JPH10197493A - Eddy-current flow detecting probe - Google Patents
Eddy-current flow detecting probeInfo
- Publication number
- JPH10197493A JPH10197493A JP9004705A JP470597A JPH10197493A JP H10197493 A JPH10197493 A JP H10197493A JP 9004705 A JP9004705 A JP 9004705A JP 470597 A JP470597 A JP 470597A JP H10197493 A JPH10197493 A JP H10197493A
- Authority
- JP
- Japan
- Prior art keywords
- coils
- coil
- detection
- eddy current
- flaw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、渦電流探傷試験時
におけるリフトオフノイズの低減と、きず検出信号の増
大を図った渦電流探傷プローブに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an eddy current inspection probe for reducing lift-off noise in an eddy current inspection test and increasing a flaw detection signal.
【０００２】[0002]
【従来の技術】従来の技術を図４に示す。渦電流探傷試
験は、鉄鋼・非鉄材料の製造時における検査および熱交
換器の細管などの各種プラントにおける保守検査等に広
く用いられており、探傷プローブはその探傷装置の性能
を決める重要な要素のーつである。2. Description of the Related Art FIG. Eddy current testing is widely used for inspections during the production of steel and non-ferrous materials and for maintenance inspections in various plants such as heat exchanger tubes.Flaw detection probes are an important factor that determines the performance of the flaw detection equipment. It is one.
【０００３】従来の渦電流探傷プローブの例を図４に示
す。従来の探傷プローブは、主にボビンコイルや、パン
ケーキコイルなどを用いており、検出方法としては、 （１）コイル自身のインピーダンス変化から、 きずの有無を調べるアブソリュート型（図４（ａ））
と、 二つのコイルの差動成分からきずの有無を調べるディ
ファレンシャル型（図４（ｂ））に分けられる。 （２）さらにこれらは、 渦電流を発生させるための励磁と、発生した渦電流の
検出をかねて行う自己誘導型（図４の（ａ）−１、
（ｂ）−１）と、 励磁用の一次コイルと検出用の二次コイルが分離され
ている相互誘導型（図４の（ａ）−２、（ｂ）−２）に
分けられる。特にディファレンシャル型は、アブソリュ
ート型と比べて、平行なリフトオフ変化によるノイズに
も強い特徴をもつ。FIG. 4 shows an example of a conventional eddy current flaw detection probe. Conventional flaw detection probes mainly use bobbin coils, pancake coils, and the like. The detection method is as follows: (1) Absolute type (Fig. 4 (a)) that checks for the presence or absence of flaws from the impedance change of the coil itself
And a differential type (FIG. 4B) for examining the presence or absence of a flaw from the differential components of the two coils. (2) In addition, these are self-induction types that perform both excitation for generating an eddy current and detection of the generated eddy current ((a) -1, FIG.
(B) -1), and a mutual induction type ((a) -2, (b) -2 in FIG. 4) in which a primary coil for excitation and a secondary coil for detection are separated. In particular, the differential type has a feature that is more resistant to noise due to parallel lift-off changes than the absolute type.
【０００４】[0004]
【発明が解決しようとする課題】しかし、従来の技術に
は、次のような問題がある。 （１）上記従来の渦電流探傷プローブでは、特にアブソ
リュート型においてはリフトオフによりリフトオフ信号
が発生し、きず信号がこれに埋もれてしまい、きずの検
出性能を悪くするというような問題点があった。 （２）また、リフトオフに強いディファレンシャル型に
おいても、図５（ａ）に示すように探傷プローフに対し
て、試験体が料めになるリフトオフに対しては、二つの
コイルの試験体までの距離ｌ1 、ｌ2 に差が生じ、リフ
トオフ信号が発生して、きずの検出性能が悪くなるとい
う問題点があった。 本発明は、これらの問題を解決することができる渦電流
探傷プローブを提供することを目的とする。However, the prior art has the following problems. (1) In the above-mentioned conventional eddy current flaw detection probe, particularly in the case of the absolute type, there is a problem that a lift-off signal is generated by lift-off, and the flaw signal is buried in the lift-off signal, thereby deteriorating the flaw detection performance. (2) Also in the differential type which is strong against lift-off, as shown in FIG. 5 (a), the distance between the test object of the two coils and the lift-off for which the test object is expensive as shown in FIG. There is a problem that a difference occurs between l 1 and l 2 , a lift-off signal is generated, and the flaw detection performance deteriorates. An object of the present invention is to provide an eddy current flaw detection probe that can solve these problems.
