JP6861756B2 - 油圧駆動システム、仕切りバルブ - Google Patents

油圧駆動システム、仕切りバルブ Download PDF

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Publication number
JP6861756B2
JP6861756B2 JP2019086579A JP2019086579A JP6861756B2 JP 6861756 B2 JP6861756 B2 JP 6861756B2 JP 2019086579 A JP2019086579 A JP 2019086579A JP 2019086579 A JP2019086579 A JP 2019086579A JP 6861756 B2 JP6861756 B2 JP 6861756B2
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JP
Japan
Prior art keywords
valve
hydraulic
urging
drive
motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019086579A
Other languages
English (en)
Japanese (ja)
Other versions
JP2020183764A (ja
Inventor
真之介 徳平
真之介 徳平
英晃 井上
英晃 井上
浩司 柴山
浩司 柴山
拓也 和出
拓也 和出
晴邦 古瀬
晴邦 古瀬
治郎 猿渡
治郎 猿渡
幹也 鐸木
幹也 鐸木
慎一 和田
慎一 和田
敬晶 照井
敬晶 照井
聖也 迫田
聖也 迫田
智也 石田
智也 石田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP2019086579A priority Critical patent/JP6861756B2/ja
Priority to KR1020200048781A priority patent/KR20200125490A/ko
Priority to TW109113468A priority patent/TWI754264B/zh
Priority to CN202010320885.9A priority patent/CN111853264B/zh
Publication of JP2020183764A publication Critical patent/JP2020183764A/ja
Application granted granted Critical
Publication of JP6861756B2 publication Critical patent/JP6861756B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/042—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/044—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by electrically-controlled means, e.g. solenoids, torque-motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K26/00—Machines adapted to function as torque motors, i.e. to exert a torque when stalled
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K29/00—Motors or generators having non-mechanical commutating devices, e.g. discharge tubes or semiconductor devices
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/10—Structural association with clutches, brakes, gears, pulleys or mechanical starters
    • H02K7/102—Structural association with clutches, brakes, gears, pulleys or mechanical starters with friction brakes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00—Circuits for servomotor systems
    • F15B2211/80—Other types of control related to particular problems or conditions
    • F15B2211/89—Control specific for achieving vacuum or "negative pressure"

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Actuator (AREA)
  • Sliding Valves (AREA)
  • Fluid-Driven Valves (AREA)
  • Details Of Valves (AREA)
  • Braking Arrangements (AREA)
JP2019086579A 2019-04-26 2019-04-26 油圧駆動システム、仕切りバルブ Active JP6861756B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2019086579A JP6861756B2 (ja) 2019-04-26 2019-04-26 油圧駆動システム、仕切りバルブ
KR1020200048781A KR20200125490A (ko) 2019-04-26 2020-04-22 유압구동 시스템, 게이트 밸브
TW109113468A TWI754264B (zh) 2019-04-26 2020-04-22 油壓驅動系統及閘閥
CN202010320885.9A CN111853264B (zh) 2019-04-26 2020-04-22 油压驱动系统及闸阀

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019086579A JP6861756B2 (ja) 2019-04-26 2019-04-26 油圧駆動システム、仕切りバルブ

Publications (2)

Publication Number Publication Date
JP2020183764A JP2020183764A (ja) 2020-11-12
JP6861756B2 true JP6861756B2 (ja) 2021-04-21

Family

ID=72985647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019086579A Active JP6861756B2 (ja) 2019-04-26 2019-04-26 油圧駆動システム、仕切りバルブ

Country Status (4)

Country Link
JP (1) JP6861756B2 (zh)
KR (1) KR20200125490A (zh)
CN (1) CN111853264B (zh)
TW (1) TWI754264B (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6878495B2 (ja) * 2019-04-26 2021-05-26 株式会社アルバック 油圧駆動システム、仕切りバルブ

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5699820A (en) 1979-12-31 1981-08-11 Kokusan Kinzoku Kogyo Co Ltd Gas cap
US4871143A (en) * 1989-02-15 1989-10-03 Cameron Iron Works Usa, Inc. Gate valve with supplemental actuator
JP4196293B2 (ja) * 2004-08-02 2008-12-17 Ｓｍｃ株式会社 真空調圧用バルブ
JP5005512B2 (ja) * 2007-11-07 2012-08-22 東京エレクトロン株式会社 ゲートバルブ装置および真空処理装置およびゲートバルブ装置における弁体の開放方法。
TW201124655A (en) * 2009-09-03 2011-07-16 Ulvac Inc Gate valve
CN103403416B (zh) * 2011-03-10 2015-09-23 株式会社爱发科 切断阀及滑阀
EP2551564A1 (de) * 2011-07-28 2013-01-30 VAT Holding AG Ventil zum im Wesentlichen gasdichten Unterbrechen eines Fliesswegs
JP2017053370A (ja) * 2015-09-07 2017-03-16 株式会社東芝 バルブおよび半導体製造装置
TWI666401B (zh) * 2016-10-04 2019-07-21 日商愛發科股份有限公司 閘閥
JP6819304B2 (ja) * 2017-01-12 2021-01-27 株式会社島津製作所 真空バルブ、真空ポンプおよび真空排気システム

Also Published As

Publication number Publication date
TWI754264B (zh) 2022-02-01
KR20200125490A (ko) 2020-11-04
TW202111236A (zh) 2021-03-16
JP2020183764A (ja) 2020-11-12
CN111853264B (zh) 2022-01-14
CN111853264A (zh) 2020-10-30

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