JP6938760B2 - 測定容器、測定システム及び測定方法 - Google Patents
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- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
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- G—PHYSICS
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- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
- G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
- G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
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Description
Claims (11)
- 液体の不純物イオン測定のための測定容器であって、
第1の平板電極と、
前記第1の平板電極に形成された第1の絶縁膜と、
前記液体が封入される空間を形成するように、前記第1の絶縁膜から離れて配置された第2の絶縁膜と、
前記第2の絶縁膜が形成され、前記第1の平板電極と向き合うように配置された第2の平板電極と、
前記液体を前記空間に注入するための注入口を有し、前記空間を封止するように構成されたシール材と、
を具備する測定容器。 - 前記第1の平板電極は、第1の基板に形成され、
前記第2の平板電極は、前記第1の基板と向き合うように配置された第2の基板に形成される請求項1に記載の測定容器。 - 前記注入口は、毛細管現象によって前記液体を前記空間に注入するための少なくとも2つの注入口を有する請求項1又は2に記載の測定容器。
- 液体の不純物イオン測定のための測定容器であって、第1の平板電極と、前記第1の平板電極に形成された第1の絶縁膜と、前記液体が封入される空間を形成するように、前記第1の絶縁膜から離れて配置された第2の絶縁膜と、前記第2の絶縁膜が形成され、前記第1の平板電極と向き合うように配置された第2の平板電極と、前記液体を前記空間に注入するための注入口を有し、前記空間を封止するように構成されたシール材とを具備する測定容器の前記第1の平板電極と前記第2の平板電極との間に三角波電圧信号を印加する電圧信号発生器と、
前記三角波電圧信号の印加に伴って前記液体を流れる電流信号を検出する検出回路と、
を有する液体の不純物イオン測定のための測定システム。 - 前記第1の平板電極は、第1の基板に形成され、
前記第2の平板電極は、前記第1の基板と向き合うように配置された第2の基板に形成される請求項4に記載の測定システム。 - 前記三角波電圧信号と前記電流信号とに基づいて前記液体の不純物イオンを測定する制御装置をさらに有する請求項4に記載の測定システム。
- 前記制御装置は、前記三角波電圧信号の変化に対する前記電流信号の変化の傾斜を表す線形回帰直線の傾きに基づいて前記液体の抵抗及び抵抗率のうち少なくとも1つを算出する請求項6に記載の測定システム。
- 前記制御装置は、前記線形回帰直線の切片と前記三角波電圧信号の掃引周波数から前記液体のキャパシタンス及び誘電率のうち少なくとも1つを算出する請求項7に記載の測定システム。
- 前記制御装置は、前記電流信号と前記線形回帰直線との差分の領域の面積に基づいて前記液体の不純物イオンの電荷量及び移動度のうち少なくとも1つを算出する請求項7又は8に記載の測定システム。
- 液体の不純物イオン測定のための測定容器であって、第1の平板電極と、前記第1の平板電極に形成された第1の絶縁膜と、前記液体が封入される空間を形成するように、前記第1の絶縁膜から離れて配置された第2の絶縁膜と、前記第2の絶縁膜が形成され、前記第1の平板電極と向き合うように配置された第2の平板電極と、前記液体を前記空間に注入するための注入口を有し、前記空間を封止するように構成されたシール材とを具備する測定容器の前記空間に前記液体が封入された状態で前記第1の平板電極と前記第2の平板電極との間に三角波電圧信号を印加することと、
前記三角波電圧信号の印加に伴って前記液体を流れる電流信号を検出することと、
を具備する液体の不純物イオン測定のための測定方法。 - 前記三角波電圧信号と前記電流信号とに基づいて前記液体の不純物イオンを測定することをさらに具備する請求項10に記載の測定方法。
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JP (1) | JP6938760B2 (ja) |
KR (1) | KR102503492B1 (ja) |
CN (1) | CN111727370A (ja) |
DE (1) | DE112018007181T5 (ja) |
WO (1) | WO2019167186A1 (ja) |
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WO2024106347A1 (ja) * | 2022-11-16 | 2024-05-23 | 株式会社東陽テクニカ | 有機elデバイス、有機elデバイスの製造方法、及び有機elデバイスの特性評価方法 |
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EP2479563B1 (en) * | 2011-01-19 | 2013-10-16 | Stichting IMEC Nederland | Electrochemical sensor comprising a 2-dimensional electron gas layer (2DEG) and method for electrochemical sensing using such electrochemical sensor |
CN102830142A (zh) * | 2012-08-24 | 2012-12-19 | 福建师范大学 | 一种三角波激励的溶液电导率的测量方法及关键电路 |
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CN104995503A (zh) * | 2013-02-12 | 2015-10-21 | 株式会社堀场先进技术 | 电阻率测定电路、液体试样测定单元、电阻率测定装置、液体试样管理方法及液体试样管理系统 |
JP2014153271A (ja) * | 2013-02-12 | 2014-08-25 | Horiba Advanced Techno Co Ltd | 比抵抗測定装置、液体試料管理方法及び液体試料管理システム |
CN104316584A (zh) * | 2014-10-31 | 2015-01-28 | 深圳市希莱恒医用电子有限公司 | 一种测量多项离子浓度的传感器及其制造方法 |
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