JP6853441B2 - Magnetic sensor element, magnetic detector, motor with magnetic sensor element and device with magnetic detector - Google Patents

Description

The present invention relates to a magnetic sensor element including an excitation coil and a signal coil, and a magnetic detector having the same.

A magnetic sensor element equipped with an excitation coil and a differential coil (two signal coils connected differentially) is a rotation measurement, displacement measurement, magnetic flaw detection, eddy current flaw detection, coin identification, proximity detection, geomagnetic measurement, etc. It is used in various fields such as wire rope inspection and food foreign matter detection. In the field of wire rope inspection, a method is generally used in which a magnetic detector is brought into close contact with the wire rope from the side surface of the wire rope, and the wire rope is magnetized by a permanent magnet or an electromagnet to detect a magnetic field in which damage occurs by a magnetic sensor element. (See, for example, international publication number WO2008 / 093410).

International Publication No. WO2008 / 093410

However, in the method of magnetizing the wire rope with a permanent magnet or an electromagnet, the magnetic detector becomes heavy because the wire rope has the permanent magnet or the electromagnet. Furthermore, the inspection requires careful handling because the magnetic detector needs to be brought into close contact with the wire rope. Therefore, there is a demand for a lightweight magnetic detector for wire rope inspection that can be used without contact with the wire rope.

The present invention has been made to solve the above-mentioned problems, and one object of the present invention is to provide a magnetic sensor element capable of solving the problems related to a magnetic detector for wire rope inspection. is there.

Means to solve problems

In order to achieve the above object, the magnetic sensor element 4 which is the magnetic sensor element according to the present invention has at least one substrate 10 made of a non-magnetic insulator and at least one flat-wound excitation coil 1 made of a non-magnetic conductor. And at least one signal coil 2 (corresponding to the first signal coil) made of a non-magnetic conductor, the substrate 10, the excitation coil 1 and the signal coil 2 form a stack, and the excitation coil 1 is formed. It has a compartment 1w that generates an excitation magnetic field 51 in a direction parallel to the surface of the excitation coil 1, and the signal coil 2 is formed in the compartment 1w when viewed from a direction orthogonal to the plane of the compartment 1w. And.
As a result, the magnetic sensor element 4 can apply the exciting magnetic field 51 to the wire rope W in the axial direction of the wire rope W from the side surface of the wire rope W. Further, since the magnetic sensor element 4 brings the compartment 1w of the excitation coil 1, the signal coil 2, and the wire rope W close to each other, the induced magnetic field 52 generated from the damage of the wire rope W can be detected with high sensitivity. ..

Furthermore, the excitation coil 1 and the signal coil 2 constituting the magnetic sensor element 4 can be formed in the same layer on the substrate 10. As a result, the magnetic sensor element 4 can be widely used in various fields because the process of forming the excitation coil 1 and the signal coil 2 is simplified and various film forming techniques can be utilized.

Furthermore, the signal coil 2 constituting the magnetic sensor element 4 can be formed not only in a direction in which the coil surface is parallel to the surface of the substrate 10 but also in a direction orthogonal to the surface of the substrate 10. As a result, the magnetic sensor element 4 can detect not only the direction orthogonal to the axis of the wire rope W but also the axial direction of the wire rope W with respect to the induced magnetic field 52 generated from the damage of the wire rope W. In addition to the wire disconnection 54, it is possible to detect a decrease in the diameter of the wire rope W due to wear, internal disconnection, rust, etc., as well as loosening, abnormal vibration, and the like.

Furthermore, the magnetic sensor element 4 can use the alternating current excitation magnetic field 51 to excite the wire rope W to obtain a signal. Therefore, the synchronous rectification method used in various fields can be used for the controller 40 for the magnetic sensor element 4. Since the magnetic detector 100 including the magnetic sensor element 4 and the synchronous rectification type controller 40 can detect a minute signal, the wire rope W can be inspected for damage without contacting the wire rope W. It will be possible. Therefore, the magnetic detector using the magnetic sensor element according to the present invention can be made lightweight because it does not require a magnet or an electromagnet in its configuration.

Effect of the invention

It is possible to provide a magnetic sensor element that realizes a lightweight magnetic detector for wire rope inspection that can be used in a non-contact manner with a wire rope.
Furthermore, by using the magnetic sensor element according to the present invention, it is possible to add advantages such as miniaturization and simplification to a device having a rotating shaft such as a motor and an encoder.
Furthermore, if a magnetic detector having a magnetic sensor element according to the present invention is used, rotation measurement, displacement measurement, magnetic flaw detection, eddy current flaw detection, coin identification, proximity detection, geomagnetic measurement, wire rope inspection, food foreign matter detection In fields such as stress detection and games, it is possible to add advantages such as light weight, small size, thinness, simplicity, high performance, power saving, new functions, non-contact, excellent productivity, and low cost. Become.
Furthermore, if the magnetic detector according to the present invention is used, even in devices such as motors, encoders, vehicles, elevators, escalators, cranes, robots, and game machines, small size, high performance, and new functions can be obtained and safety. , It is possible to add advantages such as peace of mind.

It is a figure explaining Embodiment 1 of the magnetic sensor element of this invention. It is a figure explaining Embodiment 2 of the magnetic sensor element of this invention. It is a figure explaining Embodiment 3 of the magnetic sensor element of this invention. It is a figure explaining Embodiment 4 of the magnetic sensor element of this invention. It is a front view and the side view explaining the double winding of the excitation coil 1. It is a front view and the side view explaining the double winding of the 1st flat winding signal coil. It is a perspective view explaining the detour wiring 6. It is a figure explaining the double winding of the 1st vertical winding signal coil. It is a block diagram of the controller 40 for the magnetic sensor element which concerns on this invention. It is another block diagram of the controller 40 for the magnetic sensor element which concerns on this invention. It is a conceptual diagram explaining the direction of the excitation magnetic field 51 generated by the excitation coil 1. It is a conceptual diagram of the detection principle of an induced magnetic field 52. It is a signal waveform diagram obtained by detecting an induced magnetic field 52. It is another conceptual diagram of the detection principle of an induced magnetic field 52. It is another signal waveform figure obtained by detecting an induced magnetic field 52. It is a conceptual diagram explaining the inspection method of one wire rope W. It is a perspective view explaining Embodiment 1 of the magnetic detector of this invention. It is a conceptual diagram of the detection principle of the wire disconnection 54 of the wire rope W. It is a signal waveform diagram obtained from the wire disconnection 54 of the wire rope W. It is a perspective view explaining Embodiment 5 of the magnetic sensor element of this invention. It is a perspective view explaining Embodiment 6 of the magnetic sensor element of this invention. It is a figure explaining Embodiment 7 of the magnetic sensor element of this invention. It is a perspective view explaining the inspection method of three wire ropes W. It is a conceptual diagram explaining the detection principle of an eddy current magnetic field 62. It is a signal waveform diagram obtained by detecting an eddy current magnetic field 62. It is a perspective view explaining Embodiment 1 of the apparatus which has a magnetic detector. It is a perspective view explaining Embodiment 2 of the apparatus which has a magnetic detector. It is a perspective view explaining Embodiment 3 of the apparatus which has a magnetic detector. It is a perspective view explaining Embodiment 2 of the magnetic detector of this invention. It is a perspective view explaining Embodiment 8 of the magnetic sensor element of this invention. It is a perspective view explaining Embodiment 4 of the apparatus which has a magnetic detector. It is a figure explaining embodiment 10 of the magnetic sensor element of this invention. It is a figure explaining embodiment 11 of the magnetic sensor element of this invention. It is another conceptual diagram of the detection principle of the wire disconnection 54 of the wire rope W. It is another signal waveform diagram obtained from the wire disconnection 54 of the wire rope W. It is a figure explaining embodiment 12 of the magnetic sensor element of this invention. It is a perspective view explaining Embodiment 13 of the magnetic sensor element of this invention. It is a perspective view explaining Embodiment 1 of the apparatus which has a rotating shaft of this invention.

Hereinafter, embodiments embodying the present invention, the actions and effects of the embodiments of the present invention, and methods of using the present invention in various fields will be described with reference to the drawings.

As the substrate 10 constituting the magnetic sensor element according to the present invention, when the substrate 10 is a non-magnetic insulator, a printed wiring board, a flexible printed wiring board, a glass substrate, a ceramic substrate, or the like can be used. is there. For example, in the case of printed wiring boards, JIS C 5010: 1994 printed wiring board general rules, JIS C 6480: 1994 copper-clad laminated board general rules for printed wiring boards, JIS C 5013: 1996 single-sided and double-sided printed wiring boards, JIS C 5014: A printed wiring board or a flexible printed wiring board specified in 1994 multilayer printed wiring board, JIS5017: 1994 flexible printed wiring board, etc. can be used. When the substrate 10 is made of a non-magnetic insulator, various materials such as iron alloy, permalloy, and phosphor bronze can be used.
An example of the excitation wiring path 8 is shown by a coil-shaped one, that is, an embodiment in which the excitation coil 1 is used, except for the embodiment 12 of the magnetic sensor element of the present invention shown in FIG.

(Embodiment 1 of the magnetic sensor element of the present invention)
1 (a) to 1 (e) are views for explaining the first embodiment of the magnetic sensor element of the present invention. Here, FIG. 1A is a perspective view of the magnetic sensor element 4, FIG. 1B is a perspective view of the excitation coil 1 and the signal coil 2, and FIG. 1C is a front view of the excitation coil 1 and the signal coil 2. 1 (d) is a front view and a side view of the excitation coil 1, and FIG. 1 (e) is a front view and a side view of the signal coil 2.
As shown in FIGS. 1A to 1E, the magnetic sensor element 4 is a substrate 10 formed of a glass cloth base material epoxy resin and an excitation coil formed of a copper foil on the upper surface side of the substrate 10. 1 and a signal coil 2 (corresponding to the first signal coil) formed of copper foil on the upper surface side of the substrate 10 are provided. The excitation coil 1 is formed including a compartment 1w made of a copper foil having a wide width in a direction orthogonal to the flow direction of the excitation current 50 applied to the excitation coil 1. The signal coil 2 is formed in the compartment 1w in the same layer as the excitation coil 1 near the center of the compartment 1w when viewed from a direction orthogonal to the plane of the compartment 1w.
Then, as shown in FIG. 1D, the excitation coil 1 is formed as a one-time flat-winding coil by a configuration of a winding start 1s, a coil body 1b, and a winding end 1e. As shown in FIG. 1 (e), the signal coil 2 is formed as a one-time flat winding coil by a configuration of a winding start 2s, a main body 2b, and a winding end 2e.
The signal coil 2 described here is referred to as a first flat-wound signal coil.

