JP6924803B2 - 非線形デバイスを使用する発弧防止機能付きrf装置 - Google Patents
非線形デバイスを使用する発弧防止機能付きrf装置 Download PDFInfo
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- JP6924803B2 JP6924803B2 JP2019164817A JP2019164817A JP6924803B2 JP 6924803 B2 JP6924803 B2 JP 6924803B2 JP 2019164817 A JP2019164817 A JP 2019164817A JP 2019164817 A JP2019164817 A JP 2019164817A JP 6924803 B2 JP6924803 B2 JP 6924803B2
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Images
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/46—Dielectric heating
- H05B6/48—Circuits
- H05B6/50—Circuits for monitoring or control
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/64—Heating using microwaves
- H05B6/66—Circuits
- H05B6/666—Safety circuits
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H1/00—Details of emergency protective circuit arrangements
- H02H1/0007—Details of emergency protective circuit arrangements concerning the detecting means
- H02H1/0015—Using arc detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/12—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing
- G01R31/14—Circuits therefor, e.g. for generating test voltages, sensing circuits
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/12—Testing dielectric strength or breakdown voltage ; Testing or monitoring effectiveness or level of insulation, e.g. of a cable or of an apparatus, for example using partial discharge measurements; Electrostatic testing
- G01R31/16—Construction of testing vessels; Electrodes therefor
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H9/00—Emergency protective circuit arrangements for limiting excess current or voltage without disconnection
- H02H9/04—Emergency protective circuit arrangements for limiting excess current or voltage without disconnection responsive to excess voltage
- H02H9/044—Physical layout, materials not provided for elsewhere
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/46—Dielectric heating
- H05B6/62—Apparatus for specific applications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/64—Heating using microwaves
- H05B6/66—Circuits
- H05B6/68—Circuits for monitoring or control
- H05B6/688—Circuits for monitoring or control for thawing
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Plasma Technology (AREA)
- Control Of High-Frequency Heating Circuits (AREA)
- Constitution Of High-Frequency Heating (AREA)
- Amplifiers (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16/228,482 US11013075B2 (en) | 2018-12-20 | 2018-12-20 | RF apparatus with arc prevention using non-linear devices |
US16/228,482 | 2018-12-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020102437A JP2020102437A (ja) | 2020-07-02 |
JP6924803B2 true JP6924803B2 (ja) | 2021-08-25 |
Family
ID=68887342
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019164817A Active JP6924803B2 (ja) | 2018-12-20 | 2019-09-10 | 非線形デバイスを使用する発弧防止機能付きrf装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US11013075B2 (ko) |
EP (1) | EP3672364B1 (ko) |
JP (1) | JP6924803B2 (ko) |
KR (1) | KR102324928B1 (ko) |
CN (1) | CN111044870A (ko) |
TW (1) | TWI751462B (ko) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SG11201912569UA (en) | 2017-06-27 | 2020-01-30 | Canon Anelva Corp | Plasma processing apparatus |
PL3648551T3 (pl) | 2017-06-27 | 2021-12-06 | Canon Anelva Corporation | Urządzenie do obróbki plazmowej |
WO2019003312A1 (ja) * | 2017-06-27 | 2019-01-03 | キヤノンアネルバ株式会社 | プラズマ処理装置 |
KR102421625B1 (ko) * | 2017-06-27 | 2022-07-19 | 캐논 아네르바 가부시키가이샤 | 플라스마 처리 장치 |
JP6688440B1 (ja) * | 2018-06-26 | 2020-04-28 | キヤノンアネルバ株式会社 | プラズマ処理装置、プラズマ処理方法、プログラムおよびメモリ媒体 |
US11229094B2 (en) | 2018-12-20 | 2022-01-18 | Nxp Usa, Inc. | Combined RF and thermal heating system and methods of operation thereof |
US11324084B2 (en) * | 2019-05-16 | 2022-05-03 | Nxp Usa, Inc. | Combined RF and thermal heating system with heating time estimation |
CN113708737A (zh) * | 2020-05-22 | 2021-11-26 | 恩智浦美国有限公司 | 电感器组合件、阻抗匹配网络及包括电感器组合件的系统 |
CN114062796B (zh) * | 2020-08-04 | 2023-11-14 | 青岛海尔电冰箱有限公司 | 用于电磁波发生系统的检测装置 |
JP7425705B2 (ja) * | 2020-09-29 | 2024-01-31 | シャープ株式会社 | 誘電加熱装置 |
US11802919B2 (en) * | 2020-11-23 | 2023-10-31 | Rivian Ip Holdings, Llc | Systems and methods for remotely testing continuity of electrical wiring |
US11782151B2 (en) * | 2021-05-27 | 2023-10-10 | Apple Inc. | Electronic devices with non-static object detection |
