JP7007677B1 - Electronic component inspection equipment - Google Patents

Electronic component inspection equipment Download PDF

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JP7007677B1
JP7007677B1 JP2021039426A JP2021039426A JP7007677B1 JP 7007677 B1 JP7007677 B1 JP 7007677B1 JP 2021039426 A JP2021039426 A JP 2021039426A JP 2021039426 A JP2021039426 A JP 2021039426A JP 7007677 B1 JP7007677 B1 JP 7007677B1
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electronic component
measuring unit
temperature
transport
inspection
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JP2022139164A (en
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日出夫 南
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Ueno Seiki Co Ltd
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Ueno Seiki Co Ltd
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Priority to PCT/JP2022/009698 priority patent/WO2022191126A1/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/64Manufacture or treatment of solid state devices other than semiconductor devices, or of parts thereof, not peculiar to a single device provided for in groups H01L31/00 - H10K99/00

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  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

【課題】加熱又は冷却された電子部品を安定的に常温にすることが可能な電子部品検査装置を提供する。【解決手段】電子部品を加熱又は冷却してT1℃にした状態で検査する第1の測定ユニット11と、第1の測定ユニット11で検査された電子部品をT1℃とは異なるT2℃で検査する第2の測定ユニット12と、第1の測定ユニット11から与えられた電子部品を、第2の測定ユニット12に向けて搬送する搬送機構Pとを備え、搬送機構Pは、電子部品の温度を常温に近付ける温度調整手段pを有する。【選択図】図1PROBLEM TO BE SOLVED: To provide an electronic component inspection device capable of stably bringing a heated or cooled electronic component to room temperature. SOLUTION: A first measuring unit 11 inspecting an electronic component in a state of being heated or cooled to T1 ° C., and an electronic component inspected by the first measuring unit 11 are inspected at T2 ° C. different from T1 ° C. The second measuring unit 12 and the transport mechanism P for transporting the electronic component given from the first measuring unit 11 toward the second measuring unit 12 are provided, and the transport mechanism P is the temperature of the electronic component. Has a temperature adjusting means p that brings the temperature close to room temperature. [Selection diagram] Fig. 1

Description

本発明は、電子部品を検査する電子部品検査装置に関する。 The present invention relates to an electronic component inspection device for inspecting electronic components.

電子部品は、外観検査や電気特性検査等、所定の検査がなされる。電子部品の種類によっては、電子部品を所定の温度にした状態で検査することが求められ、その具体例が特許文献1に開示されている。
特許文献1に記載の検査装置は、電子部品を搬送する搬送装置の周辺に、電子部品を常温で検査(常温検査)する常温テストユニット及び電子部品を加熱して所定の温度にした状態で検査する高温検査を行う高温テストユニットを具備している。電子部品は、常温検査がなされた後、搬送装置で搬送され、高温検査がなされる。高温テストユニットは、加熱テーブル及び測定部を有し、加熱テーブルは、ポケット内に載置された電子部品を加熱源によって加熱しながら回転して、測定部による電子部品の測定位置で電子部品が所定の温度となるようにしている。
Electronic components are subjected to predetermined inspections such as visual inspections and electrical characteristic inspections. Depending on the type of electronic component, it is required to inspect the electronic component at a predetermined temperature, and a specific example thereof is disclosed in Patent Document 1.
The inspection device described in Patent Document 1 is an inspection device in which an electronic component is inspected at room temperature (normal temperature inspection) and a normal temperature test unit is heated around the transfer device for transporting the electronic component to a predetermined temperature. It is equipped with a high temperature test unit that performs high temperature inspection. After the electronic parts are inspected at room temperature, they are transported by a transport device and inspected at high temperature. The high temperature test unit has a heating table and a measuring unit, and the heating table rotates while heating the electronic component placed in the pocket by a heating source, and the electronic component is placed at the measurement position of the electronic component by the measuring unit. The temperature is set to a predetermined level.

特許第6075663号公報Japanese Patent No. 6075663

特許文献1の検査装置では、電子部品に対し常温検査及び高温検査を行っているが、電子部品によっては、常温検査及び高温検査に加えて、電子部品を低温状態で検査する低温検査が求められる。その場合に、例えば、高温検査の後に低温検査をするには、高温検査を終えた電子部品を低温検査位置まで搬送する前に電子部品の温度を所定値(常温)まで低下させる必要がある。 In the inspection device of Patent Document 1, normal temperature inspection and high temperature inspection are performed on electronic parts, but depending on the electronic parts, low temperature inspection for inspecting electronic parts in a low temperature state is required in addition to normal temperature inspection and high temperature inspection. .. In that case, for example, in order to perform a low temperature inspection after a high temperature inspection, it is necessary to lower the temperature of the electronic component to a predetermined value (normal temperature) before transporting the electronic component that has completed the high temperature inspection to the low temperature inspection position.

しかしながら、高温となった電子部品を搬送装置による常温雰囲気での搬送のみで常温に戻そうとすると、搬送装置による搬送時間を十分に長く確保しなければならず、常温に戻すための搬送距離が長くなって、装置の大型化を招くという課題があった。
本発明は、かかる事情に鑑みてなされるもので、加熱又は冷却された電子部品を安定的に常温にすることが可能な電子部品検査装置を提供することを目的とする。
However, if an attempt is made to return an electronic component that has become hot to normal temperature only by transporting it in a normal temperature atmosphere by a transport device, it is necessary to secure a sufficiently long transport time by the transport device, and the transport distance for returning to room temperature is long. There was a problem that the length became long and the size of the device was increased.
The present invention has been made in view of such circumstances, and an object of the present invention is to provide an electronic component inspection apparatus capable of stably bringing a heated or cooled electronic component to room temperature.