【０００５】[0005]
（第１の手段）本発明に係る渦電流探傷プローブは、
（Ａ）４個の検出コイル１と、（Ｂ）励磁コイル２と、
（Ｃ）発振器３と、（Ｄ）ブリッジ回路４とからなり、
（Ｅ）前記４個の検出コイルは、菱形の各頂点を中心と
するように配置するとともに、検出コイルの対角にある
２個を逆相接続し、さらに、これら２組のコイルを差動
接続し、（Ｆ）前記励磁コイルは、２組の検出コイルの
コイル中心近傍の試験体中を斜め方向に流れる渦電流を
発生させるコイルを組合わせることにより構成し、
（Ｇ）前記発振器３は、励磁コイル２に交流電流を供給
し、（Ｈ）前記ブリッジ回路４は、差動接続されている
検出コイルから、きず信号だけを取り出すことを特徴と
する。(First Means) An eddy current flaw detection probe according to the present invention comprises:
(A) four detection coils 1, (B) excitation coil 2,
(C) An oscillator 3 and (D) a bridge circuit 4
(E) The four detection coils are arranged so as to be centered on the respective vertices of the rhombus, and two diagonally opposite detection coils are connected in anti-phase. (F) the excitation coil is configured by combining a coil that generates an eddy current that flows in an oblique direction in a test body near the coil center of the two detection coils;
(G) The oscillator 3 supplies an alternating current to the exciting coil 2, and (H) the bridge circuit 4 extracts only a flaw signal from the differentially connected detection coil.
【０００６】すなわち、本発明は、上記問題点を解決す
るために、検出コイルとして４個のコイルを菱形の各頂
点を中心とするように配置して、対角にある２個を逆相
接続し、これら２組のコイルを差動接続し、励磁コイル
としては２組の検出コイルのコイル中心近傍の試験体中
を斜め方向に流れる渦電流を発生させるコイルを組合わ
せたことを特徴とする。That is, in order to solve the above-mentioned problem, the present invention arranges four coils as detection coils so as to be centered on each vertex of a rhombus, and connects two diagonally opposite coils in opposite phase. The two sets of coils are differentially connected, and the exciting coil is a combination of coils for generating an eddy current that flows obliquely in a test body near the coil center of the two sets of detection coils. .
【０００７】「コイルを組合わせる」とは、「検出コイ
ル」と「励磁コイル」を組合わせることをいう。したが
って、次のように作用する。The term "combining coils" refers to combining "detection coils" and "excitation coils". Therefore, it operates as follows.
【０００８】本発明の渦電流探傷プローブは上記のよう
に構成されているので、励磁コイルによって試験体に斜
め方向に渦電流が発生し、このときの渦電流の変化を磁
気的に結合している検出コイルによって検出する。Since the eddy current flaw detection probe of the present invention is constructed as described above, an eddy current is generated obliquely in the test piece by the exciting coil, and the change of the eddy current at this time is magnetically coupled. Detected by the detection coil.
【０００９】４個の検出コイルは対角同士の２個が逆相
接続され、さらにそれらが差動接続されているので、見
かけ上は２個のコイルが差動接続されている形となる。
これら差動接続された２組のコイルの検出中心は、どち
らも対角同士２個のコイルを結んだ線の中点となること
から、２組のコイルは同じ検出中心をもつ。The four detection coils are connected in opposite phases at two diagonals and are connected differentially, so that apparently, the two coils are differentially connected.
Since the detection centers of these two sets of differentially connected coils are both the midpoints of the lines connecting the two coils diagonally, the two sets of coils have the same detection center.
【００１０】このため、リフトオフの変化に対しては、
リフトオフがコイルに対して平行に変化した場合は、２
組のコイル間で完全にキヤンヤルされ、リフトオフがコ
イルに対して斜めに変化した場合でも、２組のコイルの
コイル中心が同じことから、リフトオフ信号が大幅に低
減される。For this reason, with respect to a change in lift-off,
If the lift-off changes parallel to the coil, 2
The lift-off signal is greatly reduced even if the lift-off changes obliquely with respect to the coils, even if the lift-off signal changes completely with respect to the coils.
