JP6835039B2 - 物品搬送体 - Google Patents
物品搬送体 Download PDFInfo
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- JP6835039B2 JP6835039B2 JP2018116405A JP2018116405A JP6835039B2 JP 6835039 B2 JP6835039 B2 JP 6835039B2 JP 2018116405 A JP2018116405 A JP 2018116405A JP 2018116405 A JP2018116405 A JP 2018116405A JP 6835039 B2 JP6835039 B2 JP 6835039B2
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- 230000007246 mechanism Effects 0.000 claims description 77
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- 238000006243 chemical reaction Methods 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 230000036544 posture Effects 0.000 description 2
- 229920006311 Urethane elastomer Polymers 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229920000800 acrylic rubber Polymers 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
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- 238000012986 modification Methods 0.000 description 1
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- 229920000058 polyacrylate Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G19/00—Conveyors comprising an impeller or a series of impellers carried by an endless traction element and arranged to move articles or materials over a supporting surface or underlying material, e.g. endless scraper conveyors
- B65G19/18—Details
- B65G19/22—Impellers, e.g. push-plates, scrapers; Guiding means therefor
- B65G19/225—Impellers, e.g. push-plates, scrapers; Guiding means therefor for article conveyors, e.g. for container conveyors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G19/00—Conveyors comprising an impeller or a series of impellers carried by an endless traction element and arranged to move articles or materials over a supporting surface or underlying material, e.g. endless scraper conveyors
- B65G19/02—Conveyors comprising an impeller or a series of impellers carried by an endless traction element and arranged to move articles or materials over a supporting surface or underlying material, e.g. endless scraper conveyors for articles, e.g. for containers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
- B65G47/26—Devices influencing the relative position or the attitude of articles during transit by conveyors arranging the articles, e.g. varying spacing between individual articles
- B65G47/261—Accumulating articles
- B65G47/268—Accumulating articles by means of belt or chain conveyor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/34—Devices for discharging articles or materials from conveyor
- B65G47/46—Devices for discharging articles or materials from conveyor and distributing, e.g. automatically, to desired points
- B65G47/51—Devices for discharging articles or materials from conveyor and distributing, e.g. automatically, to desired points according to unprogrammed signals, e.g. influenced by supply situation at destination
- B65G47/5104—Devices for discharging articles or materials from conveyor and distributing, e.g. automatically, to desired points according to unprogrammed signals, e.g. influenced by supply situation at destination for articles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67715—Changing the direction of the conveying path
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67754—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber horizontal transfer of a batch of workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Warehouses Or Storage Devices (AREA)
- Toys (AREA)
- Liquid Crystal (AREA)
- Control And Other Processes For Unpacking Of Materials (AREA)
Description
このように、上記の構成によれば、保持部に保持された物品への走行部側からの振動の伝達を弾性体を用いて抑制する場合に、弾性体に要求される弾性変形特性の制約を緩和することができる。
物品搬送体の第1の実施形態について、図面(図1〜図5)を参照して説明する。
物品搬送体の第2の実施形態について、図面(図6〜図9)を参照して説明する。本実施形態では、弾性体60のリンク機構70に対する連結構造が、上記第1の実施形態とは異なっている。以下では、本実施形態の物品搬送体について、第1の実施形態との相違点を中心に説明する。特に明記しない点については、第1の実施形態と同様であり、同一の符号を付して詳細な説明は省略する。
次に、物品搬送体のその他の実施形態について説明する。
以下、上記において説明した物品搬送体の概要について説明する。
このように、上記の構成によれば、保持部に保持された物品への走行部側からの振動の伝達を弾性体を用いて抑制する場合に、弾性体に要求される弾性変形特性の制約を緩和することができる。
2:走行部
3:保持部
4:支持部
9:物品
41:第1部分
42:第2部分
43:ダンパ部
50:案内部
60:弾性体
70:リンク機構
71:第1リンク体
72:第2リンク体
73:連結部
80:低変位部
