JP6901812B2 - Porous pad, vacuum chuck device and method for forming a plane of the porous pad - Google Patents

Description

The present invention relates to a porous pad, a vacuum chuck device, and a method for forming a plane of the porous pad.

Conventionally, a vacuum chuck device that sucks a work by forming a vacuum state with respect to the work to be installed has been known. For example, the vacuum chuck device described in Patent Document 1 has a suction plate (porous pad) having a suction surface on which a work is placed and formed of a porous ceramic, and a negative pressure guide space is formed on the back side of the suction plate. A base plate is provided, and a vacuum pump that sucks the work to the suction plate by setting the negative pressure guide space to a negative pressure is provided.

Japanese Unexamined Patent Publication No. 2014-203904

However, in the configuration of Patent Document 1, even when the work is adsorbed on the suction plate, the position of the work may shift with respect to the suction surface due to an external force applied to the work. Generally, the smaller the contact area between the suction surface of the suction plate and the work, the lower the suction force that the work sticks to the suction plate. Therefore, for example, when the size of the work is small with respect to the suction surface, the position of the work, which is the object to be installed, tends to shift with respect to the suction surface of the suction plate.

The present invention has been made in view of the above-mentioned actual conditions, and is a method for forming a flat surface of a porous pad, a vacuum chuck device, and a porous pad that can prevent the position of an installed object to be displaced with respect to the porous pad. The purpose is to provide.

In order to achieve the above object, the porous pad according to the first aspect of the present invention has a porous ceramic portion having air permeability through which a fluid is formed by forming a plurality of pores, and the porous ceramic portion. It is provided with a non-slip portion formed on the porous ceramic portion so as to come into contact with a part of the installation object to be installed and having a static friction coefficient higher than that of the porous ceramic portion.

Further, in the porous pad, the non-slip portions are arranged along the installation surface of the porous pad on which the installation object is installed, and the porous pad is embedded in the porous ceramic portion. A plurality of tubular portions extending in the thickness direction may be provided.

Further, in the porous pad, the non-slip portion may be formed in a honeycomb shape in which the regular hexagonal tubular portions are arranged along the installation surface.

Further, in the porous pad, the non-slip portion is formed of an elastic body, and the porous ceramic portion includes a first ceramic filling portion filled in the first tubular portion among the plurality of tubular portions, and the plurality of ceramic portions. A second ceramic filling portion, which is filled in the second cylinder portion of the above-mentioned cylinder portion and is formed separately from the first ceramic filling portion, may be provided.

Further, in the porous pad, the porous ceramic portion is opened toward the installation object to be installed on the installation surface, and a groove portion filled with the non-slip portion is formed. Good.

Further, in the porous pad, the non-slip portions are arranged along the installation surface of the porous pad on which the installation object is installed, and the porous pad is embedded in the porous ceramic portion. It may be provided with a plurality of columnar portions extending in the thickness direction.

Further, in the porous pad, the columnar portion is formed in a Y-shape, an X-shape, a V-shape, an H-shape, an L-shape or a T-shape when viewed in the thickness direction of the porous pad. You may do so.

Further, in the porous pad, the non-slip portion may be formed so as to protrude from the installation surface by the amount of protrusion from the porous ceramic portion.

Further, in the porous pad, the protrusion amount may be set to 0.01 mm to 1 mm.

Further, in the porous pad, the non-slip portion may be formed of a silicone resin.

Further, in the porous pad, the area ratio obtained by dividing the contact area where the non-slip portion and a part of the installation object are in contact with the entire area of the porous ceramic portion is 0.10 or more and 0.50. It may be as follows.

In order to achieve the above object, the vacuum chuck device according to the second aspect of the present invention includes the porous pad, a base plate that forms a negative pressure guide space by installing the porous pad, and the negative pressure. It is provided with a vacuum pump that attracts the installation object to the installation surface of the porous pad by supplying a negative pressure to the guide space.

In order to achieve the above object, the method for forming a flat surface of a porous pad according to a third aspect of the present invention includes a step of polishing the installation surface of the porous pad onto a flat surface by a polishing device.