(Embodiment 2 of the magnetic sensor element of the present invention)
2 (a) to 2 (e) are views for explaining the second embodiment of the magnetic sensor element of the present invention. Here, FIG. 2A is a perspective view of the magnetic sensor element 4, FIG. 2B is a perspective view of the excitation coil 1 and the signal coil 2, and FIG. 2C is a front view of the excitation coil 1 and the signal coil 2. 2 (d) is a front view and a side view of the excitation coil 1, and FIG. 2 (e) is a front view and a side view of the signal coil 2.
As shown in FIGS. 2A to 2E, the magnetic sensor element 4 is a substrate 10 formed of a glass cloth base material epoxy resin and an excitation coil formed of a copper foil on the lower surface side of the substrate 10. 1 and a signal coil 2 (corresponding to the first signal coil) formed of copper foil on the upper surface side of the substrate 10 are provided. The excitation coil 1 is formed including a compartment 1w made of a copper foil having a wide width in a direction orthogonal to the flow direction of the excitation current 50 applied to the excitation coil 1. The signal coil 2 is formed in the compartment 1w near the center of the compartment 1w when viewed from a direction orthogonal to the plane of the compartment 1w.
Then, as shown in FIG. 2D, the excitation coil 1 is formed as a one-time flat-winding coil with a configuration of a winding start 1s, a coil body 1b, and a winding end 1e. As shown in FIG. 2E, the signal coil 2 is formed as a one-time flat winding coil by the configuration of winding start 2s, main body 2b and winding end 2e.
The signal coil 2 described here is also referred to as a first flat-wound signal coil.

(Embodiment 3 of the magnetic sensor element of the present invention)
3 (a) to 3 (e) are views for explaining the third embodiment of the magnetic sensor element of the present invention. Here, FIG. 3A is a perspective view of the magnetic sensor element 4, FIG. 3B is a perspective view of the excitation coil 1 and the signal coil 2, and FIG. 3C is a front view of the excitation coil 1 and the signal coil 2. 3 (d) is a front view and a side view of the excitation coil 1, and FIG. 3 (e) is a front view and a side view of the signal coil 2.
As shown in FIGS. 3A to 3E, the magnetic sensor element 4 includes a substrate 10 formed of a glass cloth base material epoxy resin and an excitation coil 1 formed of a copper foil on the lower surface side of the substrate 10. And a signal coil 2 (corresponding to the first signal coil) formed by including a copper foil of the same layer as the layer on which the excitation coil 1 is formed. The excitation coil 1 is formed including a compartment 1w made of a copper foil having a wide width in a direction orthogonal to the flow direction of the excitation current 50 applied to the excitation coil 1. The signal coil 2 is formed in the compartment 1w near the center of the compartment 1w when viewed from a direction orthogonal to the plane of the compartment 1w.
Then, as shown in FIG. 3D, the excitation coil 1 is formed as a one-time flat-winding coil with a configuration of a winding start 1s, a coil body 1b, and a winding end 1e. As shown in FIG. 3E, the signal coil 2 is formed as a one-turn coil having a configuration of a winding start 2s, a coil body 2b, and a winding end 2e.
Then, as shown in FIG. 3E, the signal coil 2 is a copper foil 2_L1 in the same layer as the layer on which the excitation coil 1 is formed (corresponding to the first non-magnetic conductor formed in the first layer). And the plated through hole that electrically connects the copper foil 2_L2 (corresponding to the second non-magnetic conductor formed in the second layer) on the upper surface side of the substrate 10 and the copper foil 2_L1 and the copper foil 2_L2. It is formed of copper foil 2_sh (corresponding to a third non-magnetic conductor that electrically connects the first non-magnetic conductor and the second non-magnetic conductor).
The signal coil 2 described here is referred to as a first vertically wound signal coil.

(Embodiment 4 of the magnetic sensor element of the present invention)
4 (a) to 4 (e) are views for explaining the fourth embodiment of the magnetic sensor element of the present invention. Here, FIG. 4A is a perspective view of the magnetic sensor element 4, FIG. 4B is a perspective view of the excitation coil 1 and the signal coil 2, and FIG. 4C is a front view of the excitation coil 1 and the signal coil 2. 4 (d) is a front view and a side view of the excitation coil 1, and FIG. 4 (e) is a front view and a side view of the signal coil 2.
As shown in FIGS. 4A to 4E, the magnetic sensor element 4 includes a substrate 10 formed of a glass cloth base material epoxy resin and an excitation coil 1 formed of a copper foil on the lower surface of the substrate 10. And a signal coil 2 (corresponding to the first signal coil) formed of copper foil in a layer different from the layer on which the excitation coil 1 is formed. The excitation coil 1 is formed including a compartment 1w made of a copper foil having a wide width in a direction orthogonal to the flow direction of the excitation current 50 applied to the excitation coil 1. The signal coil 2 is formed in the compartment 1w near the center of the compartment 1w when viewed from a direction orthogonal to the plane of the compartment 1w.
Then, as shown in FIG. 4D, the excitation coil 1 is formed as a one-time flat-winding coil with a configuration of a winding start 1s, a coil body 1b, and a winding end 1e. As shown in FIG. 4E, the signal coil 2 is formed as a one-turn coil having a configuration of a winding start 2s, a coil body 2b, and a winding end 2e.
Then, as shown in FIG. 4E, the signal coil 2 corresponds to the copper foil 2_L1 (corresponding to the first non-magnetic conductor formed in the first layer) in a layer different from the layer in which the excitation coil 1 is formed. , And another layer of copper foil 2_L2 (corresponding to the second non-magnetic conductor formed in the second layer), and a plating through hole that electrically connects the copper foil 2_L1 and the copper foil 2_L2. Copper foil 2_sh (corresponding to a third non-magnetic conductor that electrically connects the first non-magnetic conductor and the second non-magnetic conductor).
The signal coil 2 described here is also referred to as a first vertically wound signal coil.

(About two windings of excitation coil 1)
FIG. 5 is a front view and a side view for explaining the double winding of the excitation coil 1. As shown in FIG. 5, the excitation coil 1 is formed by a configuration of a coil body 1b that is flat-wound twice at the beginning of winding 1s and 1e at the end of winding. Further, in the coil main body 1b, a wide section 1w is formed by using a copper foil having a wide width in a direction orthogonal to the direction in which the excitation current 50 flows.
Although it is twice in the above example, the excitation coil 1 may form the compartment 1w by flat winding three times or more a plurality of times.
The excitation coil 1 may be a polygon other than a quadrangle, a circle, an ellipse, a star, or the like, and does not necessarily have to be a quadrangle. The shape may be determined based on the required functional performance.

(About double winding of the first flat winding signal coil, etc.)
FIG. 6 is a front view and a side view illustrating two windings of the first flat winding signal coil.
As shown in FIG. 6, the signal coil 2 is formed by a configuration of a coil body 2b that is flat-wound twice at the beginning of winding 2s and a coil body 2e that is wound at the end of winding 2e.
Although it is twice in the above example, the signal coil 2 may be formed by flat winding three times or more a plurality of times. The signal coil 2 can output a larger signal by winding it a plurality of times.
FIG. 7 is a perspective view illustrating the detour wiring 6. It is one of the means for extracting a signal from the end of winding of the first flat winding signal coil of two turns.
As shown in FIG. 7, the detour wiring 6 includes a winding end 2e, a plating through hole, a copper foil in a layer different from the winding end 2e formed inside the signal coil 2, a plating through hole, and a signal. It is formed by connecting the copper foils formed in the vicinity of the winding start 2s of the coil 2 in this order.
By the same method, even in the excitation coil 1 which is flat-wound a plurality of times, the wiring can be taken out from the winding end 1e formed inside the excitation coil 1 in the vicinity of the winding start 1s of the excitation coil 1.
The signal coil 2 may be a polygon other than a quadrangle, a circle, an ellipse, a star, or the like, and does not necessarily have to be a quadrangle. The shape may be determined based on the required functional performance.

(Example of double winding of the first vertical winding signal coil)
8 (a) and 8 (b) are views for explaining the double winding of the first vertical winding signal coil. Here, FIG. 8A is a three-view view of the signal coil 2, and FIG. 8B is a perspective view of the signal coil 2.
As shown in FIG. 8A, the signal coil 2 is formed by a configuration of a winding start 2s, a coil body 2b, and a winding end 2e.
Then, as shown in FIG. 8B, the signal coil 2 has a winding start 2s, a copper foil 2_L2, a plating through hole 2_sh, a copper foil 2_L1, a plating through hole 2_sh, a copper foil 2_L2, a plating through hole 2_sh, and a copper foil 2_L1. , Plated through hole 2_sh, copper foil 2_L2, and winding end 2e, which are connected in this order to form a double-wound coil.
In the above example, it is wound twice, but it may be wound three times or more a plurality of times.

(About non-magnetic conductors)
As the non-magnetic conductor, in addition to copper, aluminum, a copper alloy, an aluminum alloy, or the like that is generally used in industry can be used.

(Control for magnetic sensor element 4)
FIG. 9 is a block diagram of the controller 40 for the magnetic sensor element according to the present invention.
As shown in FIG. 9, the controller 40 is composed of an AC amplification unit 40a, a microcomputer unit 40b, an excitation unit 40c, a power supply unit 40d, and an input / output unit 40e.
The excitation unit 40c is electrically connected to the winding start 1s and the winding end 1e of the excitation coil 1 by wiring. The excitation unit 40c receives an instruction from the microcomputer unit 40b and applies an alternating current to the excitation coil 1.
The AC amplification unit 40a is electrically connected to the winding start 2s and the winding end 2e of the signal coil 2 by wiring, amplifies the AC signal output from the signal coil 2, and outputs the AC signal to the microcomputer unit 40b.
The microcomputer unit 40b AD-converts the signal sent from the AC amplifier 40a, performs synchronous rectification processing, and sends the processing result to the input / output unit 40e.
The input / output unit 40e electrically converts the processing result sent from the microcomputer unit 40b into an external device so that it can be transmitted and received to and from the external device, and outputs the digital data to the external device.
The power supply unit 40d receives power from an external power source, converts it into necessary voltage and current for each part of the controller 40, and supplies the power to each part.
The signal processing in the microcomputer unit 40b includes filter processing, averaging processing, synchronous detection processing, or processing for determining whether the signal output from the signal coil 2 exceeds a predetermined level and outputting the determination result. May be done.
In addition to the above, the input / output unit 40e may output a contact signal based on the determination result of the microcomputer unit 40b. Further, a light emitting element may be provided, and the light emitting element may be turned on or blinked. Alternatively, a waveform display may be provided to display a signal waveform. At that time, the vertical axis when displaying the signal waveform is the signal strength, and the horizontal axis is the relative relationship between the magnetic sensor 4 and the object to be measured by measuring the positional relationship between the magnetic sensor 4 and the measurement object by another means in addition to the passage of time. Positional relationships may be used.

(Another controller for magnetic sensor element 4)
FIG. 10 is another block diagram of the controller 40 for the magnetic sensor element according to the present invention. As shown in FIG. 10, the controller 40 includes an AC amplification unit 40a, a synchronous rectification unit 40b, an excitation unit 40c, a power supply unit 40d, an output unit 40e, and an oscillation unit 40f.
The AC amplification unit 40a is electrically connected to the winding start 2s and the winding end 2e of the signal coil 2 by wiring.
The oscillating unit 40f generates a synchronous signal to the synchronous rectifying unit 40b and an activation signal to the exciting unit 40c.
The excitation unit 40c is electrically connected to the winding start 1s and the winding end 1e of the excitation coil 1 by wiring. The excitation unit 40c receives an activation signal from the oscillation unit 40f and applies an alternating current excitation current 50 to the excitation coil 1.
The AC amplification unit 40a amplifies the signal output from the signal coil 2 and outputs it to the synchronous rectification unit 40b.
The synchronous rectification unit 40b synchronously rectifies the signal sent from the amplification unit 40a using the synchronization signal sent from the oscillation unit 40f, and outputs the result to the output unit 40e.
The output unit 40e electrically converts the processing result sent from the synchronous rectification unit 40b so that an external device can receive it, and outputs it as an analog signal to the outside.
The power supply unit 40d receives power from an external power source, converts it into necessary voltage and current for each part of the controller 40, and supplies the power to each part.
In addition to the above, the output unit 40e may be used as an output for notifying an abnormality. Specifically, it may detect that the analog signal exceeds a certain level and output the contact signal to the outside. The external device receives this contact signal and controls to avoid danger.

