JP6898105B2 - How to process plate-shaped objects - Google Patents

Description

The present invention relates to a method for processing a plate-shaped material in which a plate-shaped material having a scheduled cutting line is cut by a cutting blade.

As the plate-shaped workpiece is cut, the cutting blade that cuts the workpiece wears. Then, when the tip of the cutting blade is worn and cut into the workpiece, and the blade thickness of the cutting blade varies in the thickness direction of the workpiece, the upper surface side and the lower surface side of the chip produced by cutting are generated. If the chip does not meet the standard that allows this dimensional difference, it will be a defective product.

In order to prevent the production of defective chips, a calf check is performed to check the state of the cutting groove (calf) formed in the workpiece during cutting by optical means, etc., while confirming that the width of the cutting groove is appropriate. There is a cutting method (see, for example, Patent Document 1). However, there is a problem that a state in which the tip of the cutting blade is worn and the width of the cutting groove is narrowed on the lower surface side of the workpiece cannot be detected by this method.

The problem that the exact width of the cutting groove cannot be detected because the width of the cutting groove becomes narrower on the lower surface side of the work piece is that the work piece is a package substrate or the like, and the blade escapes from this package substrate to the holding surface. It occurs remarkably when cutting by sucking and holding on a jig table (for example, see Patent Document 2) in which a groove or the like is formed. This is because when the work piece is cut on the dicing tape by cutting the cutting blade to the dicing tape while the work piece is stuck on the dicing tape, the cutting blade cuts the dicing tape and the work piece. As a result, the material wears evenly in the radial and thickness directions, whereas when the workpiece sucked and held by the jig table is cut with the cutting blade, the cutting blade is more than the radial direction of the cutting blade. This is due to the fact that the cutting blade wears more in the thickness direction.

Japanese Unexamined Patent Publication No. 2010-0806664 Japanese Unexamined Patent Publication No. 2015-5543

In order to deal with the above problem, cutting is performed under the same conditions as when actually processing the workpiece, and the total processing distance of the cutting blade whose dimensional difference of the chip does not become out of specification is found by experiment and experimented. The cutting blade found in the above section with a margin in the total machining distance, that is, a distance shorter than the total machining distance by a predetermined distance, is replaced with a new cutting blade.

However, since the degree of wear of cutting blades varies from individual to individual, in order to prevent the production of defective chips that do not meet the dimensional specifications, the total processing distance to blade replacement is actually set with an excessive margin. There is. Therefore, there is a problem that the cutting blade is frequently replaced, the workability is deteriorated, and the cost of the cutting blade is increased.

Therefore, when a plate-shaped workpiece is cut with a cutting blade, the groove width of the cutting groove on the lower surface side of the workpiece can be easily detected, without producing defective inserts, and the cutting blade. There is a problem that it is possible to control the appropriate replacement timing, improve the work efficiency during cutting, and suppress the increase in cost associated with blade replacement.

The present invention for solving the above problems is a method for processing a plate-shaped object in which a plate-shaped object on which a planned cutting line is set is cut with a cutting blade, and a blade relief groove is formed at the tip of the rotating cutting blade. Position it below the height position of the lower surface of the plate-shaped object directly sucked and held by the provided jig table, and move the cutting blade and the plate-shaped object relative to each other, and use the cutting blade to reach the planned cutting line. The cutting step of cutting the plate-shaped object along the line, and the cutting edge tip of the cutting blade after cutting the plate-shaped object is positioned below the first distance from the height position of the upper surface of the plate-shaped object for inspection. After performing the confirmation cutting groove forming step for forming the confirmation cutting groove by relatively moving the cutting blade and the inspection plate-shaped object and the confirmation cutting groove forming step, the upper surface of the inspection plate-shaped object is performed. Machining of a plate-shaped object provided with a groove width detecting step of detecting the groove width of the cutting groove on the lower surface of the plate-shaped object formed in the cutting step by detecting the groove width of the confirmation cutting groove. The method.

