JP2018515936A5 - - Google Patents

Download PDF

Info

Publication number
JP2018515936A5
JP2018515936A5 JP2017560671A JP2017560671A JP2018515936A5 JP 2018515936 A5 JP2018515936 A5 JP 2018515936A5 JP 2017560671 A JP2017560671 A JP 2017560671A JP 2017560671 A JP2017560671 A JP 2017560671A JP 2018515936 A5 JP2018515936 A5 JP 2018515936A5
Authority
JP
Japan
Prior art keywords
carrier
attracting member
substrate carrier
port
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2017560671A
Other languages
English (en)
Japanese (ja)
Other versions
JP2018515936A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2016/027801 external-priority patent/WO2016190982A1/en
Publication of JP2018515936A publication Critical patent/JP2018515936A/ja
Publication of JP2018515936A5 publication Critical patent/JP2018515936A5/ja
Pending legal-status Critical Current

Links

JP2017560671A 2015-05-22 2016-04-15 磁気ドア密封を含む、基板キャリアドアアセンブリ、基板キャリア、及び方法 Pending JP2018515936A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201562165555P 2015-05-22 2015-05-22
US62/165,555 2015-05-22
PCT/US2016/027801 WO2016190982A1 (en) 2015-05-22 2016-04-15 Substrate carrier door assemblies, substrate carriers, and methods including magnetic door seal

Publications (2)

Publication Number Publication Date
JP2018515936A JP2018515936A (ja) 2018-06-14
JP2018515936A5 true JP2018515936A5 (enExample) 2021-04-30

Family

ID=57325191

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017560671A Pending JP2018515936A (ja) 2015-05-22 2016-04-15 磁気ドア密封を含む、基板キャリアドアアセンブリ、基板キャリア、及び方法

Country Status (6)

Country Link
US (1) US10196845B2 (enExample)
JP (1) JP2018515936A (enExample)
KR (1) KR102319415B1 (enExample)
CN (1) CN107636243A (enExample)
TW (1) TWI697977B (enExample)
WO (1) WO2016190982A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9694910B2 (en) 2013-02-22 2017-07-04 World View Enterprises Inc. Near-space operation systems
US9540091B1 (en) 2016-02-11 2017-01-10 World View Enterprises Inc. High altitude balloon systems and methods
US10336432B1 (en) 2017-01-09 2019-07-02 World View Enterprises Inc. Lighter than air balloon systems and methods
US10124875B1 (en) 2017-01-09 2018-11-13 World View Enterprises Inc. Continuous multi-chamber super pressure balloon
DE202017100143U1 (de) * 2017-01-12 2017-02-06 Simonswerk Gmbh Türanordnung
TWI735570B (zh) * 2017-05-09 2021-08-11 日商樂華股份有限公司 噴嘴單元、及具備噴嘴單元的環境氣體置換裝置、與環境氣體置換方法
US11703754B2 (en) * 2020-05-14 2023-07-18 Taiwan Semiconductor Manufacturing Company Ltd. Particle prevention method in reticle pod
TWI779505B (zh) * 2020-05-14 2022-10-01 台灣積體電路製造股份有限公司 光罩盒及防止光罩污染之方法
US12009242B2 (en) * 2021-08-30 2024-06-11 Taiwan Semiconductor Manufacturing Company, Ltd. Wafer transport container
KR102717220B1 (ko) * 2022-10-31 2024-10-15 (주)신산이엔지 웨이퍼 카세트
US12325504B2 (en) 2022-11-07 2025-06-10 World View Enterprises Inc. Magnetic ballast dispenser