(Regarding the control of the magnetic sensor element 4)
The waveform of the excitation current 50 applied to the excitation coil 1 can be a sine wave, a square wave, a triangular wave, a pulse wave, or the like. The excitation current 50 may include a DC component. Furthermore, the excitation current 50 does not necessarily have to be increased until the magnetic material 53 is saturated. For example, when the object to be measured is a wire rope W, the damage signal of the wire rope W is more likely to be transmitted in the wire rope as the effective magnetic permeability of the wire rope W is higher. Therefore, if the wire rope W is measured without magnetically saturating the wire rope W, it becomes easy to detect damage inside the wire rope W.
The excitation current 50 may be determined after determining the functional performance required for the magnetic detector 100. For example, magnetism is based on various conditions such as the size of the object to be measured, the size and shape of the place where it is installed, whether the magnetic detector 100 is fixed and used, or whether the magnetic detector 100 is used while being moved. After determining the structural shape dimensions of the sensor element 4, the optimum excitation current 50 and excitation frequency may be determined.
The position of the signal coil 2 in the direction orthogonal to the compartment 1w is within a range in which a necessary signal can be obtained from the object to be measured, and if the signal coil 2 is formed close to the excitation coil 1, the magnetic sensor element 4 can be made thinner.
When power saving is required, it is preferable to increase the number of turns of the excitation coil 1 in order to reduce the excitation current 50 while securing the excitation magnetic field 51 of the required size. When high sensitivity is required, it is advisable to increase the number of turns of the signal coil 2 in order to increase the obtained signal. If necessary, the AD conversion is not built in the microcomputer unit 40b, but it is preferable to use a high-resolution AD conversion electronic component outside the microcomputer unit 40b.

(Effects and actions of the configuration of the magnetic sensor element 4)
FIG. 11 is a conceptual diagram illustrating the direction of the exciting magnetic field 51 generated by the exciting coil 1.
As shown in FIG. 11, in the direction of the excitation magnetic field 51 in which the excitation current 50 flowing through the compartment 1w of the excitation coil 1 constituting the magnetic sensor element according to the present invention is generated, the compartment 1w is formed wider than the thickness of the copper foil and is excited. Since the current 50 flows with a width, it becomes parallel to the surface of the compartment 1w in the vicinity of the compartment 1w. When the excitation current 50 is set from the front side of the paper surface to the other side, the direction of the generated exciting magnetic field 51 is clockwise when the paper surface is viewed from the front side of the paper surface according to the right-handed screw rule.

FIG. 12 is a conceptual diagram of the detection principle of the induced magnetic field 52. In FIG. 12, the directions of the exciting current 50, the exciting magnetic field 51, and the induced magnetic field 52 are assumed to be at a certain moment, and the magnetic sensor element 4 is fixed, and the columnar magnetic body 53 moves on the bottom surface in the moving direction. It is shown as moving toward.
As shown in FIG. 12, the excitation current 50 flowing through the compartment 1w of the excitation coil 1 constituting the magnetic sensor element 4 provided with the first embodiment of the magnetic sensor element of the present invention is an excitation magnetic field in a direction orthogonal to the excitation current 50. 51 is generated, and the generated exciting magnetic field 51 is applied to the magnetic body 53 located in the vicinity of the exciting coil 1. The magnetic body 53 generates an induced magnetic field 52 by the exciting magnetic field 51, and the generated induced magnetic field 52 is input to the signal coil 2. The signal coil 2 generates a voltage in the input induced magnetic field 52 according to the magnitude of the directional component orthogonal to the coil surface and the speed of change.

FIG. 13 is a signal waveform diagram obtained by detecting the induced magnetic field 52. In this case, the magnetic sensor element 4 will be described as being controlled by the synchronous rectification type controller 40 described with reference to FIG. 9. The exciting magnetic field 51 is an alternating current, but since it is a synchronous rectification method, the direction can be fixed and the explanation can be given. Further, the signal coil 2 reacts to a directional component orthogonal to the coil surface. Then, it is assumed that the controller 40 is set to output to the negative side when a magnetic field is input downward and to the positive side when a magnetic field is input upward to the signal coil 2.
As shown in FIG. 13 and FIG. 12 above, the signal waveform output from the controller 40 accompanying the passage of the magnetic body 53 has a single sinusoidal shape in which the peak point appears on the negative side and then on the positive side. This is because the signal strength detected by the signal coil 2 is determined by the direction and magnitude of the induced magnetic field 52 with respect to the signal coil 2 and the distance between the signal coil 2 and the magnetic body 53. As the magnetic body 53 approaches the signal coil 2, the downward component of the induced magnetic field 52 gradually increases with respect to the signal coil 2, and the downward component becomes maximum immediately before the signal coil 2, becomes horizontal immediately above, and suddenly upwards after passing directly above. This is because the component grows, reaches its peak, and decays as it goes away.
In this case, the direction of movement describes the change in the induced magnetic field 52 when the paper surface is viewed from the front and is changed from left to right. When the moving directions are opposite, the change in the direction of the induced magnetic field 52 input to the signal coil 2 due to the movement of the magnetic body 53 is reversed, so that the peak point of the sinusoidal signal waveform becomes negative after the positive side appears. The side appears.
When the magnetic sensor element 4 is controlled by the controller 40 described with reference to FIG. 9, an alternating current excitation magnetic field 51 is applied to the magnetic body 53 to process a signal by a synchronous rectification method, so that the high frequency of the controller 40 is high. Within the range of the response performance on the side, the amplitude of the signal waveform is constant regardless of the moving speed of the magnetic material 53. The amplitude of the signal waveform does not change even if the movement is slow, including zero velocity.

FIG. 14 is another conceptual diagram of the detection principle of the induced magnetic field 52. In FIG. 14, the directions of the exciting current 50, the exciting magnetic field 51, and the induced magnetic field 52 are assumed to be at a certain moment, and the magnetic sensor element 4 is fixed, and the columnar magnetic body 53 directs the bottom surface in the moving direction. It is shown as moving.
As shown in FIG. 14, the excitation current 50 flowing through the compartment 1w of the excitation coil 1 constituting the magnetic sensor element 4 provided with the third embodiment of the magnetic sensor element of the present invention is in a direction orthogonal to the flow direction of the excitation current 50. The exciting magnetic field 51 is generated in the magnet, and the generated exciting magnetic field 51 is applied to the magnetic body 53 located near the excitation coil 1. The magnetic body 53 generates an induced magnetic field 52 by the exciting magnetic field 51, and the generated induced magnetic field 52 is input to the signal coil 2. The signal coil 2 generates a voltage in the input induced magnetic field 52 according to the magnitude of the directional component orthogonal to the coil surface and the speed of change.

FIG. 15 is another signal waveform diagram obtained by detecting the induced magnetic field 52. In this case, the magnetic sensor element 4 will be described as if it were controlled by the controller 40 described in FIG. 9. The exciting magnetic field 51 is an alternating current, but since it is a synchronous rectification method, the direction can be fixed and the explanation can be given. Further, the signal coil 2 reacts to a directional component orthogonal to the coil surface. Then, it is assumed that the controller 40 is set to output to the signal coil 2 on the negative side when a magnetic field is input to the right and to the positive side when a magnetic field is input to the left when the paper surface is viewed from the front.
As shown in FIGS. 15 and 14 above, the signal waveform output from the controller 40 accompanying the passage of the magnetic body 53 is mountain-shaped and has small depressions on both sides of the mountain. This is because the signal strength detected by the signal coil 2 is determined by the direction and magnitude of the induced magnetic field 52 with respect to the signal coil 2 and the distance between the signal coil 2 and the magnetic body 53. As the magnetic material 53 approaches the signal coil 2, the induced magnetic field 52 enters the signal coil 2 to the right, then the induced magnetic field 52 rotates clockwise and turns to the left, which is directly above and has the maximum strength. By rotating clockwise again after passing directly above, it changes to the right and attenuates as it goes away.
When the magnetic sensor element 4 is controlled by the controller 40 described with reference to FIG. 9, an alternating current excitation magnetic field 51 is applied to the magnetic body 53 to process a signal by a synchronous rectification method, so that the high frequency of the controller 40 is high. Within the range of the response performance on the side, the amplitude of the signal waveform is constant regardless of the moving speed of the magnetic material 53. The amplitude of the signal waveform does not change even if the movement is slow, including zero velocity.

(Embodiment 1: 1 for wire rope inspection of the magnetic detector of the present invention)
FIG. 16 is a conceptual diagram illustrating a method of inspecting one wire rope W.
As shown in FIG. 16, the magnetic detector 100 used for this purpose is used by temporarily attaching it to a structure 500 such as a wall with double-sided tape or the like in a non-contact state with the wire rope W in the vicinity of the wire rope W. Will be done. The wire rope W moves in its axial direction.

17 (a) and 17 (b) are perspective views illustrating the first embodiment of the magnetic detector of the present invention. This is shown as an example of the embodiment of the magnetic detector 100 described with reference to FIG. Here, FIG. 17A is a perspective view of the appearance of the magnetic detector 100, and FIG. 17B is a perspective view of the inside of the magnetic detector 100. As shown in FIGS. 17 (a) and 17 (b), the magnetic detector 100 includes a case 100c, an electric wire 100d for supplying power and inputting / outputting signals, and embodiment 1 of the magnetic sensor element of the present invention. The magnetic sensor element 4 and the controller 40 described with reference to FIG. 9 are provided. However, the magnetic sensor element 4 and the controller 40 are formed by sharing the substrate 10 of the glass cloth base material epoxy resin. The electronic components attached to the upper surface side of the substrate 10 constituting the controller 40 are electrically connected by soldering to the wiring formed on the upper surface side of the substrate 10.
Then, the electrical connection between the winding start 1s and winding end 1e of the excitation coil 1 of the magnetic sensor element 4 and the excitation portion 40c of the controller 40 is made via the wiring formed on the upper surface side of the substrate 10. ing. Further, the electrical connection between the winding start 2s and the winding end 2e of the signal coil 2 and the AC amplification unit 40a of the controller 40 is such that the winding start 2s and the winding end of the signal coil 2 formed on the upper surface side of the substrate 10 are connected. The wiring connected to 2e, the plating through hole that connects the wiring on the upper surface side and the wiring on the lower surface side of the substrate 10, the wiring on the lower surface side of the substrate 10, and the plating that connects the wiring on the lower surface side and the wiring on the upper surface side of the substrate 10. This is done by wiring connected to the through hole and the excitation portion 40c on the upper surface side of the substrate 10.