The inspection plate-like material is also used as the plate-like material to be cut in the cutting step, and in the confirmation cutting groove forming step, the cutting line of the plate-like material or the end material portion of the plate-like material is described. It is preferable to cut with a cutting blade to form the confirmation cutting groove.

The method for processing a plate-shaped object according to the present invention further includes a cutting blade replacement step for replacing the cutting blade with a new one when the groove width detected in the groove width detection step falls below an allowable value. Is preferable.
Further, in the method for processing a plate-shaped object according to the present invention, in the groove width detecting step, in addition to detecting the groove width of the cutting groove on the lower surface of the plate-shaped object formed in the cutting step, the cutting step. The groove width of the cutting groove on the upper surface of the plate-shaped object formed by is detected, and from the groove width of the cutting groove on the lower surface of the detected plate-shaped object and the groove width of the cutting groove on the upper surface of the plate-shaped object, It is preferable to calculate the tolerance of the side surface of the manufactured chip.

In the method for processing a plate-shaped object according to the present invention, the tip of the cutting edge of a rotating cutting blade is directly sucked and held by a jig table provided with a blade relief groove, and is placed at a first distance below the height position of the lower surface of the plate-shaped object. A cutting step in which the cutting blade and the plate-like object are moved relative to each other and the plate-like object is cut along the planned cutting line with the cutting blade, and the cutting edge tip of the cutting blade after cutting the plate-like object is inspected. A confirmation cutting groove forming step and a confirmation cutting groove, which are positioned below the height position of the upper surface of the object and the cutting blade and the inspection plate are moved relative to each other to form a confirmation cutting groove. After performing the forming step, by detecting the groove width of the cutting groove for checking the upper surface of the plate-shaped object for inspection, the groove width of the cutting groove on the lower surface of the plate-shaped object formed in the cutting step is detected. Since it is equipped with a detection step, a cutting groove for confirmation is formed by cutting with a cutting blade from the upper surface of the plate-shaped object for inspection by the depth of further cutting from the lower surface of the plate-shaped object to be processed. The groove width of the cutting groove on the lower surface side of the workpiece can be easily detected from the upper surface side of the inspection plate-shaped object by using the confirmation cutting groove.

Further, the method for processing a plate-shaped object according to the present invention further includes a cutting blade replacement step for replacing the cutting blade with a new one when the groove width detected in the groove width detection step falls below an allowable value. It is not necessary to replace the cutting blade with an excessive margin for the total cutting distance, and the cutting blade can be replaced at a more appropriate timing. Therefore, the work efficiency of the cutting process can be improved, and the cost increase due to the blade replacement can be suppressed.
Further, in the method for processing a plate-shaped object according to the present invention, in the groove width detecting step, in addition to detecting the groove width of the cutting groove on the lower surface of the plate-shaped object formed in the cutting step, it is formed in the cutting step. By detecting the groove width of the cutting groove on the upper surface of the plate-shaped object, the tip produced from the groove width of the cutting groove on the lower surface of the detected plate-shaped object and the groove width of the cutting groove on the upper surface of the plate-shaped object. It is possible to calculate the tolerances on the sides of the chip, and it is possible to minimize the production of defective chips whose tolerances deviate from the permissible value.

FIG. 1A is a plan view showing an example of a plate-shaped object to be cut. FIG. 1B is a bottom view showing an example of a plate-shaped object to be cut. It is sectional drawing which shows an example of a cutting apparatus. It is sectional drawing which shows the state which the plate-like object is cut along the line to be cut by a cutting blade. It is sectional drawing which shows the state which shows the state which the cutting blade and the plate-like object are moved relative to each other, and the cutting groove for confirmation is formed. This is an example of a binarized image in which the confirmation cutting groove is displayed as a black line. It is a perspective view which shows the state in which a used cutting blade is replaced with a new cutting blade.

