JP6830731B2 - Cutting equipment - Google Patents

Description

The present invention relates to a cutting apparatus for cutting a plate-shaped workpiece such as a semiconductor wafer, a package substrate, a glass substrate or a ceramic substrate.

In the device chip manufacturing process, grid-like division schedule lines called streets are set on the surface of a wafer made of silicon or compound semiconductor, and devices such as ICs and LSIs are formed in each area partitioned by the division schedule lines. Will be done. These wafers are cut along the planned split line and split into individual device chips.

Cutting is performed, for example, by a cutting device equipped with a cutting blade. The cutting blade has a ring shape with a hole in the center, and an appropriate cutting blade is selected according to the type of workpiece and the processing content and mounted on the cutting unit of the cutting device. The cutting unit has a columnar spindle that serves as an axis of rotation, and the cutting blade is mounted on the cutting unit by inserting the spindle into the hole.

When using a cutting device, first, the power is turned on to the cutting device. However, immediately after the power is turned on to the cutting device, the temperature and the like of each component of the cutting device are not in the temperature and the like during normal operation, so that each component operates normally. Even if it is attempted, the cutting process cannot be performed with the original accuracy of the cutting device. Therefore, before cutting the workpiece, the spindle is rotated, the cutting fluid is supplied to the cutting blade, and the chuck table provided in the cutting device and the cutting unit are moved to perform the idling operation.

If the idling operation is performed before cutting the workpiece, the temperature of each component of the cutting device will be in the normal operating state, and the cutting device will stably perform the cutting with the original accuracy. It will be ready. Then, the cutting process can be performed with high accuracy from the cutting process on the first workpiece.

Japanese Unexamined Patent Publication No. 2001-259961 JP-A-2002-59365

It is not easy to judge from the appearance of the cutting device whether or not the idling operation has been sufficiently performed, and it is difficult to determine the end of the idling operation only from the information obtained from the appearance. Therefore, in general, the manufacturer of the cutting device sets a recommended time with a large margin for the time required for the idling operation, and the manufacturer transmits the recommended time to the user of the cutting device. Then, the user of the cutting device performs the idling operation according to the recommended time.

Under such circumstances, the required idling operation may be completed before the recommended idling time elapses, and the cutting apparatus may be in a state where it can be machined with sufficient accuracy. However, since it is not possible to determine the completion of the required idling operation from the appearance of the device, the idling operation is excessively continued until the recommended time elapses.

Further, the set recommended time does not correspond to the environment in which the cutting device is installed and the usage mode of the cutting device, and even if the idling operation is performed at the recommended time, the required idling operation is not completed. There is a risk that the cutting device will not be ready for machining with sufficient accuracy. In that case, the idling operation is terminated even though the idling operation is required.

The present invention has been made in view of such a problem, and an object of the present invention is to provide a cutting device capable of appropriately determining the completion of an idling operation and performing the idling operation in just proportion.

According to one aspect of the present invention, a chuck table that holds a work piece on a holding surface, a cutting unit that cuts a work piece held on the chuck table with a cutting blade mounted on a spindle, and the chuck table. A moving unit that moves the cutting blade relative to the cutting feed direction perpendicular to the holding surface and the machining feed direction parallel to the holding surface, and an imaging unit that images the workpiece held on the chuck table. A cutting device including a control unit for controlling each component, wherein the control unit includes an idling operation instruction unit for instructing the execution of an idling operation for driving the cutting unit and the moving unit, and an idling operation instruction unit for the idling operation. A cutting groove forming instruction unit for moving the cutting blade to a predetermined position in the cutting feed direction with respect to the workpiece to form a cutting groove on the surface of the workpiece, and an imaging unit. A length detection indicator that images the surface of the work piece and detects the length of the cutting groove before and after the idling operation, and is detected before the idling operation. A threshold registration unit that registers a threshold value for the difference between the length of the cutting groove and the length of the cutting groove detected after the idling operation, and when the difference is equal to or greater than the threshold value, the idling operation is completed. Provided is a cutting device including a determination unit for determining that the fact cannot be confirmed and determining that further idling operation is unnecessary when the difference is equal to or less than the threshold value.

