JP6845714B2 - 樹脂成形装置、樹脂成形方法、及び樹脂成形品の製造方法 - Google Patents
樹脂成形装置、樹脂成形方法、及び樹脂成形品の製造方法 Download PDFInfo
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- 229920005989 resin Polymers 0.000 title claims description 273
- 239000011347 resin Substances 0.000 title claims description 273
- 238000000465 moulding Methods 0.000 title claims description 196
- 238000000034 method Methods 0.000 title claims description 66
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000000758 substrate Substances 0.000 claims description 64
- 230000000903 blocking effect Effects 0.000 claims description 32
- 230000007246 mechanism Effects 0.000 claims description 26
- 238000000748 compression moulding Methods 0.000 claims description 8
- 239000000047 product Substances 0.000 description 39
- 210000000078 claw Anatomy 0.000 description 22
- 238000007789 sealing Methods 0.000 description 19
- 239000012530 fluid Substances 0.000 description 16
- 239000000463 material Substances 0.000 description 12
- 239000008187 granular material Substances 0.000 description 8
- 238000009434 installation Methods 0.000 description 8
- 239000007788 liquid Substances 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 4
- 229920005992 thermoplastic resin Polymers 0.000 description 4
- 229920001187 thermosetting polymer Polymers 0.000 description 4
- 230000001174 ascending effect Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000011265 semifinished product Substances 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000013067 intermediate product Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920002050 silicone resin Polymers 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001721 transfer moulding Methods 0.000 description 1
- 230000007723 transport mechanism Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
- B29C43/361—Moulds for making articles of definite length, i.e. discrete articles with pressing members independently movable of the parts for opening or closing the mould, e.g. movable pistons
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/565—Moulds
- H01L21/566—Release layers for moulds, e.g. release layers, layers against residue during moulding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
- B29C43/18—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles
- B29C2043/181—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles incorporating preformed parts or layers, e.g. compression moulding around inserts or for coating articles encapsulated
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
- B29C43/32—Component parts, details or accessories; Auxiliary operations
- B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
- B29C2043/3602—Moulds for making articles of definite length, i.e. discrete articles with means for positioning, fastening or clamping the material to be formed or preforms inside the mould
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Description
2以上の成形型が積層され、
前記各成形型は、上型及び下型を有し、
前記各成形型における前記上型及び前記下型のうち一方の型は、側面部材及び底面部材を有し、
前記各一方の型は、前記側面部材と前記底面部材とが別々に上下動可能であることを特徴とする。
2以上の成形型が積層され、
前記各成形型が、上型及び下型を有し、
前記各成形型における前記上型及び前記下型のうち一方の型が、側面部材及び底面部材を有する樹脂成形装置により樹脂成形を行って樹脂成形体を製造する樹脂成形工程と、
前記側面部材又は前記底面部材の上昇又は下降により前記樹脂成形体の側面又は底面を離型する離型工程と、
を有することを特徴とする。
