JP6925322B2 - 除害装置 - Google Patents

除害装置 Download PDF

Info

Publication number
JP6925322B2
JP6925322B2 JP2018511430A JP2018511430A JP6925322B2 JP 6925322 B2 JP6925322 B2 JP 6925322B2 JP 2018511430 A JP2018511430 A JP 2018511430A JP 2018511430 A JP2018511430 A JP 2018511430A JP 6925322 B2 JP6925322 B2 JP 6925322B2
Authority
JP
Japan
Prior art keywords
porous element
infrared
abatement
processing
abatement device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2018511430A
Other languages
English (en)
Japanese (ja)
Other versions
JP2018526608A (ja
JP2018526608A5 (enExample
Inventor
ダンカン マイケル プライス
ダンカン マイケル プライス
ゲアリー ピーター ナイト
ゲアリー ピーター ナイト
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Publication of JP2018526608A publication Critical patent/JP2018526608A/ja
Publication of JP2018526608A5 publication Critical patent/JP2018526608A5/ja
Application granted granted Critical
Publication of JP6925322B2 publication Critical patent/JP6925322B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/005—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by heat treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/12—Radiant burners
    • F23D14/16—Radiant burners using permeable blocks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/08—Incineration of waste; Incinerator constructions; Details, accessories or control therefor having supplementary heating
    • F23G5/10—Incineration of waste; Incinerator constructions; Details, accessories or control therefor having supplementary heating electric
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/063—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating electric heating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/206—Organic halogen compounds
    • B01D2257/2066—Fluorine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Environmental & Geological Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Incineration Of Waste (AREA)
JP2018511430A 2015-09-01 2016-08-22 除害装置 Active JP6925322B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1515489.1 2015-09-01
GBGB1515489.1A GB201515489D0 (en) 2015-09-01 2015-09-01 Abatement apparatus
PCT/GB2016/052598 WO2017037419A1 (en) 2015-09-01 2016-08-22 Abatement apparatus

Publications (3)

Publication Number Publication Date
JP2018526608A JP2018526608A (ja) 2018-09-13
JP2018526608A5 JP2018526608A5 (enExample) 2019-09-19
JP6925322B2 true JP6925322B2 (ja) 2021-08-25

Family

ID=54326630

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018511430A Active JP6925322B2 (ja) 2015-09-01 2016-08-22 除害装置

Country Status (7)

Country Link
US (1) US10661217B2 (enExample)
EP (1) EP3344366A1 (enExample)
JP (1) JP6925322B2 (enExample)
KR (1) KR102588341B1 (enExample)
CN (1) CN108136310B (enExample)
GB (1) GB201515489D0 (enExample)
WO (1) WO2017037419A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201505447D0 (en) * 2015-03-30 2015-05-13 Edwards Ltd Radiant burner
GB201718752D0 (en) * 2017-11-13 2017-12-27 Edwards Ltd Vacuum and abatement systems
KR102427056B1 (ko) * 2020-06-02 2022-08-01 씨에스케이(주) 스크러버용 버너
GB2608817A (en) * 2021-07-13 2023-01-18 Edwards Ltd Modular abatement apparatus

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4201650C2 (de) * 1992-01-22 1994-08-11 Mahler Dienstleistung Vorrichtung zur thermischen Verbrennung von mit oxidierbaren Schadstoffen belasteten Abgasen
GB2285044B (en) * 1993-12-11 1997-12-24 Donald Richard Mcgee Method and apparatus for removing organic vapours from gaseous streams
US6891138B2 (en) * 1997-04-04 2005-05-10 Robert C. Dalton Electromagnetic susceptors with coatings for artificial dielectric systems and devices
US7129453B2 (en) 1997-04-04 2006-10-31 Dalton Robert C Artificial dielectric systems and devices with sintered ceramic matrix material
US6153150A (en) * 1998-01-12 2000-11-28 Advanced Technology Materials, Inc. Apparatus and method for controlled decomposition oxidation of gaseous pollutants
US6261524B1 (en) * 1999-01-12 2001-07-17 Advanced Technology Materials, Inc. Advanced apparatus for abatement of gaseous pollutants
JP2002153726A (ja) * 2000-11-21 2002-05-28 Akiji Nishiwaki 排ガス処理装置
JP2003251144A (ja) * 2002-03-04 2003-09-09 Sumitomo Metal Ind Ltd ガス分解装置及びガス分解システム
US20040152028A1 (en) * 2003-02-05 2004-08-05 Singh Prem C. Flame-less infrared heater
US7569193B2 (en) * 2003-12-19 2009-08-04 Applied Materials, Inc. Apparatus and method for controlled combustion of gaseous pollutants
US7736599B2 (en) * 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
GB0706544D0 (en) * 2007-04-04 2007-05-09 Boc Group Plc Combustive destruction of noxious substances
JP2009034636A (ja) * 2007-08-03 2009-02-19 Akiji Nishiwaki 排ガス処理方法およびその装置
JP2010223569A (ja) * 2009-03-23 2010-10-07 Kimisato Seimei Kogaku Kenkyusho:Kk Ｐｃｂの処理法および装置
JP5699022B2 (ja) * 2011-04-07 2015-04-08 岩谷産業株式会社 排ガス処理装置及び排ガス処理方法
KR101385126B1 (ko) * 2013-03-26 2014-04-16 (주)제이티에스코리아 히터 방식 공정 폐가스용 연소기
CN203764135U (zh) * 2013-12-30 2014-08-13 邓杰帆 一种有机废气处理装置

Also Published As

Publication number Publication date
JP2018526608A (ja) 2018-09-13
GB201515489D0 (en) 2015-10-14
KR20180048901A (ko) 2018-05-10
KR102588341B1 (ko) 2023-10-11
CN108136310A (zh) 2018-06-08
WO2017037419A1 (en) 2017-03-09
EP3344366A1 (en) 2018-07-11
CN108136310B (zh) 2021-10-29
US20180311607A1 (en) 2018-11-01
US10661217B2 (en) 2020-05-26

Similar Documents

Publication Publication Date Title
CN117187781B (zh) 用于基板处理装置的温度控制组件及其使用方法
JP6925322B2 (ja) 除害装置
JP5953994B2 (ja) 成膜装置及び成膜方法
KR102386812B1 (ko) 샤워헤드 설계
JP6996980B2 (ja) 汚染ガスを焼却するための放射バーナー
KR102231596B1 (ko) 가스 주입 장치 및 가스 주입 장치를 포함한 기판 프로세스 챔버
CN107429913B (zh) 辐射式燃烧器
KR101444039B1 (ko) 기판 처리 장치 및 가열 장치
TW201117269A (en) In-line gas-phase diffusion furnace
KR20230100612A (ko) 스크류 구조체를 활용한 열-촉매 반응 방법 및 이를 수행하는 장치
JPH05315070A (ja) 誘電発熱体を用いた脱臭消煙装置
JP7757758B2 (ja) 脱脂炉用排ガス燃焼装置および脱脂システム
WO2025052092A1 (en) Abatement apparatus for treating an effluent gas stream and method thereof
KR20250078046A (ko) 열-촉매 반응기
KR20240165554A (ko) 유해가스 처리 장치

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20190809

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20190809

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20200624

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20200713

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20201013

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20210113

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20210705

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20210803

R150 Certificate of patent or registration of utility model

Ref document number: 6925322

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250