP2021172562A (ja) | 2021-11-01 |
JP7028418B2 true JP7028418B2 (ja) | 2022-03-02 |
Family
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JP2020078019A Active JP7028418B2 (ja) | 2020-04-27 | 2020-04-27 | 貫通孔を有するガラス基板製造方法および表示装置製造方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP7028418B2 (ja) |
TW (1) | TW202209927A (ja) |
WO (1) | WO2021220890A1 (ja) |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006290630A (ja) | 2005-02-23 | 2006-10-26 | Nippon Sheet Glass Co Ltd | レーザを用いたガラスの加工方法 |
JP2008209483A (ja) | 2007-02-23 | 2008-09-11 | Seiko Epson Corp | 電気光学装置の製造方法、及びガラス基板の製造方法 |
JP2013147404A (ja) | 2012-01-23 | 2013-08-01 | Kiso Micro Kk | 貫通穴付きガラス基板の製造方法 |
WO2016051781A1 (ja) | 2014-10-03 | 2016-04-07 | 日本板硝子株式会社 | 貫通電極付ガラス基板の製造方法及びガラス基板 |
JP2017190285A (ja) | 2016-04-06 | 2017-10-19 | 旭硝子株式会社 | 貫通孔を有するガラス基板の製造方法およびガラス基板に貫通孔を形成する方法 |
JP2018018007A (ja) | 2016-07-29 | 2018-02-01 | 株式会社ジャパンディスプレイ | 電子機器 |
JP2018024571A (ja) | 2016-08-05 | 2018-02-15 | 旭硝子株式会社 | 孔を有するガラス基板の製造方法 |
JP2018531205A (ja) | 2015-10-09 | 2018-10-25 | コーニング インコーポレイテッド | ビアを有するガラス系基板およびそれを形成するプロセス |
JP2019152706A (ja) | 2018-03-01 | 2019-09-12 | パナソニック液晶ディスプレイ株式会社 | 表示装置及び表示装置の製造方法 |
-
2020
- 2020-04-27 JP JP2020078019A patent/JP7028418B2/ja active Active
-
2021
- 2021-04-20 WO PCT/JP2021/016066 patent/WO2021220890A1/ja active Application Filing
- 2021-04-26 TW TW110114864A patent/TW202209927A/zh unknown
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006290630A (ja) | 2005-02-23 | 2006-10-26 | Nippon Sheet Glass Co Ltd | レーザを用いたガラスの加工方法 |
JP2008209483A (ja) | 2007-02-23 | 2008-09-11 | Seiko Epson Corp | 電気光学装置の製造方法、及びガラス基板の製造方法 |
JP2013147404A (ja) | 2012-01-23 | 2013-08-01 | Kiso Micro Kk | 貫通穴付きガラス基板の製造方法 |
WO2016051781A1 (ja) | 2014-10-03 | 2016-04-07 | 日本板硝子株式会社 | 貫通電極付ガラス基板の製造方法及びガラス基板 |
JP2018531205A (ja) | 2015-10-09 | 2018-10-25 | コーニング インコーポレイテッド | ビアを有するガラス系基板およびそれを形成するプロセス |
JP2017190285A (ja) | 2016-04-06 | 2017-10-19 | 旭硝子株式会社 | 貫通孔を有するガラス基板の製造方法およびガラス基板に貫通孔を形成する方法 |
JP2018018007A (ja) | 2016-07-29 | 2018-02-01 | 株式会社ジャパンディスプレイ | 電子機器 |
JP2018024571A (ja) | 2016-08-05 | 2018-02-15 | 旭硝子株式会社 | 孔を有するガラス基板の製造方法 |
JP2019152706A (ja) | 2018-03-01 | 2019-09-12 | パナソニック液晶ディスプレイ株式会社 | 表示装置及び表示装置の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2021172562A (ja) | 2021-11-01 |
TW202209927A (zh) | 2022-03-01 |
WO2021220890A1 (ja) | 2021-11-04 |
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