Further, according to another aspect of the present invention, a first chuck table capable of holding the workpiece on the holding surface and a second chuck table capable of holding the detection workpiece for forming a cutting groove for detection can be held. A chuck table, a cutting unit that cuts a workpiece held on the first chuck table and a workpiece held on the second chuck table with a cutting blade mounted on a spindle, and the like. A moving unit that moves the chuck table 1 and the second chuck table and the cutting blade relative to the cutting feed direction perpendicular to the holding surface and the machining feed direction parallel to the holding surface, and the first chuck table. A cutting device including an imaging unit for imaging a held workpiece and a detection workpiece held on the second chuck table, and a control unit for controlling each component, the control unit. Instructs the execution of the idling operation for driving the cutting unit and the moving unit, and before and after the idling operation, the cutting blade is cut and fed with respect to the object to be detected. A cutting groove forming instruction unit that moves to a predetermined position to form a cutting groove on the surface of the work piece to be detected, and an imaging unit that images the surface of the work piece to be detected and length of the cutting groove. A length detection indicator that causes length detection to be performed before and after the idling operation, the length of the cutting groove detected before the idling operation, and detection after the idling operation. When the difference between the length of the cutting groove and the length of the cutting groove is registered with the threshold registration unit and the difference is equal to or greater than the threshold, it is determined that the idling operation has been completed, and the difference is equal to or less than the threshold. In this case, a cutting device is provided that includes a determination unit that determines that further idling operation is unnecessary.

In the cutting device according to one aspect of the present invention, the cutting blade is moved in the cutting feed direction before and after the idling operation is performed, and the work piece (work) of the cutting device, or a dresser board or a pseudo. A cutting groove is formed on the work piece (dummy work).

Then, the length of the cutting groove formed before the idling operation can be compared with the length of the cutting groove formed after the idling operation, and if the difference between the lengths is equal to or less than a predetermined threshold value, the cutting blade in the cutting direction It can be judged that the accuracy of the movement of is sufficiently stable. In this case, the determination unit determines that no further idling operation is required. Therefore, the user of the cutting device can finish the idling operation and start the cutting process.

Further, if the difference in length is larger than a predetermined threshold value, it cannot be determined that the accuracy of movement of the cutting blade in the cutting direction is sufficiently stable. In this case, the determination unit determines that it cannot confirm that the idling operation has been completed. Then, the idling operation is further performed to further stabilize the cutting device.

If the cutting process of the workpiece is started before the workpiece can be machined with sufficient accuracy, the predetermined machining may not be performed and the workpiece may have to be discarded, which is a problem. Further, if the idling operation is performed more than necessary, time, electric power, and the like are wasted, and the processing efficiency of the cutting device is lowered, which causes a problem. However, in the cutting device according to one aspect of the present invention, the completion of the idling operation can be confirmed, so that such a problem can be avoided.

As described above, the present invention provides a cutting apparatus capable of appropriately determining the completion of idling operation and performing idling operation in just proportion.

It is explanatory drawing which shows typically the cutting apparatus. FIG. 2A is a cross-sectional view schematically explaining the formation of a cutting groove before the idling operation, and FIG. 2B is a cross-sectional view schematically explaining the formation of the cutting groove after the idling operation. FIG. 3C is a cross-sectional view schematically illustrating the imaging of the cutting groove by the imaging unit. It is a schematic diagram which shows the captured image which was taken by the image pickup unit.

An embodiment according to one aspect of the present invention will be described with reference to the accompanying drawings. First, the cutting apparatus according to this embodiment will be described with reference to FIG. FIG. 1 is an explanatory diagram schematically showing a cutting device 2.

As shown in FIG. 1, the cutting device 2 includes a base 4 that supports each structure. An X-axis moving mechanism (moving unit) 8 for moving the X-axis moving table 6 and the X-axis moving table 6 in the X-axis direction is provided on the central portion of the base 4.

The X-axis moving mechanism 8 includes a pair of X-axis guide rails 10 parallel to the X-axis direction, and the X-axis moving table 6 is slidably attached to the X-axis guide rail 10. A nut portion (not shown) is provided on the lower surface side of the X-axis moving table 6, and an X-axis ball screw 12 parallel to the X-axis guide rail 10 is screwed into the nut portion.

