JP2017076799A5 - - Google Patents

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Publication number
JP2017076799A5
JP2017076799A5 JP2016201954A JP2016201954A JP2017076799A5 JP 2017076799 A5 JP2017076799 A5 JP 2017076799A5 JP 2016201954 A JP2016201954 A JP 2016201954A JP 2016201954 A JP2016201954 A JP 2016201954A JP 2017076799 A5 JP2017076799 A5 JP 2017076799A5
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JP
Japan
Prior art keywords
door
magnetic couplers
magnetic
substrate container
couplers
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Application number
JP2016201954A
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English (en)
Japanese (ja)
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JP2017076799A (ja
JP6961335B2 (ja
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Publication of JP2017076799A publication Critical patent/JP2017076799A/ja
Publication of JP2017076799A5 publication Critical patent/JP2017076799A5/ja
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Publication of JP6961335B2 publication Critical patent/JP6961335B2/ja
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JP2016201954A 2015-10-15 2016-10-13 磁気ラッチ補助を備える基板容器 Active JP6961335B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201562242032P 2015-10-15 2015-10-15
US62/242,032 2015-10-15

Publications (3)

Publication Number Publication Date
JP2017076799A JP2017076799A (ja) 2017-04-20
JP2017076799A5 true JP2017076799A5 (enExample) 2019-11-14
JP6961335B2 JP6961335B2 (ja) 2021-11-05

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ID=58551570

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016201954A Active JP6961335B2 (ja) 2015-10-15 2016-10-13 磁気ラッチ補助を備える基板容器

Country Status (1)

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JP (1) JP6961335B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3539420A1 (de) 2018-03-16 2019-09-18 Eppendorf AG Laborschrankvorrichtung zum lagern von laborproben mit magnetverschluss

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60160539U (ja) * 1984-04-02 1985-10-25 ソニー株式会社 半導体ウエハ等収納容器
JP3963227B2 (ja) * 1997-06-13 2007-08-22 ミライアル株式会社 蓋付き薄板収納容器
JPH11317438A (ja) * 1997-11-12 1999-11-16 Intevac Inc 基板キャリアの磁気支持を利用する基板支持装置
US20070175792A1 (en) * 2006-02-02 2007-08-02 Barry Gregerson Magnetic seal for wafer containers
TWI365836B (en) * 2009-05-08 2012-06-11 Gudeng Prec Industral Co Ltd Wafer container with the magnetic latch

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