【００１１】また、２組の検出コイルのコイル中心の近
傍の試験体中を渦電流が斜めに流れているため、きずに
より渦電流の乱れる割合も大きい。またその発生する位
置と４個の検出コイル間の距離が短くなるため、きずが
ある場合には、きずによる渦電流変化が作る交流磁場の
乱れを効率よく検出することができる。Further, since the eddy current flows obliquely in the test body near the coil center of the two sets of detection coils, the turbulence of the eddy current due to the flaw is large. Further, since the distance between the position where the generation occurs and the four detection coils is reduced, if there is a flaw, the disturbance of the AC magnetic field caused by the eddy current change due to the flaw can be efficiently detected.
【００１２】そのため、探傷プローブを走査したとき、
試験体のきず付近における交流磁場に乱れが生じるた
め、２組のコイルの鎖交磁束に差が生じて、きずの検出
が可能になる。Therefore, when scanning the flaw detection probe,
Since the AC magnetic field is disturbed in the vicinity of the flaw of the test body, a difference occurs in the interlinkage magnetic flux between the two coils, and the flaw can be detected.
【００１３】[0013]
（第１の実施の形態）本発明の第１の実施の形態を図１
〜図３、図５〜図６に示す。図１は、第１の実施の形態
に係る渦電流探傷プローブの構成を示す図。(First Embodiment) FIG. 1 shows a first embodiment of the present invention.
3 and FIGS. 5 to 6. FIG. 1 is a diagram illustrating a configuration of an eddy current flaw detection probe according to the first embodiment.
【００１４】図２は、第１の実施の形態の係る渦電流探
傷プローブの回路構成を示す図。図３は、渦電流探傷プ
ローブの励磁コイルの方式を示す図。図５は、斜めのリ
フトオフに対する従来技術と本発明の比較を示す図。FIG. 2 is a diagram showing a circuit configuration of the eddy current inspection probe according to the first embodiment. FIG. 3 is a diagram showing a method of an exciting coil of the eddy current inspection probe. FIG. 5 is a diagram showing a comparison between the prior art and the present invention for oblique lift-off.
【００１５】図６は、渦電流分布の従来技術と本発明の
比較を示す図である。図１の（Ａ）、（Ｂ）に示すよう
に、１は、４個の検出コイルであり、菱形の各頂点にそ
の中心がくるように配置されている。その対角の２個は
逆相接続されており、さらにこれら２組が差動接続され
ている。FIG. 6 is a diagram showing a comparison between the prior art of the eddy current distribution and the present invention. As shown in FIGS. 1A and 1B, reference numeral 1 denotes four detection coils, each of which is disposed so that its center is located at each vertex of the rhombus. Two of the diagonals are connected in reverse phase, and these two sets are differentially connected.
【００１６】２は、励磁コイルであり、交流磁場を発生
し、試験体に斜め方向に渦電流を発生させるものであ
る。「斜め方向」とは、菱形の一方の対角線に対して角
度を有すると言う意味である。Reference numeral 2 denotes an exciting coil which generates an alternating magnetic field and generates an eddy current in a test body in an oblique direction. "Diagonal direction" means having an angle with respect to one diagonal of the diamond.
【００１７】「斜め方向に渦電流を発生させる励磁コイ
ル」としては、図３に示すように、 （１）励磁コイル方式１（平面型） （２）励磁コイル方式２（矩形型） （３）励磁コイル方式３（円形型） がある。As shown in FIG. 3, the "exciting coil for generating an eddy current in an oblique direction" is as follows: (1) Exciting coil system 1 (planar type) (2) Exciting coil system 2 (rectangular type) (3) Excitation coil system 3 (circular type) is available.
【００１８】各方式の特徴を示すと、 （１）励磁コイル方式１（平面型）は、高さが小さいが
幅が大きい。 （２）励磁コイル方式２（矩形型）は、高さが大きいが
幅が小さい。The features of each system are as follows: (1) Excitation coil system 1 (flat type) has a small height but a large width. (2) Excitation coil system 2 (rectangular type) has a large height but a small width.
【００１９】（３）励磁コイル方式３（円形型）は、高
さが大きいが幅が小さい。 しかし、各方式の性能は、同等である。そのため、測定
対象により方式を選定する。(3) Excitation coil system 3 (circular type) has a large height but a small width. However, the performance of each method is equivalent. Therefore, the method is selected according to the measurement target.