FIG. 18 is a conceptual diagram of the detection principle of the wire breakage 54 of the wire rope W. Note that FIG. 18 shows that the directions of the exciting current 50, the exciting magnetic field 51, and the induced magnetic field 52 are at a certain moment, the magnetic detector 100 is fixed, and the wire rope W moves.
As shown in FIG. 18, the excitation current 50 flowing through the compartment 1w of the excitation coil 1 constituting the magnetic sensor element 4 provided with the first embodiment of the magnetic sensor element of the present invention is in a direction orthogonal to the flow direction of the excitation current 50. The exciting magnetic field 51 is generated in the above direction, and the generated exciting magnetic field 51 is applied to the wire rope W from the side of the wire rope W located in the vicinity of the excitation coil 1 in the axial direction of the wire rope W. An induced magnetic field 52 is generated by the exciting magnetic field 51 at 54 locations where the wire rope W is disconnected, and the generated induced magnetic field 52 is input to the signal coil 2. The signal coil 2 generates a voltage in the input induced magnetic field 52 according to the magnitude of the directional component orthogonal to the coil surface and the speed of change.

FIG. 19 is a signal waveform diagram obtained from the wire disconnection 54 of the wire rope W. In this case, the magnetic sensor element 4 will be described as if it were controlled by the controller 40 described in FIG. 9. The exciting magnetic field 51 is an alternating current, but since it is a synchronous rectification method, the direction can be fixed and the explanation can be given. Further, the signal coil 2 reacts to a directional component orthogonal to the coil surface. Then, it is assumed that the controller 40 is set to output to the negative side when a magnetic field is input downward and to the positive side when a magnetic field is input upward to the signal coil.
As shown in FIG. 19 and FIG. 18 above, the signal waveform output from the controller 40 due to the passage of the wire rope disconnection 54 is a single sinusoidal shape in which the peak point appears on the positive side and then appears on the negative side. It becomes. This is because the signal strength detected by the signal coil 2 is determined by the direction and magnitude of the induced magnetic field 52 with respect to the signal coil 2 and the distance between the signal coil 2 and the wire rope disconnection 54 of the wire rope W. As the wire rope disconnection 54 of the wire rope W approaches the signal coil 2, the inductive magnetic field 52 gradually increases in the upward component with respect to the signal coil 2, and immediately before the signal coil 2, the upward component becomes maximum and becomes horizontal immediately above. This is because the downward component suddenly increases after passing directly above, reaches a peak, and then attenuates as it goes away.
In this case, the direction of movement describes the change in the induced magnetic field 52 when the paper surface is viewed from the front and is changed from left to right. When the moving directions are opposite, the change in the direction of the induced magnetic field 52 input to the signal coil 2 due to the movement of the wire break 54 of the wire rope W is reversed, so that the peak point of the sinusoidal signal waveform is negative. The positive side appears after the side appears.

When the magnetic sensor element 4 is controlled by the controller 40 shown and described in FIG. 9, the AC excitation magnetic field 51 is applied to the wire rope W to process the signal by the synchronous rectification method, so that the magnetic detection is highly sensitive. The vessel 100 is obtained. Further, within the range of the response performance on the high frequency side of the controller 40, the amplitude of the signal waveform becomes constant regardless of the moving speed of the wire rope W, and the signal waveform includes a zero speed even if the movement is slow. Can have the characteristic that the amplitude of is unchanged.
Further, the magnetic body 53 including the wire rope W affects the detection of damage of the magnetic body 53 as noise due to the fact that the magnitudes and directions of the magnetizations inside the magnetic body 53 are not uniform, and the inspection of the magnetic body 53 is hindered. May be. In such a case, a magnetic field is applied to the magnetic body 53 in advance by a magnet or an electromagnet to adjust the magnitude and direction of the magnetization of the magnetic body 53, and then the magnetic detector 100 inspects the magnetic body 53 for damage. Is good. The fluctuation of the baseline of the signal waveform shown in FIG. 19 contains a component due to the irregularity of the magnitude and direction of the magnetization inside the wire rope W.

(Embodiment 5 of the magnetic sensor element of the present invention: two wire ropes W for simultaneous and individual inspection)
FIG. 20 is a perspective view illustrating the fifth embodiment of the magnetic sensor element of the present invention. In this form, two wire ropes W can be inspected simultaneously and individually. Although the substrate 10 is omitted in FIG. 20, the description including the substrate 10 will be described below.
As shown in FIG. 20, the magnetic sensor element 4 according to the fifth embodiment of the magnetic sensor element of the present invention is formed of a substrate 10 formed of a glass cloth base material epoxy resin and a copper foil on the lower surface side of the substrate 10. The excitation coil 1 and a plurality of signal coils 2 are provided. The excitation coil 1 is formed in such a size that the compartment 1w can form a plurality of signal coils 2. The plurality of signal coils 2 are composed of signal coil 2_3, signal coil 2_4, signal coil 2_1, signal coil 2_2, signal coil 2_1h and signal coil 2_2h, and the signal coil 2_3 and the signal coil 2_2 are described with reference to FIG. It is formed in the same manner as in the second embodiment of the magnetic sensor element of the present invention. Further, the signal coil 2_1, the signal coil 2_2, the signal coil 2_1h, and the signal coil 2_2h are formed in the same manner as in the third embodiment of the magnetic sensor element of the present invention shown and described in FIG.
The signal coil 2_1, the signal coil 2_2, the signal coil 2_1h, and the signal coil 2_2h have their respective coil surfaces directed in the direction of the exciting magnetic field 51, and in order to directly detect the exciting magnetic field 51, the wire rope W is connected from the wire disconnection 54. It is in a state where it cannot detect a minute signal. Therefore, the signal coil 2_1, the signal coil 2_2, the signal coil 2_1h, and the signal coil 2_2h are a combination of the signal coil 2_1 and the signal coil 2_1h, and the signal coil 2_2 and the signal coil 2_2h, respectively. Form. In the example shown in FIG. 20, the signal coil 2_1h and the signal coil 2_2h are formed at a position away from the place where the wire rope W passes for compensation for removing the influence of the exciting magnetic field 51.
The signal coil 2_1 and the signal coil 2___ are formed so as to be directly under one wire rope W, and the signal coil 2_2 and the signal coil 2___ are formed so as to be directly under another wire rope W.
As a result of the above, the signal coil 2_3 and the signal coil 2_4 can detect the induced magnetic field 52 in the direction orthogonal to the plane of the compartment 1w among the induced magnetic fields 52 generated from the wire rope W. Therefore, the obtained signal waveform has a form in which the signal becomes zero immediately below the damage of the wire rope W, but the signal changes significantly and quickly in the vicinity of the damage. The signal coil 2_3 and the signal coil 2_4 are suitable for detecting local damage such as a wire break 54. Further, the signal coil 2_1 and the signal coil 2_2 can detect a component parallel to the surface of the compartment 1w in the induced magnetic field 52 generated from the wire rope W. Therefore, the obtained signal waveform has the maximum amplitude immediately below the damage of the wire rope W. The signal coil 2_1 and the signal coil 2_1 have a wider range of damage than the wire rope 54, such as wear, internal disconnection, or change in the diameter of the wire rope W due to rust, among the damages of the wire rope W. In addition, the wire rope It is also suitable for detecting abnormalities such as loosening of W and abnormal vibration.
Although the above example is for two wire ropes W, similarly, the excitation coil 1 and the plurality of signal coils 2 may be laminated for three or more wire ropes W.

(Embodiment 6: Differential Coil 7 of the Magnetic Sensor Element of the Present Invention)
FIG. 21 is a perspective view illustrating embodiment 6 of the magnetic sensor element of the present invention. This form is called a differential coil 7, has two signal coils 2, and although it is the first vertically wound signal coil, it does not directly detect the exciting magnetic field 51, but receives a minute signal from the object to be measured. Can be detected. Although the substrate 10 is omitted in FIG. 21, the description including the substrate 10 will be described below.
As shown in FIG. 21, the magnetic sensor element 4 according to the sixth embodiment of the magnetic sensor element of the present invention is formed of a substrate 10 formed of a glass cloth base material epoxy resin and a copper foil on the lower surface side of the substrate 10. The excitation coil 1 and the two signal coils 2 formed of copper foil on the upper side of the substrate 10 are provided. The two signal coils 2 are composed of a signal coil 2_1 and a signal coil 2_1h, and are formed in the same manner as the signal coil 2 of the fourth embodiment of the magnetic sensor element of the present invention. The winding end 2e of the signal coil 2_1 and the winding end 2e of the signal coil 2_1h are electrically connected by wiring, and the winding start 2s of the signal coil 2_1 is electrically connected to the winding end 7e of the differential coil 7 by wiring, and the signal is signaled. The winding start 2s of the coil 2_1h is electrically connected to the winding start 7s of the differential coil 7 by wiring.
Regarding the wiring, as shown in FIG. 21, the winding end 2e of the signal coil 2_1 and the winding end 2e of the signal coil 2_1h are different from the layer on which the winding start 7s and the winding end 7e of the differential coil 7 are formed. By connecting to the copper foil of the above using a plated through hole, the winding start 7s and the winding end 7e of the differential coil 7 are formed in the same layer without using external wiring such as an electric wire.
The signal coil 2_1 and the signal coil 2_1h have the same shape and dimensions, face the coil surface in the same direction with respect to the exciting magnetic field 51, and are orthogonal to the surface of the compartment 1w where the exciting magnetic field 51 of substantially the same size is detected. It is formed near the center of the compartment 1w when viewed from the direction.
Furthermore, the signal coil 2_1h is formed at a position away from the wire rope W to be inspected so that the signal coil 2_1 is directly below the wire rope W to be inspected. The signal coil 2_1h is used for compensating the exciting magnetic field 51.
When a current is passed through the differential coil 7, the directions of the currents flowing through the signal coil 2_1 and the signal coil 2_h forming the differential coil 7 are opposite to each other. And this is the reason why it is called a differential coil.

(Embodiment 7 of the magnetic sensor element of the present invention: for batch inspection of a plurality of wire ropes)
22 (a) to 22 (e) are views for explaining the seventh embodiment of the magnetic sensor element of the present invention. By using this, it is possible to inspect a plurality of wire ropes W at once. Here, FIG. 22A is a perspective view of the magnetic sensor element 4, FIG. 22B is a perspective view of the excitation coil 1 and the signal coil 2, and FIG. 22C is a front view of the excitation coil 1 and the signal coil 2. 22 (d) is a front view and a side view of the excitation coil 1, and FIG. 22 (e) is a front view and a side view of the signal coil 2.
As shown in FIGS. 22 (a) to 22 (e), the magnetic sensor element 4 is a substrate 10 formed of a glass cloth base material epoxy resin and an excitation coil formed of a copper foil on the lower surface side of the substrate 10. 1 and a signal coil 2 formed of copper foil on the upper surface side of the substrate 10 are provided. The excitation coil 1 is formed including a compartment 1w made of a copper foil having a wide width in a direction orthogonal to the flow direction of the excitation current 50 applied to the excitation coil 1. The signal coil 2 is formed in the substantially compartment 1w when viewed from a direction orthogonal to the plane of the compartment 1w.
Then, as shown in FIG. 22D, the excitation coil 1 is formed as a one-time flat winding coil by a configuration of a winding start 1s, a coil body 1b, and a winding end 1e. As shown in FIG. 22 (e), the signal coil 2 is formed as a two-fold flat winding coil by a configuration of a winding start 2s, a main body 2b, and a winding end 2e.
When viewed from the direction orthogonal to the plane of the compartment 1w, the winding end 2e of the signal coil 2 formed beyond the compartment 1w does not have a copper foil layer forming the excitation coil 1 immediately below the winding end 2e of the signal coil 2. Wiring using the layer on which 1 is formed is easy. Further, if the portion of the signal coil 2 formed beyond the compartment 1w when viewed from the direction orthogonal to the plane of the compartment 1w is formed so as to be separated from the wire rope W, it is involved in the detection of the signal from the wire rope W. Therefore, for each damage of the plurality of wire ropes W, if the damage is the same, the same signal can be obtained.
Further, FIG. 23 is a perspective view illustrating an inspection method of the three wire ropes W. It is shown as a method of inspecting three wire ropes W at once. The magnetic sensor element 4 provided with the seventh embodiment of the magnetic sensor element of the present invention described with reference to FIG. 22 is used. The three wire ropes W are arranged parallel to the substrate 10 in the axial direction in the lateral direction of the elongated signal coil 2 and near the center in the longitudinal direction of the signal coil 2. Then, the three wire ropes W move in the axial direction of the three wire ropes W simultaneously or individually.
The magnetic detector 100 of this example has a functional performance of detecting damage to at least one wire rope W among a plurality of wire ropes W and outputting the result to the outside. Can be provided. This form is suitable for detecting abnormalities such as loose wire rope W and abnormal vibration.