An X-axis pulse motor 14 is connected to one end of the X-axis ball screw 12. By rotating the X-axis ball screw 12 with the X-axis pulse motor 14, the X-axis moving table 6 moves in the X-axis direction along the X-axis guide rail 10.

A chuck table 16 for holding the workpiece is provided above the X-axis moving table 6. Around the chuck table 16, four clamps 18 for fixing an annular frame supporting a work piece from all sides are arranged.

The chuck table 16 is connected to a rotation drive source (not shown) such as a motor, and rotates around a rotation axis substantially parallel to the Z-axis direction (vertical direction). Further, the chuck table 16 is machined and fed in the X-axis direction by the X-axis moving mechanism 8 described above.

The upper surface of the chuck table 16 is a holding surface 16a for holding the workpiece. The holding surface 16a is connected to a suction source (not shown) through a suction path or the like formed inside the chuck table 16.

A transport unit (not shown) for transporting the workpiece to the chuck table 16 is provided at a position close to the chuck table 16. The work piece conveyed by the transfer unit is placed on the holding surface 16a of the chuck table 16 so that the surface side is exposed upward, for example.

On the upper surface of the base 4, a gate-shaped support structure 22 for supporting two sets of cutting units 20 (first cutting unit 20a, second cutting unit 20b) is arranged so as to straddle the X-axis guide rail 10. Has been done. Two sets of cutting unit moving mechanisms (moving units) 24 for moving each cutting unit 20 in the Y-axis direction (left-right direction, indexing feed direction) and the Z-axis direction are provided on the upper front surface of the support structure 22.

Each cutting unit moving mechanism 24 commonly includes a pair of Y-axis guide rails 26 arranged in front of the support structure 22 and parallel to the Y-axis direction. A Y-axis moving plate 28 constituting each cutting unit moving mechanism 24 is slidably attached to the Y-axis guide rail 26.

A nut portion (not shown) is provided on the back surface side (rear surface side) of each Y-axis moving plate 28, and a Y-axis ball screw 30 parallel to the Y-axis guide rail 26 is screwed into the nut portion. Has been done. A Y-axis pulse motor 32 is connected to one end of each Y-axis ball screw 30. When the Y-axis ball screw 30 is rotated by the Y-axis pulse motor 32, the Y-axis moving plate 28 moves in the Y-axis direction along the Y-axis guide rail 26.

A pair of Z-axis guide rails 34 parallel to the Z-axis direction are provided on the surface (front surface) of each Y-axis moving plate 28. A Z-axis moving plate 36 is slidably attached to the Z-axis guide rail 34.

A nut portion (not shown) is provided on the back surface side (rear surface side) of each Z-axis moving plate 36, and a Z-axis ball screw 38 parallel to the Z-axis guide rail 34 is screwed into the nut portion. Has been done. A Z-axis pulse motor 40 is connected to one end of each Z-axis ball screw 38. When the Z-axis ball screw 38 is rotated by the Z-axis pulse motor 40, the Z-axis moving plate 36 moves in the Z-axis direction along the Z-axis guide rail 34.

A cutting unit 20 is provided at the bottom of each Z-axis moving plate 36. The cutting unit 20 includes an annular cutting blade mounted on one end side of a spindle serving as a rotation axis. Further, an imaging unit (imaging camera) 42 for imaging a work piece or the like is provided at a position adjacent to the cutting unit 20.

If the Y-axis moving plate 28 is moved in the Y-axis direction by each cutting unit moving mechanism 24, the cutting unit 20 and the imaging unit 42 are indexed and fed in the Y-axis direction. Further, if the Z-axis moving plate 36 is moved in the Z-axis direction by each cutting unit moving mechanism 24, the cutting unit 20 and the imaging unit 42 move up and down in the cutting feed direction.

A control unit (control means) 44 is connected to the components of the cutting device 2 such as the X-axis moving mechanism 8, the chuck table 16, the cutting unit 20, the cutting unit moving mechanism 24, and the imaging unit 42. Each component is controlled by the control unit (control means) 44.

Further, a dresser board chuck table 46 is provided in the vicinity of the chuck table 16 of the cutting apparatus 2 according to the present embodiment. The upper surface of the dresser board chuck table 46 is a holding surface 46a for holding the dresser board. For example, a cross-shaped suction groove is formed on the holding surface 46a in a plan view, and a suction hole is formed at the center of the cross. The suction hole leads to a suction source (not shown) through a suction path (not shown) inside the chuck table 46 for a dresser board.