According to the present invention, it is possible to prevent the position of the installed object to be installed from shifting with respect to the porous pad.

It is a perspective view of the machine tool which concerns on one Embodiment of this invention. It is sectional drawing of the vacuum chuck device which concerns on one Embodiment of this invention. It is a top view which shows a part of the installation surface of the porous pad which concerns on one Embodiment of this invention. FIG. 3 is a cross-sectional view taken along the line AA of FIG. It is a figure which shows the part of FIG. 4 enlarged. (A) is a cross-sectional view of the porous pad when the coolant liquid according to the embodiment of the present invention is supplied, and (b) is a cross-sectional view of the porous pad when the coolant liquid according to the comparative example is supplied. It is a figure. It is sectional drawing of the porous pad which concerns on the modification of this invention. It is sectional drawing of the porous pad which concerns on the modification of this invention. It is a top view which shows a part of the installation surface of the porous pad which concerns on the modification of this invention. It is sectional drawing which shows the part of the porous pad which concerns on the modification of this invention in an enlarged manner. It is a top view which shows a part of the installation surface of the porous pad which concerns on the modification of this invention. It is a figure which shows the apparent friction coefficient of the porous pad which concerns on Example of this invention.

An embodiment of the porous pad, the vacuum chuck device, and the method for forming a plane of the porous pad according to the present invention will be described with reference to the drawings.

As shown in FIG. 1, the machine tool 1 includes a vacuum chuck device 10 for fixing a work W, which is an example of an installation object, to an installation surface 20a, a processing unit 40 for processing the fixed work W, and a processing unit 40 during processing. A coolant liquid supply unit 50 for supplying the coolant Clt to the work W is provided. In the following description, the directions orthogonal to each other along the installation surface 20a are defined as the X direction and the Y direction, and the directions orthogonal to the installation surface 20a are defined as the Z direction.

The processing unit 40 includes a tool 41 for cutting or polishing the work W fixed to the vacuum chuck device 10. The coolant liquid supply unit 50 supplies the coolant Clt to the upper surface of the work W in order to cool the frictional heat generated between the tool 41 and the work W during machining.

As shown in FIG. 2, the vacuum chuck device 10 includes a porous pad 20, a base plate 12, and a through-hole plate 15.

The base plate 12 includes a groove 12a that opens upward in the Z direction. The base plate 12 is provided with a porous pad 20 and a through-hole plate 15 so as to close the opening of the groove 12a. The groove 12a constitutes a negative pressure guide space.

The through-hole plate 15 is a metal plate located between the porous pad 20 and the base plate 12. The through-hole plate 15 is arranged in a matrix in the X and Y directions, and a plurality of through holes 15a penetrating in the Z direction are formed.

The porous pad 20 is formed in a plate shape and is located on the upper surface of the through-hole plate 15. The porous pad 20 is breathable to allow fluid to pass through. The specific configuration of the porous pad 20 will be described later.

The vacuum pump 30 is connected to the negative pressure guide space in the groove 12a via the vacuum port 12b. When the vacuum pump 30 operates, the pressure in the negative pressure guide space becomes negative. As a result, the suction force acts on the work W on the installation surface 20a of the porous pad 20, and the work W is sucked on the porous pad 20.

Next, a specific configuration of the porous pad 20 will be described.
As shown in FIGS. 3 and 4, the porous pad 20 includes a porous ceramic portion 25 and a non-slip portion 27.

The porous ceramic portion 25 is formed of, for example, an aggregate made of powder or granular material of an inorganic material such as alumina or silicon carbide and a binder for bonding the aggregates to each other (for example, vitrified bond, resinoid, cement, rubber and glass). Etc.) are put into a molding mold and sintered. The porous ceramic portion 25 has a porous structure in which innumerable fine pores are formed. The porosity (pore density) of the porous ceramic portion 25 can be adjusted by the mixing ratio of the aggregate and the binder, and the average pore diameter can be adjusted by selecting the particle size of the aggregate. it can. The porous ceramic portion 25 allows a liquid fluid such as air or water to pass between the installation surface 20a and the back surface 20b (the surface on the negative pressure guide space side) which is the opposite surface to the installation surface 20a through a series of fine pores. Has breathability.