前記目的に沿う発明に係る電子部品検査装置は、電子部品を加熱又は冷却してT1℃にした状態で検査する第1の測定ユニットと、前記第1の測定ユニットで検査された前記電子部品を前記T1℃とは異なるT2℃で検査する第2の測定ユニットと、前記第1の測定ユニットから与えられた前記電子部品を、前記第2の測定ユニットに向けて搬送する搬送機構Pとを備え、前記搬送機構Pは、前記電子部品に前記T1℃とは異なる温度の空気を吹き付けて該電子部品の温度を常温に近付けるエアー吹き付け手段と、それぞれ前記電子部品が同じ方向に移動する複数の電子部品搬送体と、該電子部品の移動方向に直交する方向に並列に配された該複数の電子部品搬送体を該電子部品の移動方向に直交する方向に移動させて、一の該電子部品搬送体の該電子部品の移動方向上流側端部を、前記第1の測定ユニットからの前記電子部品を取得可能な位置に配置する駆動手段とを備え The electronic component inspection apparatus according to the present invention according to the above object includes a first measuring unit that inspects an electronic component in a state where it is heated or cooled to T1 ° C., and the electronic component that is inspected by the first measuring unit. A second measuring unit for inspecting at T2 ° C. different from T1 ° C., and a transport mechanism P for transporting the electronic component given from the first measuring unit toward the second measuring unit. The transport mechanism P includes an air blowing means for blowing air having a temperature different from T1 ° C. onto the electronic component to bring the temperature of the electronic component close to room temperature, and a plurality of electronic components moving in the same direction. An electronic component carrier and a plurality of electronic component carriers arranged in parallel in a direction orthogonal to the moving direction of the electronic component are moved in a direction orthogonal to the moving direction of the electronic component, and one electronic component is used. It is provided with a driving means for arranging the upstream end of the electronic component of the carrier in the moving direction at a position where the electronic component from the first measuring unit can be acquired .

本発明に係る電子部品検査装置は、第1の測定ユニットから与えられる電子部品を、第2の測定ユニットに向けて移動させる搬送機構Pが、電子部品の温度を常温に近付けるエアー吹き付け手段を有するので、加熱又は冷却された電子部品を安定的に常温にすることが可能である。 In the electronic component inspection device according to the present invention, the transport mechanism P for moving the electronic component given from the first measuring unit toward the second measuring unit provides an air blowing means for bringing the temperature of the electronic component close to room temperature. Since it has, it is possible to stably bring the heated or cooled electronic component to room temperature.

本発明の一実施の形態に係る電子部品検査装置の説明図である。It is explanatory drawing of the electronic component inspection apparatus which concerns on one Embodiment of this invention. 部品搬送ユニットの説明図である。It is explanatory drawing of the parts transfer unit. 搬送機構Pの電子部品搬送体の説明図である。It is explanatory drawing of the electronic component transport body of the transport mechanism P. 変形例に係る搬送機構の説明図である。It is explanatory drawing of the transport mechanism which concerns on the modification.

続いて、添付した図面を参照しつつ、本発明を具体化した実施の形態につき説明し、本発明の理解に供する。
図1に示すように、本発明の一実施の形態に係る電子部品検査装置10は、電子部品Wを加熱してT1℃にした状態で検査する第1の測定ユニットの一例である測定ユニット11と、測定ユニット11で検査された電子部品WをT1℃とは異なるT2℃で検査する第2の測定ユニットの一例である測定ユニット12と、測定ユニット11から与えられた電子部品Wを、測定ユニット12に向けて搬送する搬送機構Pを備えている。以下、詳細に説明する。
Subsequently, an embodiment embodying the present invention will be described with reference to the attached drawings, and the present invention will be understood.
As shown in FIG. 1, the electronic component inspection device 10 according to the embodiment of the present invention is a measurement unit 11 which is an example of a first measurement unit for inspecting an electronic component W in a state of being heated to T1 ° C. The measurement unit 12, which is an example of the second measurement unit that inspects the electronic component W inspected by the measurement unit 11 at T2 ° C different from T1 ° C, and the electronic component W given by the measurement unit 11 are measured. A transport mechanism P for transporting toward the unit 12 is provided. Hereinafter, it will be described in detail.

電子部品検査装置10の検査対象である電子部品Wは、例えば、ダイオード、トランジスタ、コンデンサ、インダクタ、IC(Integrated Circuit)である。本実施の形態では、電子部品Wが板状で平面視して矩形であるが、電子部品Wの形状は限定されない。 The electronic component W to be inspected by the electronic component inspection device 10 is, for example, a diode, a transistor, a capacitor, an inductor, and an IC (Integrated Circuit). In the present embodiment, the electronic component W is plate-shaped and rectangular in a plan view, but the shape of the electronic component W is not limited.

電子部品検査装置10は、図1に示すように、測定ユニット11、12及び搬送機構Pに加えて、電子部品Wを測定ユニット11に搬送し、測定ユニット11から取得して、搬送機構Pに向けて移動させる部品搬送ユニット14と、搬送機構Pを通過した電子部品Wを測定ユニット12に搬送し、測定ユニット12から取得する部品搬送ユニット15を備えている。 As shown in FIG. 1, the electronic component inspection device 10 conveys the electronic component W to the measurement unit 11 in addition to the measurement units 11 and 12 and the transfer mechanism P, acquires the electronic component W from the measurement unit 11, and transfers the electronic component W to the transfer mechanism P. It includes a component transfer unit 14 that moves toward the measurement unit 14, and a component transfer unit 15 that transfers the electronic component W that has passed through the transfer mechanism P to the measurement unit 12 and acquires it from the measurement unit 12.

これに加えて、電子部品検査装置10は、部品搬送ユニット15が測定ユニット12から取得した電子部品Wを部品搬送ユニット15から得て搬送する搬送機構Qと、搬送機構Qを通過した電子部品Wを搬送する部品搬送ユニット17と、部品搬送ユニット17によって搬送された電子部品WをT3℃の状態で検査して部品搬送ユニット17に戻す第3の測定ユニットの一例である測定ユニット18を具備している。但し、T3℃は、T1℃及びT2℃の双方と異なる温度である。本実施の形態では、T1>T3>T2であり、T1℃が常温(加熱したり冷却したりしない自然の温度)より高い温度(例えば、100℃以上200℃以下)、T2℃が常温より低い温度(例えば、-80℃以上-20℃以下)、T3℃が常温(例えば、0℃以上40℃以下)である。 In addition to this, in the electronic component inspection device 10, the electronic component inspection device 10 obtains the electronic component W acquired from the measurement unit 12 by the component transfer unit 15 from the component transfer unit 15 and conveys the electronic component W, and the electronic component W that has passed through the transfer mechanism Q. A measuring unit 18 which is an example of a third measuring unit for inspecting the electronic component W transported by the component transporting unit 17 at T3 ° C. and returning the electronic component W to the component transporting unit 17 is provided. ing. However, T3 ° C is a temperature different from both T1 ° C and T2 ° C. In the present embodiment, T1> T3> T2, T1 ° C is higher than normal temperature (natural temperature without heating or cooling) (for example, 100 ° C or higher and 200 ° C or lower), and T2 ° C is lower than normal temperature. The temperature (for example, −80 ° C. or higher and −20 ° C. or lower) and T3 ° C. are normal temperatures (for example, 0 ° C. or higher and 40 ° C. or lower).