When the dresser board is placed on the holding surface 46a of the dresser board chuck table 46, a negative pressure is applied from the suction source to suck and hold the dresser board on the holding surface 46a. If there is no dresser board chuck table 46, the chuck table 16 holds the dresser board when dressing the cutting blade.

The control unit (control means) 44 has a function of controlling each component of the cutting device 2 to perform cutting on the workpiece held on the chuck table 16. Further, the control unit 44 includes an idling operation instruction unit 44a, a cutting groove formation instruction unit 44b, a length detection instruction unit 44c, a threshold value registration unit 44d, and a determination unit 44e. Then, it has a function of controlling each component of the cutting device 2 to perform an idling operation so that the cutting device 2 can perform cutting with sufficient accuracy.

The idling operation instruction unit 44a has a function of instructing the cutting unit 20 and the moving unit (cutting unit moving mechanism 24) to perform an idling operation. The idling operation instruction unit 44a instructs each unit to perform an idling operation that imitates an operation during cutting.

The cutting groove forming instruction unit 44b has a function of cutting a cutting blade 20 into a workpiece 1 or the like held on a chuck table 16 or a dresser board chuck table 46 before and after an idling operation to form a cutting groove. .. The cutting groove forming instruction unit 44b, for example, moves the cutting unit 20 directly above the surplus region where the device or the like of the workpiece 1 is not formed, and instructs the cutting unit 20 to form the cutting groove in the surplus region.

Here, the workpiece 1 or the like on which the cutting groove is formed does not have to be a workpiece (work), but may be a pseudo workpiece (dummy work), a dresser board, or the like.

The length detection instruction unit 44c has a function of causing the image pickup unit 42 to image the surface of the work piece 1 or the like and detecting the length of the cutting groove from the obtained captured image. Then, the length of the cutting groove formed before the idling operation and the length of the cutting groove formed after the idling operation are detected, and information regarding the difference in the lengths is sent to the determination unit 44e.

In the threshold value registration unit 44d, the threshold value of the difference between the length of the cutting groove detected before the idling operation and the length of the cutting groove detected after the idling operation is registered. The threshold value is the difference in the length of the cutting groove at which it can be determined that the required idling operation has been completed. The threshold value is determined by the type of the cutting device 2, the cutting blade mounted on the cutting unit 20, the workpiece, and the like. Further, it may be determined by the conditions of the cutting process to be performed.

The length of the cutting groove formed by the instruction of the cutting groove forming instruction unit 44b may have an error or the like that does not depend on the state such as the temperature of each component of the cutting device 2. That is, when two cutting grooves are formed on the cutting blade at different positions on the surface of the workpiece 1 or the like at different positions at intervals, the temperature of each component of the cutting device 2 when forming each cutting groove, etc. Even if the states are substantially the same, the lengths of the two cutting grooves may change due to the influence of the accuracy of the shaft and the like. The threshold value is a value determined in consideration of the error and the like.

The determination unit 44e reads out the difference in the length of the cutting groove sent from the length detection instruction unit 44c and the threshold value of the difference in the length of the cutting groove registered in the threshold value registration unit 44d. When the difference in the lengths of the cutting grooves is equal to or greater than the threshold value, it is determined that the idling operation is not completed, and when the difference is equal to or less than the threshold value, it is determined that further idling operation is unnecessary. ..

If it is determined that further idling operation is unnecessary, cutting of the workpiece can be started. If it is determined that the idling operation is not completed, the cutting process cannot be started. In that case, the determination unit 44e transmits the determination result to the idling operation instruction unit 44a, and causes the idling operation instruction unit 44a to perform further idling operation.

The control unit (control means) 44 is, for example, a device control PC, and each component of the control unit 44 may be realized as software on the device control PC. Further, the determination result by the determination unit 44e may be displayed on the display of the device control PC and notified to the user (operator) of the cutting device 2.