The non-slip portion 27 has a function of suppressing the work W from slipping on the installation surface 20a through static friction with the work W installed on the installation surface 20a of the porous ceramic portion 25.
The non-slip portion 27 is made of a material that does not allow fluid to pass through, has a higher coefficient of static friction than the porous ceramic portion 25, and is elastically deformed. The non-slip portion 27 is formed of, for example, a high friction material such as natural rubber, synthetic rubber, silicone resin, urethane, elastomer, soft synthetic resin such as vinyl chloride or polyester. In this example, the non-slip portion 27 is made of silicone resin.

The non-slip portion 27 has a plurality of tubular portions 28 extending in the thickness direction of the porous ceramic portion 25, that is, in the Z direction. Each tubular portion 28 is formed so as to be open on both sides in the Z direction and embedded in the porous ceramic portion 25. Each tubular portion 28 has a flow allowance chamber 29 through which a fluid can pass in the Z direction. Each distribution allowance room 29 is an independent space isolated for each cylinder portion 28. Therefore, the fluid does not move between the two adjacent distribution allowance chambers 29.

In this example, the non-slip portion 27 has a honeycomb shape in which regular hexagonal tubular tubular portions 28 are arranged without gaps when viewed from the Z direction. That is, the tubular portion 28 is composed of six wall portions 28a forming a regular hexagon. If the honeycomb diameter is too small, the passage of the fluid in the Z direction may be hindered, and if the honeycomb diameter is too large, the vacuum forming chamber 29b occupying the lower surface of the work W will be described later with reference to FIG. 6A. There is a risk that the proportion of the vacuum will decrease, and eventually the degree of vacuum will decrease. From this point of view, the honeycomb diameter is preferably set to 1 mm to 10 mm, more preferably 1 mm to 5 mm.

As shown in FIG. 4, the first cylindrical portion 281 of the plurality of tubular portions 28 is filled with the first ceramic filling portion 251 of the porous ceramic portions 25. Of the plurality of tubular portions 28, the second tubular portion 282 adjacent to the first tubular portion 281 is filled with the second ceramic filling portion 252 of the porous ceramic portions 25. The first ceramic filling portion 251 and the second ceramic filling portion 252 are formed separately.

As shown in FIG. 5, the non-slip portion 27 is provided so as to project upward by the amount of protrusion H from the porous ceramic portion 25. That is, the lower end surface of the non-slip portion 27 is located on the same plane as the lower surface of the porous ceramic portion 25, and the upper end surface of the non-slip portion 27 is formed higher than the upper surface of the porous ceramic portion 25 by the amount of protrusion H. .. If the protrusion amount H is too small, it may be difficult for the upper end surface of the non-slip portion 27 to come into contact with the work W, and if the protrusion amount H is too large, the work W separates from the porous ceramic portion 25, resulting in an attractive force. May decrease. From such a viewpoint, the protrusion amount H is preferably set to 0.01 mm to 1 mm, more preferably 0.01 mm to 0.05 mm.
Further, if the width W of the non-slip portion 27, that is, the thickness of the wall portion 28a is too large, the passage of the fluid may be hindered, and if it is too small, the contact area between the work W and the non-slip portion 27 is insufficient and the work W It may not be possible to suppress the misalignment of. From such a viewpoint, the width W of the non-slip portion 27 is preferably set to 0.01 mm to 1 mm, more preferably 0.01 mm to 0.5 mm. Further, if the area ratio obtained by dividing the contact area where the non-slip portion 127 and a part of the work W are in contact with the total area of the porous ceramic portion 25 is too large, the passage of the fluid may be hindered, and the area ratio is too small. And the contact area between the work W and the non-slip portion 27 may be insufficient to suppress the displacement of the work W. Therefore, the area ratio is preferably set to 0.10 or more and 0.50 or less.