81:第1部材
82:第2部材
A:走行方向
G:案内方向
R:回転軸心
Claims (7)
- 走行部と、物品を保持する保持部と、前記走行部に対して前記保持部を支持する支持部と、を備えた物品搬送体であって、
前記支持部は、前記走行部に支持された第1部分と、前記保持部に連結された第2部分と、前記第1部分と前記第2部分との間に設けられたダンパ部と、を備え、
前記ダンパ部は、前記第2部分に対する前記第1部分の移動を特定の案内方向に沿って案内する案内部と、前記第1部分及び前記第2部分のそれぞれに連結されて、前記第2部分に対する前記第1部分の移動に連動するリンク機構と、弾性体と、を備え、
前記弾性体は、前記リンク機構の動作を減衰させるように前記リンク機構に連結されている、物品搬送体。 - 前記第1部分が前記第2部分に対して前記案内方向に沿って移動した場合における、前記第2部分に対する前記第1部分の変位量よりも前記弾性体の変形量が小さくなるように、前記弾性体が前記リンク機構に連結されている、請求項1に記載の物品搬送体。
- 前記リンク機構は、前記第1部分が前記第2部分に対して前記案内方向に沿って移動した場合における、前記第2部分に対する前記第1部分の変位量よりも前記第2部分に対する変位量が小さくなる低変位部を有し、
前記弾性体は、前記低変位部と一体的に移動するように連結された部分と、前記第1部分及び前記第2部分の一方と一体的に移動するように連結された部分とを有している、請求項2に記載の物品搬送体。 - 前記リンク機構は、前記第1部分が前記第2部分に対して前記案内方向に沿って移動した場合に、前記案内方向に交差する回転軸心周りに相対的に回転する第1部材と第2部材とを有し、
前記弾性体は、前記第1部材に一体的に連結された部分と、前記第2部材に一体的に連結された部分とを有している、請求項2に記載の物品搬送体。 - 前記リンク機構は、連結部において前記案内方向に交差する回転軸心周りに回転自在に連結された第1リンク体及び第2リンク体を備え、
前記第1リンク体は、前記連結部とは異なる位置において前記第1部分に対して回転自在に連結され、
前記第2リンク体は、前記連結部とは異なる位置において前記第2部分に対して回転自在に連結され、
前記弾性体は、前記連結部に連結されている、請求項1から4のいずれか一項に記載の物品搬送体。 - 前記案内方向は、前記走行部の走行方向に沿う方向である、請求項1から5のいずれか一項に記載の物品搬送体。
- 前記保持部は、前記支持部によって、前記走行部に吊り下げ支持されている、請求項1から6のいずれか一項に記載の物品搬送体。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018116405A JP6835039B2 (ja) | 2018-06-19 | 2018-06-19 | 物品搬送体 |
US16/427,521 US10640294B2 (en) | 2018-06-19 | 2019-05-31 | Article transport body |
TW108119767A TWI812731B (zh) | 2018-06-19 | 2019-06-06 | 物品搬送體 |
KR1020190069244A KR20190143373A (ko) | 2018-06-19 | 2019-06-12 | 물품 반송체 |
CN201910521296.4A CN110615241B (zh) | 2018-06-19 | 2019-06-17 | 物品输送体 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018116405A JP6835039B2 (ja) | 2018-06-19 | 2018-06-19 | 物品搬送体 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019218180A JP2019218180A (ja) | 2019-12-26 |
JP6835039B2 true JP6835039B2 (ja) | 2021-02-24 |
Family
ID=68839590
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018116405A Active JP6835039B2 (ja) | 2018-06-19 | 2018-06-19 | 物品搬送体 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10640294B2 (ja) |
JP (1) | JP6835039B2 (ja) |
KR (1) | KR20190143373A (ja) |
CN (1) | CN110615241B (ja) |
TW (1) | TWI812731B (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020230440A1 (ja) * | 2019-05-13 | 2020-11-19 | 村田機械株式会社 | 天井搬送車 |
US11295973B2 (en) * | 2020-02-11 | 2022-04-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus and method for automated wafer carrier handling |
EP4245631A1 (en) * | 2020-11-10 | 2023-09-20 | Murata Machinery, Ltd. | Overhead transport vehicle |
JP2022101200A (ja) * | 2020-12-24 | 2022-07-06 | 株式会社ダイフク | 物品搬送車 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4144965A (en) * | 1977-09-12 | 1979-03-20 | Robert L. Alldredge | Flexible conveyor track assembly |
JP3764186B2 (ja) * | 1994-08-31 | 2006-04-05 | 丸菱工業株式会社 | 車両用シートのサスペンション装置 |
CN1636845A (zh) * | 2003-11-13 | 2005-07-13 | 应用材料有限公司 | 在空中传送期间稳定衬底的载体 |
JP2012061889A (ja) * | 2010-09-14 | 2012-03-29 | Kyb Co Ltd | 搬送台車 |
JP5525399B2 (ja) * | 2010-09-16 | 2014-06-18 | 東京エレクトロン株式会社 | 搬送装置、基板処理システム及び姿勢制御機構 |
JP2014156889A (ja) * | 2013-02-15 | 2014-08-28 | Ihi Corp | 構造物の防震構造 |
JP6064940B2 (ja) * | 2014-04-07 | 2017-01-25 | 株式会社ダイフク | 物品搬送車 |
JP6327124B2 (ja) * | 2014-11-12 | 2018-05-23 | 株式会社ダイフク | 物品搬送車 |
EP3533728B1 (en) * | 2016-10-25 | 2022-02-09 | Murata Machinery, Ltd. | Overhead transport vehicle |
CN207481595U (zh) * | 2017-03-24 | 2018-06-12 | 南京林业大学 | 一种变刚度的半主动悬架弹性部件 |
-
2018
- 2018-06-19 JP JP2018116405A patent/JP6835039B2/ja active Active
-
2019
- 2019-05-31 US US16/427,521 patent/US10640294B2/en active Active
- 2019-06-06 TW TW108119767A patent/TWI812731B/zh active
- 2019-06-12 KR KR1020190069244A patent/KR20190143373A/ko not_active Application Discontinuation
- 2019-06-17 CN CN201910521296.4A patent/CN110615241B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
TWI812731B (zh) | 2023-08-21 |
TW202017823A (zh) | 2020-05-16 |
US20190382206A1 (en) | 2019-12-19 |
KR20190143373A (ko) | 2019-12-30 |
CN110615241A (zh) | 2019-12-27 |
CN110615241B (zh) | 2023-03-24 |
US10640294B2 (en) | 2020-05-05 |
JP2019218180A (ja) | 2019-12-26 |
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