Each component of the cutting device has a slight difference in operation depending on the internal temperature and the like. Therefore, if the idling operation is performed and the state such as temperature does not become a steady state, a desired processing result may not be obtained. Therefore, an idling operation is performed before cutting the workpiece to bring each component into a steady state. However, since the cutting device cannot perform the cutting process while the idling operation is being performed, it is preferable that the idling operation is completed in the shortest possible time.

In the cutting device 2 according to the present embodiment, the completion of the idling operation can be appropriately determined by the action of each component of the control unit 44, and the idling operation can be performed without excess or deficiency regardless of the recommended time of the idling operation.

Next, the process from when the power is turned on to the cutting device 2 according to the present embodiment until the idling operation is completed will be described. First, after the power is turned on to the cutting device 2, a cutting groove is formed in the workpiece or the like before the idling operation is performed. FIG. 2A is a cross-sectional view schematically illustrating the formation of the cutting groove 3a. The cutting groove formation instruction unit 44b of the control unit 44 causes each component of the cutting device 2 to form the cutting groove 3a.

The workpiece 1 or the like on which the cutting groove 3a is formed is held by the chuck table 16 or the dresser board chuck table 46. The rotation of the cutting blade 20c is started, the cutting fluid is supplied to the cutting blade 20c, and the moving unit (cutting unit moving mechanism 24) is operated to move the cutting blade 20c in the cutting feed direction (Z-axis direction). When the cutting blade 20c is moved to a predetermined height position, the workpiece 1 and the like are cut to form a cutting groove 3a.

Next, each component of the cutting device 2 is allowed to perform an idling operation for a predetermined time. The idling operation instruction unit 44a of the control unit 44 causes each component of the cutting device 2 to perform an idling operation. The idling operation instructed by the idling operation instruction unit 44a is, for example, an operation that imitates the operation of the cutting device 2 during normal operation. For example, it is an operation of supplying a cutting fluid to a cutting blade while rotating a spindle, and makes the state at the time of operation appear. Further, in order to quickly bring the state such as the temperature of each component of the cutting device 2 into a steady state, an operation having a higher strength than the operation during normal operation may be performed.

The execution time of the idling operation performed by the cutting device 2 is shorter than, for example, the recommended idling operation time set by the manufacturer of the cutting device 2. When the recommended time is 30 minutes, the idling operation performed by the cutting device 2 is, for example, 5 minutes.

After the idling operation is performed, the cutting groove forming instruction unit 44b of the control unit 44 causes each component of the cutting device 2 to form a cutting groove 3b. FIG. 2B is a cross-sectional view schematically illustrating the formation of the cutting groove 3b. The cutting groove 3b is formed at a position different from that of the cutting groove 3a by the blade that formed the cutting groove 3a before the idling operation is performed.

Next, as shown in FIG. 2C, the surface of the workpiece 1 or the like is imaged by the image pickup unit 42 according to the instruction of the length detection instruction unit 44c of the control unit 44, and each cutting is performed from the obtained image pickup image. The groove length L is detected. Then, the length of the cutting groove 3a and the length of the cutting groove 3b are compared by the determination unit 44e. The determination unit 44e reads a value serving as a threshold value from the threshold value registration unit 44d, and compares the difference between the length of the cutting groove 3a and the length of the cutting groove 3b with the threshold value.

When the state such as the temperature of each component of the cutting device 2 is different from the steady state, the cutting blade 20c deviates from the predetermined height position even if the cutting blade 20c is moved to the predetermined height position. Is positioned. Therefore, the cutting groove is formed to have a length different from that of the cutting groove formed when the temperature and the like of each component are in a steady state.

When the value of the length of the cutting groove formed before and after the idling operation is different, it can be said that the state such as the temperature of each component of the cutting device 2 has changed before and after the idling operation. Therefore, it cannot be confirmed that the state such as the temperature of each component is a steady state. On the other hand, when the values of the lengths of the cutting grooves are substantially the same, it can be said that the states such as the temperature of each component are substantially unchanged before and after the idling operation. That is, it can be confirmed that the state such as the temperature of each component is a steady state.

When the value of the difference in the lengths of the cutting grooves formed before and after the idling operation is equal to or less than the threshold value, the determination unit 44e determines that the state such as the temperature of each component of the cutting device 2 is a steady state. Judge that it is. That is, the determination unit 44e determines that no further idling operation is required and that the cutting device 2 is in a state where normal cutting can be stably performed with the original accuracy.