【００２０】３は、発信器で、励磁コイルに交流電流を
与える。４は、ブリッジ回路であり、差動接続されてい
る検出コイルから、きず信号だけを取り出す。Reference numeral 3 denotes a transmitter which supplies an alternating current to the exciting coil. Reference numeral 4 denotes a bridge circuit which extracts only a flaw signal from the differentially connected detection coil.
【００２１】１０は、試験体、１１は、試験体に生じた
きず、１２は、試験体中に発生した渦電流である。Reference numeral 10 denotes a test body, 11 denotes a flaw generated in the test body, and 12 denotes an eddy current generated in the test body.
【００２２】図１の（Ｃ）、（Ｄ）に示すように、励磁
コイル２により試験体中に「斜め方向に発生した渦電
流」は、（ａ）きずがないときは、乱れはなく、検出コ
イルに生じる渦電流からの鎖交磁束に差はなく出力は０
となる。（ｂ）しかし、きずがある場合は、渦電流に乱
れが生じ、このときの渦電流の乱れにより検出コイルの
鎖交磁束が各コイル間で異なるのできず信号として検出
される。As shown in FIGS. 1C and 1D, the "eddy current generated in the oblique direction" in the test piece by the exciting coil 2 is not disturbed when (a) there is no flaw. There is no difference in the linkage flux from the eddy current generated in the detection coil, and the output is 0
Becomes (B) However, if there is a flaw, the eddy current is disturbed, and the disturbance of the eddy current causes the interlinkage magnetic flux of the detection coil to be different between the coils, and is detected as a signal.
【００２３】図２に本発明装置の回路構成を示す。本発
明装置では検出コイルとして４個のコイルを用い、対角
にある２個を逆相接続し、これら２組のコイルを差動接
続する構成となっている。FIG. 2 shows a circuit configuration of the device of the present invention. In the device of the present invention, four coils are used as detection coils, two diagonally opposite coils are connected in reverse phase, and these two coils are differentially connected.
【００２４】次にリフトオフのある場合を図５により説
明する。 （１）従来装置による探傷の場合には、斜めリフトオフ
が発生すると、試験体と、検出コイルの位置関係が、図
５（ａ）に示すように検出コイルと試験体との距離がｌ
1 、ｌ2 となり、それぞれ異なる。Next, a case where there is a lift-off will be described with reference to FIG. (1) In the case of the flaw detection by the conventional apparatus, when the oblique lift-off occurs, the positional relationship between the test object and the detection coil is changed as shown in FIG.
1 and l 2 , each being different.
【００２５】そのため大きなリフトオフ信号が発生す
る。 （２）一方、本発明装置の場合には、図５（ｂ）に示す
ように、２組の検出コイルの検出中心からみた試験体ま
での距離ｌは常に等しく、（ａ）平行なリフトオフ変化
に対しては、リフトオフ信号が完全にキャンセルされ、
（ｂ）斜めのリフトオフに対しても、リフトオフ信号が
大幅に低減される。As a result, a large lift-off signal is generated. (2) On the other hand, in the case of the apparatus of the present invention, as shown in FIG. 5B, the distance l from the detection center of the two detection coils to the test object is always equal, and (a) the parallel lift-off change , The lift-off signal is completely cancelled,
(B) The lift-off signal is greatly reduced even for the oblique lift-off.
【００２６】[0026]
【発明の効果】本発明は前述のように構成されているの
で、以下に記載するような効果を奏する。 （１）本発明によれば、通常のリフトオフ信号の低減だ
けでなく、斜めのリフトオフ信号に対しても低減が図ら
れる。 （２）さらに、図６（ａ）に示す従来の励磁コイルに比
較して、本発明による斜めの渦電流を発生させる励磁コ
イル（図６（ｂ））の場合は、きずにより乱れる渦電流
の割合も大きく、また、渦電流の乱れる位置と検出コイ
ル間の距離が短くなるため、きずがある場合にはきずに
よる渦電成変化が作る交流磁場の乱れの減衰が小さくな
る。 （３）そのため、探傷プローブを走査したとき、試験体
のきず付近におけさらに渦電流が、きず信号が増大する
ため、きず信号がリフトオフ信号に埋もれることなく、
きずに対する検出性能が大幅に向上することができる。 （４）また、管の探傷に対しても検出性能の向上を図る
ことができる。Since the present invention is configured as described above, it has the following effects. (1) According to the present invention, it is possible to reduce not only a normal lift-off signal but also an oblique lift-off signal. (2) Compared with the conventional excitation coil shown in FIG. 6 (a), the excitation coil (FIG. 6 (b)) for generating an oblique eddy current according to the present invention has an eddy current which is disturbed by a flaw. Since the ratio is large and the distance between the position where the eddy current is disturbed and the detection coil is short, if there is a flaw, the decay of the AC magnetic field disturbance caused by the eddy current change due to the flaw is reduced. (3) Therefore, when the flaw detection probe is scanned, the eddy current further increases near the flaw of the test object, and the flaw signal increases, so that the flaw signal is not buried in the lift-off signal.
