JP6832576B2 - ホウフッ化物含有廃液の処理方法 - Google Patents
ホウフッ化物含有廃液の処理方法 Download PDFInfo
- Publication number
- JP6832576B2 JP6832576B2 JP2017045816A JP2017045816A JP6832576B2 JP 6832576 B2 JP6832576 B2 JP 6832576B2 JP 2017045816 A JP2017045816 A JP 2017045816A JP 2017045816 A JP2017045816 A JP 2017045816A JP 6832576 B2 JP6832576 B2 JP 6832576B2
- Authority
- JP
- Japan
- Prior art keywords
- waste liquid
- borofluoride
- treatment
- solution
- booxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000007788 liquid Substances 0.000 title claims description 79
- 239000002699 waste material Substances 0.000 title claims description 45
- 238000000034 method Methods 0.000 title claims description 15
- 239000000243 solution Substances 0.000 claims description 37
- 239000011591 potassium Substances 0.000 claims description 22
- 229910052700 potassium Inorganic materials 0.000 claims description 22
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims description 21
- 239000007864 aqueous solution Substances 0.000 claims description 21
- 238000000926 separation method Methods 0.000 claims description 18
- 229940043430 calcium compound Drugs 0.000 claims description 12
- 150000001674 calcium compounds Chemical class 0.000 claims description 12
- 239000000126 substance Substances 0.000 claims description 10
- 230000002378 acidificating effect Effects 0.000 claims description 7
- 150000003388 sodium compounds Chemical class 0.000 claims description 7
- 239000000463 material Substances 0.000 claims 1
- 229910052731 fluorine Inorganic materials 0.000 description 21
- 239000011737 fluorine Substances 0.000 description 21
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 18
- 239000010802 sludge Substances 0.000 description 18
- 238000005530 etching Methods 0.000 description 17
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 16
- 229910052796 boron Inorganic materials 0.000 description 15
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 14
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 10
- -1 hydride ion boron ions Chemical class 0.000 description 9
- 239000011521 glass Substances 0.000 description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- 150000002500 ions Chemical class 0.000 description 6
- 239000003002 pH adjusting agent Substances 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 230000007613 environmental effect Effects 0.000 description 4
- PUZPDOWCWNUUKD-UHFFFAOYSA-M sodium fluoride Chemical compound [F-].[Na+] PUZPDOWCWNUUKD-UHFFFAOYSA-M 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 230000007935 neutral effect Effects 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 2
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 2
- 229910001634 calcium fluoride Inorganic materials 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000000706 filtrate Substances 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- 230000001376 precipitating effect Effects 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000011775 sodium fluoride Substances 0.000 description 2
- 235000013024 sodium fluoride Nutrition 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- UXVMQQNJUSDDNG-UHFFFAOYSA-L Calcium chloride Chemical compound [Cl-].[Cl-].[Ca+2] UXVMQQNJUSDDNG-UHFFFAOYSA-L 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910000019 calcium carbonate Inorganic materials 0.000 description 1
- 239000001110 calcium chloride Substances 0.000 description 1
- 229910001628 calcium chloride Inorganic materials 0.000 description 1
- AXCZMVOFGPJBDE-UHFFFAOYSA-L calcium dihydroxide Chemical compound [OH-].[OH-].[Ca+2] AXCZMVOFGPJBDE-UHFFFAOYSA-L 0.000 description 1
- 239000000920 calcium hydroxide Substances 0.000 description 1
- 229910001861 calcium hydroxide Inorganic materials 0.000 description 1
- 238000005345 coagulation Methods 0.000 description 1
- 230000015271 coagulation Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 230000002085 persistent effect Effects 0.000 description 1