When the plate-shaped work W is installed on the installation surface 20a of the porous pad 20, the upper end surface of the non-slip portion 27 comes into contact with the lower surface of the work W. Here, the non-slip portion 27 is formed of a silicone resin or the like having a high coefficient of static friction. Therefore, in addition to the suction force associated with the vacuum, it is possible to prevent the position of the work W being machined from shifting in the direction along the installation surface 20a due to the static friction force acting with the work W. The work W is formed in a plate shape by, for example, a metal such as aluminum, a resin, paper, ceramics, a material such as wood, or the like. Specifically, the work W is a solar cell panel, a semiconductor panel, a liquid crystal panel, a printed circuit board, an organic EL (Electro-Luminescence) panel, a glass plate, a film such as a polymer, or the like.
Generally, when the size of the work W is small with respect to the installation surface of the porous pad, the contact area between the work W and the porous pad is small, so that the suction force of the work W to the porous pad tends to be small. The position of the work W is easily displaced. In this regard, in the porous pad 20 according to the present embodiment, even if the work W has a small size, the frictional force by the non-slip portion 27 acts so as to compensate for the decrease in the suction force. Therefore, for example, during processing. The displacement of the work W can be suppressed.

Next, with reference to FIGS. 6A and 6B, the action when the coolant liquid Clt is poured into the work W being processed will be described.
As shown in FIG. 6B, unlike the porous pad 20 of the present embodiment, the porous pad 120 according to the comparative example does not have a non-slip portion 27 and is composed of only the porous ceramic portion 25. .. When the coolant Clt is poured into the work W in a state where the work W is adsorbed on the installation surface 120a of the porous pad 120 according to the comparative example, as shown by the arrow F1 in FIG. 6B, the work W It passes through the porous pad 120 from the upper surface to the side surface. At this time, as shown by the arrow F2 in FIG. 6B, a part of the coolant liquid Clt wraps around the work overlapping region L1 below the work W in the porous pad 120. As a result, the degree of vacuum in the work overlapping region L1 of the porous pad 120 becomes low, which causes a decrease in the suction force.

In this regard, as shown in FIG. 6A, the porous pad 20 according to the present embodiment has a distribution allowance chamber 29 for each cylinder portion 28. The plurality of flow allowance chambers 29 include a liquid passage chamber 29a through which the coolant liquid Clt passes, and a vacuum formation chamber 29b that is closed by the lower surface of the work W to form a vacuum. The liquid passage chamber 29a has at least a part of the opening on the upper side thereof. In this example, the liquid passage chambers 29a overlap the side surface of the work W in the Z direction and are arranged in a frame shape along the side surface of the work W. The upper opening of the vacuum forming chamber 29b is closed by the lower surface of the work W, and the vacuum forming chamber 29b is arranged in a plurality of liquid passage chambers 29a arranged in a frame shape.
When the coolant liquid Clt is poured into the work W adsorbed on the porous pad 20, the coolant liquid Clt passes through the plurality of liquid passage chambers 29a. Therefore, the coolant liquid Clt does not enter the plurality of vacuum forming chambers 29b. Therefore, it is suppressed that a part of the coolant liquid Clt wraps around the work overlapping region L1 of the porous pad 20. As a result, the plurality of vacuum forming chambers 29b that form a vacuum can be isolated from the liquid passing chamber 29a through which the coolant liquid Clt passes. Therefore, the degree of vacuum in the work overlapping region L1 of the porous pad 20 can be increased, and thus the suction force can be increased.

Further, the coolant liquid Clt functions like an air-impermeable film for the work W. That is, the degree of vacuum in the work overlapping region L1 of the porous pad 20 can be increased by surrounding the periphery of the plurality of vacuum forming chambers 29b in which the air-impermeable coolant Clt forms a vacuum. On the other hand, in this respect, in the comparative example of FIG. 6B, a part of the coolant liquid Clt wraps around the work overlapping region L1 of the porous pad 20, so that the air due to the coolant liquid Clt does not pass through the wraparound part. The function is reduced and it becomes easier for air to pass through. Therefore, in the configuration of the comparative example, the degree of vacuum tends to decrease as compared with the configuration of the present embodiment.
The positions and numbers of the liquid passage chamber 29a and the vacuum forming chamber 29b vary depending on the size of the work W or the installation position of the work W.