(Examples of use of magnetic sensor elements in various fields)
In the above, the magnetic sensor element according to the present invention and the magnetic detector using the same have been described for wire rope inspection, but the magnetic sensor element according to the present invention can be widely used in various fields. This will be described below.

(About detection of non-magnetic conductors)
The detection principle of the induced magnetic field 52 generated from the magnetic body 53 is as described with reference to FIGS. 12 and 13, but the magnetic detector 100 using the magnetic sensor element according to the present invention is described from the magnetic body 53. In addition to the induced magnetic field 52 generated, the eddy current magnetic field 62 generated from the non-magnetic conductor 60 can also be detected.
FIG. 24 is a conceptual diagram illustrating the detection principle of the eddy current magnetic field 62. In FIG. 24, the directions of the exciting current 50, the exciting magnetic field 51, the eddy current 61, and the eddy current magnetic field 62 are assumed to be at a certain moment, and the magnetic sensor element 4 is fixed, and the columnar non-magnetic conductor 60 is formed. The bottom surface is shown as moving in the moving direction.
As shown in FIG. 24, the excitation current 50 flowing through the compartment 1w of the excitation coil 1 constituting the magnetic sensor element 4 provided with the first embodiment of the magnetic sensor element of the present invention is in a direction orthogonal to the flow direction of the excitation current 50. The exciting magnetic field 51 is generated in, and the generated exciting magnetic field 51 is applied to the non-magnetic conductor 60 located in the vicinity of the exciting coil 1. At this time, an eddy current 61 that generates an eddy current magnetic field 62 flows through the non-magnetic conductor 60 so as to obstruct the input of the exciting magnetic field 51. Then, the generated eddy current magnetic field 62 is input to the signal coil 2. The signal coil 2 generates a voltage in the input eddy current magnetic field 62 according to the magnitude of the directional component orthogonal to the coil surface and the speed of change.

FIG. 25 is a signal waveform diagram obtained by detecting the eddy current magnetic field 62. In this case, the magnetic sensor element 4 will be described as if it were controlled by the controller 40 described in FIG. 9. The exciting magnetic field 51 is an alternating current, but since it is a synchronous rectification method, the direction can be fixed and the explanation can be given. Further, the signal coil 2 reacts to a directional component orthogonal to the coil surface. Then, it is assumed that the controller 40 is set to output to the negative side when a magnetic field is input downward and to the positive side when a magnetic field is input upward to the signal coil 2.
As shown in FIG. 25 and FIG. 24 above, the signal waveform output from the controller 40 accompanying the passage of the non-magnetic conductor 60 has a single sinusoidal shape in which the peak point appears on the positive side and then on the negative side. This is because the signal strength detected by the signal coil 2 is determined by the direction and magnitude of the eddy current magnetic field 62 with respect to the signal coil 2 and the distance between the non-magnetic conductor 60 and the signal coil 2. As the non-magnetic conductor 60 approaches the signal coil 2, the eddy current magnetic field 62 gradually increases in the upward component with respect to the signal coil 2, and the upward component becomes maximum immediately before the signal coil 2, becomes horizontal immediately above, and suddenly after passing directly above. This is because the downward component becomes larger, reaches a peak, and then attenuates as it goes away.
In this case, the direction of movement describes the change in the eddy current magnetic field 62 when the paper surface is viewed from the front from the left to the right. When the moving directions are opposite, the change in the direction of the eddy current magnetic field 62 input to the signal coil 2 due to the movement of the non-magnetic conductor 60 is reversed, so that the peak point of the sinusoidal signal waveform appears on the negative side. The positive side appears from.
When the magnetic sensor element 4 is controlled by the controller 40 described with reference to FIG. 9, the AC excitation magnetic field 51 is applied to the non-magnetic conductor 60 to process the signal by the synchronous rectification method. Within the range of the response performance on the high frequency side, the amplitude of the signal waveform is constant regardless of the moving speed of the non-magnetic conductor 60. The amplitude of the signal waveform does not change even if the movement is slow, including zero velocity.

(Rotation measurement: Embodiment 1 of an apparatus having a magnetic detector)
26 (a) to 26 (c) are perspective views illustrating the first embodiment of an apparatus having a magnetic detector. It is shown for detecting the rotation of the rotating shaft of a device 111 having a rotating shaft such as a motor or an encoder. As shown in FIGS. 26 (a) to 26 (c), the device 111 includes a magnetic detector 100 including the first embodiment of the magnetic sensor element of the present invention, a rotating shaft 200, a housing 210, and the like. The magnetic detector 100 is used by being fixed to the housing 210 in the vicinity of the rotating shaft 200. The rotating shaft 200 is installed in the vicinity of the signal coil 2 of the magnetic sensor element 4 constituting the magnetic detector 100, and further, a magnetic material 53 or a magnetic material 53 or a portion located near the signal coil 2 of the rotating shaft 200 is provided. The non-magnetic conductor 60 is used, and further has a feature that the induced magnetic field 52 or the eddy current magnetic field 62 input to the signal coil 2 changes with the rotation of the rotating shaft 200. For example, the portion of the rotating shaft 200 located near the signal coil 2 is changed in shape such as a protrusion 201, a groove 202, and a gear 203. As a result, as the rotating shaft 200 rotates, the size and direction of the components input to the signal coil 2 of the induced magnetic field 52 or the eddy current magnetic field 62 generated by the exciting magnetic field 51 change. Therefore, by monitoring the output of the magnetic detector 100, it is possible to know the rotation speed, the rotation speed, or the rotation angle of the rotation shaft 200.
In the case of the magnetic detector according to the present invention, as described with reference to FIGS. 12 and 13, the single-shot sinusoidal signal waveform obtained differs depending on the direction of movement. If the relationship between the signal waveforms is obtained, the rotation direction can be known from the signal waveform.

(Displacement measurement: Embodiment 2 of an apparatus having a magnetic detector)
FIG. 27 is a perspective view illustrating a second embodiment of an apparatus having a magnetic detector. Shown for displacement measurement. As shown in FIG. 27, the device 111 is interlocked with the magnetic detector 100 provided with the first embodiment of the magnetic sensor element of the present invention, the contact 302 which is a component to be brought into contact with the object to be measured, and the contact 302. The interlocking element 303, the holder 304 holding the interlocking element 303 in the vicinity of the magnetic detector 100, and the detector 305 made of a magnetic body 53 or a non-magnetic conductor 60 are provided, and the detector 305 is a magnetic detector. The size of the interlocking coil 2 is about the same as or smaller than that of the signal coil 2 constituting the 100, and the interlocking element 303 is fixed to the interlocking element 303. And.
As a result, as the detector 305 moves, the magnitude and direction of the components input to the signal coil 2 of the induction magnetic field 52 or the eddy current magnetic field 62 generated from the detector 305 by the excitation magnetic field 51 change. If the relationship between the displacement amount of the contactor 302 and the output of the magnetic detector 100 is obtained in advance, the displacement amount of the contactor 302 can be known from the output of the magnetic detector 100.

(Magnetic flaw detection: Example of using magnetic detector)
For magnetic flaw detection of steel materials, the magnetic detector 100 provided with the first embodiment of the magnetic detector of the present invention described with reference to FIG. 17 can be used. In this case, the surface of the controller 40 opposite to the surface on which the electronic components are mounted, that is, the flat surface of the magnetic detector 100 is moved toward the object to be measured.
The detection principle is based on the same principle as that for detecting the induced magnetic field 52 generated from the wire disconnection 54 of the wire rope W described with reference to FIG. The object to be measured changes from the wire rope W to the rod-shaped steel material or the flat plate-shaped steel material, and the wire disconnection 54 of the wire rope W replaces the scratches on the steel material.
Since the magnetic detector 100 does not use a magnet or an electromagnet in its configuration, it can be made lighter and smaller. Further, if the magnetic sensor element according to the present invention is formed by using the flexible printed wiring board, the object to be measured is not limited to a flat plate, and even a tubular object can be used for flaw detection.
If the magnitude of the obtained signal changes depending on the relationship between the shape of the scratch to be detected and the scanning direction of the magnetic detector 100, the exciting magnetic field 51 can be applied to each of the two orthogonal directions. It is advisable to devise such as providing two excitation coils 1. Further, the signal coil 2 may be used in various forms such as a first flat-wound signal coil, a first vertical-wound signal coil, or a combination thereof. Further, the magnetic detector 100 is constructed by making the frequency of the excitation current 50 applied to the excitation coil 1 variable, and the output of the magnetic detector 100 is analyzed in relation to the excitation frequency to obtain the depth of scratches on the steel material. Information will be available.
Hereinafter, the magnetic detector 100 described here will be referred to as a magnetic flaw detector according to the present invention.

(Eddy current flaw detection: Example of using magnetic detector)
Also for flaw detection of a non-magnetic conductor 60 such as aluminum, the magnetic detector 100 provided with the first embodiment of the magnetic detector of the present invention shown and described in FIG. 17 can be used. Also in this case, the surface opposite to the surface on which the electronic component of the controller 40 is mounted, that is, the flat surface of the magnetic detector 100 is moved toward the measurement object.
The detection principle is the same as that for detecting the eddy current magnetic field 62 generated by the non-magnetic conductor 60 as described with reference to FIGS. 24 and 25. When the object to be measured is a flat plate of the non-magnetic conductor 60, when the exciting magnetic field 51 is applied to the flat plate, an eddy current magnetic field 62 that hinders the change of the exciting magnetic field 51 is generated in the flat plate. An eddy current 61 flows. At this time, if there is a scratch in the flat plate, the flow of the eddy current 61 is disturbed by this, which changes the eddy current magnetic field 62, which is detected by the magnetic detector 100.
If the magnetic sensor element according to the present invention is formed by using the flexible printed wiring board, the object to be measured is not limited to a flat plate, and even a tubular object can be used for flaw detection.
In the case of the magnetic detector according to the present invention, it is possible to determine from the signal waveform whether the signal waveform generated from the scratch on the object to be measured is due to the induced magnetic field 52 or the eddy current magnetic field 62. .. Since the eddy current magnetic field 62 is generated so as to prevent the change of the exciting magnetic field 51 when the excitation magnetic field 51 is applied to the object to be measured, if the shape of the scratch is the same, the eddy current magnetic field 62 will be the upper peak of the single sinusoidal signal waveform. The order in which the lower peaks appear is opposite to that in the case of the induced magnetic field 52.
Hereinafter, the magnetic detector 100 described here will be referred to as an eddy current flaw detector according to the present invention.