The plate-shaped object W to be cut as shown in FIGS. 1 (A) and 1 (B) is, for example, a package substrate such as a QFN (Quad Flat Non-readed package) substrate. The plate-shaped object W has a frame W1 made of an alloy or the like and having a rectangular outer shape. On the upper surface Wa of the plate-shaped object W shown in FIG. 1 (A), a plurality of device regions Wa1 (three in the illustrated example) are formed as individual chips C including devices by being divided. There is. Each device area Wa1 is surrounded by a scrap portion Wa2 that is fragmented and discarded. The device region Wa1 is partitioned by a plurality of scheduled cutting lines S orthogonal to each other, and a plurality of electrodes S1 connected to each device (not shown) are arranged on the scheduled cutting line S. The electrodes S1 are insulated from each other by the resin J molded on the frame W1. FIG. 1B shows the lower surface Wb of the plate-shaped object W, and the lower surface side of each device region Wa1 shown in FIG. 1A is sealed with a mold resin J that protects the device. The plate-shaped object W includes a mold resin J that seals a device (not shown) by cutting a plurality of electrodes S1 at the center along a line S to be cut, and a plurality of cut electrodes S1. It is divided into chips C.

The cutting device 1 shown in FIG. 2 is a device capable of cutting a plate-shaped object W, and cuts the plate-shaped object W with a holding means 3 for holding the plate-shaped object W and a rotatable cutting blade 60. It is provided with at least a cutting means 6 for cutting. In FIG. 2, the structure of the plate-shaped object W is shown in a simplified manner.

The holding means 3 includes, for example, a jig table 30 having a holding surface 30a for holding the plate-shaped object W, and a jig base 31 on which the jig table 30 is mounted. The holding means 3 can rotate around the axis in the vertical direction (Z-axis direction), and can be reciprocated in the X-axis direction by a cutting feed means (not shown).

The jig table 30 is a rectangular flat plate made of a metal material such as SUS, and the plate-shaped object W can be sucked and held by the holding surface 30a which is the upper surface thereof. On the holding surface 30a, three suction regions composed of a plurality of blade relief grooves 300e and a plurality of suction holes 300c are formed so as to correspond to the three device regions Wa1 of the plate-shaped object W shown in FIG. 1 (A). They are formed side by side at equal distances in the axial direction.

The three suction regions of the jig table 30 are partitioned by blade relief grooves 300e, which are orthogonal to each other. Each blade relief groove 300e is formed to avoid contact between the jig table 30 and the cutting blade 60 when the plate-shaped object W is cut by the cutting blade 60, and the plate-shaped object W is formed by the jig table 30. It is formed on the holding surface 30a so as to be located directly below each scheduled cutting line S shown in FIG. 1 (A) in the held state. Both ends of the blade relief groove 300e are opened so as to pass through the outer periphery of the jig table 30, for example. The width of the blade relief groove 300e is wider than the blade thickness of the cutting blade 60. Therefore, the rotated cutting blade 60 is lowered to the cutting height position for cutting the plate-shaped object W, and the holding means 3 for holding the plate-shaped object W is cut and fed toward the cutting blade 60 to form a plate-like object. Even when the object W is cut from the outer peripheral end to the opposite outer peripheral end, the jig table 30 and the cutting blade 60 do not come into contact with each other.

Suction holes 300c are formed in the central portion of each region defined by the blade relief groove 300e so as to penetrate the jig table 30 in the thickness direction. Each suction hole 300c can suck the chip C shown in FIG. 1 (A) produced by division on a one-to-one basis.

As shown in FIG. 2, the upper surface of the jig base 31 is a double annular mounting surface 31a on which the jig table 30 is mounted. A first suction path 311 communicating with the lower end of each suction hole 300c of the jig table 30 is formed in the central portion of the jig base 31.

On the outer peripheral side of the jig base 31, a second suction path 312 facing the outer region of the lower surface of the jig table 30 when the jig table 30 is placed on the mounting surface 31a of the jig base 31 is formed. ing. The first suction path 311 and the second suction path 312 are independent of each other.

One end of the pipe 320 is connected to the lower end side of the first suction path 311. A suction source 32 including a vacuum generator or the like is connected to the other end of the pipe 320. For example, the first solenoid valve 321 is arranged on the pipe 320, and the first solenoid valve 321 is the pipe 320, the first suction path 311 of the jig base 31, and the suction hole of the jig table 30. It has a function of switching between a state in which the path up to 300c communicates with the suction source 32 and a state in which the path is open to the atmosphere.

