JP7009854B2 - 起動素子、スイッチング電源回路の制御ic及びスイッチング電源回路 - Google Patents
起動素子、スイッチング電源回路の制御ic及びスイッチング電源回路 Download PDFInfo
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Description
第1の実施の形態に係る半導体装置は高耐圧JFETであり、起動素子をなす半導体デバイスとしてスイッチング電源回路に含まれる起動回路に備えられる。第1の実施の形態に係る半導体装置は、図1に示すように、平面パターンで中央に円形状をなして設けられたn型のドレイン領域2を備える。ドレイン領域2の上にはドレイン領域2より高不純物密度のn型(n+)のドレインコンタクト領域3が設けられ、ドレインコンタクト領域3の上には円形状の入力パッド19がドレインコンタクト領域3に接続して設けられている。入力パッド19は図1中では点線で例示されている。
ドライバ回路75と、それぞれドライバ回路75に接続された発振器74、出力アンプ76、ラッチ回路77及びパルス幅変調コンパレータ78とを備える。ブラウンアウトコンパレータ73の反転入力端子には基準電源79が接続されている。
図9に示すように、第2の溝及びサージ電流誘導領域を設けることなく、いずれも同じ形状の第1の溝9a1,9a2,9a3の内側にソース領域7a,7b,7cを配置した高耐圧JFETを比較例に係る半導体装置として用意した。比較例に係る半導体装置においても、起動回路が動作を開始し、ソース領域7a,7b,7cの電位が一定値に上昇すると、第1の溝9a1,9a2,9a3のそれぞれの開口部において空乏層J同士が同時に接触してドリフト層4がピンチオフする。そしてドレイン領域2からソース領域7a,7b,7cへの電流はカットオフされる。
図6に示した半導体装置のサージ電流誘導領域5aが配置される第2の溝9bは、開口部の幅w2とほぼ同じ幅のU字の底部を有していた。しかし第1の実施の形態に係る半導体装置では、図11に示すように、第2の溝9b1は、U字の底部に対応する部分の幅w1が開口部の幅w2より広くてもよい。第1変形例に係る半導体装置では、第2の溝9b1は平面パターンで逆T字状又は壺型であり、第2の溝9b1のT字の横棒又は壺の底部の幅w1は、第1の溝9a1,9a2の開口部の幅w1と同じである。
第2の実施の形態に係る半導体装置は、第1の実施の形態に係る半導体装置と同様に、スイッチング電源回路に含まれる起動回路に備えられ、起動素子をなす高耐圧JFET85である。第1の実施の形態に係る半導体装置では、ゲート領域9に設ける第2の溝9bの開口部の幅を第1の溝9a1,9a2の開口部の幅より狭く調整することにより、サージ電流誘導領域5a2側の開口部をソース領域7a側の開口部がピンチオフするよりも先にピンチオフさせる。しかし第2の実施の形態に係る半導体装置は、ゲート領域9に設ける第2の溝9cの開口部の幅を調整することなく、第2の溝9cの開口部の周囲に「ピンチオフ誘導領域」を設けて、第1の溝9a1,9a2の開口部より先にピンチオフを誘導する点が、第1の実施の形態の場合と異なる。
図13に示すように、第2の実施の形態に係る半導体装置におけるピンチオフ誘導領域として、ドリフト層4及びサージ電流誘導領域5a3より低不純物密度のn--型の第2のn型領域23が設けられてもよい。
図14に示すように、第2の実施の形態に係る半導体装置におけるピンチオフ誘導領域は、ゲート領域9より高不純物密度のp+型の第1のp型領域24であってもよい。第2の溝9cの内側にはn型のサージ電流誘導領域5a4がドリフト層4及びゲート領域9と接して設けられている。サージ電流誘導領域5a4の上面上にはサージ電流誘導コンタクト領域6a4が設けられ、サージ電流誘導領域5a4はサージ電流誘導コンタクト領域6a4を介してグランド電位に接続されている。
図15に示すように、第2の実施の形態に係る半導体装置におけるピンチオフ誘導領域は、ドリフト層4の上部のサージ電流誘導領域5a,5bの近傍に設けられた、ゲート領域9より高不純物密度のp+型の第2のp型領域25a,25bであってもよい。図示を省略するが、ゲート領域9は図1に示したような第1の溝及び第2の溝を有し、第2の溝の内側にはn型のサージ電流誘導領域5a,5bがドリフト層4及びゲート領域9と接して設けられている。サージ電流誘導領域5a,5bの上面上にはサージ電流誘導コンタクト領域6a,6bが設けられ、サージ電流誘導領域5a,5bはサージ電流誘導コンタクト領域6a,6bを介してグランド電位に接続されている。
本発明は上記の第1及び第2の実施の形態によって説明したが、この開示の一部をなす論述及び図面は、本発明を限定するものであると理解すべきではない。本開示から当業者には様々な代替実施の形態、実施例及び運用技術が明らかになると考えられるべきである。
4…ドレインドリフト層(ドリフト層),
4a…第1のn型領域,
5a,5b…サージ電流誘導領域,