(Food foreign matter detection: Example of using magnetic detector)
Also for food foreign matter detection, the magnetic detector 100 provided with the first embodiment of the magnetic detector of the present invention described with reference to FIG. 17 can be used.
What can be detected as foreign matter is both the magnetic material 53 and the non-magnetic conductor 60. The basic principle is the same as that shown and described in FIGS. 12 and 13, and FIGS. 24 and 25.
The entire food foreign matter inspection device corresponds to the device 111.

(Coin identification: Example of using magnetic detector)
Also for coin identification, the magnetic detector 100 provided with the first embodiment of the magnetic detector of the present invention described with reference to FIG. 17 can be used.
In this case, the magnetic detector 100 is combined with a guide component configured so that the coin moves near the magnetic detector 100.
Since the coin is a conductor 60, an eddy current magnetic field 62 can be used for detection. The output change of the magnetic detector 100 is determined by the relationship between the shape dimension of the signal coil 2 constituting the magnetic detector 100 and the shape dimension material of the coin. Coins are identified by obtaining the relationship between various coins and the output signal obtained by the magnetic detector 100 in advance.
If the location through which the guide part of the coin passes is not constant due to the dimensional accuracy of the guide part and the discrimination ability deteriorates, use two magnetic detectors 100 and arrange them on both sides of the guide part to place the coin. Deterioration is mitigated by identification. However, in this case, since the two magnetic detectors 100 are arranged close to each other, noise due to mutual interference is generated and the coin identification ability is rather deteriorated unless countermeasures are taken. As a countermeasure, the same excitation current 50 is applied to the excitation coil 1 built in the two magnetic detectors 100, or the input / output unit 40e of the controller 40 is used between the two magnetic detectors 100. It is good to operate while synchronizing by communicating with and exciting by time division or at the same time.

(Proximity detection: Embodiment 3 of an apparatus having a magnetic detector)
FIG. 28 is a perspective view illustrating the third embodiment of the device having a magnetic detector. Shown for proximity detection. As shown in FIG. 28, the apparatus 111 includes a magnetic detector 100 provided with the first embodiment of the magnetic detector of the present invention, a soft magnetic material 102, and an object to be detected 311. , Adhered to the case of the magnetic detector 100. The mounting position of the soft magnetic material 102 is a position that covers the signal coil 2 when the signal coil 2 is viewed from a direction orthogonal to the surface of the section 1w of the excitation coil 1. An example of the soft magnetic material 102 is permalloy, and an example of the object to be detected is a magnet.
The detection principle is based on the fact that the magnetic properties of the soft magnetic material 102 change due to the magnetic field generated by the detected body 311 as the detected body 311 approaches. That is, the direction and magnitude of the induced magnetic field 52 generated by the exciting magnetic field 51 change due to the magnetic change of the soft magnetic material 102. Then, this change becomes a change in the signal voltage output from the signal coil 2.
If the relationship between the distance between the detector 311 and the magnetic detector 100 to which the soft magnetic material 102 is attached and the output of the magnetic detector 100 to which the soft magnetic material 102 is attached is obtained in advance, the magnitude of the signal is obtained. The approach distance of the detected object can be known from.

(Geomagnetic measurement: Embodiment 2 of the magnetic detector of the present invention and Embodiment 8 of the magnetic sensor element of the present invention)
29 (a) to 29 (c) are perspective views illustrating the second embodiment of the magnetic detector of the present invention. Shown for geomagnetic measurement. Here, FIG. 29A is a perspective view of the appearance of the magnetic detector 100, FIG. 29B is a perspective view of the inside thereof, and FIG. 29C is a perspective view of the inside excluding the soft magnetic material 102.
Further, FIG. 30 is a perspective view illustrating the eighth embodiment of the magnetic sensor element of the present invention. This is shown as being used in the magnetic detector 100 shown in FIG.
As shown in FIGS. 29 (a) to 29 (c) and 30, the magnetic detector 100 includes a soft magnetic material 102, a magnetic sensor element 4, a controller 40, a case 40c, and a cable 100d. ing. The magnetic sensor element 4 and the controller 40 share a substrate 10.
The magnetic sensor element 4 is formed of an excitation coil 1, a signal coil 2_1 and a signal coil 2_2, which are first vertically wound signal coils having the fourth embodiment of the magnetic sensor element of the present invention, and the excitation coil 1 is a compartment 1w_1. The coil path is formed so that the excitation current 50 flowing through the compartment 1w_1 and the compartment 1w_2 is opposite to each other. The fact that the excitation currents 50 are opposite to each other is as shown in FIG. 30 as the direction in which the current flows at the moment. The signal coil 2_1 is formed in the compartment 1w_1 when viewed from a direction orthogonal to the plane of the compartment 1w_1, and the signal coil 2_1 is formed in the compartment 1w_1 when viewed from a direction orthogonal to the plane of the compartment 1w_2. Further, the winding end 2e of the signal coil 2_2 and the winding start 2s of the signal coil 2_1 are connected. As a result, the exciting magnetic field 51 detected by each of the signal coil 2_1 and the signal coil 2_2 is canceled. Therefore, the signal voltage generated between the winding start 2s of the signal coil 2_1 and the winding end 2e of the signal coil 2_1, which is a combination of the two signal coils 2_1 and the signal coil 2_2, has a direct effect of the exciting magnetic field 51. Will be removed.
The soft magnetic material 102 is adhered to the magnetic sensor element 4 so as to cover the two first vertically wound signal coils when viewed from a direction orthogonal to the plane of the section 1w_1 or 1w_2 of the excitation coil 1. It is assumed that the substrate 10 is made of a glass cloth base epoxy resin, the excitation coil 1 is made of copper foil, the receiving coil 2 is made of copper foil, and the soft magnetic material 102 is made of permalloy. The soft magnetic material 102 may be configured to individually cover the two first vertically wound signal coils. Further, it may be provided on both sides of the magnetic sensor element 4.
In the following, the detection principle will be described using the magnetic field input from the outside as the geomagnetism. In the magnetic detector 100, when the geomagnetism is input from the lateral direction of the magnetic detector 100 in parallel with the substrate 10, the exciting magnetic field 51 and the geomagnetism are input to the soft magnetic material 102. The exciting magnetic field 51 is formed in the two first vertically wound signal coils so that the directions are opposite to each other. At a certain moment, the exciting magnetic field 51 and the geomagnetism are added and input to the soft magnetic material 102 portion located in the vicinity of one first vertically wound signal coil, and the other soft magnetic material 102 portion is input. Is input by subtracting the geomagnetism from the exciting magnetic field 51. The soft magnetic material 102 has a property of magnetically saturating according to its BH characteristics. Therefore, due to the input of the geomagnetism, a time region is generated in which one soft magnetic material 102 portion is in the saturation region and the other soft magnetic material 102 portion does not reach the saturation region. That is, when there is no geomagnetic input, the signal voltages generated by the exciting magnetic field 51 in each of the first vertically wound signal coils match, but when there is a geomagnetic input, a time domain in which they do not match occurs. Therefore, the signal output from the terminal to which the two first vertically wound signal coils are connected changes according to the magnitude of the input geomagnetism. This is the detection principle.
If the relationship between the magnitude of the geomagnetism to be input and the output of the magnetic detector 100 is obtained in advance, the magnitude of the geomagnetism can be known from the output of the magnetic detector 100.
It should be noted that the first vertically wound signal coil is orthogonal if it is formed by using the first vertically wound signal coil in two orthogonal directions instead of forming the direction in which the surface faces in only one direction. The geomagnetism can be measured with two axes, and it can be used as an azimuth meter.

(Stress detection 1: Usage example of magnetic detector)
As the magnetic detector 100 that can be used in the field of stress detection, the magnetic sensor element 4 is shown and described in FIG. 3 in the first embodiment of the magnetic detector of the present invention which has been described by showing FIG. The magnetic detector 100 modified to the third embodiment of the magnetic sensor element of the present invention can be used.
The stress detection utilizes the fact that the magnetic body 53 changes its magnetism in response to the application of stress. For example, if the object to be measured is the axle of the magnetic body 53 directly connected to the tire of an automobile, the torsional torque can be known. This is performed by installing and operating the magnetic detector 100 in a state similar to that for measuring the damage of the wire rope W, with the magnetic detector 100 close to the axle. That is, this state means a state in which the wire rope W shown in FIG. 17 is replaced with an axle. If the relationship between the magnitude of the torsional torque applied to the axle, which is the object to be measured, and the output of the magnetic detector 100 is obtained in advance, the magnitude of the torsional torque applied from the output of the magnetic detector 100 can be known.
In addition to this, stress detection can be used for measuring the distribution of residual stress in iron or iron alloys, and estimating the degree of fatigue or the history of stress application based on the distribution. In addition, by recording the measurement results and comparing them with the latest records, information on the progress of deterioration can be obtained.
The shape of the object to be measured is not limited to a rod shape, but may be a flat plate shape or a tubular shape. The compatibility with the object to be measured may be adjusted by the method of forming the magnetic sensor element 4. For example, if the object to be measured is tubular, the magnetic sensor element 4 may be formed by using a flexible printed wiring board.

(Stress detection 2: Embodiment 9 of the magnetic sensor element of the present invention and embodiment 4 of the device having a magnetic detector)
As another magnetic sensor element 4 that can be used in the field of stress detection, in the first embodiment of the magnetic sensor element of the present invention, the material of the substrate 10 is changed from a glass cloth base epoxy resin to a magnetic material such as an iron alloy. However, a plurality of signal coils 2 formed by distributing them can be used. This embodiment is referred to as a ninth embodiment of the magnetic sensor element of the present invention.
Alternatively, the magnetic sensor element 4 may be formed by using a flexible printed wiring board and may be formed by adhering to the magnetic body 53.
FIG. 31 is a perspective view illustrating the fourth embodiment of the device having a magnetic detector. Shown for collision detection. As shown in FIG. 31, the device 111 includes a magnetic detector 100 including a magnetic sensor element 4 and a controller 40 according to the ninth embodiment of the magnetic sensor element of the present invention, and an automobile 400 main body, and magnetic detection is performed. The device 100 is attached to the lower part of the front surface of the automobile 400, and the controller 40 controls the magnetic sensor element 4 by a synchronous rectification method and is multi-channel so that signals from a plurality of signal coils 2 can be received. There is.
When an object collides with the magnetic sensor element 4, stress is applied to the substrate 10 of the magnetic body 53 to change its magnetism. At this time, the induction magnetic field 52 generated from the substrate 10 of the magnetic body 53 changes due to the exciting magnetic field 51, and this change is input to the signal coil 2 and appears as a change in the signal voltage from the signal coil 2. This is the detection principle. Then, this change in signal voltage is processed by the controller 40 and output. Based on this output signal, the device 111 performs processing for an abnormality such as opening an airbag when the output exceeds a certain level. Since the substrate 10 which is a magnetic material can be detected before it reaches plastic deformation, it is characterized in that collision can be detected at an early stage.