Next, a method of polishing the installation surface 20a of the porous pad 20 will be described. If the porous pad 20 is used repeatedly, the flatness of the installation surface 20a of the porous pad 20 may be lowered, or unevenness may be formed on the installation surface 20a. Therefore, the installation surface 20a of the porous pad 20 is polished by a polishing device (not shown) so as to be flat. When polishing, the non-slip portion 27 is compressed in the Z direction more than the porous ceramic portion 25. Therefore, the amount of polishing of the non-slip portion 27 is smaller than the amount of polishing of the porous ceramic portion 25. When the compressive force on the non-slip portion 27 by the polishing device is released, the non-slip portion 27 protrudes from the porous ceramic portion 25 by the amount of protrusion H due to the restoring force of the non-slip portion 27. Therefore, even after the installation surface 20a of the porous pad 20 is polished, the non-slip portion 27 can maintain a state in which the non-slip portion 27 protrudes from the porous ceramic portion 25 by the amount of protrusion H. Further, since the non-slip portion 27 is formed over the entire area of the porous ceramic portion 25 in the Z direction, even when the installation surface 20a of the porous pad 20 is repeatedly polished, the non-slip portion 27 provides a non-slip function. Can be maintained.

(effect)
According to the above-described embodiment, the following effects are obtained.

(1) The porous pad 20 is an example of a porous ceramic portion 25 having a breathability through which a fluid is passed by forming a plurality of pores, and an object to be installed installed in the porous ceramic portion 25. It is provided with a non-slip portion 27 formed in the porous ceramic portion 25 so as to come into contact with a part of W and having a static friction coefficient higher than that of the porous ceramic portion 25.
According to this configuration, the non-slip portion 27 can prevent the position of the work W to be installed from shifting with respect to the porous pad 20.
For example, as the contact area between the installation surface 20a of the porous pad 20 and the work W becomes smaller, the suction force that the work W adsorbs to the installation surface 20a decreases. The non-slip portion 27 acts to compensate for the decrease in the suction force due to the small size of the work W. Therefore, regardless of the size of the work W, it is possible to prevent the position of the work W from shifting with respect to the porous pad 20.

(2) The non-slip portions 27 are arranged along the installation surface 20a of the porous pad 20 on which the work W is installed, and are embedded in the porous ceramic portion 25 in the thickness direction (Z direction) of the porous pad 20. ) Is provided with a plurality of tubular portions 28.
According to this configuration, the work W can be easily held by the non-slip portion 27 regardless of the orientation in which the work W is installed with respect to the installation surface 20a.

(3) The non-slip portion 27 is formed in a honeycomb shape in which regular hexagonal tubular tubular portions 28 are arranged along the installation surface 20a.
According to this configuration, the tubular portion 28 includes a plurality of wall portions 28a facing different three directions on the installation surface 20a. Therefore, the work W can be easily held by the non-slip portion 27 regardless of the direction in which the work W is installed with respect to the installation surface 20a.

(4) The non-slip portion 27 is formed of an elastic body. The porous ceramic portion 25 is filled in the first ceramic filling portion 251 of the plurality of tubular portions 28 in the first tubular portion 281 and in the second tubular portion 282 of the plurality of tubular portions 28. A ceramic filling portion 251 and a second ceramic filling portion 252 formed separately from the ceramic filling portion 251 are provided.
According to this configuration, the non-slip portion 27 functions as an elastic body between the separate first ceramic filling portion 251 and the second ceramic filling portion 252. As a result, for example, even when the work W is warped in the X direction or the Y direction, the porous pad 20 is deformed according to the warp of the work W. Therefore, the contact area between the work W and the porous pad 20 can be secured, and the suction force of the work W to the porous pad 20 can be secured.

(5) The non-slip portion 27 is formed so as to protrude from the installation surface 20a by the amount of protrusion H from the porous ceramic portion 25.
According to this configuration, the non-slip portion 27 projects more than the porous ceramic portion 25, so that the non-slip portion 27 can be more reliably brought into contact with the work W.

(6) The protrusion amount H is set to 0.01 mm to 1 mm.
According to this configuration, the work W can be brought into contact with the non-slip portion 27 without separating the work W from the porous ceramic portion 25.