Family Cites Families (30)
Publication number | Priority date | Publication date | Assignee | Title |
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GB592664A (en) | 1944-09-26 | 1947-09-25 | Harold Burton | Automatic high-frequency heater for heating plastic moulding powders and the like |
US2868941A (en) | 1958-03-11 | 1959-01-13 | Chemetron Corp | Electronic arc-suppressor |
DE4127504A1 (de) | 1991-08-20 | 1993-02-25 | Leybold Ag | Einrichtung zur unterdrueckung von lichtboegen |
JPH09283339A (ja) | 1996-04-16 | 1997-10-31 | Murata Mfg Co Ltd | 複合インダクタ |
JPH1183023A (ja) * | 1997-08-29 | 1999-03-26 | Mitsubishi Electric Corp | 高周波加熱調理器 |
US6657173B2 (en) | 1998-04-21 | 2003-12-02 | State Board Of Higher Education On Behalf Of Oregon State University | Variable frequency automated capacitive radio frequency (RF) dielectric heating system |
JP3653628B2 (ja) * | 2000-08-24 | 2005-06-02 | 三菱電機株式会社 | 高周波加熱装置 |
DE20220908U1 (de) * | 2001-12-17 | 2004-07-29 | Phoenix Contact Gmbh & Co. Kg | Überspannungsschutzeinrichtung |
JP3830144B2 (ja) | 2002-06-21 | 2006-10-04 | 松下電器産業株式会社 | 高周波誘電加熱用電力制御方法およびその装置 |
US20040031699A1 (en) | 2002-08-19 | 2004-02-19 | Applied Materials, Inc. | Method for performing real time arcing detection |
JP2004220923A (ja) | 2003-01-15 | 2004-08-05 | Ulvac Japan Ltd | 異常放電検出装置と検出方法、及び該異常放電検出装置を備えたプラズマ処理装置 |
JP2005158326A (ja) | 2003-11-21 | 2005-06-16 | Matsushita Electric Ind Co Ltd | 高周波加熱装置 |
JP2006128075A (ja) | 2004-10-01 | 2006-05-18 | Seiko Epson Corp | 高周波加熱装置、半導体製造装置および光源装置 |
US7305311B2 (en) | 2005-04-22 | 2007-12-04 | Advanced Energy Industries, Inc. | Arc detection and handling in radio frequency power applications |
EP3585135A1 (en) | 2006-02-21 | 2019-12-25 | Goji Limited | Electromagnetic heating |
US7368918B2 (en) | 2006-07-27 | 2008-05-06 | Siemens Energy & Automation | Devices, systems, and methods for adaptive RF sensing in arc fault detection |
US8334700B2 (en) | 2008-02-14 | 2012-12-18 | Mks Instruments, Inc. | Arc detection |
US20090308734A1 (en) | 2008-06-17 | 2009-12-17 | Schneider Automation Inc. | Apparatus and Method for Wafer Level Arc Detection |
US20120122072A1 (en) | 2008-11-10 | 2012-05-17 | Rf Dynamics Ltd. | Method and system for heating and/or thawing blood products |
KR101584397B1 (ko) | 2009-11-10 | 2016-01-11 | 고지 엘티디. | Rf 에너지를 사용하여 가열하기 위한 장치 및 방법 |
KR101325137B1 (ko) | 2011-05-31 | 2013-11-06 | 주식회사 뉴파워 프라즈마 | 아크 방지 기능을 갖는 플라즈마 전원공급 시스템 및 이를 갖는 플라즈마 처리 장치 |
US20160313419A1 (en) * | 2013-12-20 | 2016-10-27 | Koninklijke Philips N.V. | Radio frequency safety switch with adjustable switching level for mri systems |
EP2953425B1 (en) | 2014-06-03 | 2019-08-21 | Ampleon Netherlands B.V. | Radio frequency heating apparatus |
US9306533B1 (en) * | 2015-02-20 | 2016-04-05 | Reno Technologies, Inc. | RF impedance matching network |
GB201513120D0 (en) * | 2015-07-24 | 2015-09-09 | C Tech Innovation Ltd | Radio frequency heating system |
US10763814B2 (en) * | 2016-08-09 | 2020-09-01 | John Bean Technologies Corporation | Radio frequency processing apparatus and method |
US10677822B2 (en) * | 2016-09-27 | 2020-06-09 | Analog Devices Global Unlimited Company | Electrical overstress detection device |
EP3503679B1 (en) | 2017-12-20 | 2022-07-20 | NXP USA, Inc. | Defrosting apparatus and methods of operation thereof |
CN108521691A (zh) | 2018-03-19 | 2018-09-11 | 上海点为智能科技有限责任公司 | 射频解冻加热设备 |
CN108812854A (zh) | 2018-05-08 | 2018-11-16 | 上海点为智能科技有限责任公司 | 射频解冻系统 |
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2018
- 2018-12-20 US US16/228,482 patent/US11013075B2/en active Active
-
2019
- 2019-09-10 JP JP2019164817A patent/JP6924803B2/ja active Active
- 2019-12-02 CN CN201911218583.4A patent/CN111044870A/zh active Pending
- 2019-12-12 EP EP19215650.3A patent/EP3672364B1/en active Active
- 2019-12-19 KR KR1020190171153A patent/KR102324928B1/ko active IP Right Grant
- 2019-12-19 TW TW108146708A patent/TWI751462B/zh active
Also Published As
Publication number | Publication date |
---|---|
JP2020102437A (ja) | 2020-07-02 |
US20200205243A1 (en) | 2020-06-25 |
TWI751462B (zh) | 2022-01-01 |
US11013075B2 (en) | 2021-05-18 |
CN111044870A (zh) | 2020-04-21 |
KR102324928B1 (ko) | 2021-11-12 |
EP3672364A1 (en) | 2020-06-24 |
EP3672364B1 (en) | 2021-07-07 |
KR20200077450A (ko) | 2020-06-30 |
TW202042471A (zh) | 2020-11-16 |
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