従って、部品搬送ユニット14、搬送機構P、部品搬送ユニット15、搬送機構Q及び部品搬送ユニット17は、電子部品Wの搬送順に設けられている。
部品搬送ユニット14(部品搬送ユニット15、17についても同様)は、図1、図2に示すように、鉛直配置された回転軸19を中心に回転する水平配置された円盤状の回転体20と、回転体20にそれぞれ連結され、放射状に配された複数のアーム21と、各アーム21に昇降可能に取り付けられた鉛直方向に長いノズル22と、回転体20を各アーム21及び各ノズル22と共に間欠的に回転させるモータ23を有している。
Therefore, the component transfer unit 14, the transfer mechanism P, the component transfer unit 15, the transfer mechanism Q, and the component transfer unit 17 are provided in the order of transfer of the electronic component W.
As shown in FIGS. 1 and 2, the parts transfer unit 14 (the same applies to the parts transfer units 15 and 17) is a horizontally arranged disk-shaped rotating body 20 that rotates around a vertically arranged rotation shaft 19. , A plurality of arms 21 connected to the rotating body 20 and arranged radially, a vertically long nozzle 22 attached to each arm 21 so as to be able to move up and down, and a rotating body 20 together with each arm 21 and each nozzle 22. It has a motor 23 that rotates intermittently.

ノズル22は、下端部で電子部品Wを吸着可能であり、モータ23の作動に伴う回転軸19を中心とした回転と一時停止を繰り返して、吸着している電子部品Wを搬送する。アーム21及びノズル22の停止位置のいつくかには、図2に示すように、アーム21の停止位置の上方に、支持体24によって水平に支持された円盤状の板材25の外周に固定された複数の支持部材26と、支持部材26に昇降自在に取り付けられた可動体28が設けられている。 The nozzle 22 can attract the electronic component W at the lower end portion, and repeatedly rotates and pauses around the rotation shaft 19 accompanying the operation of the motor 23 to convey the attracted electronic component W. As shown in FIG. 2, some of the stop positions of the arm 21 and the nozzle 22 were fixed to the outer periphery of the disk-shaped plate 25 horizontally supported by the support 24 above the stop position of the arm 21. A plurality of support members 26 and a movable body 28 attached to the support member 26 so as to be able to move up and down are provided.

各可動体28は、支持部材26に固定されているモータ29の作動によって下降して、ノズル22に接触しノズル22を押し下げる。支持部材26には下降した可動体28を上昇させるコイルばね30が取り付けられ、ノズル22には下降したノズル22を上昇させるコイルばね31が装着されている。なお、図2においては、アーム21、ノズル22及びコイルばね31を2組のみ記載し、他のアーム21、ノズル22及びコイルばね31の記載を省略している。また、図2では、支持部材26、可動体28、モータ29及びコイルばね30を1つずつ記載しているが、本実施の形態では、これらが複数個ずつ設けられている。 Each movable body 28 descends by the operation of the motor 29 fixed to the support member 26, comes into contact with the nozzle 22, and pushes down the nozzle 22. A coil spring 30 for raising the lowered movable body 28 is attached to the support member 26, and a coil spring 31 for raising the lowered nozzle 22 is attached to the nozzle 22. In FIG. 2, only two sets of the arm 21, the nozzle 22, and the coil spring 31 are described, and the description of the other arm 21, the nozzle 22, and the coil spring 31 is omitted. Further, in FIG. 2, the support member 26, the movable body 28, the motor 29, and the coil spring 30 are shown one by one, but in the present embodiment, a plurality of these are provided.

上方に可動体28が設けられたノズル22の停止位置の1つには下方に、図1、図2に示すように、測定ユニット11が具備する回転テーブル32が配され、当該ノズル22の停止位置と回転テーブル32の間には、ノズル22に吸着されている電子部品Wを取得して、回転テーブル32に形成されたポケット33に電子部品Wを収めるロータリー機34が設けられている。なお、図1では、ロータリー機34及びロータリー機34と同一の設計の他のロータリー機の記載を省略している。 As shown in FIGS. 1 and 2, a rotary table 32 provided in the measuring unit 11 is arranged below one of the stop positions of the nozzle 22 provided with the movable body 28 above, and the nozzle 22 is stopped. Between the position and the rotary table 32, a rotary machine 34 is provided that acquires the electronic component W adsorbed on the nozzle 22 and stores the electronic component W in the pocket 33 formed in the rotary table 32. In addition, in FIG. 1, the description of the rotary machine 34 and another rotary machine having the same design as the rotary machine 34 is omitted.

ロータリー機34は、図2に示すように、図示しない支持体に取り付けられた水平な回転軸35を中心に回転する円盤状の回転体36と、回転体36に固定された複数のアーム37にそれぞれ取り付けられた複数のチャック38を備えている。回転体36の半径方向に長い各チャック38は、回転体36を中心に放射状に配置され、回転体36に対し回転体36の半径方向に進退可能である。等ピッチで配置された各チャック38は、吸引力により一端部(回転体36の中心から遠い側の端部)で電子部品Wを吸着することができる。 As shown in FIG. 2, the rotary machine 34 has a disk-shaped rotating body 36 that rotates about a horizontal rotating shaft 35 attached to a support (not shown) and a plurality of arms 37 fixed to the rotating body 36. Each has a plurality of attached chucks 38. Each chuck 38 long in the radial direction of the rotating body 36 is arranged radially around the rotating body 36, and can move forward and backward in the radial direction of the rotating body 36 with respect to the rotating body 36. Each chuck 38 arranged at an equal pitch can attract the electronic component W at one end (the end far from the center of the rotating body 36) by the suction force.

