JP6942475B2 - 小型流体制御装置 - Google Patents
小型流体制御装置 Download PDFInfo
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- JP6942475B2 JP6942475B2 JP2017010017A JP2017010017A JP6942475B2 JP 6942475 B2 JP6942475 B2 JP 6942475B2 JP 2017010017 A JP2017010017 A JP 2017010017A JP 2017010017 A JP2017010017 A JP 2017010017A JP 6942475 B2 JP6942475 B2 JP 6942475B2
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Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0042—Electric operating means therefor
- F16K99/0048—Electric operating means therefor using piezoelectric means
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/10—Adaptations or arrangements of distribution members
- F04B39/1066—Valve plates
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/047—Pumps having electric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
- F16K99/0015—Diaphragm or membrane valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2210/00—Working fluid
- F05B2210/10—Kind or type
- F05B2210/12—Kind or type gaseous, i.e. compressible
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2260/00—Function
- F05B2260/60—Fluid transfer
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B2211/00—Circuits for servomotor systems
- F15B2211/20—Fluid pressure source, e.g. accumulator or variable axial piston pump
- F15B2211/205—Systems with pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0082—Microvalves adapted for a particular use
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0082—Microvalves adapted for a particular use
- F16K2099/0094—Micropumps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Reciprocating Pumps (AREA)
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
- Electrically Driven Valve-Operating Means (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Description
1A 小型流体制御装置
1B 小型バルブ装置
1a 殼体
10 座体
11 気体導入板
11a 気体導入板の第2表面
11b 気体導入板の第1表面
110 気体導入孔
111 中心凹部
112 気体ガイド溝
12 共振片
12a 可動部
12b 固定部
120 中空孔
121 第1チャンバ
13 圧電アクチュエータ
130 懸吊板
130a 懸吊板の第2表面
130b 懸吊板の第1表面
130c 凸部
130d 中心部
130e 外周部
131 外枠
131a 外枠の第2表面
131b 外枠の第1表面
132 フレーム
132a フレームの第2表面
132b フレームの第1表面
133 圧電セラミック板
134、151 導電ピン
135 空隙
141、142 絶縁片
15 導電片
16 集気板
16a 収容空間
160 表面
161 基準表面
162 集気チャンバ
163 第1貫通孔
164 第2貫通孔
165 第1圧力リリーフチャンバ
166 第1出口チャンバ
167、181a 凸部構造
168 側壁
17 バルブ片
170 弁孔
171 位置決め孔
18 出口板
180 基準表面
181 圧力リリーフ通孔
182 出口通孔
183 第2圧力リリーフチャンバ
184 第2出口チャンバ
185 連通流路
187 第2表面
188 位置規制構造
19 出口
g0 間隙
(a)〜(x) 圧電アクチュエータの異なる実施態様
a0、i0、j0、m0、n0、o0、p0、q0、r0 懸吊板
a1、i1、m1、n1、o1、p1、q1、r1 外枠
a2、i2、m2、n2、o2、p2、q2、r2 フレーム、板連接部
a3、 m3、n3、o3、p3、q3、r3 空隙
d 圧電アクチュエータの振動移動
s4、t4、u4、v4、w4、x4 凸部
m2’、n2’、o2’、q2’、r2’ 外枠に連接されるフレームの端部
m2”、n2”、o2”、q2”、r2” 懸吊板に連接されるフレームの端部
Claims (5)
- 小型空気圧動力装置に適用する小型流体制御装置であって、
気体導入板と、共振片と、圧電アクチュエータを含み、
前記気体導入板が、少なくとも1つの気体導入孔と、少なくとも1つの気体ガイド溝と、合流チャンバを構成する中心凹部を備え、前記少なくとも1つの気体導入孔が気体の導入に用いられ、前記気体ガイド溝が前記気体導入孔に対応し、かつ前記気体導入孔の気体をガイドして前記中心凹部が構成する前記合流チャンバに合流させ、
前記共振片が、前記気体導入板の前記合流チャンバに対応する中空孔を備え、
前記圧電アクチュエータが、懸吊板と、外枠と、圧電セラミック板を備え、