The detection performance for flaws can be greatly improved. (4) Further, the detection performance can be improved even for the flaw detection of the pipe.
【図１】本発明の第１の実施の形態に係る渦電流探傷プ
ローブの構成を示す図。FIG. 1 is a diagram showing a configuration of an eddy current inspection probe according to a first embodiment of the present invention.
【図２】本発明の第１の実施の形態の係る渦電流探傷プ
ローブの回路構成を示す図。FIG. 2 is a diagram showing a circuit configuration of the eddy current inspection probe according to the first embodiment of the present invention.
【図３】第１の実施の形態の係る渦電流探傷プローブの
励磁コイルの方式を示す図。FIG. 3 is a diagram showing a method of an exciting coil of the eddy current inspection probe according to the first embodiment.
【図４】従来の渦電流探傷プローブを示す図。FIG. 4 is a diagram showing a conventional eddy current flaw detection probe.
【図５】斜めのリフトオフに対する従来技術と本発明の
比較を示す図。FIG. 5 is a diagram showing a comparison between the prior art and the present invention for oblique lift-off.
【図６】渦電流分布の従来技術と本発明の比較を示す
図。FIG. 6 is a diagram showing a comparison between the prior art of the eddy current distribution and the present invention.
１…検出コイル ２…励磁コイル ３…発振器 ４…ブリッジ回路 ５…プローブ １０…試験体 １１…きず １２…渦電流 REFERENCE SIGNS LIST 1 detection coil 2 excitation coil 3 oscillator 4 bridge circuit 5 probe 10 test specimen 11 flaw 12 eddy current
Claims (1)
励磁コイル（２）と、（Ｃ）発振器（３）と、（Ｄ）ブ
リッジ回路（４）とからなり、（Ｅ）前記４個の検出コ
イル（１）は、菱形の各頂点を中心とするように配置す
るとともに、検出コイルの対角にある２個を逆相接続
し、さらに、これら２組のコイルを差動接続し、（Ｆ）
前記励磁コイル（２）は、２組の検出コイルのコイル中
心近傍の試験体中を斜め方向に流れる渦電流を発生させ
るコイルを組合わせることにより構成し、（Ｇ）前記発
振器（３）は、励磁コイル（２）に交流電流を供給し、
（Ｈ）前記ブリッジ回路（４）は、差動接続されている
検出コイルから、きず信号だけを取り出すことを特徴と
する渦電流探傷プローブ。(A) four detection coils (1); and (B)
It comprises an exciting coil (2), (C) an oscillator (3), and (D) a bridge circuit (4). (E) The four detection coils (1) are centered on each vertex of a diamond. And the two coils on opposite sides of the detection coil are connected in anti-phase, and the two coils are connected differentially.
