JP6873071B2 - 環境形成装置、環境形成ユニット及び熱処理装置 - Google Patents

環境形成装置、環境形成ユニット及び熱処理装置 Download PDF

Info

Publication number
JP6873071B2
JP6873071B2 JP2018039684A JP2018039684A JP6873071B2 JP 6873071 B2 JP6873071 B2 JP 6873071B2 JP 2018039684 A JP2018039684 A JP 2018039684A JP 2018039684 A JP2018039684 A JP 2018039684A JP 6873071 B2 JP6873071 B2 JP 6873071B2
Authority
JP
Japan
Prior art keywords
air
space
conditioning unit
conditioning
air outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2018039684A
Other languages
English (en)
Japanese (ja)
Other versions
JP2019152407A (ja
JP2019152407A5 (https=
Inventor
斉藤 哲也
哲也 斉藤
研治 桑田
研治 桑田
和広 迫中
和広 迫中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Espec Corp
Original Assignee
Espec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Espec Corp filed Critical Espec Corp
Priority to JP2018039684A priority Critical patent/JP6873071B2/ja
Publication of JP2019152407A publication Critical patent/JP2019152407A/ja
Publication of JP2019152407A5 publication Critical patent/JP2019152407A5/ja
Application granted granted Critical
Publication of JP6873071B2 publication Critical patent/JP6873071B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Furnace Details (AREA)
  • Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
  • Other Air-Conditioning Systems (AREA)
  • Furnace Charging Or Discharging (AREA)
JP2018039684A 2018-03-06 2018-03-06 環境形成装置、環境形成ユニット及び熱処理装置 Active JP6873071B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2018039684A JP6873071B2 (ja) 2018-03-06 2018-03-06 環境形成装置、環境形成ユニット及び熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2018039684A JP6873071B2 (ja) 2018-03-06 2018-03-06 環境形成装置、環境形成ユニット及び熱処理装置

Publications (3)

Publication Number Publication Date
JP2019152407A JP2019152407A (ja) 2019-09-12
JP2019152407A5 JP2019152407A5 (https=) 2020-05-07
JP6873071B2 true JP6873071B2 (ja) 2021-05-19

Family

ID=67948749

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2018039684A Active JP6873071B2 (ja) 2018-03-06 2018-03-06 環境形成装置、環境形成ユニット及び熱処理装置

Country Status (1)

Country Link
JP (1) JP6873071B2 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9568362B2 (en) * 2012-12-19 2017-02-14 Viavi Solutions Inc. Spectroscopic assembly and method
JP7601016B2 (ja) 2022-01-21 2024-12-17 株式会社村田製作所 加熱炉
JP7605494B2 (ja) 2022-06-17 2024-12-24 三建産業株式会社 電気炉
JP7663958B2 (ja) 2022-07-13 2025-04-17 三建産業株式会社 電気炉

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3170237B2 (ja) * 1997-10-21 2001-05-28 タバイエスペック株式会社 平板状ワークの一面を無風加熱できる熱処理装置
DE10001293B4 (de) * 2000-01-14 2008-06-12 WS-Wärmeprozeßtechnik GmbH Röhren-Erhitzerofen
JP3985460B2 (ja) * 2001-03-27 2007-10-03 株式会社村田製作所 熱処理炉
JP2006207958A (ja) * 2005-01-31 2006-08-10 Asahi Glass Co Ltd セラミックス用焼成容器、セラミックス用焼成装置及びセラミックス焼成方法
JP5538740B2 (ja) * 2009-03-18 2014-07-02 光洋サーモシステム株式会社 熱処理装置
JP5408106B2 (ja) * 2010-11-02 2014-02-05 Tdk株式会社 加熱炉
JP5861080B2 (ja) * 2012-04-26 2016-02-16 パナソニックIpマネジメント株式会社 熱風循環式加熱装置

Also Published As

Publication number Publication date
JP2019152407A (ja) 2019-09-12

Similar Documents

Publication Publication Date Title
JP6873071B2 (ja) 環境形成装置、環境形成ユニット及び熱処理装置
CN1159818C (zh) 带有空调装置的配电柜
JP6836045B2 (ja) 手術室の空調システム
AU2014379851A1 (en) Air conditioner
JP2014070748A (ja) クリーンルームの区画方法、クリーンルーム
JP2019152407A5 (https=)
KR20090021160A (ko) 공기 조절 장치
JP7046642B2 (ja) クリーンルーム及びクリーンルームの排気量調整方法
JP2009174828A (ja) 温調用ブース
JP2015004455A (ja) 低温吹出口装置
WO2008038880A1 (en) Annealing apparatus
JP4212689B2 (ja) 置換換気式空気調和装置
US20080317647A1 (en) Autoclaves with Combined Air Flow
JP7580895B2 (ja) クリーンルームの空調システム
JP2015218947A (ja) 空調システム
JP5346768B2 (ja) 電算機室用空調システム
JP2009192314A (ja) 試験装置
CN212362636U (zh) 一种陶瓷烘干房
TW202305290A (zh) 暖氣機
JP2015094500A (ja) 放熱器及びこれを用いた空調システム
JP2007178065A (ja) クリーンルーム用還気装置
JPH04203833A (ja) 空調システム
JP6464482B2 (ja) 空調システム
JP2010048467A (ja) 板状体冷却装置及び熱処理システム
JP5680914B2 (ja) 冷却システム

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20200220

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20200220

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20200330

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20210118

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20210128

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20210322

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20210409

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20210420

R150 Certificate of patent or registration of utility model

Ref document number: 6873071

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250