JP6919608B2 - スピン軌道トルク型磁化回転素子、スピン軌道トルク型磁気抵抗効果素子及び磁気メモリ - Google Patents
スピン軌道トルク型磁化回転素子、スピン軌道トルク型磁気抵抗効果素子及び磁気メモリ Download PDFInfo
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- 230000005415 magnetization Effects 0.000 title claims description 42
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- 150000001787 chalcogens Chemical class 0.000 claims description 11
- 229910052723 transition metal Inorganic materials 0.000 claims description 9
- 230000007704 transition Effects 0.000 claims description 8
- 150000003624 transition metals Chemical class 0.000 claims description 8
- 229910052751 metal Inorganic materials 0.000 description 27
- 239000002184 metal Substances 0.000 description 26
- 230000008859 change Effects 0.000 description 14
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- 239000011669 selenium Substances 0.000 description 5
- 229910001385 heavy metal Inorganic materials 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 230000005290 antiferromagnetic effect Effects 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000011777 magnesium Substances 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 241000894007 species Species 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 229910005347 FeSi Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000003302 ferromagnetic material Substances 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000000696 magnetic material Substances 0.000 description 2
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- 229910052727 yttrium Inorganic materials 0.000 description 2
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- 229910020598 Co Fe Inorganic materials 0.000 description 1
- 229910002519 Co-Fe Inorganic materials 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 229910000618 GeSbTe Inorganic materials 0.000 description 1
- 229910005866 GeSe Inorganic materials 0.000 description 1
- 229910005900 GeTe Inorganic materials 0.000 description 1
- 229910001106 Ho alloy Inorganic materials 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910020068 MgAl Inorganic materials 0.000 description 1
- 229910017028 MnSi Inorganic materials 0.000 description 1
- 229910003271 Ni-Fe Inorganic materials 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910005642 SnTe Inorganic materials 0.000 description 1
- 229910002367 SrTiO Inorganic materials 0.000 description 1
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 229910004166 TaN Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910001291 heusler alloy Inorganic materials 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 150000001247 metal acetylides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910000510 noble metal Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229910052699 polonium Inorganic materials 0.000 description 1
- HZEBHPIOVYHPMT-UHFFFAOYSA-N polonium atom Chemical compound [Po] HZEBHPIOVYHPMT-UHFFFAOYSA-N 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
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- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/329—Spin-exchange coupled multilayers wherein the magnetisation of the free layer is switched by a spin-polarised current, e.g. spin torque effect