(Stress Detection 3: Embodiment 10 of the magnetic sensor element of the present invention)
32 (a) to 32 (d) are views for explaining the tenth embodiment of the magnetic sensor element of the present invention. Shown for flaw detection. Here, FIG. 32 (a) is a perspective view of the magnetic sensor element 4, FIG. 32 (b) is a front view and a side view of the magnetic sensor element 4, and FIG. 32 (c) is a front view and a side view of the excitation coil 1. FIG. 32 (d) is a front view and a side view of the signal coil 2. As shown in FIGS. 32 (a) to 32 (d), the magnetic sensor 4 is formed of an excitation coil 1 formed of phosphor bronze, which is a non-magnetic conductor having a spring property, and a phosphor bronze on the upper side of the excitation coil 1. The signal coil 2 is provided. The signal coil 2 and the excitation coil 1 are laminated with an adhesive 9. The excitation coil 1 is formed including a compartment 1w made of phosphor bronze having a wide width in a direction orthogonal to the flow direction of the excitation current 50 applied to the excitation coil 1. The main body 2b of the signal coil 2 is formed in the compartment 1w near the center of the compartment 1w when viewed from a direction orthogonal to the plane of the compartment 1w.
Then, as shown in FIG. 32 (c), the excitation coil 1 is formed as a one-time flat winding coil by a configuration of a winding start 1s, a coil body 1b, and a winding end 1e. As shown in FIG. 32 (d), the signal coil 2 is formed as a one-time flat winding coil by a configuration of a winding start 2s, a main body 2b, and a winding end 2e. The winding start 2s and winding end 2e of the signal coil 2 have a large area so that the lead wire can be easily soldered.
The feature of this form is that the handleability is improved. This is because, in the field of magnetic flaw detection or eddy current flaw detection, the spring property of phosphor bronze forming the excitation coil 2 can be utilized when the magnetic sensor element 4 is brought into close contact with the inspection object and moved. Due to this springiness, the allowable range of force adjustment for adhering to the inspection object is widened, and the operation becomes easy. Regarding the groove in the main body 2b of the excitation coil, for example, the excitation coil 1 and the signal coil 2 may be filled with an adhesive used when forming a laminate. Further, the adhesive used at that time may be an adhesive having elasticity.
(Embodiment 11 of the magnetic sensor element of the present invention: Example of a second signal coil)

33 (a) to 33 (e) are views for explaining the eleventh embodiment of the magnetic sensor element of the present invention. Here, FIG. 33A is a perspective view of the magnetic sensor element 4, FIG. 33B is a perspective view of the excitation coil 1 and the signal coil 3, and FIG. 33C is a front view of the excitation coil 1 and the signal coil 3. 33 (d) is a front view and a side view of the excitation coil 1, and FIG. 33 (e) is a front view and a side view of the signal coil 3.
As shown in FIGS. 33 (a) to 33 (e), the magnetic sensor element 4 is a substrate 10 formed of a glass cloth base material epoxy resin and an excitation coil formed of a copper foil on the lower surface side of the substrate 10. 1 and a signal coil 3 (corresponding to a second signal coil) formed of copper foil on the upper surface side of the substrate 10 are provided. The excitation coil 1 has a section 1w_1 made of copper foil in which the directions in which the excitation current 50 flows are opposite to each other, a section 1w_1 made of copper foil, and a boundary 5, and the boundary 5 has a section 1w_1 and a section 1w_2. A section 1w_1 and a section 1w_2 formed by being adjacent to each other and formed by a signal coil 3 including a boundary 5 and forming a boundary 5 except for the boundary 5 when viewed from a direction orthogonal to the plane of the section 1w_1 or 1w_2. It is formed in the combined compartment.
Then, as shown in FIG. 33 (d), the excitation coil 1 is formed as a one-time flat winding coil by a configuration of a winding start 1s, a coil body 1b, and a winding end 1e. As shown in FIG. 33 (e), the signal coil 3 is formed as a one-time flat winding coil by a configuration of a winding start 3s, a main body 3b, and a winding end 3e.
The signal coil 3 described here is referred to as a second flat-wound signal coil.

FIG. 34 is another conceptual diagram of the detection principle of the wire breakage 54 of the wire rope W. The case where the magnetic sensor element 4 provided with the eleventh embodiment of the magnetic sensor element of the present invention is used is shown. In FIG. 34, the directions of the excitation currents 50_1 and 50_2, the excitation magnetic fields 51_1 and 51_2, and the induced magnetic field 52g are assumed to be at a certain moment, and the magnetic sensor element 4 is fixed and the wire rope W is shown to move. ing.
As shown in FIG. 34, the excitation current 50_1 generates an excitation magnetic field 51_1, the excitation current 50_2 generates an excitation magnetic field 51_2 in a direction orthogonal to the flow direction thereof, and the generated excitation magnetic field 51_1 and the excitation magnetic field 51_2 are the excitation coil 1 It is applied to the wire rope W in the axial direction of the wire rope W from the side of the wire rope W located in the vicinity. At 54 locations where the wire rope W is disconnected, an induced magnetic field of 52 g is generated by the combined excitation magnetic field of the excitation magnetic field 51_1 and the excitation magnetic field 51_2, and the generated induced magnetic field 52 g is input to the signal coil 2. The signal coil 2 generates a voltage in the input induced magnetic field of 52 g according to the magnitude of the directional component orthogonal to the coil surface and the speed of change.

FIG. 35 is another signal waveform diagram obtained from the wire disconnection 54 of the wire rope W. The case where the magnetic sensor element 4 provided with the eleventh embodiment of the magnetic sensor element of the present invention is used and controlled by the controller 40 shown and described in FIG. 9 will be described.
As shown in FIG. 35 and FIG. 34 above, the signal output from the controller 40 has a chevron shape with a dented peak. This is because the excitation current 50_1 flowing through the compartment 1w_1 and the excitation current 50_2 flowing through the compartment 1w_2 are opposite to each other with the boundary 5 in between. Since the exciting magnetic field 51_1 and the exciting magnetic field 51_2 are opposite to each other in the vicinity immediately above the boundary 5, the exciting magnetic field in which the exciting magnetic field 51_1 and the exciting magnetic field 51_2 are combined is in a small state. Therefore, when the center of the wire disconnection 54 is directly above the boundary 5, the induced magnetic field 52 g generated from the vicinity of the wire disconnection 54 is in a state of being lowered from the peak value. When this moves a little away from directly above, the end face of the broken wire in the wire breaking 54 and the copper foil forming the coil path of the signal coil 3 approach each other, and the excitation magnetic field 51_1 and the excitation magnetic field 51_2 are combined to excite. Since the magnetic field also becomes large, the peak value appears. Further, as the wire disconnection 54 increases the distance between the signal coils 3, the signal input to the signal coil 3 is attenuated.
Further, although a magnetic field is generated from the boundary 5 in the direction orthogonal to the surface of the excitation coil, the compartment 1w_1 and the compartment 1w_2 forming the boundary 5 at the boundary 5 are brought close to each other as close as possible so as to be orthogonal to the surface of the excitation coil 1. The magnetic flux generated from the boundary 5 can be reduced in the direction of coiling. As a result, the signal coil 3 can detect a change in the induced magnetic field 52 g generated by the wire disconnection 54 of the wire rope W.
The feature of the signal coil 3 is that the signal can be detected when the center of the wire disconnection 54 of the wire rope W is directly above the wire rope W even though the form is the same as that of the first flat winding signal coil. That is, it is possible to provide a function similar to that of the first vertically wound signal coil. By mixing the first flat-wound signal coil and the second flat-wound signal coil, in addition to the wire disconnection 54, the diameter of the wire rope W is reduced due to wear, internal disconnection, rust, etc., and further loosened. , Abnormal vibration, etc. can also be detected.

Further, since the second flat winding signal coil has the same form as the first signal coil, the same can be performed for the double winding described with reference to FIG.
Further, the signal coil 3 may be a polygon other than a quadrangle, a circle, an ellipse, a star, or the like, and does not necessarily have to be a quadrangle. The shape may be determined based on the required functional performance.

(Embodiment 12 of the magnetic sensor element of the present invention: Example of excitation wiring path 8)
An example is shown in which the excitation wiring path 8 is not coiled.
36 (a) to 36 (d) are diagrams illustrating embodiment 12 of the magnetic sensor element of the present invention. Here, FIG. 36 (a) is a perspective view of the magnetic sensor element 4, FIG. 36 (b) is a front view and a side view of the magnetic sensor element 4, and FIG. 36 (c) is a front view and a side view of the excitation wiring path 8. 36 (d) is a front view and a side view of the signal coil 2. As shown in FIGS. 36 (a) to 36 (d), the magnetic sensor 4 includes an excitation wiring path 8 formed of phosphor bronze, which is a non-magnetic conductor having a spring property, and phosphor bronze on the upper side of the excitation wiring path 8. It includes a signal coil 2 formed from. The signal coil 2 and the excitation wiring path 8 are laminated with an adhesive 9. The excitation wiring path 8 is formed including a section 1w made of phosphor bronze having a wide width in a direction orthogonal to the flow direction of the excitation current 50 applied to the excitation wiring path 8. The signal coil 2 is formed in the compartment 1w near the center of the compartment 1w when viewed from a direction orthogonal to the plane of the compartment 1w.
Then, as shown in FIG. 36C, the excitation wiring path 8 is formed by a configuration of a start 8s, a main body 8b, and an end 8e. In this case, the main body 8b and the compartment 1w are the same. As shown in FIG. 32 (d), the signal coil 2 is formed as a one-time flat winding coil by a configuration of a winding start 2s, a main body 2b, and a winding end 2e. The winding start 2s and winding end 2e of the signal coil 2 have a large area so that the electric wire can be easily soldered.
When the magnetic sensor element 4 is used, an electric wire is electrically connected to the start 8s and the end 8e of the excitation wiring path 8 and the winding start 2s and the winding end 2e of the signal coil 2. It should be noted that care must be taken when routing the electric wires connected to the start 8s and the end 8e of the excitation wiring path 8. One of the reasons is that the magnetic field generated by the excitation current 50 applied to the magnetic sensor element 4 is radiated to the surroundings in a wide range, which may adversely affect other electronic devices. Another is that it may disturb the exciting magnetic field 51 generated in parallel with the compartment 1w and affect the measurement accuracy. However, this is the minimum configuration for the magnetic sensor element 4. It can be used for various purposes such as magnetic particle inspection, eddy current flaw detection, and rotation measurement.