- 150000003109 potassium Chemical class 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 150000003112 potassium compounds Chemical class 0.000 description 1
- 229910001414 potassium ion Inorganic materials 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 239000011780 sodium chloride Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- 238000004065 wastewater treatment Methods 0.000 description 1
- 238000003911 water pollution Methods 0.000 description 1
Images
Landscapes
- Removal Of Specific Substances (AREA)
Description
HBF4 + KOH → KBF4 + H2O
12‐前処理槽
14‐前処理液収容槽
16、17‐フィルタプレス
18‐汚泥収容槽
20‐ホウフッ化物処理槽
22‐カリウム溶液収容槽
24‐pH調整剤収容槽
26‐汚泥収容槽
28‐濾液収容槽
Claims (1)
- 少なくともホウフッ化物を含む廃液にpHが5を超えるまでナトリウム化合物またはカルシウム化合物を添加する前処理工程と、
前記前処理工程で得られた溶液のpHが10以上になるように少なくともカリウムを含むアルカリ水溶液を添加し、前記アルカリ水溶液添加後に、酸性物質によって被処理溶液のpHを5〜9に調整するホウフッ化物除去工程と、
前記ホウフッ化物除去工程で得られた溶液を固液分離する固液分離工程と、
を含むホウフッ化物含有廃液の処理方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017045816A JP6832576B2 (ja) | 2017-03-10 | 2017-03-10 | ホウフッ化物含有廃液の処理方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017045816A JP6832576B2 (ja) | 2017-03-10 | 2017-03-10 | ホウフッ化物含有廃液の処理方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018149469A JP2018149469A (ja) | 2018-09-27 |
JP6832576B2 true JP6832576B2 (ja) | 2021-02-24 |
Family
ID=63681146
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017045816A Active JP6832576B2 (ja) | 2017-03-10 | 2017-03-10 | ホウフッ化物含有廃液の処理方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP6832576B2 (ja) |
-
2017
- 2017-03-10 JP JP2017045816A patent/JP6832576B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP2018149469A (ja) | 2018-09-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR101656825B1 (ko) | 폐수로부터 불소 성분을 제거하는 조성물 및 이를 이용하여 폐수로부터 불소 성분을 제거하는 방법 | |
US11286181B2 (en) | Treatment method and treatment apparatus for waste water containing sulfuric acid, fluorine and heavy metal ions | |
WO2012033077A1 (ja) | 銅エッチング廃液の処理方法 | |
WO2015198438A1 (ja) | フッ化物含有水の処理方法及び処理装置 | |
US20210340018A1 (en) | Chemical agent comprising fluorine-containing polyaluminum chloride | |
JP6832576B2 (ja) | ホウフッ化物含有廃液の処理方法 | |
TWI449668B (zh) | Preparation method of calcium fluoride | |
KR101559852B1 (ko) | 식각공정에서 발생하는 붕불산 폐수의 처리방법 | |
CN105461132B (zh) | 一种废水处理方法及系统 | |
KR20150120971A (ko) | 붕불화물 함유수의 처리 방법 및 처리 장치 | |
WO2013054875A1 (ja) | フルオロリン酸化合物を含む廃水の処理方法 | |
JP6467651B2 (ja) | アルミニウム化合物溶液の製造方法 | |
WO2000046156A1 (fr) | Procede d'elimination de calcium a partir d'eau contenant une forte teneur en hydrogeno-carbonate de calcium | |
JP6045964B2 (ja) | ホウフッ化物イオン含有排水の処理方法およびホウフッ化物イオン含有排水の処理装置 | |
JP2018158296A (ja) | ケイフッ化水素酸含有廃液の処理方法 | |
WO2018105680A1 (ja) | シリカ含有水の処理装置および処理方法 | |
JP6467578B2 (ja) | ケイフッ化水素酸含有廃液の処理方法 | |
JP2009095810A (ja) | ホウ素含有排水の処理方法及び処理装置 | |
JP6396827B2 (ja) | ホウフッ化物含有排水の処理方法および処理システム | |
KR101918832B1 (ko) | 구리 함유 폐수의 처리 방법 및 처리 장치 | |
KR101273168B1 (ko) | 불소화합물 함유수 처리방법 | |
KR101028447B1 (ko) | 혼합폐산으로부터 선택적 침전을 통해 불산을 분리하는 방법 및 그 분리장치 | |
KR20160043322A (ko) | 불소제거를 위한 폐수 처리 시스템 | |
TWI552963B (zh) | Waste acid solution treatment method | |
WO2023234047A1 (ja) | フッ素及びアルミニウム含有水の処理方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20200310 |
|
A871 | Explanation of circumstances concerning accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A871 Effective date: 20200310 |
|
A975 | Report on accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A971005 Effective date: 20200318 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20200702 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200722 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200826 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20201104 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20201118 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20201225 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210119 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6832576 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |