JP6961335B2 - 磁気ラッチ補助を備える基板容器 - Google Patents
磁気ラッチ補助を備える基板容器 Download PDFInfo
- Publication number
- JP6961335B2 JP6961335B2 JP2016201954A JP2016201954A JP6961335B2 JP 6961335 B2 JP6961335 B2 JP 6961335B2 JP 2016201954 A JP2016201954 A JP 2016201954A JP 2016201954 A JP2016201954 A JP 2016201954A JP 6961335 B2 JP6961335 B2 JP 6961335B2
- Authority
- JP
- Japan
- Prior art keywords
- door
- magnetic
- magnetic couplers
- couplers
- door frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000005291 magnetic effect Effects 0.000 title claims description 191
- 239000000758 substrate Substances 0.000 title claims description 49
- 239000000463 material Substances 0.000 claims description 23
- 229910000831 Steel Inorganic materials 0.000 claims description 7
- 239000010959 steel Substances 0.000 claims description 7
- 238000000034 method Methods 0.000 description 8
- 238000007789 sealing Methods 0.000 description 6
- 238000000418 atomic force spectrum Methods 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 239000011800 void material Substances 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 239000000470 constituent Substances 0.000 description 4
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 230000005389 magnetism Effects 0.000 description 4
- 229910052779 Neodymium Inorganic materials 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 3
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 238000005266 casting Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000001746 injection moulding Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201562242032P | 2015-10-15 | 2015-10-15 | |
| US62/242,032 | 2015-10-15 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017076799A JP2017076799A (ja) | 2017-04-20 |
| JP2017076799A5 JP2017076799A5 (enExample) | 2019-11-14 |
| JP6961335B2 true JP6961335B2 (ja) | 2021-11-05 |
Family
ID=58551570
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016201954A Active JP6961335B2 (ja) | 2015-10-15 | 2016-10-13 | 磁気ラッチ補助を備える基板容器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6961335B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP3539420A1 (de) | 2018-03-16 | 2019-09-18 | Eppendorf AG | Laborschrankvorrichtung zum lagern von laborproben mit magnetverschluss |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60160539U (ja) * | 1984-04-02 | 1985-10-25 | ソニー株式会社 | 半導体ウエハ等収納容器 |
| JP3963227B2 (ja) * | 1997-06-13 | 2007-08-22 | ミライアル株式会社 | 蓋付き薄板収納容器 |
| JPH11317438A (ja) * | 1997-11-12 | 1999-11-16 | Intevac Inc | 基板キャリアの磁気支持を利用する基板支持装置 |
| US20070175792A1 (en) * | 2006-02-02 | 2007-08-02 | Barry Gregerson | Magnetic seal for wafer containers |
| TWI365836B (en) * | 2009-05-08 | 2012-06-11 | Gudeng Prec Industral Co Ltd | Wafer container with the magnetic latch |
-
2016
- 2016-10-13 JP JP2016201954A patent/JP6961335B2/ja active Active
Also Published As
| Publication number | Publication date |
|---|---|
| JP2017076799A (ja) | 2017-04-20 |
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