回転体36は、図示しないモータの作動によって間欠的に回転し、チャック38の配置ピッチ分の回転と一時停止とを繰り返す。チャック38は、12時の位置で、下降状態のノズル22から電子部品Wを取得し、6時位置で、図示しないモータの駆動力を与えられて下降し、回転テーブル32のポケット33内に電子部品Wを入れる。下降したチャック38は、コイルばね39によって上昇する。 The rotating body 36 is intermittently rotated by the operation of a motor (not shown), and repeats rotation and pause by the arrangement pitch of the chuck 38. At the 12 o'clock position, the chuck 38 acquires the electronic component W from the nozzle 22 in the descending state, and at the 6 o'clock position, the chuck 38 is given a driving force of a motor (not shown) and descends, and electronically enters the pocket 33 of the rotary table 32. Insert the part W. The lowered chuck 38 is raised by the coil spring 39.

測定ユニット11は、図1に示すように、鉛直に配された回転軸32aを中心に間欠的に回転する回転テーブル32に加え、回転テーブル32のポケット33に収容された電子部品Wを検査(本実施の形態では、電気特性検査)する検査手段40を具備している。回転テーブル32にはヒータ27が設けられ、ヒータ27は、ポケット33内の電子部品Wを、検査手段40による検査が行われる位置に搬送されるまでに所定の温度(T1℃)まで加熱する。 As shown in FIG. 1, the measuring unit 11 inspects the electronic component W housed in the pocket 33 of the rotary table 32 in addition to the rotary table 32 that rotates intermittently around the rotary shaft 32a arranged vertically (as shown in FIG. 1). In the present embodiment, the inspection means 40 for (electrical characteristic inspection) is provided. A heater 27 is provided on the rotary table 32, and the heater 27 heats the electronic component W in the pocket 33 to a predetermined temperature (T1 ° C.) before being transported to a position where the inspection by the inspection means 40 is performed.

検査手段40による検査が完了した電子部品Wは、回転テーブル32の回転によって、チャック38の直下まで移動し、チャック38に吸着される。
回転テーブル32から電子部品Wを取得したチャック38は12時位置まで移動し、上昇位置に配されていたノズル22が下降して、12時位置に配されたチャック38から電子部品Wを取得し吸着する。
The electronic component W that has been inspected by the inspection means 40 moves to just below the chuck 38 by the rotation of the rotary table 32, and is attracted to the chuck 38.
The chuck 38 that has acquired the electronic component W from the rotary table 32 moves to the 12 o'clock position, the nozzle 22 arranged at the ascending position descends, and the electronic component W is acquired from the chuck 38 arranged at the 12 o'clock position. Adsorb.

ノズル22に吸着された電子部品Wは、モータ23の作動によりノズル22と共に移動して、ロータリー機34と同じ設計のロータリー機が設けられた位置まで常温雰囲気で搬送され、当該ロータリー機に与えられる。なお、ロータリー機34とは異なる設計の機構を用いて、部品搬送ユニット14及び測定ユニット11間の電子部品Wの受け渡しを行うようにしてもよいことや、部品搬送ユニット14のノズル22が、回転テーブル32のポケット33に電子部品Wを直接投入し、回転テーブル32のポケット33から電子部品Wを直接取得するようにしてもよいことは言うまでもない。 The electronic component W adsorbed on the nozzle 22 moves together with the nozzle 22 by the operation of the motor 23, is conveyed to the position where the rotary machine having the same design as the rotary machine 34 is provided, and is given to the rotary machine. .. It should be noted that the electronic component W may be transferred between the component transfer unit 14 and the measurement unit 11 by using a mechanism having a design different from that of the rotary machine 34, and the nozzle 22 of the component transfer unit 14 rotates. Needless to say, the electronic component W may be directly inserted into the pocket 33 of the table 32, and the electronic component W may be directly acquired from the pocket 33 of the rotary table 32.

ノズル22から電子部品Wを取得したロータリー機は、電子部品Wを、図3に示す、搬送機構Pが有する部品中継手段41に与える。搬送機構P(搬送機構Qも同じ)は、図3に示すように、部品中継手段41に加えて、それぞれ部品中継手段41から電子部品Wが送られる複数(本実施の形態では、5個)の電子部品搬送体42と、各電子部品搬送体42を平行移動させるシフト手段43と、電子部品搬送体42から与えられる電子部品Wを部品搬送ユニット15に向けて送り出す部品送出手段44を備えている。 The rotary machine that has acquired the electronic component W from the nozzle 22 gives the electronic component W to the component relay means 41 of the transport mechanism P shown in FIG. As shown in FIG. 3, the transport mechanism P (same for the transport mechanism Q) has a plurality of electronic components W to be sent from the component relay means 41 in addition to the component relay means 41 (five in the present embodiment). 42, a shift means 43 for translating each electronic component carrier 42, and a component delivery means 44 for sending the electronic component W provided by the electronic component carrier 42 toward the component transfer unit 15. There is.

各電子部品搬送体42は、図1、図3に示すように、直線状であり、水平に設けられ、並列に配されている。各電子部品搬送体42の内側には、図3に示すように、電子部品Wが収められる搬送空間45、搬送空間45に連通した複数の空気流通路46及び各空気流通路46に連通した空気流入空間47が形成されている。搬送空間45は、電子部品搬送体42の長手方向に長く、電子部品搬送体42の長手方向両端で開口している。部品中継手段41から送り出される電子部品Wは、搬送空間45の上流側端部(長手方向一端部)から搬送空間45内に進入する。電子部品Wは、搬送空間45内に進入した時点で常温より高い温度である。 As shown in FIGS. 1 and 3, each electronic component carrier 42 is linear, is provided horizontally, and is arranged in parallel. Inside each electronic component carrier 42, as shown in FIG. 3, a transport space 45 in which the electronic component W is housed, a plurality of air flow passages 46 communicating with the transport space 45, and air communicating with each air flow passage 46. The inflow space 47 is formed. The transport space 45 is long in the longitudinal direction of the electronic component transport body 42, and is open at both ends of the electronic component transport body 42 in the longitudinal direction. The electronic component W sent out from the component relay means 41 enters the transport space 45 from the upstream end (one end in the longitudinal direction) of the transport space 45. The temperature of the electronic component W is higher than normal temperature when it enters the transport space 45.