On the other hand, when the difference in the lengths of the cutting grooves is equal to or greater than the threshold value, the determination unit 44e cannot confirm that the temperature and the like of each component of the cutting device 2 are in a steady state. It is determined that the completion of idling operation cannot be confirmed. Then, the determination unit 44e transmits the determination result to the idling operation instruction unit 44a, and causes the idling operation instruction unit 44a to further instruct the idling operation. After that, a new cutting groove is formed in the same manner, the length thereof is detected, and the determination unit 44e again determines whether or not further idling operation is necessary.

An example of determination by the determination unit 44e will be described with reference to FIG. FIG. 3 is a schematic view showing a captured image 5 captured by the imaging unit 42. In an example of the captured image 5 shown in FIG. 3, a cutting groove 3a, a cutting groove 3b, and a cutting groove 3c formed in the workpiece 1 are captured.

For example, the cutting groove 3a is a cutting groove formed in the workpiece 1 immediately after the power of the cutting device 2 is turned on and before the idling operation is performed. The cutting groove 3b is a cutting groove formed in the workpiece 1 after the idling operation is performed. The cutting groove 3c is a cutting groove formed in the workpiece 1 after an idling operation is further performed after the cutting groove 3b is formed.

The first determination by the determination unit 44e is performed after the cutting groove 3a and the cutting groove 3b are formed. The length L1 of the cutting groove 3a and the length L2 of the cutting groove 3b can be obtained from the captured image in which the cutting groove 3a and the cutting groove 3b are captured. The determination unit 44e compares the value of the difference between the length L1 of the cutting groove 3a and the length L2 of the cutting groove 3b with the threshold value registered in the threshold value registration unit 44d.

As a result, when the difference exceeds the threshold value, the determination unit 44e determines that it cannot be confirmed that the idling operation of the cutting device 2 is completed. Further, an idling operation is performed, a cutting groove 3c is formed, and when the length detection indicating unit 44c causes the imaging unit 42 to image the workpiece 1, the captured image 5 illustrated in FIG. 3 is obtained.

From the captured image 5 shown in FIG. 3, the length L2 of the cutting groove 3b and the length L3 of the cutting groove 3c can be obtained. The determination unit 44e compares the value of the difference between the length L2 of the cutting groove 3b and the length L3 of the cutting groove 3c with the threshold value registered in the threshold value registration unit 44d. As a result, when the difference is less than the threshold value, the determination unit 44e determines that the further idling operation of the cutting device 2 is unnecessary. Then, it is confirmed that the idling operation is sufficiently carried out, the state such as the temperature of each component of the cutting device 2 becomes a steady state, and the cutting process of the workpiece 1 can be started.

As described above, according to the cutting device 2 according to the present embodiment, the completion of the idling operation can be confirmed by performing the determination by the determination unit 44e of the control unit 44, so that the idling operation of the cutting device 2 is excessive or insufficient. Can be implemented without. If the idling operation can be completed in a shorter time than the recommended idling operation time of the cutting device 2, the cutting process by the cutting device 2 can be started at an early stage, so that the efficiency of the cutting process can be improved.

Further, when the completion of the idling operation cannot be confirmed even if the recommended idling operation time is exceeded, the cutting process by the cutting device 2 can be started after the necessary idling operation is further performed. Therefore, the cutting process is not performed in a state where the idling operation is not sufficiently performed. Then, the efficiency of the cutting process can be improved because the cutting process that does not reach a predetermined level is not wasted.

The present invention is not limited to the description of the above embodiment, and can be implemented with various modifications. For example, in the above embodiment, after the power is turned on to the cutting device 2, a cutting groove is formed before the idling operation is performed, and then the next cutting groove is formed after the idling operation is performed to perform the determination. However, the present application is not limited to this.

When the idling operation has never been performed and the state such as the temperature of each component of the cutting device 2 is clearly different from the steady state, a cutting groove is formed before the first idling operation is performed. It does not have to be. When the temperature and other conditions of each component of the cutting device 2 change significantly before and after the first idling operation, it is not necessary to form cutting grooves before and after the first idling operation and compare the lengths of the cutting grooves. It cannot be confirmed that the idling operation is completed.

In that case, the cutting groove is not formed before the first idling operation is performed, the first cutting groove is formed after the first idling operation is performed, the second idling operation is performed, and then 2 Form the second cutting groove. Then, the length of the first cutting groove and the length of the second cutting groove are compared and the determination by the determination unit 44e is performed. In this case, since the cutting groove is not formed before the first idling operation is performed, the time for forming the cutting groove can be omitted.

In addition, the structure, method, etc. according to the above-described embodiment can be appropriately modified and implemented as long as the scope of the object of the present invention is not deviated.

1 Work piece 3,3a, 3b, 3c Cutting groove 5 Capturing image 2 Cutting device 4 Base 6 X-axis moving table 8 X-axis moving mechanism 10 X-axis guide rail 12 X-axis ball screw 14 X-axis pulse motor 16 Chuck table 16a Holding surface 18 Clamp 20 Cutting unit 20a 1st cutting unit 20b 2nd cutting unit 20c Cutting blade 22 Support structure 24 Cutting unit moving mechanism 26 Y-axis guide rail 28 Y-axis moving plate 30 Y-axis ball screw 32 Y-axis pulse motor 34 Z-axis Guide rail 36 Z-axis moving plate 38 Z-axis ball screw 40 Z-axis pulse motor 42 Imaging camera (imaging unit)
44 Control unit (control means)
44a Idling operation instruction unit 44b Cutting groove formation instruction unit 44c Length detection instruction unit 44d Threshold registration unit 44e Judgment unit 46 Dressing board chuck table 46a Holding surface

Claims (2)

A chuck table that holds the work piece on a holding surface, a cutting unit that cuts the work piece held on the chuck table with a cutting blade mounted on a spindle, and the chuck table and the cutting blade on the holding surface. A moving unit that moves relative to the cutting feed direction perpendicular to the cutting feed direction and the machining feed direction parallel to the holding surface, an imaging unit that images the workpiece held on the chuck table, and a control unit that controls each component. A cutting device equipped with,
The control unit is
An idling operation instruction unit that instructs the execution of an idling operation that drives the cutting unit and the moving unit, and an idling operation instruction unit.
Before and after the idling operation, a cutting groove forming instruction unit that moves the cutting blade to a predetermined position in the cutting feed direction with respect to the workpiece to form a cutting groove on the surface of the workpiece. ,
A length detection indicator that images the surface of the work piece with the image pickup unit and causes length detection to detect the length of the cutting groove before and after the idling operation.
A threshold value registration unit that registers a threshold value of the difference between the length of the cutting groove detected before the idling operation and the length of the cutting groove detected after the idling operation.
When the difference is equal to or more than the threshold value, it is determined that the idling operation is completed, and when the difference is equal to or less than the threshold value, it is determined that further idling operation is unnecessary. Cutting equipment. It is held by a first chuck table capable of holding a work piece on a holding surface, a second chuck table capable of holding a detection work piece for forming a cutting groove for detection, and the first chuck table. A cutting unit that cuts a work piece and a work piece for detection held on the second chuck table with a cutting blade mounted on a spindle, the first chuck table, the second chuck table, and the cutting. A moving unit that moves the blade relative to the cutting feed direction perpendicular to the holding surface and the machining feed direction parallel to the holding surface, the workpiece held by the first chuck table, and the second chuck table. A cutting device including an imaging unit that captures an image of a work piece for detection held in a machine and a control unit that controls each component.
The control unit is
Before and after the idling operation instruction unit for instructing the execution of the idling operation for driving the cutting unit and the moving unit, and before and after the idling operation, the cutting blade is specified in the cutting feed direction with respect to the workpiece to be detected. A cutting groove formation instruction unit that moves to the position of and forms a cutting groove on the surface of the work piece for detection.
A length detection indicating unit that images the surface of the work piece for detection with the image pickup unit and performs length detection for detecting the length of the cutting groove before and after the idling operation.
A threshold value registration unit that registers a threshold value of the difference between the length of the cutting groove detected before the idling operation and the length of the cutting groove detected after the idling operation.
When the difference is equal to or more than the threshold value, it is determined that the idling operation is completed, and when the difference is equal to or less than the threshold value, it is determined that further idling operation is unnecessary. Cutting equipment.