CN108691811A - 真空泵 - Google Patents

真空泵 Download PDF

Info

Publication number
CN108691811A
CN108691811A CN201810078329.8A CN201810078329A CN108691811A CN 108691811 A CN108691811 A CN 108691811A CN 201810078329 A CN201810078329 A CN 201810078329A CN 108691811 A CN108691811 A CN 108691811A
Authority
CN
China
Prior art keywords
heat insulating
insulating member
cylindrical portion
peripheral surface
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201810078329.8A
Other languages
English (en)
Chinese (zh)
Inventor
坪川彻也
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to CN202011238072.1A priority Critical patent/CN112524059A/zh
Publication of CN108691811A publication Critical patent/CN108691811A/zh
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/58—Cooling; Heating; Diminishing heat transfer
    • F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
    • F04D29/5853—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps heat insulation or conduction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D79/00—Methods, machines, or devices not covered elsewhere, for working metal by removal of material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/02—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine for mounting on a work-table, tool-slide, or analogous part
    • B23Q3/06—Work-clamping means
    • B23Q3/062—Work-clamping means adapted for holding workpieces having a special form or being made from a special material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Optics & Photonics (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
CN201810078329.8A 2017-03-29 2018-01-26 真空泵 Pending CN108691811A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011238072.1A CN112524059A (zh) 2017-03-29 2018-01-26 真空泵的制造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-065948 2017-03-29
JP2017065948A JP6916412B2 (ja) 2017-03-29 2017-03-29 真空ポンプ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN202011238072.1A Division CN112524059A (zh) 2017-03-29 2018-01-26 真空泵的制造方法

Publications (1)

Publication Number Publication Date
CN108691811A true CN108691811A (zh) 2018-10-23

Family

ID=63672223

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201810078329.8A Pending CN108691811A (zh) 2017-03-29 2018-01-26 真空泵
CN202011238072.1A Pending CN112524059A (zh) 2017-03-29 2018-01-26 真空泵的制造方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN202011238072.1A Pending CN112524059A (zh) 2017-03-29 2018-01-26 真空泵的制造方法

Country Status (3)

Country Link
US (1) US10590958B2 (enExample)
JP (1) JP6916412B2 (enExample)
CN (2) CN108691811A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6916413B2 (ja) * 2017-04-25 2021-08-11 株式会社島津製作所 電源一体型真空ポンプ
CN115870562B (zh) * 2023-03-08 2023-06-02 贵州航宇科技发展股份有限公司 一种切割防脱落装置及筒件切割方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH074384A (ja) * 1993-06-17 1995-01-10 Osaka Shinku Kiki Seisakusho:Kk 複合分子ポンプ
CN103223569A (zh) * 2013-04-26 2013-07-31 马钢(集团)控股有限公司 圆锥破碎机动锥修复方法
CN105275835A (zh) * 2014-06-03 2016-01-27 株式会社岛津制作所 真空泵以及真空泵的制造方法
CN105328420A (zh) * 2015-11-10 2016-02-17 中信重工机械股份有限公司 一种旋回破碎机大型薄壁斜偏心轴套的加工方法
CN106239195A (zh) * 2016-08-18 2016-12-21 武汉船用机械有限责任公司 一种机匣零件的支撑工装

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6412173B1 (en) * 1999-07-26 2002-07-02 Phoenix Analysis And Design Technologies, Inc. Miniature turbomolecular pump
CN201195207Y (zh) * 2008-05-09 2009-02-18 中国北车集团大同电力机车有限责任公司 环类薄壁件装夹装置
CN103084891B (zh) * 2013-02-01 2016-02-03 合肥合锻机床股份有限公司 机械压力机气缸活塞导向环车床加工工装及其使用方法
JP6386737B2 (ja) * 2014-02-04 2018-09-05 エドワーズ株式会社 真空ポンプ
JP6289148B2 (ja) * 2014-02-14 2018-03-07 エドワーズ株式会社 真空ポンプ、及びこの真空ポンプに用いられる断熱スペーサ
JP6287596B2 (ja) * 2014-06-03 2018-03-07 株式会社島津製作所 真空ポンプ
JP6114721B2 (ja) * 2014-08-11 2017-04-12 日本オートマチックマシン株式会社 バイス及びワーククランプ方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH074384A (ja) * 1993-06-17 1995-01-10 Osaka Shinku Kiki Seisakusho:Kk 複合分子ポンプ
CN103223569A (zh) * 2013-04-26 2013-07-31 马钢(集团)控股有限公司 圆锥破碎机动锥修复方法
CN105275835A (zh) * 2014-06-03 2016-01-27 株式会社岛津制作所 真空泵以及真空泵的制造方法
CN105328420A (zh) * 2015-11-10 2016-02-17 中信重工机械股份有限公司 一种旋回破碎机大型薄壁斜偏心轴套的加工方法
CN106239195A (zh) * 2016-08-18 2016-12-21 武汉船用机械有限责任公司 一种机匣零件的支撑工装

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
闫锋等: "结构分析技术在矿用隔爆型水冷电机生产中的应用", 《电气防爆》 *

Also Published As

Publication number Publication date
US10590958B2 (en) 2020-03-17
US20180283400A1 (en) 2018-10-04
JP2018168732A (ja) 2018-11-01
JP6916412B2 (ja) 2021-08-11
CN112524059A (zh) 2021-03-19

Similar Documents

Publication Publication Date Title
JP6666696B2 (ja) 真空ポンプ
US10704555B2 (en) Stator-side member and vacuum pump
KR102214001B1 (ko) 진공 펌프, 및 이 진공 펌프에 이용되는 단열 스페이서
KR20220092858A (ko) 진공 펌프
KR20160037837A (ko) 진공 펌프
US10221863B2 (en) Vacuum pump
CN108691811A (zh) 真空泵
KR20160140576A (ko) 배기구 부품, 및 진공 펌프
TW201643322A (zh) 渦輪分子泵
JP6390479B2 (ja) ターボ分子ポンプ
JP7661225B2 (ja) 多段ターボ分子ポンプ
JP2003269369A (ja) 真空ポンプ
JP2014029130A (ja) 真空ポンプ
EP4130481A1 (en) Vacuum pump and vacuum pump piping structure
JP7147401B2 (ja) ターボ分子ポンプ
JP7480604B2 (ja) 真空ポンプ
WO2014021096A1 (ja) 真空ポンプ
JP5255752B2 (ja) ターボ分子ポンプ
JP2008286179A (ja) ターボ型真空ポンプ、及び該ターボ型真空ポンプを備えた半導体製造装置
JP7689823B2 (ja) 真空ポンプ
JP7671586B2 (ja) 真空ポンプとその回転体
JP2019090398A (ja) 真空ポンプ、および真空ポンプに備わる高温ステータ、ガス排気口
WO2023106154A1 (ja) 真空ポンプおよび良熱伝導性部品
WO2025084255A1 (ja) 真空ポンプ、真空ポンプの回転体及び真空ポンプの上流側の回転翼

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication

Application publication date: 20181023

RJ01 Rejection of invention patent application after publication