(7) The non-slip portion 27 is formed of a silicone resin.
According to this configuration, since the silicone resin has a high coefficient of static friction, the displacement of the work W can be further suppressed.

(8) The method for forming a flat surface of the porous pad 20 includes a step of polishing the installation surface 20a of the porous pad 20 onto a flat surface by a polishing device.
According to this configuration, when polishing by the polishing apparatus, the non-slip portion 27 is compressed more than the porous ceramic portion 25, so that the non-slip portion 27 protrudes from the porous ceramic portion 25 by the amount of protrusion H even after polishing. It is possible to keep the state of being made. Therefore, even when the installation surface 20a of the porous pad 20 is repeatedly polished, the non-slip portion 27 remains, so that the function of suppressing the displacement of the work W by the non-slip portion 27 can be maintained.

(9) The vacuum chuck device 10 includes a porous pad 20, a base plate 12 that forms a negative pressure guide space by installing the porous pad 20, and a work W by supplying negative pressure to the negative pressure guide space. The vacuum pump 30 is provided on the installation surface 20a of the porous pad 20.
According to this configuration, in the vacuum chuck device 10, the position shift of the work W can be suppressed by the non-slip portion 27.

(Modification example)
In addition, the said embodiment can be carried out in the following embodiments which modified this as appropriate.

In the above embodiment, the non-slip portion 27 is formed over the entire area of the installation surface 20a of the porous pad 20, but may be formed on a part of the installation surface 20a.

In the above embodiment, the machine tool 1 includes the coolant liquid supply unit 50, but the coolant liquid supply unit 50 may be omitted. Even in this case, as shown in FIG. 6A, by isolating the vacuum forming chamber 29b that forms a vacuum from the flow allowance chamber 29 through which air passes, the degree of vacuum and thus the adsorption force can be increased. it can.

In the above embodiment, the processing unit 40 cuts or polishes the work W fixed to the vacuum chuck device 10 through the tool 41, but the present invention is not limited to this, and printing or exposure may be performed on the work W.

In the above embodiment, as shown in FIG. 4, the first ceramic filling portion 251 and the second ceramic filling portion 252 are formed separately by interposing the non-slip portion 27. However, as shown in FIG. 7, the porous ceramic portion 25 may have a groove portion 26 that opens upward, and the non-slip portion 27 may be located in the groove portion 26. In this configuration, the porous ceramic portion 25 can be integrally formed, thereby increasing the rigidity of the porous pad 20 and suppressing the bending of the porous pad 20.
Further, as shown in FIG. 8, the groove portion 26 shown in FIG. 7 may be omitted, and the non-slip portion 27 may be installed on the upper surface of the porous ceramic portion 25 formed in a plate shape. In this case, for example, the thickness of the non-slip portion 27 is set to be the same as the protrusion amount H. Further, the non-slip portion 27 is adhered to the porous ceramic portion 25 with an adhesive.

In the above embodiment, as shown in FIG. 5, the lower end surface of the non-slip portion 27 is located on the same surface as the lower surface of the porous ceramic portion 25, and the upper end surface of the non-slip portion 27 is the porous ceramic portion 25. It was formed so as to protrude by the amount of protrusion H from the upper surface. However, the present invention is not limited to this, and as shown in FIG. 10, the lower end surface of the non-slip portion 27 may also be formed so as to protrude by the amount of protrusion H from the lower surface of the porous ceramic portion 25. According to this configuration, both sides of the porous pad 20 can be used as an installation surface having a non-slip function of the work W.

In the above embodiment, the non-slip portion 27 is formed in a honeycomb shape, but the present invention is not limited to this, and the non-slip portion 27 may be formed in another shape. For example, the tubular portion 28 of the non-slip portion 27 is not limited to a regular hexagonal tubular shape, but may be formed in a quadrangular tubular shape or a cylindrical shape. Further, the non-slip portion 27 may be formed in a shape other than the tubular shape. For example, as shown in FIG. 9, the non-slip portions 127 may be formed in a grid pattern. Specifically, the non-slip portion 127 includes a plurality of first plate portions 127a extending along the X direction and lining up along the Y direction, and a plurality of second plate portions 127a extending along the Y direction and lining up along the X direction. 127b and. The first plate portion 127a and the second plate portion 127b are connected at positions where they intersect each other. In other words, in the non-slip portion 127 shown in FIG. 9, square tubular portions are arranged without gaps in the X direction and the Y direction along the installation surface 20a. The cross-sectional view taken along the line BB of FIG. 9 is the same as that of FIG. 4 of the above embodiment or FIGS. 7, 8 and 10 of the modified example.

