CN111308403B - 磁传感器装置 - Google Patents

磁传感器装置 Download PDF

Info

Publication number
CN111308403B
CN111308403B CN201911273832.XA CN201911273832A CN111308403B CN 111308403 B CN111308403 B CN 111308403B CN 201911273832 A CN201911273832 A CN 201911273832A CN 111308403 B CN111308403 B CN 111308403B
Authority
CN
China
Prior art keywords
magnetic field
component
magnetic sensor
magnetic
coil
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201911273832.XA
Other languages
English (en)
Chinese (zh)
Other versions
CN111308403A (zh
Inventor
渡部司也
平林启
奥津吉隆
吉田将规
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Asahi Kasei Microdevices Corp
TDK Corp
Original Assignee
Asahi Kasei Microdevices Corp
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Kasei Microdevices Corp, TDK Corp filed Critical Asahi Kasei Microdevices Corp
Publication of CN111308403A publication Critical patent/CN111308403A/zh
Application granted granted Critical
Publication of CN111308403B publication Critical patent/CN111308403B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/096—Magnetoresistive devices anisotropic magnetoresistance sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0017—Means for compensating offset magnetic fields or the magnetic flux to be measured; Means for generating calibration magnetic fields
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0023—Electronic aspects, e.g. circuits for stimulation, evaluation, control; Treating the measured signals; calibration
    • G01R33/0029—Treating the measured signals, e.g. removing offset or noise
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0023—Electronic aspects, e.g. circuits for stimulation, evaluation, control; Treating the measured signals; calibration
    • G01R33/0035—Calibration of single magnetic sensors, e.g. integrated calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/007—Environmental aspects, e.g. temperature variations, radiation, stray fields
    • G01R33/0082—Compensation, e.g. compensating for temperature changes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/0206—Three-component magnetometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/095—Magnetoresistive devices extraordinary magnetoresistance sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/098—Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Toxicology (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
CN201911273832.XA 2018-12-12 2019-12-12 磁传感器装置 Active CN111308403B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018-232084 2018-12-12
JP2018232084A JP6993956B2 (ja) 2018-12-12 2018-12-12 磁気センサ装置

Publications (2)

Publication Number Publication Date
CN111308403A CN111308403A (zh) 2020-06-19
CN111308403B true CN111308403B (zh) 2022-08-05

Family

ID=70858902

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201911273832.XA Active CN111308403B (zh) 2018-12-12 2019-12-12 磁传感器装置

Country Status (4)

Country Link
US (1) US11162772B2 (enExample)
JP (1) JP6993956B2 (enExample)
CN (1) CN111308403B (enExample)
DE (1) DE102019132824A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102019209035A1 (de) * 2019-06-21 2020-12-24 Infineon Technologies Ag Erfassen einer diskreten positionsbeziehung zwischen einem magnetfeldgeber und einer magnetfeldsensoranordnung
JP7613560B2 (ja) * 2021-03-31 2025-01-15 株式会社村田製作所 センサー出力補償回路
JP7505684B2 (ja) * 2021-10-06 2024-06-25 Tdk株式会社 磁気抵抗効果素子、磁気抵抗効果装置および磁気センサ
JP2024011975A (ja) 2022-07-15 2024-01-25 Tdk株式会社 磁気センサ装置
JP2024041557A (ja) * 2022-09-14 2024-03-27 Tdk株式会社 磁気センサ装置およびその製造方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0629686A (ja) * 1992-07-09 1994-02-04 Meidensha Corp 磁気遮へい装置
JP2008082757A (ja) * 2006-09-26 2008-04-10 Yokogawa Electric Corp 移動体の位置検出システム
WO2008123144A1 (ja) * 2007-03-23 2008-10-16 Asahi Kasei Emd Corporation 磁気センサ及びその感度測定方法
CN104834021A (zh) * 2015-05-11 2015-08-12 上海集成电路研发中心有限公司 一种地磁传感器灵敏度的计算方法
JP2016138839A (ja) * 2015-01-28 2016-08-04 ヤマハ株式会社 磁気センサの検査装置
CN106097723A (zh) * 2013-04-22 2016-11-09 徐州工程学院 基于偏置磁场的车辆压车道实线检测装置的工作方法
CN108627944A (zh) * 2017-03-24 2018-10-09 Tdk株式会社 位置检测装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5952825A (en) 1997-08-14 1999-09-14 Honeywell Inc. Magnetic field sensing device having integral coils for producing magnetic fields
JP3835354B2 (ja) * 2001-10-29 2006-10-18 ヤマハ株式会社 磁気センサ
JP2015075465A (ja) 2013-10-11 2015-04-20 旭化成エレクトロニクス株式会社 ３次元磁界測定装置及び３次元磁界測定方法

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0629686A (ja) * 1992-07-09 1994-02-04 Meidensha Corp 磁気遮へい装置
JP2008082757A (ja) * 2006-09-26 2008-04-10 Yokogawa Electric Corp 移動体の位置検出システム
WO2008123144A1 (ja) * 2007-03-23 2008-10-16 Asahi Kasei Emd Corporation 磁気センサ及びその感度測定方法
CN106097723A (zh) * 2013-04-22 2016-11-09 徐州工程学院 基于偏置磁场的车辆压车道实线检测装置的工作方法
JP2016138839A (ja) * 2015-01-28 2016-08-04 ヤマハ株式会社 磁気センサの検査装置
CN104834021A (zh) * 2015-05-11 2015-08-12 上海集成电路研发中心有限公司 一种地磁传感器灵敏度的计算方法
CN108627944A (zh) * 2017-03-24 2018-10-09 Tdk株式会社 位置检测装置

Also Published As

Publication number Publication date
JP2020094883A (ja) 2020-06-18
DE102019132824A1 (de) 2020-06-18
US20200191547A1 (en) 2020-06-18
CN111308403A (zh) 2020-06-19
US11162772B2 (en) 2021-11-02
JP6993956B2 (ja) 2022-01-14

Similar Documents

Publication Publication Date Title
CN111308403B (zh) 磁传感器装置
US8836317B2 (en) Current sensor
CN107110920B (zh) 磁传感器及其制造方法以及使用该磁传感器的电流量检测器
US10114044B2 (en) Current sensor
CN111044942B (zh) 磁传感器装置
JP6886222B2 (ja) 磁気センサ
US11531071B2 (en) Magnetic field detection device
CN110296720B (zh) 磁传感装置
JP2016502098A (ja) 磁気センシング装置及びその磁気誘導方法
WO2009055151A1 (en) Matching of gmr sensors in a bridge
CN109959883B (zh) 磁传感器
US10564228B2 (en) Magnetoresistive effect element unit and magnetoresistive effect element device
JP2016517952A (ja) 磁気センシング装置及びその磁気誘導方法、製造プロセス
US12117317B2 (en) Position detection device
JP7070532B2 (ja) 磁気センサ
JP6384677B2 (ja) 電流センサ
JP7607071B2 (ja) 磁気センサ装置、インバータ装置、バッテリ装置、電動モータおよび車両
US12352831B2 (en) Dual current magnetic field sensor
CN114207857B (zh) 磁传感器装置
JP2012159309A (ja) 磁気センサおよび磁気センサ装置

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant