JP6896291B2 - タングステンとゲルマニウムの化合物膜及び半導体装置 - Google Patents
タングステンとゲルマニウムの化合物膜及び半導体装置 Download PDFInfo
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- JP6896291B2 JP6896291B2 JP2018524013A JP2018524013A JP6896291B2 JP 6896291 B2 JP6896291 B2 JP 6896291B2 JP 2018524013 A JP2018524013 A JP 2018524013A JP 2018524013 A JP2018524013 A JP 2018524013A JP 6896291 B2 JP6896291 B2 JP 6896291B2
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- germanium
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Description
(2)前記ゲルマニウム/タングステンの組成比が1以上で3.2以下であることを特徴とする前記(1)記載のタングステンとゲルマニウムの化合物膜。
(3)前記(1)または(2)に記載のタングステンとゲルマニウムの化合物膜を備える半導体装置。
(4)半導体基板と、前記タングステンとゲルマニウムの化合物膜との積層構造を備えることを特徴とする前記(3)記載の半導体装置。
(5)半導体基板、前記タングステンとゲルマニウムの化合物膜、金属電極の順で積層された積層構造を備えることを特徴とする前記(4)記載の半導体装置。
(6)半導体基板、ゲルマニウム/タングステンの組成比が1以上で3.2以下であるタングステンとゲルマニウムの化合物膜、金属電極の順で積層された積層構造を備えることを特徴とする半導体装置。
(7)前記半導体基板は、ゲルマニウム基板、シリコン基板、及びシリコンゲルマニウム基板のうちのいずれかであることを特徴とする前記(4)乃至(6)のいずれか1項記載の半導体装置。
(8)タングステンの原料ガスとゲルマニウムの原料ガスを、気相中および基板上の少なくともいずれかで化学反応させることにより、タングステンとゲルマニウムの化合物を前記基板上に作製することを特徴とする前記(1)記載のタングステンとゲルマニウムの化合物膜の製造方法。
(9)タングステンの原料ガスとゲルマニウムの原料ガスを120℃以上270℃以下の温度に保持することを特徴とする前記(8)記載のタングステンとゲルマニウムの化合物膜の製造方法。
(10)タングステンの原料ガスとゲルマニウムの原料ガスを供給して、気相中および基板上の少なくともいずれかで化学反応させ、タングステンとゲルマニウムの化合物を作製する化合物膜の製造装置であって、前記タングステンの原料ガスと前記ゲルマニウムの原料ガスを120℃以上270℃以下の温度に保持する加熱機構を備えることを特徴とするタングステンとゲルマニウムの化合物膜の製造装置。
(式1) (αE)1/2=A(E−EO)
本発明の第1の実施の形態のタングステンゲルマニウム化合物膜について、図を参照して以下説明する。
タングステンゲルマニウム化合物膜の製造には、原料ガスにWF6とGeH4を用いる。成膜室の壁に設置したヒーターを用いて、原料ガスに120℃以上270℃以下の範囲で熱を与えることにより、気相中でWF6とGeH4を反応させて、タングステンゲルマニウム化合物の前駆体となるWGen(n=0.2−6)を合成する。120℃よりも低い温度で加熱すると、WF6とGeH4は反応しない。また、270℃よりも大きい温度で加熱すると、GeH4同士が反応して、アモルファスゲルマニウム膜が形成される。
本実施の形態は、基板表面上の反応のみで製造する場合である。
図5は、GeH4とWF6の基板表面上での反応過程を示す模式図である。図5に示すように、第1の実施の形態の気相中の反応を利用しなくても、タングステンゲルマニウム化合物の薄膜を作製することができる。この時、基板3を120℃以上270℃以下の範囲でヒーター4等により加熱すると、WGen前駆体の凝集を促すことができる。また、120℃よりも低い温度で加熱すると、WF6とGeH4はうまく凝集しない。また、270℃よりも高い温度で加熱すると、GeH4同士が反応して、アモルファスゲルマニウム膜が形成される。
本実施の形態では、タングステンゲルマニウム化合物膜を、半導体装置に適用した構造について図を参照して説明する。
2、42 WGen膜
3 基板
4、28 ヒーター
11 WGe6前駆体
12 WGe6膜
13 半導体基板
24 ガスボンベ
25 ガス流量制御器
26 ガス配管
27 成膜室
29 排気口
30 バルブ
31 基板ステージ
32 圧力計
33、52 Ge基板
34 WGe2膜
35 WGe膜
36 W膜
40 P型Si基板
41 N型Si基板
43 ゲート絶縁膜
44 金属電極
50 SOI基板
51 GOI基板
57 SiO2膜
58 Ge
Claims (9)
- タングステンの原料ガスとゲルマニウムの原料ガスを供給し、その原料ガスまたは基板を120℃以上270℃以下で加熱して化学反応させて前記基板上にタングステンおよびゲルマニウムの化合物膜を前記基板上に形成することを含んでなる方法によって作製される、ゲルマニウム/タングステンの組成比が0.2以上で6未満で、光学的エネルギーギャップを有することを特徴とするタングステンとゲルマニウムの化合物膜。
- 前記ゲルマニウム/タングステンの組成比が1以上で3.2以下であることを特徴とする請求項1記載のタングステンとゲルマニウムの化合物膜。
- 請求項1または2に記載のタングステンとゲルマニウムの化合物膜を備える半導体装置。
- 半導体基板と、前記タングステンとゲルマニウムの化合物膜との積層構造を備えることを特徴とする請求項3記載の半導体装置。
- 半導体基板、前記タングステンとゲルマニウムの化合物膜、金属電極の順で積層された積層構造を備えることを特徴とする請求項4記載の半導体装置。
- 半導体基板、ゲルマニウム/タングステンの組成比が1以上で3.2以下であり、光学的エネルギーギャップが0.12eV以上の前記タングステンとゲルマニウムの化合物膜、金属電極の順で積層された積層構造を備えることを特徴とする請求項5記載の半導体装置。
- 前記半導体基板は、ゲルマニウム基板、シリコン基板、及びシリコンゲルマニウム基板のうちのいずれかであることを特徴とする請求項4〜6のいずれか1項記載の半導体装置。
- タングステンの原料ガスとゲルマニウムの原料ガスを、該原料ガスまたは基板を120℃以上270℃以下で加熱して化学反応させることにより、タングステンとゲルマニウムの化合物膜を前記基板上に形成することを含み、該タングステンとゲルマニウムの化合物膜はゲルマニウム/タングステンの組成比が0.2以上で6未満で、光学的エネルギーギャップを有する、タングステンとゲルマニウムの化合物膜の製造方法。
- 前記タングステンとゲルマニウムの化合物膜は、ゲルマニウム/タングステンの組成比が1以上で3.2以下である、請求項8記載のタングステンとゲルマニウムの化合物膜の製造方法。
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JP2010067387A (ja) * | 2008-09-09 | 2010-03-25 | Canon Inc | 電子源および画像表示装置 |
JP4660743B1 (ja) | 2009-08-21 | 2011-03-30 | 独立行政法人産業技術総合研究所 | 薄膜トランジスタ |
JP2014067804A (ja) | 2012-09-25 | 2014-04-17 | Sharp Corp | 光電変換素子 |
KR101882604B1 (ko) | 2014-05-12 | 2018-08-24 | 내셔날 인스티튜트 오브 어드밴스드 인더스트리얼 사이언스 앤드 테크놀로지 | 결정 배향층 적층 구조체, 전자 메모리 및 결정 배향층 적층 구조체의 제조 방법 |
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