For example, a branch pipe 322 branches and extends from the pipe 320, and one end of the branch pipe 322 communicates with a second suction path 312 of the jig base 31. For example, a second solenoid valve 323 is arranged on the branch pipe 322, and the second solenoid valve 323 has a suction source of the branch pipe 322 and the path to the second suction path 312 of the jig base 31. It has a function of switching between a state of communicating with 32 and a state of being open to the atmosphere.

The cutting means 6 is capable of indexing feed in the Y-axis direction and cutting feed in the Z-axis direction. For example, a cutting blade 60 that cuts while rotating on a plate-shaped object W and a cutting blade attached to the tip thereof. It includes at least a rotatable spindle 61 that supports 60.

The cutting blade 60 is, for example, a washer-type cutting blade having an annular outer shape, and diamond abrasive grains are fixed with an appropriate binder. The blade thickness of the cutting blade 60 is, for example, 0.25 mm. The axial direction of the spindle 61 is a direction (Y-axis direction) orthogonal to the moving direction (X-axis direction) of the holding means 3, and the detachable flange 63 and the attachment / detachment flange 63 and the spindle 61 are on the front end side (front side on the paper surface). The cutting blade 60 is fixed by the fixing nut 64. Then, as the spindle 61 is rotationally driven by a motor (not shown), the cutting blade 60 also rotates at high speed. The cutting blade 60 may be, for example, a hub blade including a base metal (hub) made of aluminum and a cutting blade formed so as to project radially outward from the base metal.

For example, in the vicinity of the cutting means 6, an alignment means 7 for detecting the scheduled cutting line S of the plate-shaped object W held by the holding means 3 is arranged. The alignment means 7 includes an image pickup means 70, and can detect the scheduled cutting line S of the upper surface Wa of the plate-shaped object W by image processing such as pattern matching based on the image acquired by the image pickup means 70. For example, the alignment means 7 and the cutting means 6 are integrally formed, and both move in the Y-axis direction and the Z-axis direction in conjunction with each other.

For example, the image pickup means 70 is connected to a determination means 8 which is composed of a CPU and a storage element such as a memory and determines the timing of replacement of the cutting blade 60. The determination means 8 includes a binarization processing unit 80 that binarizes the image captured by the image pickup means 70. Further, in the memory of the determination means 8, the permissible value of the groove width of the cutting groove formed in the plate-shaped object W by cutting is stored in advance. The permissible value of the groove width of the cutting groove is mainly determined according to the value of the blade thickness of the cutting blade 60 and the dimensional tolerance of the tip C formed by cutting the plate-shaped object W. The permissible value of the groove width of the cutting groove is set to, for example, the set blade thickness ± 50 μm of the cutting blade 60, and when the value of the blade thickness of the cutting blade 60 is 0.25 mm as in the present embodiment, the cutting blade 60 When the groove width of the cutting groove is less than 0.2 mm due to abnormal wear such as thinning of the side surface, the determining means 8 determines that the groove width of the cutting groove is out of the permissible value.

Hereinafter, a processing method for cutting the plate-shaped object W using the cutting device 1 shown in FIG. 2 will be described.

(1) Cutting step First, by setting the second solenoid valve 323 shown in FIG. 2 at the communication position and operating the suction source 32, the suction force generated by the suction source 32 is transmitted to the second suction path 312. Then, the jig table 30 is set in a state of being sucked and held on the jig base 31. Then, the plate-shaped object W is placed on the holding surface 30a of the jig table 30 so that the upper surface Wa thereof is on the upper side. By setting the first solenoid valve 321 to the communication position, the suction force generated by the suction source 32 is transmitted to each suction hole 300c, and the plate-shaped object W is suction-held on the holding surface 30a.

For example, the holding means 3 for holding the plate-shaped object W rotates about the axis in the vertical direction so that the longitudinal direction of the plate-shaped object W is the X-axis direction. Next, the holding means 3 for holding the plate-shaped object W is sent in the −X direction, and the region to be processed of the plate-shaped object W is imaged by the imaging means 70. The alignment means 7 detects the Y-axis coordinate position of the planned cutting line S extending in the X-axis direction in which the cutting blade 60 is cut, using the captured image formed by the imaging means 70.

Next, the scheduled cutting line S to be cut and the cutting blade 60 are aligned in the Y-axis direction, and the cutting blade 60 rotates at high speed in the clockwise direction when viewed from the −Y direction side (front side on the paper surface). .. Further, the cutting blade 60 is cut and fed in the −Z direction, and the tip of the cutting edge is below the first distance H1 (for example, 100 μm) from the height position Z1 of the lower surface Wb of the plate-shaped object W shown in FIG. The cutting blade 60 is positioned in this way. The first distance H1 is a distance mainly determined by the value of the blade thickness of the cutting blade 60 (0.25 mm in the present embodiment), and is about half the value of the blade thickness of the cutting blade 60. It is decided.

When the plate-shaped object W shown in FIG. 2 is further fed in the −X direction at a predetermined cutting feed rate, the cutting blade 60 and the plate-shaped object W move relatively in the X-axis direction, and the cutting blade 60 moves. The plate-shaped object W is cut along the scheduled cutting line S, and the plate-shaped object W is cut while forming the cutting groove M0 shown in FIG. At the same time, the tip of the cutting edge of the cutting blade 60, for example, having a rectangular cross section at the beginning, wears so that the cross section becomes R-shaped (arc-shaped).

When the cutting blade 60 finishes cutting one scheduled cutting line S-when the plate-shaped object W is sent to a predetermined position on the X direction side, the cutting feed of the plate-shaped object W is stopped once, and the cutting blade 60 is turned on. The plate-shaped object W is separated from the plate-shaped object W, and then the plate-shaped object W is moved in the + X direction and returned to the origin position. Then, the plate-shaped object W is cut along all the scheduled cutting lines S in the X-axis direction by sequentially performing the same cutting while indexing and feeding the cutting blades 60 in the + Y direction at intervals of the adjacent scheduled cutting lines S. To do.

(2) Confirmation cutting groove forming step For example, after cutting the plate-shaped object W along all the planned cutting lines S in the X-axis direction as described above, the cutting edge tip of the cutting blade 60 is for inspection shown in FIG. The plate-shaped object (in this embodiment, the plate-shaped object W) is positioned below the first distance H1 from the height position Z2 of the upper surface Wa, and the cutting blade 60 and the inspection plate-shaped object are moved relative to each other for confirmation. Form a cutting groove. In addition to performing the confirmation cutting groove forming step after cutting the plate-shaped object W along all the scheduled cutting lines S in the X-axis direction as in the present embodiment, for example, (1) cutting step. In, the plate-shaped object W may be cut along the plurality of scheduled cutting lines S in the X-axis direction, and then before cutting the remaining plurality of scheduled cutting lines S in the X-axis direction. Alternatively, for example, after cutting one plate-shaped object W along all the vertical and horizontal scheduled cutting lines S, and then before starting cutting of another plate-shaped object W scheduled to be cut. You may.

In the present embodiment, the inspection plate-like material that forms the confirmation cutting groove as described above is also used as the plate-like material W, but is not limited thereto. For example, a sub-chuck table is arranged at a position close to the holding means 3, a carbon plate piece or a resin plate piece is held as an inspection plate-like object on the sub-chuck table, and confirmation cutting is performed on the inspection plate-like object. It may form a groove.