5a1~5a4…サージ電流誘導領域,
6a,6b…サージ電流誘導コンタクト領域,
6a1~6a4…サージ電流誘導コンタクト領域,
7a,7b…ソース領域, 8a,8b…ソースコンタクト領域,
9…ゲート領域, 9a1,9a2,9a3…第1の溝,
9b,9b1…第2の溝, 9c…第2の溝, 10…ゲートコンタクト領域,
11a~11c…素子分離膜, 12…ゲート電極, 13…第1層間絶縁膜,
14…抵抗素子, 15…ドレイン電極, 16a,16b…ソース電極,
17…ゲート電極配線, 18…第2層間絶縁膜, 19…入力パッド,
20a,20b…ソース配線, 21a,21b…サージ電流誘導電極,
22a,22b…サージ電流誘導配線,
23…第2のn型領域,
24…第1のp型領域,
25a,25b…第2のp型領域,
31a,31b…入力端子, 32…整流器, 33…平滑コンデンサ,
34…トランス, 35…一次主コイル, 36…一次補助コイル,
37…二次コイル, 38…整流ダイオード, 39…出力コンデンサ,
40…抵抗, 41a,41b…出力端子, 42…フォトダイオード,
43…シャントレギュレータ, 44,45…抵抗, 46…整流ダイオード,
47…電源コンデンサ, 48…MOSFET, 49…抵抗,
50…コンデンサ, 51…フォトトランジスタ, 52…ダイオード,
60…制御IC, 61…高電圧入力端子, 62…フィードバック端子,
63…電流センス端子, 64…電源端子, 65…ゲート出力端子,
66…接地端子, 70…起動回路, 71…低電圧停止回路,
72…レギュレータ, 73…ブラウンアウトコンパレータ, 74…発振器,
75…ドライバ回路, 76…出力アンプ, 77…ラッチ回路,
78…パルス幅変調コンパレータ, 79…基準電源, 81…高電圧入力端子,
82…ブラウンアウト端子, 83…オン・オフ信号入力端子, 84…電源端子,
85…高耐圧JFET, 85a…第1JFET部, 85b…第2JFET部,
85c…第3JFET部,
86…抵抗回路, 86a,86b…抵抗, 87…起動補助回路, 88…抵抗,
89…第1のP-MOSFET, 90…第1のN-MOSFET,
91…第2のP-MOSFET, 92…負荷, 93…第2のN-MOSFET,
94…抵抗,
J…空乏層
Claims (15)
- スイッチング電源回路の制御ICを起動するための起動素子であって、
第1導電型の半導体基板と、
前記半導体基板の上部に設けられた第2導電型のドレイン領域と、
前記半導体基板の上部に前記ドレイン領域と接して前記ドレイン領域を横方向で囲むように設けられた第2導電型のドリフト層と、
前記半導体基板の上部で前記ドリフト層の前記ドレイン領域と反対側となる外側に設けられ、前記ドレイン領域から等距離でそれぞれの開口部が位置し前記外側に向かって凹み、前記半導体基板の厚み方向に沿って延びる第1の溝及び第2の溝、を有するゲート領域と、
前記第1の溝の内側に、前記ドリフト層及び前記ゲート領域と接して設けられた第2導電型のソース領域と、
前記第2の溝の内側に、前記ドリフト層及び前記ゲート領域と接して設けられた第2導電型のサージ電流誘導領域と、
を備え、
前記ソース領域は前記制御ICの電源端子と電気的に接続され、
前記サージ電流誘導領域はグランド電位と電気的に接続される
起動素子。 - 前記第2の溝は一対の前記第1の溝に挟まれて設けられ、
前記ゲート領域と前記ソース領域とで形成されるpn接合に逆バイアスが印加されたときに、隣り合う前記第1の溝の間の前記第2の溝の開口部がピンチオフすることを特徴とする請求項1に記載の起動素子。 - 前記第2の溝の開口部の幅は、前記第1の溝の開口部の幅より狭く、
前記逆バイアスが印加されたときに前記第2の溝の開口部が、前記第1の溝の開口部よりも先にピンチオフすることを特徴とする請求項2に記載の起動素子。 - 前記サージ電流誘導領域の前記外側に向かう方向と垂直方向の幅は、前記第2の溝の開口部の幅より広いことを特徴とする請求項3に記載の起動素子。
- 前記第2の溝の周囲に、前記逆バイアスが印加されたときに前記第2の溝の開口部が前記第1の溝の開口部よりも先にピンチオフするように不純物密度が制御されたピンチオフ誘導領域を更に備えることを特徴とする請求項2~4のいずれか一項に記載の起動素子。
- 前記ドリフト層は、前記ソース領域及び前記サージ電流誘導領域より不純物密度が低く、前記第1の溝の内側に延在し、
前記ピンチオフ誘導領域として、前記第2の溝の開口部と前記サージ電流誘導領域との間に、前記第1の溝の内側の前記ドリフト層の領域よりも大きく、前記ドリフト層の不純物密度以下である第2導電型領域を有する、
ことを特徴とする請求項5に記載の起動素子。 - 前記ドリフト層は、前記ソース領域及び前記サージ電流誘導領域より不純物密度が低く、前記第1の溝の内側に延在し、
