KR102588341B1 - 저감 장치 - Google Patents

저감 장치 Download PDF

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Publication number
KR102588341B1
KR102588341B1 KR1020187009054A KR20187009054A KR102588341B1 KR 102588341 B1 KR102588341 B1 KR 102588341B1 KR 1020187009054 A KR1020187009054 A KR 1020187009054A KR 20187009054 A KR20187009054 A KR 20187009054A KR 102588341 B1 KR102588341 B1 KR 102588341B1
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South Korea
Prior art keywords
porous element
infrared
processing chamber
processing
porous
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KR1020187009054A
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English (en)
Korean (ko)
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KR20180048901A (ko
Inventor
던칸 마이클 프라이스
게리 피터 나이트
Original Assignee
에드워즈 리미티드
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Publication of KR20180048901A publication Critical patent/KR20180048901A/ko
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Publication of KR102588341B1 publication Critical patent/KR102588341B1/ko
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/005—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by heat treatment
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23D—BURNERS
    • F23D14/00—Burners for combustion of a gas, e.g. of a gas stored under pressure as a liquid
    • F23D14/12—Radiant burners
    • F23D14/16—Radiant burners using permeable blocks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G5/00—Incineration of waste; Incinerator constructions; Details, accessories or control therefor
    • F23G5/08—Incineration of waste; Incinerator constructions; Details, accessories or control therefor having supplementary heating
    • F23G5/10—Incineration of waste; Incinerator constructions; Details, accessories or control therefor having supplementary heating electric
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/063—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating electric heating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/206—Organic halogen compounds
    • B01D2257/2066—Fluorine
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Incineration Of Waste (AREA)
KR1020187009054A 2015-09-01 2016-08-22 저감 장치 Active KR102588341B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1515489.1 2015-09-01
GBGB1515489.1A GB201515489D0 (en) 2015-09-01 2015-09-01 Abatement apparatus
PCT/GB2016/052598 WO2017037419A1 (en) 2015-09-01 2016-08-22 Abatement apparatus

Publications (2)

Publication Number Publication Date
KR20180048901A KR20180048901A (ko) 2018-05-10
KR102588341B1 true KR102588341B1 (ko) 2023-10-11

Family

ID=54326630

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020187009054A Active KR102588341B1 (ko) 2015-09-01 2016-08-22 저감 장치

Country Status (7)

Country Link
US (1) US10661217B2 (enExample)
EP (1) EP3344366A1 (enExample)
JP (1) JP6925322B2 (enExample)
KR (1) KR102588341B1 (enExample)
CN (1) CN108136310B (enExample)
GB (1) GB201515489D0 (enExample)
WO (1) WO2017037419A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201505447D0 (en) * 2015-03-30 2015-05-13 Edwards Ltd Radiant burner
GB201718752D0 (en) * 2017-11-13 2017-12-27 Edwards Ltd Vacuum and abatement systems
KR102427056B1 (ko) * 2020-06-02 2022-08-01 씨에스케이(주) 스크러버용 버너
GB2608817A (en) * 2021-07-13 2023-01-18 Edwards Ltd Modular abatement apparatus

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2285044A (en) * 1993-12-11 1995-06-28 Donald Richard Mcgee Method and apparatus for removing organic vapours from a gas stream
KR100349698B1 (ko) 1999-04-20 2002-08-22 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 개량된 기상 오염물 저감 장치 및 방법
JP2003251144A (ja) * 2002-03-04 2003-09-09 Sumitomo Metal Ind Ltd ガス分解装置及びガス分解システム
JP2009034636A (ja) 2007-08-03 2009-02-19 Akiji Nishiwaki 排ガス処理方法およびその装置
JP2012217910A (ja) * 2011-04-07 2012-11-12 Iwatani Internatl Corp 排ガス処理装置及び排ガス処理方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4201650C2 (de) * 1992-01-22 1994-08-11 Mahler Dienstleistung Vorrichtung zur thermischen Verbrennung von mit oxidierbaren Schadstoffen belasteten Abgasen
US7129453B2 (en) * 1997-04-04 2006-10-31 Dalton Robert C Artificial dielectric systems and devices with sintered ceramic matrix material
US6891138B2 (en) * 1997-04-04 2005-05-10 Robert C. Dalton Electromagnetic susceptors with coatings for artificial dielectric systems and devices
US6153150A (en) * 1998-01-12 2000-11-28 Advanced Technology Materials, Inc. Apparatus and method for controlled decomposition oxidation of gaseous pollutants
JP2002153726A (ja) * 2000-11-21 2002-05-28 Akiji Nishiwaki 排ガス処理装置
US20040152028A1 (en) * 2003-02-05 2004-08-05 Singh Prem C. Flame-less infrared heater
US7569193B2 (en) * 2003-12-19 2009-08-04 Applied Materials, Inc. Apparatus and method for controlled combustion of gaseous pollutants
US7736599B2 (en) * 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
GB0706544D0 (en) * 2007-04-04 2007-05-09 Boc Group Plc Combustive destruction of noxious substances
JP2010223569A (ja) * 2009-03-23 2010-10-07 Kimisato Seimei Kogaku Kenkyusho:Kk Ｐｃｂの処理法および装置
KR101385126B1 (ko) * 2013-03-26 2014-04-16 (주)제이티에스코리아 히터 방식 공정 폐가스용 연소기
CN203764135U (zh) * 2013-12-30 2014-08-13 邓杰帆 一种有机废气处理装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2285044A (en) * 1993-12-11 1995-06-28 Donald Richard Mcgee Method and apparatus for removing organic vapours from a gas stream
KR100349698B1 (ko) 1999-04-20 2002-08-22 어드밴스드 테크놀러지 머티리얼즈, 인코포레이티드 개량된 기상 오염물 저감 장치 및 방법
JP2003251144A (ja) * 2002-03-04 2003-09-09 Sumitomo Metal Ind Ltd ガス分解装置及びガス分解システム
JP2009034636A (ja) 2007-08-03 2009-02-19 Akiji Nishiwaki 排ガス処理方法およびその装置
JP2012217910A (ja) * 2011-04-07 2012-11-12 Iwatani Internatl Corp 排ガス処理装置及び排ガス処理方法

Also Published As

Publication number Publication date
JP6925322B2 (ja) 2021-08-25
WO2017037419A1 (en) 2017-03-09
US10661217B2 (en) 2020-05-26
EP3344366A1 (en) 2018-07-11
CN108136310B (zh) 2021-10-29
US20180311607A1 (en) 2018-11-01
JP2018526608A (ja) 2018-09-13
GB201515489D0 (en) 2015-10-14
CN108136310A (zh) 2018-06-08
KR20180048901A (ko) 2018-05-10

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