2 チップ
10 樹脂成形装置
20a 顆粒樹脂(樹脂材料)
20b 溶融樹脂(流動性樹脂)
20 硬化樹脂(封止樹脂)
100A 上型(上プレート)
100B 上型(中間プレート)
100C 可動プレート(下プレート)
101 上プレートの孔
200A、200B 下型
201A 下型側面部材(上段側面部材)
201B 下型側面部材(下段側面部材)
202A 下型底面部材(上段底面部材)
202B 下型底面部材(下段底面部材)
203A 下型キャビティ(上段キャビティ)
203B 下型キャビティ(下段キャビティ)
204 弾性部材
300A 保持部材A
300B 保持部材B
300C 保持部材C
400A 外気遮断部材A
400B 外気遮断部材B
400C 外気遮断部材C
501、502、503、504 Oリング
600 固定機構(固定爪)
A1〜A3 樹脂クランプ力が加わる方向を表す矢印
B1〜B2 基板クランプ力が加わる方向を表す矢印
C1 下段基板クランプ力をキャンセルする力が加わる方向を表す矢印
D1 上段基板クランプ力が加わる方向を表す矢印
D2 下段基板クランプ力をキャンセルする力が加わる方向を表す矢印
V1 成形型内の空気の吸引方向を表す矢印
X1〜X7 下プレートの移動方向又は力が加わる方向を表す矢印
Y1〜Y6 保持部材Aの移動方向又は力が加わる方向を表す矢印
Z1〜Z6 保持部材Cの移動方向又は力が加わる方向を表す矢印
Claims (8)
- 2以上の成形型が積層された樹脂成形装置であって、
前記各成形型は、上型及び下型を有し、
前記各成形型における前記上型及び前記下型のうち一方の型は、側面部材及び底面部材を有し、
前記各一方の型は、前記側面部材と前記底面部材とが別々に上下動可能であり、
上下に隣接する前記成形型において、
各成形型における前記一方の型が下型であり、他方の型が上型であり、上段の成形型の底面部材が、下段の成形型の上型と直接一体に形成されているか、又は、
各成形型における前記一方の型が上型であり、他方の型が下型であり、下段の成形型の底面部材が、上段の成形型の下型と直接一体に形成されており、
前記樹脂成形装置は、さらに、前記上段の成形型の底面部材を、前記下段の成形型の底面部材に対し上下動しないように固定する固定機構と、前記積層された成形型の全てを外気から遮断する外気遮断機構と、前記外気遮断機構によって外気から遮断された空間を減圧する減圧機構とを有することを特徴とする樹脂成形装置。 - 前記上型及び前記下型のうち、他方の型における、前記一方の型と対向する面に基板を固定可能である請求項1記載の樹脂成形装置。
- 前記一方の型が下型であり、
前記側面部材が下型側面部材であり、
前記底面部材が下型底面部材である、
請求項1又は2記載の樹脂成形装置。 - 圧縮成形装置である請求項1から3のいずれか一項に記載の樹脂成形装置。
- 請求項1から4のいずれか一項に記載の樹脂成形装置により樹脂成形を行って樹脂成形体を製造する樹脂成形工程と、
前記側面部材又は前記底面部材の上昇又は下降により前記樹脂成形体の側面又は底面を離型する離型工程と、
を有することを特徴とする樹脂成形方法。 - 前記離型工程が、前記側面部材の上昇又は下降により前記樹脂成形体の側面を離型する側面離型工程と、前記底面部材の上昇又は下降により前記樹脂成形体の底面を離型する底面離型工程と、を含み、
前記側面離型工程により前記樹脂成形体の側面を離型した後に、前記底面離型工程により前記樹脂成形体の底面を離型する、請求項5記載の樹脂成形方法。 - 前記離型工程が、前記側面部材の上昇又は下降により前記樹脂成形体の側面を離型する側面離型工程と、前記底面部材の上昇又は下降により前記樹脂成形体の底面を離型する底面離型工程と、を含み、
前記底面離型工程により前記樹脂成形体の底面を離型した後に、前記側面離型工程により前記樹脂成形体の側面を離型する、請求項5記載の樹脂成形方法。 - 請求項5から7のいずれか一項に記載の樹脂成形方法により樹脂を成形することを特徴とする樹脂成形品の製造方法。
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JP2017046044A JP6845714B2 (ja) | 2017-03-10 | 2017-03-10 | 樹脂成形装置、樹脂成形方法、及び樹脂成形品の製造方法 |
TW107100934A TWI702130B (zh) | 2017-03-10 | 2018-01-10 | 樹脂成型裝置、樹脂成型方法和樹脂成型品的製造方法 |
CN201810059333.XA CN108568929B (zh) | 2017-03-10 | 2018-01-22 | 树脂成型装置、树脂成型方法以及树脂成型品的制造方法 |
KR1020180026311A KR102148022B1 (ko) | 2017-03-10 | 2018-03-06 | 수지 성형 장치, 수지 성형 방법 및 수지 성형품의 제조 방법 |
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CN112248339B (zh) * | 2019-07-22 | 2022-09-09 | Oppo广东移动通信有限公司 | 壳体、壳体的制造方法和电子设备 |
CN111016096B (zh) * | 2019-11-26 | 2021-09-10 | 中国航发沈阳黎明航空发动机有限责任公司 | 一种压注成型用导杆开合式对正施压装置 |
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JP3490606B2 (ja) * | 1998-03-20 | 2004-01-26 | 富士通株式会社 | 半導体装置製造用金型 |
JP2002292653A (ja) | 2001-03-29 | 2002-10-09 | Takagi Kogyo Kk | 多段式注型成型装置 |
JP3896274B2 (ja) * | 2001-10-30 | 2007-03-22 | 住友重機械工業株式会社 | 半導体樹脂封止装置 |
JP4217572B2 (ja) * | 2003-09-18 | 2009-02-04 | アピックヤマダ株式会社 | 樹脂モールド方法および樹脂モールド装置 |
JP2008283111A (ja) * | 2007-05-14 | 2008-11-20 | Sumitomo Heavy Ind Ltd | 樹脂封止装置及び樹脂封止方法 |
JP5312897B2 (ja) * | 2008-10-20 | 2013-10-09 | Towa株式会社 | 圧縮成形装置 |
CN101428471B (zh) * | 2008-12-08 | 2010-12-15 | 广东达诚机械有限公司 | 热成型模具 |
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TW201832890A (zh) | 2018-09-16 |
KR102148022B1 (ko) | 2020-08-25 |
KR20180103714A (ko) | 2018-09-19 |
CN108568929A (zh) | 2018-09-25 |
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