複数の空気流通路46は、それぞれ直線状であり、搬送空間45の下位置に設けられ、上端部が搬送空間45に連通し、下端部が空気流入空間47に連通している。各空気流通路46は上端部が下端部より部品送出手段44に近づくように傾斜している。
空気流通路46の下側に形成された空気流入空間47は、電子部品搬送体42の長手方向に長く、上側が各空気流通路46に連通している。
Each of the plurality of air flow passages 46 is linear and is provided at a position below the transport space 45, with an upper end portion communicating with the transport space 45 and a lower end portion communicating with the air inflow space 47. The upper end of each air flow passage 46 is inclined so as to be closer to the component delivery means 44 than the lower end.
The air inflow space 47 formed on the lower side of the air flow passage 46 is long in the longitudinal direction of the electronic component carrier 42, and the upper side communicates with each air flow passage 46.

搬送機構Pは、空気流入空間47に連通したチューブ48に接続されたエアー吹き付け手段(本実施の形態では、真空ポンプ)49を具備している。エアー吹き付け手段49は、チューブ48、空気流入空間47及び複数の空気流通路46を介して搬送空間45に常温の空気を送り込み、搬送空間45内の各電子部品WにT1℃未満の温度(本実施の形態では、常温)の空気を吹き付けて、各電子部品Wを搬送空間45の下流側端部(長手方向他端部)に向けて移動させると共に、常温の空気の吹き付けによって各電子部品Wの温度を常温に近付ける(本実施の形態では、60℃以上低下させる)。 The transport mechanism P includes an air blowing means (vacuum pump in this embodiment) 49 connected to a tube 48 communicating with the air inflow space 47. The air blowing means 49 sends air at room temperature to the transport space 45 via the tube 48, the air inflow space 47, and the plurality of air flow passages 46, and has a temperature of less than T1 ° C. (this) to each electronic component W in the transport space 45. In the embodiment, air at room temperature) is blown to move each electronic component W toward the downstream end portion (the other end in the longitudinal direction) of the transport space 45, and each electronic component W is blown with air at room temperature. The temperature of the above is brought close to normal temperature (in this embodiment, the temperature is lowered by 60 ° C. or more).

従って、本実施の形態では、搬送機構Pが、電子部品Wの温度を常温に近付ける(本実施の形態では、常温にする)温度調整手段pとして、エアー吹き付け手段49を有している。
ここで、電子部品搬送体42から部品送出手段44に移動した電子部品Wは、ロータリー機構34と同じ設計のロータリー機構及び部品搬送ユニット15を経て、測定ユニット12に搬送されることから(図1参照)、搬送機構Pは、エアー吹き付け手段49による電子部品Wへの空気の吹き付けを、電子部品Wの測定ユニット12に向けての移動にも利用する。
また、電子部品搬送体42は、搬送空間45内に配されている電子部品Wが搬送空間45から出ないように搬送空間45の下流側を閉じるストッパ50を有している。
Therefore, in the present embodiment, the transport mechanism P has the air blowing means 49 as the temperature adjusting means p for bringing the temperature of the electronic component W close to the normal temperature (in the present embodiment, the temperature is brought to the normal temperature).
Here, the electronic component W that has moved from the electronic component carrier 42 to the component delivery means 44 is conveyed to the measurement unit 12 via the rotary mechanism and the component transfer unit 15 having the same design as the rotary mechanism 34 (FIG. 1). (See), the transport mechanism P also uses the blowing of air to the electronic component W by the air blowing means 49 to move the electronic component W toward the measuring unit 12.
Further, the electronic component transport body 42 has a stopper 50 that closes the downstream side of the transport space 45 so that the electronic component W arranged in the transport space 45 does not come out of the transport space 45.

シフト手段43は、図3に示すように、それぞれ平面視して各電子部品搬送体42に直交して配された直線状のガイド51、52、ガイド51、52に対して平行な螺子軸53と、各電子部品搬送体42の下部に取り付けられ、ガイド51に沿って移動する可動ブロック54と、各電子部品搬送体42の下部に取り付けられ、ガイド52に沿って移動する可動ブロック55と、各電子部品搬送体42の下部に固定され、螺子軸53に装着されたナットブロック56と、螺子軸53を回転駆動させる駆動手段57を備えている。 As shown in FIG. 3, the shift means 43 has a screw shaft 53 parallel to the linear guides 51, 52, guides 51, and 52 arranged orthogonally to each electronic component carrier 42 in a plan view. A movable block 54 attached to the lower part of each electronic component carrier 42 and moving along the guide 51, and a movable block 55 attached to the lower part of each electronic component carrier 42 and moving along the guide 52. It is provided with a nut block 56 fixed to the lower part of each electronic component carrier 42 and mounted on the screw shaft 53, and a driving means 57 for rotationally driving the screw shaft 53.

駆動手段57は、螺子軸53を時計回り及び反時計回りに回転させることができ、螺子軸53を回転させてナットブロック56を螺子軸53に沿って移動させる。各電子部品搬送体42は、ナットブロック56の移動に伴って、各可動ブロック54、55と共に各電子部品搬送体42の長手方向に直交する方向に移動(横移動)する。駆動手段57は、複数の電子部品搬送体42を移動させて、一の電子部品搬送体42の上流側端部を、部品中継手段41から電子部品Wが送り出される部品送り出し位置(即ち、測定ユニット11からの電子部品Wを取得可能な位置)に配置する。 The drive means 57 can rotate the screw shaft 53 clockwise and counterclockwise, and rotate the screw shaft 53 to move the nut block 56 along the screw shaft 53. Each electronic component carrier 42 moves (laterally moves) in a direction orthogonal to the longitudinal direction of each electronic component carrier 42 together with the movable blocks 54 and 55 as the nut block 56 moves. The drive means 57 moves a plurality of electronic component transport bodies 42, and moves the upstream end portion of one electronic component transport body 42 to a component delivery position (that is, a measurement unit) in which the electronic component W is sent out from the component relay means 41. The electronic component W from 11 is placed at a position where it can be acquired).