As shown in FIG. 4, in the confirmation cutting groove forming step, for example, the cutting blade 60 that rotates clockwise when viewed from the −Y direction side moves in the + Y direction, and the end material portion Wa2 of the plate-shaped object W. It is positioned above. Further, the cutting blade 60 is cut and fed in the −Z direction, and the cutting blade 60 is positioned so that the tip of the cutting edge is below the first distance H1 from the height position Z2 of the upper surface Wa of the plate-shaped object W. .. Then, the plate-shaped object W is sent out to the −X direction side (the back side of the paper surface), so that the cutting blade 60 and the plate-shaped object W move relatively in the X-axis direction, and the cutting blade 60 is a scrap portion. We will cut Wa2. When the plate-shaped object W is sent to a predetermined position on the −X direction side, the cutting feed of the plate-shaped object W is once stopped, and the cutting blade 60 is separated from the plate-shaped object W. As a result, a cutting groove M1 for confirmation having a predetermined length having an R-shaped cross section is formed in the end material portion Wa2 having a depth of H1.
In the present embodiment, as described above, the end material portion Wa2 of the plate-shaped object W is cut by the cutting blade 60 to form a cutting groove for confirmation, but the plate-shaped object W is confirmed by cutting the scheduled cutting line S. It may form a cutting groove for use. Further, the length of the confirmation cutting groove M1 can be arbitrarily determined. For example, when the planned cutting line S of the plate-shaped object W is cut to form the confirmation cutting groove. , A confirmation cutting groove extending from one end to the other end of one scheduled cutting line S may be formed, or a confirmation cutting groove extending halfway of one scheduled cutting line S may be formed.

(3) Groove Width Detection Step For example, the imaging means 70 shown in FIG. 4 moves above the confirmation cutting groove M1 formed in the scrap portion Wa2, and the confirmation cutting groove M1 is within the imaging region of the imaging means 70. Is positioned so that it fits. Then, the imaging means 70 forms an captured image in which the confirmation cutting groove M1 is captured. The image pickup means 70 transfers the data of the captured image in which the confirmation cutting groove M1 is captured to the binarization processing unit 80 of the determination means 8. The binarization processing unit 80 performs, for example, a filter processing using a sharpening filter on the sent captured image, and further performs a binarization processing on the processed image after the filter processing. In the binarization process, for example, in the captured image in which the brightness of one pixel is displayed from 0 to 255, the pixel having a brightness value smaller than the slice level is set to 0, and the pixel having a brightness value higher than the slice level is set to 255. This is a process of converting to the binarized image G1 shown in 5.

As shown in FIG. 5, in the binarized image G1, the confirmation cutting groove M1 is represented by a black line as a set of pixels having a brightness value less than the slice level, and the upper surface Wa of the end material portion Wa2 is sliced. It is displayed as white in the image as a pixel having a brightness value equal to or higher than the level. The determination means 8 calculates the sum of the pixels forming the black line in the binarized image G1 in the Y-axis direction at an arbitrary X coordinate position, and detects this sum as the groove width B1 of the confirmation cutting groove M1. .. The detectable confirmation cutting groove M1 groove width B1 can be equated with the groove width B0 of the cutting groove M0 on the lower surface Wb of the plate-shaped object W shown in FIG. Next, the determination means 8 compares the groove width B1 of the confirmation cutting groove M1 in the binarized image G1 with the permissible value of the groove width of the cutting groove stored in advance in the memory, and determines the confirmation cutting groove M1. It is determined whether or not the groove width B1 is less than the permissible value.

When the determination means 8 determines that the groove width B1 of the confirmation cutting groove M1 is not less than the allowable value of the groove width stored, cutting of the planned cutting line S extending in the Y-axis direction of the plate-shaped object W. Is then executed. That is, after the holding means 3 shown in FIG. 4 is rotated by 90 degrees, the same cutting process as the previous cutting is performed along all the scheduled cutting lines S extending in the Y-axis direction of the plate-shaped object W. The plate-shaped object W is cut vertically and horizontally along all the scheduled cutting lines S, and the plate-shaped object W can be divided into individual chips C including devices.

On the other hand, when the groove width B1 of the confirmation cutting groove M1 is less than the allowable value of the stored groove width, the cutting blade 60 has abnormal wear such as side thinning, so that the upper surface side and the lower surface side and the lower surface are thinned. Since there is a possibility that a chip whose dimensional difference from the side is unacceptable is manufactured, the determination means 8 determines that the cutting blade 60 needs to be replaced with a new one. Therefore, the determination means 8 displays the determination result as a warning on a monitor (not shown) or issues an alarm as a warning.