前記ピンチオフ誘導領域として、前記第2の溝の開口部と前記サージ電流誘導領域との間に、前記第2の溝の開口部から前記サージ電流誘導領域までの距離が、前記第1の溝の開口部から前記ソース領域までの距離よりも長く、前記ドリフト層の不純物密度以下である第2導電型領域を有することを特徴とする請求項5に記載の起動素子。 - 前記第2導電型領域は、前記ドリフト層であることを特徴とする請求項6又は7に記載の起動素子。
- 前記第2導電型領域は前記ドリフト層より不純物密度の低い領域であることを特徴とする請求項6又は7に記載の起動素子。
- 前記ピンチオフ誘導領域として、前記ドリフト層と前記ゲート領域の間であって、前記第2の溝の内壁の位置に設けられ、前記ゲート領域より不純物密度の高い第1の第1導電型領域を有することを特徴とする請求項5~9のいずれか一項に記載の起動素子。
- 前記ピンチオフ誘導領域として、前記ドリフト層の上部で前記サージ電流誘導領域の近傍に設けられた第2の第1導電型領域を有することを特徴とする請求項5~10のいずれか一項に記載の起動素子。
- 前記ゲート領域と電気的に接続するゲート配線と、前記ソース領域と電気的に接続するソース配線と、前記ドレイン領域と電気的に接続するドレイン配線と、前記サージ電流誘導領域と電気的に接続するサージ電流誘導電極とを備えることを特徴とする請求項1~11のいずれか一項に記載の起動素子。
- 前記ゲート配線と前記サージ電流誘導電極とが繋がっていることを特徴とする請求項12に記載の起動素子。
- 請求項1~13のいずれか一項に記載の起動素子を備えることを特徴とするスイッチング電源回路の制御IC。
- 請求項14に記載の制御ICを備えることを特徴とするスイッチング電源回路。
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008235612A (ja) | 2007-03-21 | 2008-10-02 | Denso Corp | 保護素子 |
WO2014203487A1 (ja) | 2013-06-20 | 2014-12-24 | 富士電機株式会社 | 半導体装置、スイッチング電源用制御icおよびスイッチング電源装置 |
JP2015135844A (ja) | 2014-01-16 | 2015-07-27 | 富士電機株式会社 | 接合型電界効果トランジスタ |
JP2016096176A (ja) | 2014-11-12 | 2016-05-26 | 富士電機株式会社 | 半導体装置 |
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US9893209B2 (en) * | 2010-12-02 | 2018-02-13 | Alpha And Omega Semiconductor Incorporated | Cascoded high voltage junction field effect transistor |
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US9460926B2 (en) * | 2014-06-30 | 2016-10-04 | Alpha And Omega Semiconductor Incorporated | Forming JFET and LDMOS transistor in monolithic power integrated circuit using deep diffusion regions |
CN107004605A (zh) * | 2014-12-18 | 2017-08-01 | 夏普株式会社 | 场效应晶体管 |
US10446695B2 (en) * | 2015-10-21 | 2019-10-15 | United Silicone Carbide, Inc. | Planar multi-implanted JFET |
JP6693805B2 (ja) * | 2016-05-17 | 2020-05-13 | ローム株式会社 | 半導体装置 |
US9966462B2 (en) * | 2016-07-12 | 2018-05-08 | Semiconductor Components Industries Llc | Guard rings for cascode gallium nitride devices |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
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WO2014203487A1 (ja) | 2013-06-20 | 2014-12-24 | 富士電機株式会社 | 半導体装置、スイッチング電源用制御icおよびスイッチング電源装置 |
JP2015135844A (ja) | 2014-01-16 | 2015-07-27 | 富士電機株式会社 | 接合型電界効果トランジスタ |
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