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- H01F10/324—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer
- H01F10/3254—Exchange coupling of magnetic film pairs via a very thin non-magnetic spacer, e.g. by exchange with conduction electrons of the spacer the spacer being semiconducting or insulating, e.g. for spin tunnel junction [STJ]
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Description
(スピン軌道トルク型磁気抵抗効果素子)
図1は、第1実施形態にかかるスピン軌道トルク型磁気抵抗効果素子100の断面模式図である。図1に示すスピン軌道トルク型磁気抵抗効果素子100は、第1強磁性層1と第2強磁性層2と非磁性層3からなる機能部10と、スピン軌道トルク配線20と、第1電極30と、第2電極40とを備える。
機能部10は、一般の磁気抵抗効果素子と同様の構成である。機能部10は、非磁性層3が絶縁体からなる場合は、トンネル磁気抵抗効果(TMR:Tunneling Magnetoresistance)素子と同様の構成であり、非磁性層3が金属からなる場合は巨大磁気抵抗効果(GMR:Giant Magnetoresistance)素子と同様の構成である。第2強磁性層2は固定層や参照層、第1強磁性層1は自由層や記憶層などと呼ばれる。
例えば、非磁性層3が絶縁体からなる場合(トンネルバリア層である場合)、その材料としては、Al2O3、SiO2、MgO、及び、MgAl2O4等を用いることができる。また、これらの他にも、Al、Si、Mgの一部が、Zn、Be等に置換された材料等も用いることができる。これらの中でも、MgOやMgAl2O4はコヒーレントトンネルが実現できる材料であるため、スピンを効率よく注入できる。非磁性層3が金属からなる場合、その材料としては、Cu、Au、Ag等を用いることができる。さらに、非磁性層3が半導体からなる場合、その材料としては、Si、Ge、CuInSe2、CuGaSe2、Cu(In,Ga)Se2等を用いることができる。
スピン軌道トルク配線20は、x方向に延びる。スピン軌道トルク配線20は、第1強磁性層1の一面に接続されている。スピン軌道トルク配線20は、第1強磁性層1に直接接続されていてもよいし、他の層を介し接続されていてもよい。
第1電極30及び第2電極40は、平面視(z方向から見て)で機能部10を挟む位置に設けられる。第1電極30及び第2電極40は、スピン軌道トルク配線20の機能部10側に設けられてもよいし、その反対の面に設けられてもよい。機能部10のスピン軌道トルク配線20と反対側に接続される上部電極(図示略)と第1電極30と第2電極40との3端子で素子が駆動する。データを書き込む際は第1電極30と第2電極40間に電流を流し、データを読み出す際は上部電極(図示略)と第1電極30または第2電極40との間に電流を流す。
上記でスピン軌道トルク型磁気抵抗効果素子の動作について概略を説明したが詳細について説明する。図3は、第1実施形態にかかるスピン軌道トルク型磁気抵抗効果素子の動作時のタイミングチャートである。図3の左側が書き込み時におけるスピン軌道トルク型磁気抵抗効果素子の電圧、抵抗、電流変化であり、右側が読み出し時におけるスピン軌道トルク型磁気抵抗効果素子の電圧、抵抗、電流変化である。
(スピン軌道トルク型磁化回転素子)
図4は、本実施形態にかかるスピン軌道トルク型磁化回転素子の断面模式図である。図4に示すスピン軌道トルク型磁化回転素子110は、非磁性層3及び第2強磁性層2を有さない点のみが、図1に示すスピン軌道トルク型磁気抵抗効果素子100と異なる。
(磁気メモリ)
図5は、複数のスピン軌道トルク型磁気抵抗効果素子100(図1参照)を備える磁気メモリ200の模式図である。図1は、図5におけるA−A面に沿ってスピン軌道トルク型磁気抵抗効果素子100を切断した断面図に対応する。図5に示す磁気メモリ200は、スピン軌道トルク型磁気抵抗効果素子100が3×3のマトリックス配置をしている。図5は、磁気メモリの一例であり、スピン軌道トルク型磁気抵抗効果素子100の構成、数及び配置は任意である。
2 第2強磁性層
3 非磁性層
10 機能部
20 スピン軌道トルク配線
30 第1電極
32 第1スイッチング層
40 第2電極
42 第2スイッチング層
100、101 スピン軌道トルク型磁気抵抗効果素子
110 スピン軌道トルク型磁化回転素子
200 磁気メモリ
M1、M2 磁化
Claims (8)
- 第1方向に延在するスピン軌道トルク配線と、
前記スピン軌道トルク配線の一面に積層された第1強磁性層と、
平面視において前記第1強磁性層を挟む位置で前記スピン軌道トルク配線と接続された第1電極及び第2電極と、を備え、
前記第1電極の内部と前記第2電極の内部とのうち少なくとも一方に、所定の閾値電圧を境界に高抵抗状態と低抵抗状態とが変化し、双方向に電流を流すことができるスイッチング層を有する、スピン軌道トルク型磁化回転素子。 - 前記第1電極及び前記第2電極が前記スイッチング層を内部に有する、請求項1に記載のスピン軌道トルク型磁化回転素子。
- 前記第1電極における前記スイッチング層と、前記第2電極における前記スイッチング層との閾値電圧が異なる、請求項2に記載のスピン軌道トルク型磁化回転素子。
- 読み出し時に通電される前記第1電極又は前記第2電極と前記第1強磁性層との間における前記スピン軌道トルク配線の抵抗値をRr、読み出し時に通電される前記第1電極又は前記第2電極における前記スイッチング層の低抵抗状態での抵抗値をRon、読み出し時に通電される前記第1電極又は前記第2電極と前記第1強磁性層との間に読み出し時に印加する電圧をVr、前記第1強磁性層を磁化反転させるのに必要な臨界閾値電流をIcとした際に、
Rr+Ron>Vr/Ic
の関係が成り立つ、請求項1から3のいずれか一項に記載のスピン軌道トルク型磁化回転素子。 - 前記スイッチング層はカルコゲン元素を含む合金である、請求項1〜4のいずれか一項に記載のスピン軌道トルク型磁化回転素子。
- 前記スイッチング層は金属絶縁体転移する遷移金属を含む酸化物である、請求項1〜4のいずれか一項に記載のスピン軌道トルク型磁化回転素子。
- 請求項1から6のいずれか一項に記載のスピン軌道トルク型磁化回転素子と、
前記第1強磁性層と対向する第2強磁性層と、
前記第1強磁性層と前記第2強磁性層との間に位置する非磁性層と、を備える、スピン軌道トルク型磁気抵抗効果素子。 - 請求項7に記載のスピン軌道トルク型磁気抵抗効果素子を複数備えた磁気メモリ。
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