上流側端部が部品送り出し位置に配された電子部品搬送体42は、ストッパ50により搬送空間45の下流側が閉じられた状態で、部品中継手段41から電子部品Wが間欠的に搬送空間45に送られる。搬送空間45内に送られた電子部品Wは、エアー吹き付け手段49からの空気で搬送空間45内を移動する。一の電子部品搬送体42の搬送空間45内のストッパ50より上流側が電子部品Wで満たされるタイミングで、駆動手段57の作動により各電子部品搬送体42が移動して、他の電子部品搬送体42の上流側端部が、部品送り出し位置に配され、当該電子部品搬送体42の搬送空間45内に部品中継手段41から電子部品Wが送られる。 In the electronic component carrier 42 whose upstream end is arranged at the component delivery position, the electronic component W is intermittently transferred from the component relay means 41 to the transport space 45 in a state where the downstream side of the transport space 45 is closed by the stopper 50. Sent. The electronic component W sent into the transport space 45 moves in the transport space 45 by the air from the air blowing means 49. At the timing when the upstream side of the stopper 50 in the transport space 45 of one electronic component carrier 42 is filled with the electronic component W, each electronic component carrier 42 is moved by the operation of the drive means 57, and the other electronic component carrier 42 is moved. The upstream end of the 42 is arranged at the component feeding position, and the electronic component W is fed from the component relay means 41 into the transport space 45 of the electronic component carrier 42.

この処理を、全ての電子部品搬送体42の搬送空間45のストッパ50より上流側が電子部品Wで満たされるまで繰り返す。この間、各電子部品搬送体42の搬送空間45内の電子部品Wには、搬送空間45に送られるエアー吹き付け手段49からの空気による冷却が続けられている。その後、最初に部品中継手段41から電子部品Wが搬送空間45に送られた電子部品搬送体42を下流側端部が部品送り出し位置に配された状態にし、当該電子部品搬送体42のストッパ50を開けて、搬送空間45の下流側端部から部品送出手段44に電子部品Wが送り出されるようにする。電子部品Wは、空気の吹き付けによって、搬送空間45の下流側端部から送り出されるまでに常温になっている。 This process is repeated until the upstream side of the stopper 50 of the transport space 45 of all the electronic component transport bodies 42 is filled with the electronic component W. During this time, the electronic components W in the transport space 45 of each electronic component transport body 42 continue to be cooled by the air from the air blowing means 49 sent to the transport space 45. After that, the electronic component carrier 42 in which the electronic component W is first sent from the component relay means 41 to the transport space 45 is placed in a state where the downstream end is arranged at the component delivery position, and the stopper 50 of the electronic component carrier 42 is placed. Is opened so that the electronic component W is sent out from the downstream end of the transport space 45 to the component sending means 44. The electronic component W has reached room temperature by the time it is sent out from the downstream end of the transport space 45 by blowing air.

このように、電子部品搬送体42を並列に配置することによって、1つの電子部品搬送体の搬送距離を長くすることなく、電子部品Wを常温に近付ける(電子部品Wの温度を所定値以上低下又は上昇させる)ための搬送時間を確保可能であり、電子部品Wを常温に近付けるために電子部品検査装置が大型化になるのを防ぐことができる。 By arranging the electronic component carriers 42 in parallel in this way, the electronic component W is brought closer to room temperature without lengthening the transport distance of one electronic component carrier (the temperature of the electronic component W is lowered by a predetermined value or more). It is possible to secure a transport time for raising the size of the electronic component W, and it is possible to prevent the electronic component inspection device from becoming large in size because the electronic component W is brought close to room temperature.

搬送空間45から部品送出手段44に送り出された電子部品Wは、図1に示すように、ロータリー機34と同じ設計のロータリー機、部品搬送ユニット15、及び、ロータリー機34と同じ設計のロータリー機を経て、測定ユニット12に搬送される。測定ユニット12は、ポケット59が等ピッチで形成された回転テーブル60と、ポケット59内の電子部品Wの電気特性検査を行う検査手段61を具備している。回転テーブル60は、ペルチェ素子62を有し、ポケット59内の電子部品Wを、検査手段61による検査が行われる位置に搬送するまでに所定の温度(T2℃)まで冷却する。 As shown in FIG. 1, the electronic component W sent out from the transport space 45 to the component delivery means 44 is a rotary machine having the same design as the rotary machine 34, a parts transfer unit 15, and a rotary machine having the same design as the rotary machine 34. Is conveyed to the measuring unit 12. The measuring unit 12 includes a rotary table 60 in which the pockets 59 are formed at equal pitches, and an inspection means 61 for inspecting the electrical characteristics of the electronic component W in the pocket 59. The rotary table 60 has a Pelche element 62, and cools the electronic component W in the pocket 59 to a predetermined temperature (T2 ° C.) before being transported to a position where the inspection by the inspection means 61 is performed.

ここで、ペルチェ素子62は、電子部品Wを常温状態から冷却することから、電子部品Wを常温より高い温度から冷却するのに比べて、検査手段61による検査が行われる位置に電子部品Wが搬送されるまでに、安定的に電子部品Wの温度を所定値まで下げることができる。検査手段61による検査を終えた電子部品Wは、回転テーブル60からロータリー機34と同じ設計のロータリー機経由で部品搬送ユニット15に戻され、ロータリー機34と同じ設計のロータリー機を経て搬送機構Qに搬送される。 Here, since the Pelche element 62 cools the electronic component W from a normal temperature state, the electronic component W is located at a position where the inspection by the inspection means 61 is performed, as compared with cooling the electronic component W from a temperature higher than the normal temperature. By the time it is transported, the temperature of the electronic component W can be stably lowered to a predetermined value. The electronic component W that has been inspected by the inspection means 61 is returned from the rotary table 60 to the component transfer unit 15 via the rotary machine having the same design as the rotary machine 34, and is returned to the component transfer unit 15 via the rotary machine having the same design as the rotary machine 34. Will be transported to.

搬送機構Qは、搬送機構Pと同じ設計であり、測定ユニット12からロータリー機、部品搬送ユニット15及びロータリー機を順に経て与えられる電子部品Wを常温に近付ける(本実施の形態では、電子部品Wの温度を20℃以上上昇させる)温度調整手段q(本実施の形態では、エアー吹き付け手段)を有している。搬送機構Qで常温に近付けられた(本実施の形態では、常温にされた)電子部品Wは、ロータリー機34と同じ設計のロータリー機を経由して部品搬送ユニット17に送られ、部品搬送ユニット17のノズル22に吸着された状態で、部品搬送ユニット17の近傍に設けられた測定ユニット18により、T3℃(本実施の形態では、常温)の状態で電気特性検査がなされる(即ち、測定ユニット18は、測定ユニット12による検査がなされた電子部品WをT3℃にした状態で検査する)。従って、搬送機構Qは、電子部品Wを測定ユニット18に向けて移動させることとなる。 The transport mechanism Q has the same design as the transport mechanism P, and brings the electronic component W given in this order from the measuring unit 12 through the rotary machine, the component transport unit 15, and the rotary machine closer to room temperature (in the present embodiment, the electronic component W). It has a temperature adjusting means q (air blowing means in this embodiment) (which raises the temperature of the above by 20 ° C. or more). The electronic component W brought close to room temperature by the transport mechanism Q (in this embodiment, brought to room temperature) is sent to the component transport unit 17 via a rotary machine having the same design as the rotary machine 34, and is sent to the component transport unit 17. The electrical characteristics are inspected (that is, measured) at T3 ° C. (in this embodiment, normal temperature) by the measuring unit 18 provided in the vicinity of the component transport unit 17 while being attracted to the nozzle 22 of the 17th. The unit 18 inspects the electronic component W inspected by the measuring unit 12 at T3 ° C.). Therefore, the transport mechanism Q moves the electronic component W toward the measurement unit 18.