(Embodiment 13 of the magnetic sensor element of the present invention)
In FIG. 21, the differential coil 7 has been described. The differential coil 7 is one of a forms for preventing a direct influence from the exciting magnetic field 51 on the first vertically wound signal coil. Here, another embodiment for removing the direct influence of the exciting magnetic field 51 on the first vertically wound signal coil will be described as the thirteenth embodiment of the magnetic sensor element of the present invention.
37 (a) and 37 (b) are perspective views illustrating the thirteenth embodiment of the magnetic sensor element of the present invention. Here, the magnetic sensor element 4 shown in FIGS. 37 (a) and 37 (b) is the same. However, the viewpoint is different. FIG. 37B shows the viewpoint in a direction substantially horizontal to the coil surface of the excitation coil 1_1 or the excitation coil 1-22.
As shown in FIGS. 37 (a) and 37 (b), the magnetic sensor element 4 includes a substrate 10 formed of a glass cloth base material epoxy resin and an excitation coil 1_2 formed of a copper foil on the lower surface side of the substrate 10. An excitation coil 1_1 formed of a copper foil on the upper surface side of the substrate 10 and a signal coil 2 having the form of a first vertically wound signal coil are provided. The two excitation coils 1 have the same size and shape, and are formed at the same location when viewed from a direction orthogonal to the substrate 10. Further, the excitation coil 1_1 is formed by including a section 1_1w made of a copper foil having a wide width in a direction orthogonal to the direction in which the applied excitation current 50 flows, and similarly, the excitation coil 1_2 is formed by including a section 1-2w. However, a part of the substrate 10 is shown in FIG. 37 (b).
The signal coil 2 looks at the compartment 1-11w from a direction orthogonal to the compartment 1-11w, and includes the compartment 1-11w and the compartment 1_2w in the coil surface near the center of the compartment 1-11w, and includes the excitation coil 1-11 and the excitation coil 1-22. Is formed of another layer of copper foil.
Then, in the excitation coil 1_1 and the excitation coil 1_2, the winding end 1_1e and the winding end 1_2e are connected by a plating through hole.
The excitation coil 1-11, the excitation coil 1-2, and the signal coil 2 are formed with the substrate 10 as a symmetrical plane.
Therefore, when the excitation current 50 is applied between the winding start 1_1s of the excitation coil 1_1 and the winding start 1-2s of the excitation coil 1-22, the directions of the exciting magnetic fields 51 generated by the flowing excitation current 50 are opposite to each other in the compartments 1-11w and 1_2w. Become. As a result, the exciting magnetic field 51 from the compartment 1-11w and the exciting magnetic field 51 from the compartment 1-2w are input from opposite directions in the direction orthogonal to the coil surface of the signal coil 2, and the signal coil 2 does not directly detect the exciting magnetic field 51.
When the object to be measured such as the wire rope W is located near the excitation coil 1-11, the exciting magnetic field 51 generated by the excitation coil 1-11 becomes dominant over the exciting magnetic field 51 generated by the excitation coil 1-2. An exciting magnetic field (referred to as an exciting magnetic field 51 gg) is applied to the object, an induced magnetic field 52 is generated from the object to be measured by the excited magnetic field 51 gg, and the generated induced magnetic field 52 is input to the signal coil 2. Then, a voltage signal resulting from this is induced in the signal coil 2.

(Rotation measurement: Example of using a magnetic sensor element for a device having a rotation axis)
FIG. 38 is a perspective view illustrating the first embodiment of the apparatus having a rotating shaft of the present invention. An example of the device 140 having a rotating shaft is shown by a motor. As shown in FIG. 38, the device 140 having a rotating shaft includes a magnetic sensor element 4 having the first embodiment of the magnetic sensor element of the present invention, a rotating shaft 200 having a notch 204, a housing 210, a bearing 211, and a rotor. It has 212 (having a magnet), a stator 213 (having a coil), and the like, and the magnetic sensor element 4 is used by being fixed to the housing 210 in the vicinity of the rotating shaft 200. The upper view of FIG. 38 shows the state in which the magnetic sensor element 4 is fixed to the housing 210. However, in this state, since the notch 204 of the rotating shaft 200 is hidden, the state in which the magnetic sensor element 4 is removed is shown on the lower side of FIG. 38. Further, the device 140 having a rotating shaft is shown in cross section so that the inside thereof can be easily understood.
Then, the rotating shaft 200 uses a magnetic body 53 or a non-magnetic conductor 60 in a portion located near the magnetic sensor element 4 of the rotating shaft 200, and is further input to the signal coil 2 as the rotating shaft 200 rotates. It has a feature that the induced magnetic field 52 or the eddy current magnetic field 62 changes. In this example, a notch 204 is provided in a portion of the rotating shaft 200 located near the magnetic sensor element 4. As a result, as the rotating shaft 200 rotates, the relative positional relationship between the notch 204 and the excitation coil 1 and the signal coil 2 changes, and the signal of the induced magnetic field 52 or the eddy current magnetic field 62 generated near the notch 204. The magnitude and direction of the components input to the coil 2 change, and the signal coil outputs a change in the signal voltage corresponding to this change.
As an external device, the controller 40 described with reference to FIG. 9 is used, and the rotation angle of the rotating shaft 200, the output output as a result of controlling the magnetic sensor element 4 by the controller 40, and the output. By obtaining the relationship between the above, the rotation speed, the number of rotations, or the rotation angle of the rotation shaft 200 of the device 140 having the rotation shaft can be known.
The magnetic sensor element according to the present invention can also be formed in the vicinity of the ultra-small motor realized by MEMS by using a general film forming technique.

1 Excitation coil 1w Section 2 Signal coil 3 Signal coil 4 Magnetic sensor element 5 Boundary 6 Detour wiring 7 Differential coil 8 Excitation wiring path 10 Board 40 Controller 50 Excitation current 51 Excitation magnetic field 52 Inductive magnetic field 53 Magnetic material 54 Wire break Non-magnetic conductor 61 Swirl current 62 Swirl current Magnetic field 100 Magnetic detector 102 Soft magnetic material 111 Device 140 Device with rotating shaft 200 Rotating axis W Wire rope

Claims (10)

It includes an excitation coil made of a conductor, a signal coil made of a non-magnetic conductor, and a substrate.
The excitation coil and the signal coil are formed in the same layer, the excitation coil, the signal coil, and the substrate form a stack, and the excitation coil carries a current having a directional component in a first direction. The conductor having the conductor which can flow and the conductor which can flow a current having a directional component in the second direction opposite to the first direction, and the signal coil is formed by the excitation coil. When viewed from a direction orthogonal to the surface of the layer to be formed, a current having the first direction component of the excitation coil can be passed, and a current having the second direction component can be passed. A magnetic sensor element characterized in that it is arranged on the substrate surrounded by the conductor that cannot be formed. It is equipped with an excitation coil made of a conductor and a signal coil made of a non-magnetic conductor.
The excitation coil and the signal coil are formed on different layers from each other, the A excitation coil and the signal coil, to form a laminate, the excitation coil, applying a current having a direction component of the first direction The conductor having a direction component in a second direction opposite to the first direction and a conductor capable of passing a current having a direction component in the second direction opposite to the first direction, and the signal coil including the inner surface of the signal coil. Overlaps in part or all of the conductor capable of carrying a current having the directional component of the first direction when viewed from a direction orthogonal to the plane of the layer on which the excitation coil is formed, and said the second. A magnetic sensor element characterized in that it is formed so as not to overlap with the conductor capable of passing a current having a directional component in the direction of. It includes an excitation coil made of a conductor, a signal coil made of a non-magnetic conductor, and a substrate.
The signal coil includes a first non-magnetic conductor formed in the first layer, a second non-magnetic conductor formed in the second layer, the first non-magnetic conductor, and the second non-magnetic conductor. It has a third non-magnetic conductor that electrically connects the magnetic conductor, and the excitation coil and the first non-magnetic conductor of the signal coil are formed in the same layer, and the excitation coil and the excitation coil are described. The signal coil and the substrate form a laminate, and the excitation coil has a conductor capable of passing a current having a direction component in the first direction and a second direction opposite to the first direction. The first non-magnetic conductor of the signal coil has the conductor capable of carrying a current having a directional component, and the first non-magnetic conductor of the signal coil is viewed from a direction orthogonal to the surface of the layer on which the excitation coil is formed. Arranged on the substrate surrounded by the conductor, which can carry a current having the first direction component of the excitation coil and cannot flow a current having the second direction component. A magnetic sensor element characterized by being It includes an excitation coil made of a conductor, a signal coil made of a non-magnetic conductor, and a substrate.
The signal coil includes a first non-magnetic conductor formed in the first layer, a second non-magnetic conductor formed in the second layer, the first non-magnetic conductor, and the second non-magnetic conductor. It has a third non-magnetic conductor that electrically connects the magnetic conductor, and the excitation coil, the first layer of the signal coil, and the second layer are formed in separate layers from each other. wherein the excitation coil and the signal coil and the substrate, to form a laminate, the excitation coil, said conductor capable of conducting current having a direction component of the first orientation, the first orientation opposite Having the conductor capable of carrying a current having a directional component of a second orientation, the signal coil is the first, as viewed from a direction orthogonal to the plane of the layer on which the excitation coil is formed. It is formed so as to overlap a part or all of the conductor capable of carrying a current having a directional component in the direction of, and not to overlap the conductor capable of carrying a current having a directional component in the second direction. A magnetic sensor element characterized by being present. It includes an excitation coil made of a conductor, a signal coil made of a non-magnetic conductor, and a substrate.
The excitation coil is formed in the first layer and the second layer, and the signal coil is formed in the first non-magnetic conductor formed in the third layer and the second layer formed in the fourth layer. It has a non-magnetic conductor, a third non-magnetic conductor that electrically connects the first non-magnetic conductor and the second non-magnetic conductor, and the excitation coil, the signal coil, and the substrate are , The excitation coil forms a laminate , the conductor capable of carrying a current having a directional component in the first direction, and a current having a directional component in a second direction opposite to the first direction. The signal coil has a directional component of the first layer in the first direction when viewed from a direction orthogonal to the surface of the layer on which the excitation coil is formed. Overlapping in some or all of the conductors capable of carrying the current, and overlapping in some or all of the conductors capable of carrying the current having the directional component of the second orientation of the second layer. And the current having the first direction component of the second layer without overlapping with the conductor capable of passing the current having the second direction component of the first layer. A magnetic sensor element characterized in that it is formed so as not to overlap with the conductor that can be flowed. It includes an excitation coil made of a conductor, a signal coil made of a non-magnetic conductor, and a substrate.
The excitation coil is formed in a first layer and a second layer, the excitation coil and the signal coil are formed in different layers from each other, and the excitation coil, the signal coil, and the substrate are laminated. forming a said excitation coil, said conductor capable of flowing a current having a direction component of the first orientation, passing the current having a direction component of the second direction opposite to the first direction The signal coil, including the inner surface of the signal coil, has the conductor capable of forming the first layer of the first layer when viewed from a direction orthogonal to the surface of the layer on which the excitation coil is formed. A conductor that overlaps in part or all of the conductor capable of carrying a current having a directional component in one direction and can carry a current having a directional component in the second direction of the second layer. The first orientation of the second layer without overlapping with the conductor which is partially or wholly overlapped and can carry a current having the directional component of the second orientation of the first layer. A magnetic sensor element characterized in that it is formed so as not to overlap with the conductor capable of passing a current having a direction component of. The magnetic sensor element according to claim 2, wherein the laminate is formed including a substrate. A device having a rotating shaft, which comprises one or more magnetic sensor elements according to any one of claims 1 to 7. A magnetic detector comprising one or more magnetic sensor elements according to any one of claims 1 to 7. A device comprising one or more magnetic detectors according to claim 9.

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