(4) Cutting blade replacement step When the groove width B1 of the confirmation cutting groove M1 detected in the above (3) groove width detection step is less than the permissible value, for example, an operator who recognizes the judgment by the judgment means 8 , Perform a cutting blade replacement step of replacing the cutting blade 60 with a new cutting blade. First, the rotating spindle 61 is stopped, and the fixing nut 64, which is screwed into the boss portion of the fixing flange 65 inserted into the spindle 61 shown in FIG. 6, is removed from the fixing flange 65. Next, the detachable flange 63 sandwiching the cutting blade 60 together with the fixed flange 65 is removed from the boss portion of the fixed flange 65 so that the cutting blade 60 can be removed from the spindle 61. Further, the used cutting blade 60 is removed from the spindle 61, a new cutting blade is attached to the spindle 61 so as not to be damaged, and the cutting blade 60 is fixed again with the detachable flange 63 and the fixing nut 64.
Instead of replacing the cutting blade 60 with a new cutting blade, the cutting blade 60 may be cut into the dresser board to correct the blade thickness at the tip of the cutting blade 60.

As described above, the method for processing a plate-shaped material according to the present invention includes (1) a cutting step, (2) a cutting groove forming step for confirmation, and (3) a groove width detecting step. A cutting groove M1 for confirmation can be formed by cutting with a cutting blade 60 from the upper surface Wa of the inspection plate-shaped object (plate-shaped object W in this embodiment) by the depth of further cutting from the lower surface Wb of W. By detecting the groove width B1 of the cutting groove M1 for inspection, the groove width B0 of the cutting groove M0 on the lower surface Wb side of the plate-shaped object W can be easily detected from the upper surface Wa side of the plate-shaped object for inspection. ..

When the plate-shaped object W is sucked and held by the jig table 30 shown in FIG. 4 for cutting as in the present embodiment, the plate-shaped object W whose lower surface Wb side is supported by a protective tape or a substrate is used. Abnormal wear such as side thinning is more likely to occur on the cutting blade 60 as compared with the case where the cutting process is performed by sucking and holding with a porous chuck or the like. This is due to the following reasons.
Generally, the cross-sectional shape of a new cutting blade 60 is rectangular. Then, when a plate-like object supported by a protective tape or the like is completely cut by the cutting blade 60, the tip of the cutting edge of the cutting blade 60 is evenly worn on the left and right in the blade thickness direction as the cutting is performed, and its cross-sectional shape Changes to an R shape in which R is about 1/2 of the blade thickness. This is because, in order to completely cut the plate-shaped object, the cutting blade 60 is positioned at a height position where the tip of the cutting edge slightly cuts into the protective tape or the like, and the cutting process is performed. That is, both the side surface of the cutting blade 60 cut into the plate-shaped object and the tip of the cutting edge are always in contact with the plate-shaped object or the protective tape. On the other hand, when the plate-shaped object W is sucked and held by the jig table 30 for cutting as in the present embodiment, as shown in FIG. 3, the cutting edge tip of the rotating cutting blade 60 is used. Since cutting is performed while being accommodated in the blade relief groove 300e, the side surface of the cutting blade 60, which is always in contact with the plate-shaped object W, is more easily worn than the cutting edge tip, unlike the cutting edge tip of the cutting blade 60. As a result, abnormal wear such as side thinning is likely to occur such that R of less than about 1/2 of the blade thickness is formed at the tip of the cutting edge of the cutting blade 60.
Therefore, as in the present embodiment, when the plate-shaped object W is sucked and held by the jig table 30 shown in FIG. 4 for cutting, the method for processing the plate-shaped object according to the present invention is particularly suitable.
Further, when a cutting blade having a thicker blade thickness is used instead of the cutting blade 60 and a plate-shaped object W supported by a protective tape whose lower surface Wb side is thin is sucked and held by a porous chuck or the like for cutting. It is difficult to further cut the cutting blade from the lower surface Wb of the plate-shaped object W by a distance of 1/2 or more of the blade thickness, and abnormal wear of the cutting blade is likely to occur. The method for processing a plate-like object is particularly suitable.

Further, in the method for processing a plate-shaped object according to the present invention, when the groove width detected in (3) the groove width detection step is less than the permissible value, the cutting blade replacement step of replacing the cutting blade 60 with a new one is performed. Further provision makes it unnecessary to replace the cutting blade 60 with an excessive margin for the total cutting distance of the cutting blade 60, and the cutting blade 60 can be replaced at a more appropriate timing. Therefore, the work efficiency of the cutting process can be improved, and the cost increase due to the blade replacement can be suppressed.

The method for processing a plate-shaped object according to the present invention is not limited to the present embodiment, and the configuration of the cutting apparatus 1 shown in the attached drawing is not limited to this, and the present invention is not limited to this. It can be changed as appropriate within the range where the effect of
For example, the method for processing a plate-shaped object according to the present invention may be combined with a conventional calf check (see, for example, Patent Document 1) or the like. That is, in the groove width detection step, in addition to detecting the groove width B1 of the confirmation cutting groove M1, the cutting groove M0 is imaged to detect the groove width of the cutting groove M0 on the upper surface Wa of the plate-shaped object W. The tolerance of the side surface of the manufactured chip C may be calculated from the detected values of the two groove widths.

W: Plate-shaped material Wa: Upper surface of plate-shaped material Wa1: Device area Wa2: End material part S: Scheduled cutting line S1: Electrode C: Chip Wb: Lower surface of plate-shaped material J: Mold resin 1: Cutting device 3: Holding Means 30: Jig table 30a: Holding surface 300c: Suction hole 300e: Blade escape groove
31: Jig base 31a: Mounting surface 311: First suction path 312: Second suction path 32: Suction source 320: Piping 321: First solenoid valve 322: Branch pipe 323: Second solenoid valve 6 : Cutting means 60: Cutting blade 61: Spindle 63: Detachable flange 64: Fixed nut 65: Fixed flange 7: Alignment means 70: Imaging means 8: Judgment means 80: Binarization processing unit

Claims (4)

It is a processing method of a plate-shaped object that cuts a plate-shaped object with a scheduled cutting line with a cutting blade.
The tip of the rotating cutting blade is positioned at a first distance below the height position of the lower surface of the plate-shaped object that is directly sucked and held by a jig table provided with a blade relief groove, and the cutting blade and the plate-shaped object are placed. A cutting step of moving relative to each other and cutting a plate-like object along the planned cutting line with the cutting blade.
The tip of the cutting edge of the cutting blade after cutting the plate-shaped object is positioned below the first distance from the height position of the upper surface of the plate-shaped object for inspection, and the cutting blade and the plate-shaped object for inspection are relative to each other. The confirmation cutting groove formation step to move and form the confirmation cutting groove,
After performing the confirmation cutting groove forming step, by detecting the groove width of the confirmation cutting groove on the upper surface of the inspection plate-shaped object, the cutting groove on the lower surface of the plate-shaped object formed in the cutting step is detected. A method for processing a plate-like object, which comprises a groove width detection step for detecting the groove width of the plate. The inspection plate-like material is also used as a plate-like material to be cut in the cutting step.
The plate according to claim 1, wherein in the confirmation cutting groove forming step, a cutting line of the plate-shaped object or a scrap portion of the plate-shaped object is cut by the cutting blade to form the confirmation cutting groove. Processing method of the state. The plate-shaped object according to claim 1 or 2, further comprising a cutting blade replacement step of replacing the cutting blade with a new one when the groove width detected in the groove width detection step falls below an allowable value. Processing method. In the groove width detection step, in addition to detecting the groove width of the cutting groove on the lower surface of the plate-shaped object formed in the cutting step, the cutting groove on the upper surface of the plate-shaped object formed in the cutting step is detected. Claim 1 is to detect the groove width and calculate the tolerance of the side surface of the produced chip from the groove width of the cutting groove on the lower surface of the detected plate-shaped object and the groove width of the cutting groove on the upper surface of the plate-shaped object. The method for processing a plate-like object according to 2, or 3.

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