The excitation coil (2) is constituted by combining coils for generating an eddy current that flows in an oblique direction in a test body near the center of the two detection coils, and (G) the oscillator (3) includes: Supplying an alternating current to the exciting coil (2),
(H) The eddy current inspection probe, wherein the bridge circuit (4) extracts only a flaw signal from the differentially connected detection coil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9004705A JPH10197493A (en) | 1997-01-14 | 1997-01-14 | Eddy-current flow detecting probe |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9004705A JPH10197493A (en) | 1997-01-14 | 1997-01-14 | Eddy-current flow detecting probe |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH10197493A true JPH10197493A (en) | 1998-07-31 |
Family
ID=11591306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9004705A Pending JPH10197493A (en) | 1997-01-14 | 1997-01-14 | Eddy-current flow detecting probe |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH10197493A (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000008458A1 (en) * | 1998-08-06 | 2000-02-17 | Mitsubishi Heavy Industries, Ltd. | Eddy-current flaw detector probe |
| WO2002097425A1 (en) * | 2001-05-29 | 2002-12-05 | Nihon University | Mutual-induction insertion probe |
| JP2004507736A (en) * | 2000-08-24 | 2004-03-11 | シエル・インターナシヨネイル・リサーチ・マーチヤツピイ・ベー・ウイ | Detection of abnormalities in conductive materials |
| WO2010134510A1 (en) * | 2009-05-22 | 2010-11-25 | 住友金属工業株式会社 | Rotating eddy current test probe |
| JP2011064590A (en) * | 2009-09-17 | 2011-03-31 | Ebara Corp | Eddy current sensor, polishing apparatus, plating apparatus, polishing method, plating method |
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| JP2017053635A (en) * | 2015-09-07 | 2017-03-16 | 株式会社Ihi | Flaw detection probe and flaw detection method |
| CN107153094A (en) * | 2017-05-24 | 2017-09-12 | 昆明理工大学 | U-shaped two-stage differential eddy current probe, detecting system and detection method |
| CN107167516A (en) * | 2017-05-24 | 2017-09-15 | 昆明理工大学 | Double difference dynamic formula pulse eddy current probe unit, array probe and detection means |
| JP2020180959A (en) * | 2019-04-24 | 2020-11-05 | 健二 飯島 | Magnetic sensor element, magnetic detector, motor having magnetic sensor element, and device having magnetic detector |
-
1997
- 1997-01-14 JP JP9004705A patent/JPH10197493A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6501267B1 (en) | 1998-08-06 | 2002-12-31 | Mitsubishi Heavy Industries, Ltd. | Eddy-current flaw detector probe |
| WO2000008458A1 (en) * | 1998-08-06 | 2000-02-17 | Mitsubishi Heavy Industries, Ltd. | Eddy-current flaw detector probe |
| JP4903349B2 (en) * | 2000-08-24 | 2012-03-28 | シエル・インターナシヨネイル・リサーチ・マーチヤツピイ・ベー・ウイ | Detection of abnormalities in objects made of conductive materials |
| JP2004507736A (en) * | 2000-08-24 | 2004-03-11 | シエル・インターナシヨネイル・リサーチ・マーチヤツピイ・ベー・ウイ | Detection of abnormalities in conductive materials |
| WO2002097425A1 (en) * | 2001-05-29 | 2002-12-05 | Nihon University | Mutual-induction insertion probe |
| US8638091B2 (en) | 2009-05-22 | 2014-01-28 | Nippon Steel & Sumitomo Metal Corporation | Rotary eddy current testing probe device |
| WO2010134510A1 (en) * | 2009-05-22 | 2010-11-25 | 住友金属工業株式会社 | Rotating eddy current test probe |
| JP2011064590A (en) * | 2009-09-17 | 2011-03-31 | Ebara Corp | Eddy current sensor, polishing apparatus, plating apparatus, polishing method, plating method |
| WO2013089205A1 (en) * | 2011-12-13 | 2013-06-20 | 株式会社アミテック | Position detection device |
| US9683829B2 (en) | 2011-12-13 | 2017-06-20 | Amiteq Co., Ltd. | Position detection device |
| US9274085B2 (en) | 2012-03-19 | 2016-03-01 | Hitachi, Ltd. | Eddy current inspection device, eddy current inspection probe, and eddy current inspection method |
| JP2017053635A (en) * | 2015-09-07 | 2017-03-16 | 株式会社Ihi | Flaw detection probe and flaw detection method |
| CN107153094A (en) * | 2017-05-24 | 2017-09-12 | 昆明理工大学 | U-shaped two-stage differential eddy current probe, detecting system and detection method |
| CN107167516A (en) * | 2017-05-24 | 2017-09-15 | 昆明理工大学 | Double difference dynamic formula pulse eddy current probe unit, array probe and detection means |
| CN107167516B (en) * | 2017-05-24 | 2023-09-26 | 昆明理工大学 | Double differential pulse eddy current probe unit, array probe and detection device |
| JP2020180959A (en) * | 2019-04-24 | 2020-11-05 | 健二 飯島 | Magnetic sensor element, magnetic detector, motor having magnetic sensor element, and device having magnetic detector |
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