In the above embodiment, the non-slip portion 27 is formed in a tubular shape such as a honeycomb shape, but the present invention is not limited to this, and the non-slip portion 27 may be formed in a columnar shape extending along the Z direction. For example, as shown in FIG. 11, the non-slip portion 27 may be composed of a plurality of columnar portions 227 arranged at positions corresponding to the corner portions of the honeycomb. The columnar portion 227 has a Y-shaped shape when viewed from the Z direction, and has a shape extending along the Z direction. As a result, the contact area between the work W and the non-slip portion 27 is reduced, so that the contact pressure is increased and the work W is more reliably fixed. Further, since the plurality of columnar portions 227 are independently separated from each other, the range affected when a part of the non-slip portion 27 is bent can be reduced. Further, when it has a Y-shape, it can be made more resistant to bending than when it is formed in a flat plate shape. The columnar portion 227 is not limited to the Y-shape when viewed from the Z direction, and may be formed in an X-shape, a V-shape, an H-shape, an L-shape, or a T-shape. When the columnar portion 227 has an X-shaped shape, the columnar portion 227 may be arranged at the intersection of the lattices.

Hereinafter, examples of the present invention will be described in comparison with control examples, and the effects of the present invention will be demonstrated. This example shows one embodiment of the present invention, and the present invention is not limited thereto.

In this embodiment, the work W was installed on the porous pad 20 in which the non-slip portion 127 was formed in a grid pattern shown in FIG. 9, and the apparent friction coefficient was measured. For the non-slip portion 127, a silicone resin having a width W = 300 μm was used. Work W used stone and glass.

For the embodiment in which the grid spacing D of the non-slip portion 127 is 10 mm, 5 mm, 3 mm and 1.5 mm, the work W is placed on the installation surface 20a and attracted to the installation surface 20a of the porous pad 20 by the vacuum chuck device 10. did. In this state, the apparent coefficient of friction was measured for each. Further, as a comparative example, the work W was placed on a porous pad having no anti-slip portion 127, and the apparent friction coefficient was measured.

The measurement result of the apparent friction coefficient is shown in FIG. The vertical axis represents the apparent friction coefficient, and the horizontal axis is the area ratio (silicone resin area ratio) obtained by dividing the contact area where the non-slip portion 127 and a part of the work W contact by the total area of the porous ceramic portion 25. ) Is shown. As the interval D becomes smaller, the proportion of the non-slip portion 127 increases. Therefore, the smaller the interval D, the larger the silicone resin area ratio. No groove is the apparent friction coefficient of the comparative example measured by placing the work W on the porous pad 20 having no non-slip portion 127.

This apparent friction coefficient was larger for both stone and glass than when the work W was made of stone and glass and the interval D was 10 mm, as compared with the case without the groove in the comparative example. When the interval D was 5 mm, the apparent friction coefficient of both stone and glass was larger than when the interval D was 10 mm. When the interval D was 3 mm, the apparent friction coefficient of both stone and glass was larger than when the interval D was 5 mm. When the interval D was 1.5 mm, the apparent friction coefficient was larger for stone than when the interval D was 3 mm, but for glass, the apparent friction coefficient was smaller.

From the above results, when the silicone resin area ratio is up to 0.20, the apparent friction coefficient increases as the silicone resin area ratio increases, and when it exceeds 0.20, the apparent friction coefficient is the silicone resin area ratio. It turned out that even if it grows, it does not necessarily grow. From this, it was found that the silicone resin area ratio is preferably 1.10 or more and 1.50 or less.