以上、本発明の実施の形態を説明したが、本発明は、上記した形態に限定されるものでなく、要旨を逸脱しない条件の変更等は全て本発明の適用範囲である。
例えば、搬送機構P(搬送機構Qについても同じ)は、電子部品搬送体を1つのみ有するものであってもよい。搬送機構P(搬送機構Qについても同じ)が、複数の電子部品搬送体を有する場合、複数の電子部品搬送体は並列配置されている必要はない。また、図4に示すように、複数の電子部品搬送体64を軸心が水平配置された円柱状の回転体65の側面に取り付け、回転体65の回転によって、一の電子部品搬送体64を、第1の測定ユニットからの電子部品Wを取得可能な位置に配置するようにしてもよい。
電子部品搬送体は直線状に限定されず、例えば、円弧状であってもよい。
Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and all changes in conditions that do not deviate from the gist are within the scope of the present invention.
For example, the transport mechanism P (the same applies to the transport mechanism Q) may have only one electronic component transport body. When the transport mechanism P (the same applies to the transport mechanism Q) has a plurality of electronic component transport bodies, the plurality of electronic component transport bodies do not need to be arranged in parallel. Further, as shown in FIG. 4, a plurality of electronic component carriers 64 are attached to the side surfaces of a columnar rotating body 65 whose axes are horizontally arranged, and one electronic component carrier 64 is formed by the rotation of the rotating body 65. , The electronic component W from the first measuring unit may be arranged at a position where it can be acquired.
The electronic component carrier is not limited to a linear shape, and may be, for example, an arc shape.

また、温度調整手段p(温度調整手段qについても同じ)として、エアー吹き付け手段を採用する必要はなく、例えば、温度調整手段pに、図4に示すように、電子部品搬送体64に取り付けられたヒートシンク66を採用してもよい。即ち、温度調整手段p(温度調整手段qについても同じ)は、常温より高温状態又は低温状態にある電子部品Wを単に常温雰囲気で常温に近付けるものではなく、電子部品Wを積極的に放熱させて、あるいは、電子部品Wから積極的に吸熱して常温に近付けるものであればよい。 Further, it is not necessary to adopt an air blowing means as the temperature adjusting means p (the same applies to the temperature adjusting means q). For example, the temperature adjusting means p is attached to the electronic component carrier 64 as shown in FIG. The heat sink 66 may be adopted. That is, the temperature adjusting means p (the same applies to the temperature adjusting means q) does not simply bring the electronic component W, which is in a state higher or lower than normal temperature, close to normal temperature in a normal temperature atmosphere, but actively dissipates heat from the electronic component W. Alternatively, it may be any as long as it positively absorbs heat from the electronic component W and brings it close to room temperature.

更に、搬送機構P、Qは同一の設計でなくてもよく、第1、第2、第3の測定ユニットも同一の設計でなくてもよい。
第1の測定ユニット(第2、第3の測定ユニットについても同じ)は、前記実施の形態のものに限定されないのは言うまでもなく、例えば、ノズルが放射状に取り付けられた回転体が水平軸を中心に回転するものであってもよい。
Further, the transport mechanisms P and Q do not have to have the same design, and the first, second, and third measurement units do not have to have the same design.
Needless to say, the first measuring unit (the same applies to the second and third measuring units) is not limited to that of the above-described embodiment, and for example, a rotating body to which nozzles are radially attached is centered on a horizontal axis. It may rotate to.

そして、第1、第2、第3の測定ユニットは同一高さ位置に配されている必要はなく、例えば、第1の測定ユニットの直下に第2の測定ユニットを配置し、第2の測定ユニットの直下に第3の測定ユニットを配置してもよい。この場合、鉛直方向に長い電子部品搬送を有する搬送機構P、Qが採用される。 The first, second, and third measurement units do not have to be arranged at the same height position. For example, the second measurement unit is arranged directly under the first measurement unit, and the second measurement is performed. A third measuring unit may be arranged directly under the unit. In this case, transfer mechanisms P and Q having a long electronic component transfer in the vertical direction are adopted.

また、電子部品の検査をT1℃の状態とT2℃の状態とでのみで行えばよい場合、第3の測定ユニット及び搬送機構Qは省略される。この場合、例えば、T1℃>常温>T2℃のパターン、及び、T2℃>常温>T1℃のパターンが存在する。
この点、電子部品の検査をT1℃の状態、T2℃の状態及びT3℃の状態で行う場合、前記実施の形態のT1℃>T3℃(=常温)>T2℃のパターンに加えて、例えば、T2℃>T3℃(=常温)>T1℃のパターンが存在する。T2℃>T3℃(=常温)>T1℃のパターンの場合、第1の測定ユニットでは、電子部品を冷却してT1℃にした状態で検査する。また、エアー吹き付け手段が電子部品に吹き付ける空気をT1℃より高い温度とすることによって、電子部品を常温に近付けることができる。よって、エアー吹き付け手段はT1℃とは異なる温度の空気を電子部品に吹き付けて、電子部品を常温に近付けることとなる。
Further, when the inspection of the electronic component needs to be performed only in the state of T1 ° C. and the state of T2 ° C., the third measuring unit and the transport mechanism Q are omitted. In this case, for example, there is a pattern of T1 ° C> normal temperature> T2 ° C and a pattern of T2 ° C> normal temperature> T1 ° C.
In this regard, when the inspection of the electronic component is performed in the state of T1 ° C., the state of T2 ° C. and the state of T3 ° C., in addition to the pattern of T1 ° C.> T3 ° C. (= normal temperature)> T2 ° C. of the above embodiment, for example. , T2 ° C> T3 ° C (= normal temperature)> T1 ° C. In the case of the pattern of T2 ° C.> T3 ° C. (= normal temperature)> T1 ° C., in the first measuring unit, the electronic component is cooled and inspected at T1 ° C. Further, by setting the temperature of the air blown by the air blowing means to the electronic component to be higher than T1 ° C., the electronic component can be brought close to normal temperature. Therefore, the air blowing means blows air having a temperature different from T1 ° C. onto the electronic component to bring the electronic component closer to room temperature.

