JP6916412B2 - 真空ポンプ - Google Patents

真空ポンプ Download PDF

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Publication number
JP6916412B2
JP6916412B2 JP2017065948A JP2017065948A JP6916412B2 JP 6916412 B2 JP6916412 B2 JP 6916412B2 JP 2017065948 A JP2017065948 A JP 2017065948A JP 2017065948 A JP2017065948 A JP 2017065948A JP 6916412 B2 JP6916412 B2 JP 6916412B2
Authority
JP
Japan
Prior art keywords
insulating member
heat insulating
peripheral surface
stator
cylindrical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2017065948A
Other languages
English (en)
Japanese (ja)
Other versions
JP2018168732A (ja
JP2018168732A5 (enExample
Inventor
徹也 坪川
徹也 坪川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP2017065948A priority Critical patent/JP6916412B2/ja
Priority to CN201810078329.8A priority patent/CN108691811A/zh
Priority to CN202011238072.1A priority patent/CN112524059A/zh
Priority to US15/920,650 priority patent/US10590958B2/en
Publication of JP2018168732A publication Critical patent/JP2018168732A/ja
Publication of JP2018168732A5 publication Critical patent/JP2018168732A5/ja
Application granted granted Critical
Publication of JP6916412B2 publication Critical patent/JP6916412B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D79/00—Methods, machines, or devices not covered elsewhere, for working metal by removal of material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
    • B23Q3/06—Work-clamping means
    • B23Q3/062—Work-clamping means adapted for holding workpieces having a special form or being made from a special material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Optics & Photonics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
JP2017065948A 2017-03-29 2017-03-29 真空ポンプ Active JP6916412B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2017065948A JP6916412B2 (ja) 2017-03-29 2017-03-29 真空ポンプ
CN201810078329.8A CN108691811A (zh) 2017-03-29 2018-01-26 真空泵
CN202011238072.1A CN112524059A (zh) 2017-03-29 2018-01-26 真空泵的制造方法
US15/920,650 US10590958B2 (en) 2017-03-29 2018-03-14 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017065948A JP6916412B2 (ja) 2017-03-29 2017-03-29 真空ポンプ

Publications (3)

Publication Number Publication Date
JP2018168732A JP2018168732A (ja) 2018-11-01
JP2018168732A5 JP2018168732A5 (enExample) 2020-01-09
JP6916412B2 true JP6916412B2 (ja) 2021-08-11

Family

ID=63672223

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017065948A Active JP6916412B2 (ja) 2017-03-29 2017-03-29 真空ポンプ

Country Status (3)

Country Link
US (1) US10590958B2 (enExample)
JP (1) JP6916412B2 (enExample)
CN (2) CN112524059A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6916413B2 (ja) * 2017-04-25 2021-08-11 株式会社島津製作所 電源一体型真空ポンプ
CN115870562B (zh) * 2023-03-08 2023-06-02 贵州航宇科技发展股份有限公司 一种切割防脱落装置及筒件切割方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3098140B2 (ja) * 1993-06-17 2000-10-16 株式会社大阪真空機器製作所 複合分子ポンプ
US6412173B1 (en) * 1999-07-26 2002-07-02 Phoenix Analysis And Design Technologies, Inc. Miniature turbomolecular pump
CN201195207Y (zh) * 2008-05-09 2009-02-18 中国北车集团大同电力机车有限责任公司 环类薄壁件装夹装置
CN103084891B (zh) * 2013-02-01 2016-02-03 合肥合锻机床股份有限公司 机械压力机气缸活塞导向环车床加工工装及其使用方法
CN103223569B (zh) * 2013-04-26 2016-03-23 马钢(集团)控股有限公司 圆锥破碎机动锥修复方法
JP6386737B2 (ja) * 2014-02-04 2018-09-05 エドワーズ株式会社 真空ポンプ
JP6289148B2 (ja) * 2014-02-14 2018-03-07 エドワーズ株式会社 真空ポンプ、及びこの真空ポンプに用いられる断熱スペーサ
JP6287596B2 (ja) * 2014-06-03 2018-03-07 株式会社島津製作所 真空ポンプ
JP6427963B2 (ja) * 2014-06-03 2018-11-28 株式会社島津製作所 真空ポンプ
JP6114721B2 (ja) * 2014-08-11 2017-04-12 日本オートマチックマシン株式会社 バイス及びワーククランプ方法
CN105328420B (zh) * 2015-11-10 2017-06-13 中信重工机械股份有限公司 一种旋回破碎机大型薄壁斜偏心轴套的加工方法
CN106239195B (zh) * 2016-08-18 2019-03-08 武汉船用机械有限责任公司 一种机匣零件的支撑工装

Also Published As

Publication number Publication date
CN108691811A (zh) 2018-10-23
US20180283400A1 (en) 2018-10-04
CN112524059A (zh) 2021-03-19
JP2018168732A (ja) 2018-11-01
US10590958B2 (en) 2020-03-17

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