JP6997060B2 - 赤外線放射装置 - Google Patents
赤外線放射装置 Download PDFInfo
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- JP6997060B2 JP6997060B2 JP2018190005A JP2018190005A JP6997060B2 JP 6997060 B2 JP6997060 B2 JP 6997060B2 JP 2018190005 A JP2018190005 A JP 2018190005A JP 2018190005 A JP2018190005 A JP 2018190005A JP 6997060 B2 JP6997060 B2 JP 6997060B2
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- 230000005855 radiation Effects 0.000 claims description 134
- 239000004020 conductor Substances 0.000 claims description 85
- 238000009826 distribution Methods 0.000 claims description 16
- 230000020169 heat generation Effects 0.000 claims description 9
- 239000010410 layer Substances 0.000 description 118
- 239000000463 material Substances 0.000 description 25
- 238000010438 heat treatment Methods 0.000 description 21
- 239000000758 substrate Substances 0.000 description 21
- 229910052751 metal Inorganic materials 0.000 description 10
- 239000002184 metal Substances 0.000 description 10
- 238000007789 sealing Methods 0.000 description 8
- 239000012790 adhesive layer Substances 0.000 description 6
- 239000012298 atmosphere Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 230000000737 periodic effect Effects 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 238000012546 transfer Methods 0.000 description 4
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 3
- 238000009429 electrical wiring Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 229910001634 calcium fluoride Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 230000006837 decompression Effects 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 210000004907 gland Anatomy 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- BSYNRYMUTXBXSQ-UHFFFAOYSA-N Aspirin Chemical compound CC(=O)OC1=CC=CC=C1C(O)=O BSYNRYMUTXBXSQ-UHFFFAOYSA-N 0.000 description 1
- 229910004261 CaF 2 Inorganic materials 0.000 description 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910002060 Fe-Cr-Al alloy Inorganic materials 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- OYLGJCQECKOTOL-UHFFFAOYSA-L barium fluoride Chemical compound [F-].[F-].[Ba+2] OYLGJCQECKOTOL-UHFFFAOYSA-L 0.000 description 1
- 229910001632 barium fluoride Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000010436 fluorite Substances 0.000 description 1
- -1 gold and nickel Chemical class 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01K—ELECTRIC INCANDESCENT LAMPS
- H01K1/00—Details
- H01K1/28—Envelopes; Vessels
- H01K1/30—Envelopes; Vessels incorporating lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/002—Optical elements characterised by the material of which they are made; Optical coatings for optical elements made of materials engineered to provide properties not available in nature, e.g. metamaterials
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with infrared radiation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01K—ELECTRIC INCANDESCENT LAMPS
- H01K1/00—Details
- H01K1/02—Incandescent bodies
- H01K1/04—Incandescent bodies characterised by the material thereof
- H01K1/10—Bodies of metal or carbon combined with other substance
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01K—ELECTRIC INCANDESCENT LAMPS
- H01K1/00—Details
- H01K1/02—Incandescent bodies
- H01K1/16—Electric connection thereto
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01K—ELECTRIC INCANDESCENT LAMPS
- H01K1/00—Details
- H01K1/18—Mountings or supports for the incandescent body
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/0033—Heating devices using lamps
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/26—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
- G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/032—Heaters specially adapted for heating by radiation heating
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Radiation-Therapy Devices (AREA)
- Control Of Resistance Heating (AREA)
- Resistance Heating (AREA)
Description
発熱部と、前記発熱部から熱エネルギーを入力すると非プランク分布のピーク波長を有する赤外線を放射可能なメタマテリアル構造体と、を有する放射部と、
前記放射部から放射された赤外線を集光しつつ外部に向けて透過する集光レンズを1以上有する集光部と、
を備えたものである。
Claims (6)
- 発熱部と、前記発熱部から熱エネルギーを入力すると非プランク分布のピーク波長を有する赤外線を放射可能なメタマテリアル構造体と、を有する放射部と、
前記放射部から放射された赤外線を集光しつつ外部に向けて透過する集光レンズを1以上有する集光部と、
前記放射部から放射された赤外線を前記集光部に反射する反射体と、
を備え、
前記反射体は、前記放射部から見て前記集光部とは反対側を覆い、且つ該反射体の端部が該放射部よりも前記集光部側まで延びていることで、該反射体の内側に該放射部が位置するように配置され、
前記集光レンズは、前記反射体の外側に位置し、
前記放射部と前記集光部との並び方向に沿って見たときに前記放射部は前記集光レンズの内側に含まれている、
赤外線放射装置。 - 前記メタマテリアル構造体は、第1放射面から前記赤外線を放射する第1メタマテリアル構造体と、第2放射面から前記赤外線を放射する第2メタマテリアル構造体と、を有し、
前記反射体、前記第2メタマテリアル構造体,前記発熱部,前記第1メタマテリアル構造体,及び前記集光部はこの順に配置されている、
請求項1に記載の赤外線放射装置。 - 前記メタマテリアル構造体は、第1放射面から前記赤外線を放射する第1メタマテリアル構造体と、第2放射面から前記赤外線を放射する第2メタマテリアル構造体と、を有し、
前記第1メタマテリアル構造体,前記発熱部,及び前記第2メタマテリアル構造体は、前記放射部と前記集光部との並び方向に垂直な方向にこの順で配置されており、
前記反射体は、前記第1,第2メタマテリアル構造体を両側から挟むように配置されている、
請求項1に記載の赤外線放射装置。 - 前記1以上の集光レンズは、いずれも、前記放射部側から平行光が入射した場合の焦点距離が100mm以上である、
請求項1~3のいずれか1項に記載の赤外線放射装置。 - 前記メタマテリアル構造体は、前記発熱部側から順に、第1導体層と、該第1導体層に接合された誘電体層と、各々が前記誘電体層に接合され互いに離間して周期的に配置された複数の個別導体層を有する第2導体層と、を備える、
請求項1~4のいずれか1項に記載の赤外線放射装置。 - 前記メタマテリアル構造体は、少なくとも表面が導体からなり互いに離間して周期的に配置された複数のマイクロキャビティを備える、
請求項1~4のいずれか1項に記載の赤外線放射装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018190005A JP6997060B2 (ja) | 2018-10-05 | 2018-10-05 | 赤外線放射装置 |
US16/577,270 US11710628B2 (en) | 2018-10-05 | 2019-09-20 | Infrared light radiation device |
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---|---|---|---|
JP2018190005A JP6997060B2 (ja) | 2018-10-05 | 2018-10-05 | 赤外線放射装置 |
Publications (2)
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JP2020061214A JP2020061214A (ja) | 2020-04-16 |
JP6997060B2 true JP6997060B2 (ja) | 2022-01-17 |
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Country Status (2)
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US (1) | US11710628B2 (ja) |
JP (1) | JP6997060B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP6997060B2 (ja) * | 2018-10-05 | 2022-01-17 | 日本碍子株式会社 | 赤外線放射装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010157381A (ja) | 2008-12-26 | 2010-07-15 | Helios Techno Holding Co Ltd | 発光装置 |
JP2014149976A (ja) | 2013-02-01 | 2014-08-21 | Panasonic Corp | 赤外光源素子 |
WO2018079386A1 (ja) | 2016-10-24 | 2018-05-03 | 日本碍子株式会社 | 赤外線ヒーター |
Family Cites Families (20)
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US2045564A (en) * | 1933-06-24 | 1936-06-30 | William L Bear | Nonglare reflector |
US3167258A (en) * | 1961-05-23 | 1965-01-26 | Earl G Wilde | Light fixture |
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US7300177B2 (en) * | 2004-02-11 | 2007-11-27 | 3M Innovative Properties | Illumination system having a plurality of light source modules disposed in an array with a non-radially symmetrical aperture |
US7196460B2 (en) * | 2004-07-01 | 2007-03-27 | Osram Sylvania Inc. | Incandescent reflector heat lamp with uniform irradiance |
US20070081248A1 (en) * | 2005-10-11 | 2007-04-12 | Kuohua Wu | Reflector |
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JP2015198063A (ja) * | 2014-04-03 | 2015-11-09 | 日本碍子株式会社 | 赤外線ヒーター |
EP3435735B1 (en) | 2016-03-24 | 2020-12-02 | NGK Insulators, Ltd. | Radiation device and processing device using same radiation device |
WO2019208252A1 (ja) * | 2018-04-23 | 2019-10-31 | 日本碍子株式会社 | 赤外線放射装置 |
JP2020017433A (ja) * | 2018-07-26 | 2020-01-30 | 日本碍子株式会社 | 赤外線放射装置 |
JP6997060B2 (ja) * | 2018-10-05 | 2022-01-17 | 日本碍子株式会社 | 赤外線放射装置 |
-
2018
- 2018-10-05 JP JP2018190005A patent/JP6997060B2/ja active Active
-
2019
- 2019-09-20 US US16/577,270 patent/US11710628B2/en active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010157381A (ja) | 2008-12-26 | 2010-07-15 | Helios Techno Holding Co Ltd | 発光装置 |
JP2014149976A (ja) | 2013-02-01 | 2014-08-21 | Panasonic Corp | 赤外光源素子 |
WO2018079386A1 (ja) | 2016-10-24 | 2018-05-03 | 日本碍子株式会社 | 赤外線ヒーター |
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US11710628B2 (en) | 2023-07-25 |
US20200110252A1 (en) | 2020-04-09 |
JP2020061214A (ja) | 2020-04-16 |
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