前記懸吊板が、正方形構造であり、7.5mm〜12mmの間の長さ、7.5mm〜12mmの間の幅、0.1mm〜0.4mmの間の厚さを備え、
前記外枠が、前記懸吊板と前記外枠の間を連接して設置された少なくとも1つのフレームを備え、
前記圧電セラミック板が、正方形構造であり、前記懸吊板の第1表面に貼付され、かつ前記圧電セラミック板が前記懸吊板の辺の長さより大きくない辺の長さを有し、7. 5mm〜12mmの間の長さ、7.5mm〜12mmの間の幅、0.05mm〜0.3mmの間の厚さを備え、
そのうち、前記圧電アクチュエータ、前記共振片、前記気体導入板が順に対応して重ねて設置かつ位置決めされ、前記共振片と前記圧電アクチュエータの間に有する間隙で第1チャンバを形成し、前記圧電アクチュエータが駆動されると、気体が前記気体導入板の前記少なくとも1つの気体導入孔から導入され、前記少なくとも1つの気体ガイド溝を介して前記中心凹部に集められ、さらに前記共振片の前記中空孔を経由して前記第1チャンバ内に進入し、さらに前記圧電アクチュエータの前記少なくとも1つのフレームの間の空隙から下に向かって伝送され、気体が継続的に押し出されることを特徴とする、小型流体制御装置。 - 前記小型流体制御装置の前記圧電セラミック板の長さが7.5mm〜8.5mmで、幅が7.5mm〜8.5mmであることを特徴とする、請求項1に記載の小型流体制御装置。
- 前記小型流体制御装置の前記懸吊板の長さが7.5mm〜8.5mmで、幅が7.5mm〜8.5mmであることを特徴とする、請求項1に記載の小型流体制御装置。
- 前記懸吊板の第2表面上に設置される凸部を備え、前記凸部の高さは0.02mm〜0.08mmの間であり、円形の突起構造であって、その直径が前記懸吊板の最小辺の長さの0.55倍の寸法であることを特徴とする、請求項1に記載の小型流体制御装置。
- 前記気体導入板は、ステンレス材質で構成し、その厚さが0.4mm〜0.6mmの間であることを特徴とする、請求項1に記載の小型流体制御装置。
Applications Claiming Priority (14)
Application Number | Priority Date | Filing Date | Title |
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TW105102843 | 2016-01-29 | ||
TW105102842 | 2016-01-29 | ||
TW105102842 | 2016-01-29 | ||
TW105102845 | 2016-01-29 | ||
TW105102843 | 2016-01-29 | ||
TW105102845 | 2016-01-29 | ||
TW105119823 | 2016-06-24 | ||
TW105119825 | 2016-06-24 | ||
TW105119823 | 2016-06-24 | ||
TW105119825 | 2016-06-24 | ||
TW105119824 | 2016-06-24 | ||
TW105119824 | 2016-06-24 | ||
TW105128570A TWI681119B (zh) | 2016-01-29 | 2016-09-05 | 微型流體控制裝置 |
TW105128570 | 2016-09-05 |
Publications (2)
Publication Number | Publication Date |
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JP2017133507A JP2017133507A (ja) | 2017-08-03 |
JP6942475B2 true JP6942475B2 (ja) | 2021-09-29 |
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JP2017010017A Active JP6942475B2 (ja) | 2016-01-29 | 2017-01-24 | 小型流体制御装置 |
Country Status (4)
Country | Link |
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US (1) | US9976673B2 (ja) |
EP (1) | EP3203070B1 (ja) |
JP (1) | JP6942475B2 (ja) |
KR (1) | KR20170091000A (ja) |
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US10487820B2 (en) * | 2016-01-29 | 2019-11-26 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
EP3203081B1 (en) | 2016-01-29 | 2021-06-16 | Microjet Technology Co., Ltd | Miniature fluid control device |
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EP3203077B1 (en) | 2016-01-29 | 2021-06-16 | Microjet Technology Co., Ltd | Piezoelectric actuator |
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2016
- 2016-12-28 US US15/392,018 patent/US9976673B2/en active Active
- 2016-12-29 EP EP16207248.2A patent/EP3203070B1/en active Active
- 2016-12-30 KR KR1020160183866A patent/KR20170091000A/ko active Search and Examination
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EP3203070B1 (en) | 2022-03-16 |
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US9976673B2 (en) | 2018-05-22 |
US20170219120A1 (en) | 2017-08-03 |
JP2017133507A (ja) | 2017-08-03 |
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