JP2017076799A5

JP2017076799A5 -

Info

Publication number: JP2017076799A5
Application number: JP2016201954A
Authority: JP
Filing date: 2016-10-13
Publication date: 2019-11-14
Anticipated expiration: 2036-10-13

Claims

A substrate container,
A container shell including a door frame;
A door installed in the door frame, the door including a concentric outer periphery around the door axis;
A gasket attached to one of the container shell and the door frame;
At least one mechanical door latch for latching the door to the door frame at a plurality of separate latch positions near the gasket;
A plurality of magnetic couplers attached to at least one of the door and the door frame,
A substrate container in which a total magnetic attraction is generated between the door and the door frame by the plurality of magnetic couplers.

The substrate container of claim 1, wherein the at least one mechanical door latch is attached to the door.

The at least one mechanical door latch is mounted within the door and the outer periphery of the door for latching the door to the door frame at the plurality of separate latch positions about the outer periphery of the door. The substrate container of claim 2 including a plurality of latch tips extending through the door frame and into the door frame.

The substrate container according to claim 1, wherein the total magnetic attraction is within a predetermined force range.

A first plurality of magnetic couplers of the plurality of magnetic couplers are mounted proximate to the door frame and between the plurality of separate latch positions;
A second plurality of magnetic couplers of the plurality of magnetic couplers are attached to the door, and the second plurality of magnetic couplers of the plurality of magnetic couplers are the first of the plurality of magnetic couplers. Substantially aligned with a plurality of magnetic couplers of
2. The total magnetic attraction is generated between the first plurality of magnetic couplers of the plurality of magnetic couplers and the second plurality of magnetic couplers of the plurality of magnetic couplers. Substrate container.

The first plurality of magnetic couplers of the plurality of magnetic couplers and the second plurality of magnetic couplers of the plurality of magnetic couplers are substantially aligned in a direction parallel to the door axis. The substrate container according to claim 5 .

The substrate container according to claim 5 , wherein the door frame defines a plurality of pockets into which the first plurality of magnetic couplers are mounted.

Said first plurality of magnetic coupler saw contains a magnetized material, said second plurality of magnetic coupler comprises a steel material, the substrate container according to claim 5.

At least some of the magnetic couplers of the first plurality of magnetic couplers are centered proximate respective edges of the door frame, and at least some of the second plurality of magnetic couplers are The substrate container of claim 5 , wherein the substrate container is centered proximate to each edge of the door.

6. The substrate container according to claim 5 , wherein a magnetic shield is disposed between an internal chamber of the substrate transport apparatus and at least one of the first plurality of magnetic couplers and the second plurality of magnetic couplers. .

6. The substrate container of claim 5 , wherein at least some of the magnetic couplers or the second plurality of magnetic couplers of the first plurality of magnetic couplers comprise a magnetized material contained in a non-magnetic casing.