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03215960A (ja) * 1990-01-22 1991-09-20 Ebara Corp 容器開閉機構
JP3347812B2 (ja) * 1992-05-19 2002-11-20 株式会社荏原製作所 真空容器並びに該真空容器を用いた真空処理方法
US5398481A (en) * 1992-05-19 1995-03-21 Ebara Corporation Vacuum processing system
JPH0637176A (ja) * 1992-05-21 1994-02-10 Ebara Corp 保管箱の防塵装置及びその着脱機構
JP3963227B2 (ja) 1997-06-13 2007-08-22 ミライアル株式会社 蓋付き薄板収納容器
TW518649B (en) 2002-01-30 2003-01-21 Chi Mei Optoelectronics Corp Substrate container with non-friction door element
US7328727B2 (en) * 2004-04-18 2008-02-12 Entegris, Inc. Substrate container with fluid-sealing flow passageway
US20070140822A1 (en) 2005-12-16 2007-06-21 Applied Materials, Inc. Methods and apparatus for opening and closing substrate carriers
CN101370616B (zh) 2006-01-11 2011-04-27 应用材料股份有限公司 一种基材载件、一种装载端口以及一种清洗基材载件的方法
US20070175792A1 (en) 2006-02-02 2007-08-02 Barry Gregerson Magnetic seal for wafer containers
KR20090053915A (ko) * 2006-08-18 2009-05-28 브룩스 오토메이션 인코퍼레이티드 용량이 축소된 캐리어, 이송, 로드 포트, 버퍼 시스템
KR101613836B1 (ko) * 2007-05-17 2016-04-21 브룩스 오토메이션 인코퍼레이티드 측면 개방형 기판 캐리어 및 로드 포트
US8424703B2 (en) * 2008-05-01 2013-04-23 Brooks Automation, Inc. Substrate container sealing via movable magnets
TWI365836B (en) * 2009-05-08 2012-06-11 Gudeng Prec Industral Co Ltd Wafer container with the magnetic latch
JP5516968B2 (ja) * 2010-06-08 2014-06-11 独立行政法人産業技術総合研究所 連結搬送システム
JP5881956B2 (ja) * 2011-02-28 2016-03-09 株式会社日立国際電気 基板処理装置、半導体装置の製造方法およびウェーハホルダ
US10115616B2 (en) 2013-07-18 2018-10-30 Applied Materials, Inc. Carrier adapter insert apparatus and carrier adapter insert detection methods
CN109671643B (zh) 2013-08-12 2023-11-28 应用材料公司 具有工厂接口环境控制的基板处理系统、装置和方法

Similar Documents

Publication Publication Date Title
JP2018515936A5 (enExample)
TWI697977B (zh) 包括磁性門密封件的基板載體門組件、基板載體及方法
US8870512B2 (en) Sealed substrate carriers and systems and methods for transporting substrates
CN103038873B (zh) 连结搬运系统
US7909167B2 (en) Wafer container
US6336567B1 (en) Magnetic secured container closure with release by movement of magnetic member
US10832928B2 (en) Systems, apparatus, and methods for an improved load port
CN102934212A (zh) 连结系统
US10014200B2 (en) Gas injection device and assisting member
JP2009239006A (ja) 密閉容器の蓋開閉装置及び該開閉装置を用いたガス置換装置
US9947637B2 (en) System and method for clamping wafers together in alignment using pressure
EP0570967B1 (en) Vacuum container
JP3226511B2 (ja) 容器および容器の封止方法
JP2017220561A (ja) ノズルユニット、およびノズルユニットを備える雰囲気置換装置、ならびに雰囲気置換方法
TW201523722A (zh) 基板處理設備及基板處理方法
JP2015035612A (ja) ノズル駆動ユニットおよびガス注入装置
KR101286824B1 (ko) 반도체 및 엘시디 제조설비의 게이트 밸브
JP2009054859A (ja) 基板受入装置及び基板受入方法
KR102823274B1 (ko) 주사전자현미경용 시료 밀폐 장치
CN219085954U (zh) 一种晶圆吸附载台
KR20120084883A (ko) 기판 홀더 탈부착 장치
JP2003243312A (ja) 半導体製造装置
US11469124B2 (en) Contactless latch and coupling for vacuum wafer transfer cassette
JP2005340614A (ja) クリーンシステム用ロードポート
JP2002368075A (ja) 容器および容器の封止方法