The present invention allows for various embodiments and modifications without departing from the broad spirit and scope of the present invention. Moreover, the above-described embodiment is for explaining the present invention, and does not limit the scope of the present invention. That is, the scope of the present invention is indicated not by the embodiment but by the claims. Then, various modifications made within the scope of the claims and the equivalent meaning of the invention are considered to be within the scope of the present invention.

This application is based on Japanese Patent Application No. 2018-055693 filed on March 23, 2018. The specification, claims, and the entire drawing of Japanese Patent Application No. 2018-055693 shall be incorporated into this specification as a reference.

1 Machine tool 10 Vacuum chuck device 12 Base plate 12a Groove 12b Vacuum port 15 Through hole plate 15a Through hole 20,120 Porous pad 20a, 120a Installation surface 20b Back surface 25 Porous ceramic part 26 Groove part 27, 127 Non-slip part 227 Columnar part 28 Cylinder 28a Wall 29 Flow allowance chamber 29a Liquid passage chamber 29b Vacuum forming chamber 30 Vacuum pump 40 Machining section 41 Tool 50 Coolant liquid supply section 251 First ceramic filling section 252 Second ceramic filling section 281 First cylinder section 282 2 Cylinder H Overhang amount L1 Work overlapping area W Work Clt Coolant liquid

Claims (11)

A porous ceramic part that allows fluid to pass through by forming multiple pores, and a porous ceramic part that allows fluid to pass through.
The porous formed on the porous ceramic section so as to contact a portion of the setting target object installed in the ceramic part, Bei example and a non-slip portion having a high static coefficient of friction than the porous ceramic section,
The non-slip portions are arranged along the installation surface of the porous pad on which the installation object is installed, and a plurality of columnar portions extending in the thickness direction of the porous pad in a state of being embedded in the porous ceramic portion. With,
Porous pad. A porous ceramic part that allows fluid to pass through by forming multiple pores, and a porous ceramic part that allows fluid to pass through.
A non-slip portion formed in the porous ceramic portion so as to come into contact with a part of an object to be installed installed in the porous ceramic portion and having a higher coefficient of static friction than the porous ceramic portion is provided.
The slip section are aligned along the installation surface of the multi-porous pad the installation object that are installed, a plurality of cylindrical extending in the thickness direction of the porous pad in a state in which the embedded in the porous ceramic section with a part,
The slip section, Ru is formed to project only the projection amount from the installation surface than the porous ceramic section,
Multi-porous pad. The non-slip portion is formed in a honeycomb shape in which the plurality of regular hexagonal tubular portions are arranged along the installation surface.
The porous pad according to claim 2. The non-slip portion is formed of an elastic body and is formed of an elastic body.
The porous ceramic part is
A first ceramic filling portion filled in the first cylinder portion among the plurality of cylinder portions, and a first ceramic filling portion.
A second ceramic filling portion that is filled in the second cylinder portion of the plurality of cylinder portions and is formed separately from the first ceramic filling portion is provided.
The porous pad according to claim 2 or 3. The porous ceramic portion is opened toward the installation object to be installed on the installation surface, and a groove portion filled with the non-slip portion is formed.
The porous pad according to claim 2 or 3. The columnar portion is formed in a Y-shape, an X-shape, a V-shape, an H-shape, an L-shape, or a T-shape when viewed in the thickness direction of the porous pad.
The porous pad according to claim 1. The protrusion amount is set to 0.01 mm to 1 mm.
The porous pad according to any one of claims 2 to 5. The non-slip portion is formed of a silicone resin.
The porous pad according to any one of claims 1 to 7. The area ratio obtained by dividing the contact area where the non-slip portion and a part of the installation object are in contact with the entire area of the porous ceramic portion is 0.10 or more and 0.50 or less.
The porous pad according to any one of claims 1 to 8. The porous pad according to any one of claims 1 to 9,
A base plate that forms a negative pressure guide space by installing the porous pad,
And a vacuum pump for adsorbing the setting target object on the mounting surface of the porous pad by supplying a negative pressure to the negative pressure guide space,
Vacuum chuck device. The method for forming a flat surface of a porous pad according to any one of claims 1 to 9.
Comprising the step of polishing by the polishing apparatus the installation surface of the porous pad to the plane,
A method for forming a flat surface of a porous pad.

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