JP6831764B2 - 化合物半導体基板の評価方法、およびこれを用いた化合物半導体基板の製造方法 - Google Patents
化合物半導体基板の評価方法、およびこれを用いた化合物半導体基板の製造方法 Download PDFInfo
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- JP6831764B2 JP6831764B2 JP2017184589A JP2017184589A JP6831764B2 JP 6831764 B2 JP6831764 B2 JP 6831764B2 JP 2017184589 A JP2017184589 A JP 2017184589A JP 2017184589 A JP2017184589 A JP 2017184589A JP 6831764 B2 JP6831764 B2 JP 6831764B2
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- compound semiconductor
- semiconductor substrate
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- raman
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- 239000000758 substrate Substances 0.000 title claims description 111
- 239000004065 semiconductor Substances 0.000 title claims description 75
- 150000001875 compounds Chemical class 0.000 title claims description 69
- 238000004519 manufacturing process Methods 0.000 title claims description 17
- 238000011156 evaluation Methods 0.000 title claims description 14
- 238000001069 Raman spectroscopy Methods 0.000 claims description 34
- 238000005259 measurement Methods 0.000 claims description 26
- 238000001237 Raman spectrum Methods 0.000 claims description 13
- 238000005452 bending Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 12
- 239000010410 layer Substances 0.000 description 50
- 239000013078 crystal Substances 0.000 description 25
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 13
- 229910002601 GaN Inorganic materials 0.000 description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 238000009826 distribution Methods 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 230000007547 defect Effects 0.000 description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 5
- 150000004767 nitrides Chemical class 0.000 description 5
- 239000007789 gas Substances 0.000 description 4
- 239000002994 raw material Substances 0.000 description 4
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000001066 destructive effect Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 150000001495 arsenic compounds Chemical class 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229940093920 gynecological arsenic compound Drugs 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Description
B 下地基板
G 化合物半導体層
G1 バッファ層
G2 動作層
1 レーザー光発振器
2 入射レーザー光
3 鏡
4 散乱光
5 測定対象(化合物半導体基板Z)
6 対物レンズ
7 集光レンズ
8 空間スリット
9 検出器
10 分光器
Claims (2)
- 下地基板の主面上に化合物半導体層を積層させた化合物半導体基板を準備するステップ1と、
前記ステップ1で得られた化合物半導体基板の表面および裏面の少なくとも一方の面の任意の一半径上で、測定点を、最低でも前記基板の端部と中心部を含む2か所以上選択してラマンスペクトルを測定し、前記下地基板のラマンピーク周波数を得るステップ2と、
前記ステップ2で得られた各ラマンピーク周波数のうち、最大値と最小値との差Xを算出するステップ3と、
前記下地基板の最大曲げ応力値を算出するステップ4と、
前記Xが、前記ステップ4で得られた前記下地基板の最大曲げ応力値の50%を超える場合を前記化合物半導体基板が割れやすいと判断するステップ5と、
を備えることを特徴とする化合物半導体基板の評価方法。 - 請求項1に記載の評価方法を用いて化合物半導体基板の割れやすさを判断し、前記判断に基づいて製造条件を決定することを特徴とする化合物半導体基板の製造方法。
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JP6831764B2 true JP6831764B2 (ja) | 2021-02-17 |
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Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH1114470A (ja) * | 1997-06-24 | 1999-01-22 | Sharp Corp | 試料の界面応力解析方法 |
US6509201B1 (en) * | 2001-04-11 | 2003-01-21 | Advanced Micro Devices, Inc. | Method and apparatus for monitoring wafer stress |
JP2006073866A (ja) * | 2004-09-03 | 2006-03-16 | Horiba Ltd | 半導体材料の応力測定方法及びその装置 |
JP2006084179A (ja) * | 2004-09-14 | 2006-03-30 | Ngk Spark Plug Co Ltd | 非破壊検査方法及び非破壊検査装置 |
JP2007147607A (ja) * | 2005-11-07 | 2007-06-14 | Toray Res Center:Kk | 試料の応力または歪みを測定する方法 |
JP4386031B2 (ja) * | 2005-12-26 | 2009-12-16 | 住友電気工業株式会社 | 半導体デバイスの製造方法および窒化ガリウム結晶基板の識別方法 |
JP2009065025A (ja) * | 2007-09-07 | 2009-03-26 | Covalent Materials Corp | 化合物半導体基板 |
JP5944873B2 (ja) * | 2013-09-20 | 2016-07-05 | 新日鉄住金マテリアルズ株式会社 | 炭化珪素単結晶ウェハの内部応力評価方法、及び炭化珪素単結晶ウェハの反りの予測方法 |
US10048142B2 (en) * | 2014-05-30 | 2018-08-14 | Showa Denko K.K. | Evaluation method for bulk silicon carbide single crystals and reference silicon carbide single crystal used in said method |
JP6384229B2 (ja) * | 2014-09-19 | 2018-09-05 | 住友電気工業株式会社 | 窒化ガリウム基板 |
WO2016067918A1 (ja) * | 2014-10-31 | 2016-05-06 | 富士電機株式会社 | 炭化珪素エピタキシャル膜の成長方法 |
WO2017057742A1 (ja) * | 2015-10-02 | 2017-04-06 | 新日鐵住金株式会社 | SiC単結晶インゴット |
JP2017109900A (ja) * | 2015-12-16 | 2017-06-22 | 富士電機株式会社 | エピタキシャル成長装置、エピタキシャル成長方法及び半導体素子の製造方法 |
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