JP6993956B2 - 磁気センサ装置 - Google Patents

磁気センサ装置 Download PDF

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Publication number
JP6993956B2
JP6993956B2 JP2018232084A JP2018232084A JP6993956B2 JP 6993956 B2 JP6993956 B2 JP 6993956B2 JP 2018232084 A JP2018232084 A JP 2018232084A JP 2018232084 A JP2018232084 A JP 2018232084A JP 6993956 B2 JP6993956 B2 JP 6993956B2
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JP
Japan
Prior art keywords
magnetic field
magnetic
magnetic sensor
component
additional
Prior art date
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Application number
JP2018232084A
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English (en)
Japanese (ja)
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JP2020094883A5 (enExample
JP2020094883A (ja
Inventor
司也 渡部
啓 平林
吉隆 奥津
将規 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Kasei Microdevices Corp
TDK Corp
Original Assignee
TDK Corp
Asahi Kasei EMD Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp, Asahi Kasei EMD Corp filed Critical TDK Corp
Priority to JP2018232084A priority Critical patent/JP6993956B2/ja
Priority to US16/699,781 priority patent/US11162772B2/en
Priority to DE102019132824.1A priority patent/DE102019132824A1/de
Priority to CN201911273832.XA priority patent/CN111308403B/zh
Publication of JP2020094883A publication Critical patent/JP2020094883A/ja
Publication of JP2020094883A5 publication Critical patent/JP2020094883A5/ja
Application granted granted Critical
Publication of JP6993956B2 publication Critical patent/JP6993956B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0017—Means for compensating offset magnetic fields or the magnetic flux to be measured; Means for generating calibration magnetic fields
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/096—Magnetoresistive devices anisotropic magnetoresistance sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0023—Electronic aspects, e.g. circuits for stimulation, evaluation, control; Treating the measured signals; calibration
    • G01R33/0029—Treating the measured signals, e.g. removing offset or noise
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0023—Electronic aspects, e.g. circuits for stimulation, evaluation, control; Treating the measured signals; calibration
    • G01R33/0035—Calibration of single magnetic sensors, e.g. integrated calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/007—Environmental aspects, e.g. temperature variations, radiation, stray fields
    • G01R33/0082—Compensation, e.g. compensating for temperature changes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/0206—Three-component magnetometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/095—Magnetoresistive devices extraordinary magnetoresistance sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/098—Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Toxicology (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
JP2018232084A 2018-12-12 2018-12-12 磁気センサ装置 Active JP6993956B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2018232084A JP6993956B2 (ja) 2018-12-12 2018-12-12 磁気センサ装置
US16/699,781 US11162772B2 (en) 2018-12-12 2019-12-02 Magnetic sensor device
DE102019132824.1A DE102019132824A1 (de) 2018-12-12 2019-12-03 Magnetische sensorvorrichtung
CN201911273832.XA CN111308403B (zh) 2018-12-12 2019-12-12 磁传感器装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018232084A JP6993956B2 (ja) 2018-12-12 2018-12-12 磁気センサ装置

Publications (3)

Publication Number Publication Date
JP2020094883A JP2020094883A (ja) 2020-06-18
JP2020094883A5 JP2020094883A5 (enExample) 2020-09-24
JP6993956B2 true JP6993956B2 (ja) 2022-01-14

Family

ID=70858902

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018232084A Active JP6993956B2 (ja) 2018-12-12 2018-12-12 磁気センサ装置

Country Status (4)

Country Link
US (1) US11162772B2 (enExample)
JP (1) JP6993956B2 (enExample)
CN (1) CN111308403B (enExample)
DE (1) DE102019132824A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019209035A1 (de) * 2019-06-21 2020-12-24 Infineon Technologies Ag Erfassen einer diskreten positionsbeziehung zwischen einem magnetfeldgeber und einer magnetfeldsensoranordnung
JP7613560B2 (ja) * 2021-03-31 2025-01-15 株式会社村田製作所 センサー出力補償回路
JP7505684B2 (ja) * 2021-10-06 2024-06-25 Tdk株式会社 磁気抵抗効果素子、磁気抵抗効果装置および磁気センサ
JP2024011975A (ja) 2022-07-15 2024-01-25 Tdk株式会社 磁気センサ装置
JP2024041557A (ja) * 2022-09-14 2024-03-27 Tdk株式会社 磁気センサ装置およびその製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001516031A (ja) 1997-08-14 2001-09-25 ハネウエル・インコーポレーテッド 磁界検出デバイス
WO2008123144A1 (ja) 2007-03-23 2008-10-16 Asahi Kasei Emd Corporation 磁気センサ及びその感度測定方法
JP2016138839A (ja) 2015-01-28 2016-08-04 ヤマハ株式会社 磁気センサの検査装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0629686A (ja) * 1992-07-09 1994-02-04 Meidensha Corp 磁気遮へい装置
JP3835354B2 (ja) * 2001-10-29 2006-10-18 ヤマハ株式会社 磁気センサ
JP2008082757A (ja) * 2006-09-26 2008-04-10 Yokogawa Electric Corp 移動体の位置検出システム
CN106097723B (zh) * 2013-04-22 2018-07-10 徐州工程学院 基于偏置磁场的车辆压车道实线检测装置的工作方法
JP2015075465A (ja) 2013-10-11 2015-04-20 旭化成エレクトロニクス株式会社 ３次元磁界測定装置及び３次元磁界測定方法
CN104834021B (zh) * 2015-05-11 2018-06-22 上海集成电路研发中心有限公司 一种地磁传感器灵敏度的计算方法
JP6365908B1 (ja) * 2017-03-24 2018-08-01 Tdk株式会社 位置検出装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001516031A (ja) 1997-08-14 2001-09-25 ハネウエル・インコーポレーテッド 磁界検出デバイス
WO2008123144A1 (ja) 2007-03-23 2008-10-16 Asahi Kasei Emd Corporation 磁気センサ及びその感度測定方法
JP2016138839A (ja) 2015-01-28 2016-08-04 ヤマハ株式会社 磁気センサの検査装置

Also Published As

Publication number Publication date
JP2020094883A (ja) 2020-06-18
DE102019132824A1 (de) 2020-06-18
US20200191547A1 (en) 2020-06-18
CN111308403B (zh) 2022-08-05
CN111308403A (zh) 2020-06-19
US11162772B2 (en) 2021-11-02

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