ここで、例えば、電子部品の搬送順に、常温検査用の測定ユニットa、搬送機構j、常温より高い温度での検査用の測定ユニットb、搬送機構k、常温より低い温度での計測用の測定ユニットcが設けられている場合、測定ユニットb、cがそれぞれ第1、第2の測定ユニットであり、搬送機構kが搬送機構Pとなり、測定ユニットaは第1、第2、第3の測定ユニットいずれにも該当せず、搬送機構jは搬送機構P、Qのいずれにも該当しない。 Here, for example, in the order of transporting the electronic parts, the measurement unit a for normal temperature inspection, the transport mechanism j, the measurement unit b for inspection at a temperature higher than normal temperature, the transport mechanism k, and the measurement for measurement at a temperature lower than normal temperature. When the unit c is provided, the measurement units b and c are the first and second measurement units, respectively, the transfer mechanism k is the transfer mechanism P, and the measurement unit a is the first, second, and third measurement units. It does not correspond to any of the units, and the transfer mechanism j does not correspond to any of the transfer mechanisms P and Q.

10:電子部品検査装置、11、12:測定ユニット、14、15:部品搬送ユニット、17:部品搬送ユニット、18:測定ユニット、19:回転軸、20:回転体、21:アーム、22:ノズル、23:モータ、24:支持体、25:板材、26:支持部材、27:ヒータ、28:可動体、29:モータ、30、31:コイルばね、32:回転テーブル、32a:回転軸、33:ポケット、34:ロータリー機、35:回転軸、36:回転体、37:アーム、38:チャック、39:コイルばね、40:検査手段、41:部品中継手段、42:電子部品搬送体、43:シフト手段、44:部品送出手段、45:搬送空間、46:空気流通路、47:空気流入空間、48:チューブ、49:エアー吹き付け手段、50:ストッパ、51、52:ガイド、53:螺子軸、54:可動ブロック、55:可動ブロック、56:ナットブロック、57:駆動手段、59:ポケット、60:回転テーブル、61:検査手段、62:ペルチェ素子、64:電子部品搬送体、65:回転体、66:ヒートシンク、P:搬送機構、Q:搬送機構、W:電子部品 10: Electronic component inspection device, 11, 12: Measuring unit, 14, 15: Parts transport unit, 17: Parts transport unit, 18: Measurement unit, 19: Rotating shaft, 20: Rotating body, 21: Arm, 22: Nozzle , 23: Motor, 24: Support, 25: Plate, 26: Support member, 27: Heater, 28: Movable body, 29: Motor, 30, 31: Coil spring, 32: Rotating table, 32a: Rotating shaft, 33 : Pocket, 34: Rotary machine, 35: Rotating shaft, 36: Rotating body, 37: Arm, 38: Chuck, 39: Coil spring, 40: Inspection means, 41: Parts relay means, 42: Electronic component carrier, 43 : Shift means, 44: Parts delivery means, 45: Transport space, 46: Air flow passage, 47: Air inflow space, 48: Tube, 49: Air blowing means, 50: Stopper, 51, 52: Guide, 53: Screw Shaft, 54: Movable block, 55: Movable block, 56: Nut block, 57: Drive means, 59: Pocket, 60: Rotating table, 61: Inspection means, 62: Pelche element, 64: Electronic component carrier, 65: Rotating body, 66: heat sink, P: transport mechanism, Q: transport mechanism, W: electronic component

Claims (2)

電子部品を加熱又は冷却してT1℃にした状態で検査する第1の測定ユニットと、
前記第1の測定ユニットで検査された前記電子部品を前記T1℃とは異なるT2℃で検査する第2の測定ユニットと、
前記第1の測定ユニットから与えられた前記電子部品を、前記第2の測定ユニットに向けて搬送する搬送機構Pとを備え、
前記搬送機構Pは、前記電子部品に前記T1℃とは異なる温度の空気を吹き付けて該電子部品の温度を常温に近付けるエアー吹き付け手段と、それぞれ前記電子部品が同じ方向に移動する複数の電子部品搬送体と、該電子部品の移動方向に直交する方向に並列に配された該複数の電子部品搬送体を該電子部品の移動方向に直交する方向に移動させて、一の該電子部品搬送体の該電子部品の移動方向上流側端部を、前記第1の測定ユニットからの前記電子部品を取得可能な位置に配置する駆動手段とを備えることを特徴とする電子部品検査装置。
The first measuring unit that inspects electronic components in a state where they are heated or cooled to T1 ° C.
A second measuring unit that inspects the electronic component inspected by the first measuring unit at a T2 ° C different from the T1 ° C.
The electronic component given from the first measuring unit is provided with a transport mechanism P for transporting the electronic component toward the second measuring unit.
The transport mechanism P includes an air blowing means for blowing air having a temperature different from T1 ° C. onto the electronic component to bring the temperature of the electronic component close to room temperature, and a plurality of electronic components in which the electronic component moves in the same direction. A carrier and a plurality of electronic component carriers arranged in parallel in a direction orthogonal to the moving direction of the electronic component are moved in a direction orthogonal to the moving direction of the electronic component, so that the electronic component carrier is one. An electronic component inspection apparatus comprising: a driving means for arranging an upstream end portion of the electronic component in a moving direction at a position where the electronic component from the first measuring unit can be acquired .
請求項1記載の電子部品検査装置において、前記エアー吹き付け手段は、空気の吹き付けを、該電子部品の前記第2の測定ユニットに向けての移動にも利用することを特徴とする電子部品検査装置。 In the electronic component inspection device according to claim 1, the air blowing means also uses the blowing of air toward the second measuring unit of the electronic component. ..
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