JP6819376B2 - 変位計測装置 - Google Patents

変位計測装置 Download PDF

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Publication number
JP6819376B2
JP6819376B2 JP2017048283A JP2017048283A JP6819376B2 JP 6819376 B2 JP6819376 B2 JP 6819376B2 JP 2017048283 A JP2017048283 A JP 2017048283A JP 2017048283 A JP2017048283 A JP 2017048283A JP 6819376 B2 JP6819376 B2 JP 6819376B2
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Japan
Prior art keywords
sensor head
light
distance range
distance
reflection position
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JP2017048283A
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English (en)
Japanese (ja)
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JP2018151282A (ja
Inventor
佑太 三浦
佑太 三浦
菅　孝博
孝博 菅
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Omron Corp
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Omron Corp
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Publication date
Application filed by Omron Corp filed Critical Omron Corp
Priority to JP2017048283A priority Critical patent/JP6819376B2/ja
Priority to TW106143736A priority patent/TWI642900B/zh
Priority to CN202010883783.8A priority patent/CN111982017B/zh
Priority to CN201711360394.1A priority patent/CN108571936A/zh
Priority to KR1020170174124A priority patent/KR102046158B1/ko
Publication of JP2018151282A publication Critical patent/JP2018151282A/ja
Priority to KR1020190014042A priority patent/KR102109948B1/ko
Priority to KR1020190159122A priority patent/KR102160671B1/ko
Application granted granted Critical
Publication of JP6819376B2 publication Critical patent/JP6819376B2/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)
JP2017048283A 2017-03-14 2017-03-14 変位計測装置 Active JP6819376B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2017048283A JP6819376B2 (ja) 2017-03-14 2017-03-14 変位計測装置
TW106143736A TWI642900B (zh) 2017-03-14 2017-12-13 Displacement measuring device
CN201711360394.1A CN108571936A (zh) 2017-03-14 2017-12-15 位移测量装置
CN202010883783.8A CN111982017B (zh) 2017-03-14 2017-12-15 位移测量装置
KR1020170174124A KR102046158B1 (ko) 2017-03-14 2017-12-18 변위 계측 장치
KR1020190014042A KR102109948B1 (ko) 2017-03-14 2019-02-01 변위 계측 장치
KR1020190159122A KR102160671B1 (ko) 2017-03-14 2019-12-03 변위 계측 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017048283A JP6819376B2 (ja) 2017-03-14 2017-03-14 変位計測装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2020216647A Division JP2021047213A (ja) 2020-12-25 2020-12-25 変位計測装置

Publications (2)

Publication Number Publication Date
JP2018151282A JP2018151282A (ja) 2018-09-27
JP6819376B2 true JP6819376B2 (ja) 2021-01-27

Family

ID=63575931

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017048283A Active JP6819376B2 (ja) 2017-03-14 2017-03-14 変位計測装置

Country Status (4)

Country Link
JP (1) JP6819376B2 (zh)
KR (3) KR102046158B1 (zh)
CN (2) CN111982017B (zh)
TW (1) TWI642900B (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2022506691A (ja) 2018-11-05 2022-01-17 トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング 少なくとも１つの物体の位置を決定する検出器及び方法
CN109724516A (zh) * 2019-02-27 2019-05-07 中北大学 一种基于光纤传感的表面形貌测量系统和方法
JP7207377B2 (ja) 2020-06-30 2023-01-18 株式会社羽根 養殖用水槽内給餌用水流遮蔽体、及び養殖用水槽内給餌方法
JP2021047213A (ja) * 2020-12-25 2021-03-25 オムロン株式会社 変位計測装置

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05322531A (ja) * 1992-05-22 1993-12-07 Toshio Fukuda 物体の３次元形状測定装置
JPH0674760A (ja) * 1992-06-25 1994-03-18 Matsushita Electric Works Ltd 光学式変位センサ
US5785651A (en) * 1995-06-07 1998-07-28 Keravision, Inc. Distance measuring confocal microscope
JP4833503B2 (ja) * 2003-02-28 2011-12-07 パナソニック電工Ｓｕｎｘ株式会社 厚さ測定装置
DE102004022454B4 (de) * 2004-05-06 2014-06-05 Carl Mahr Holding Gmbh Messeinrichtung mit optischer Tastspitze
CN100523716C (zh) * 2007-12-27 2009-08-05 哈尔滨工业大学 复色超分辨差动共焦测量方法与装置
JP5790178B2 (ja) * 2011-03-14 2015-10-07 オムロン株式会社 共焦点計測装置
JP5870576B2 (ja) * 2011-09-22 2016-03-01 オムロン株式会社 光学計測装置
JP2013096941A (ja) * 2011-11-04 2013-05-20 Sony Corp 撮像装置、撮像方法、及びプログラム
JP5834979B2 (ja) * 2012-02-03 2015-12-24 オムロン株式会社 共焦点計測装置
JP5994504B2 (ja) * 2012-09-14 2016-09-21 オムロン株式会社 共焦点計測装置
JP6044315B2 (ja) * 2012-12-12 2016-12-14 オムロン株式会社 変位計測方法および変位計測装置
JP5966982B2 (ja) * 2013-03-15 2016-08-10 オムロン株式会社 共焦点計測装置
CN103398659B (zh) * 2013-08-07 2016-05-18 南京信息工程大学 光纤位移传感器及基于数据融合的多通道位移测量方法
JP2015059825A (ja) * 2013-09-18 2015-03-30 株式会社ミツトヨ 三次元測定装置
JP6331499B2 (ja) * 2014-03-07 2018-05-30 オムロン株式会社 共焦点計測装置の光軸調整方法、共焦点計測システム、プログラム、及び、プログラムを記録した記録媒体
JP2016099742A (ja) * 2014-11-19 2016-05-30 株式会社東芝 情報処理装置、映像投影装置、情報処理方法及びプログラム
JP2016102697A (ja) * 2014-11-27 2016-06-02 パナソニックＩｐマネジメント株式会社 距離画像生成装置、距離画像生成方法、及び距離画像生成プログラム
US9829312B2 (en) * 2015-07-09 2017-11-28 Mituloyo Corporation Chromatic confocal range sensor comprising a camera portion

Also Published As

Publication number Publication date
KR102160671B1 (ko) 2020-09-28
JP2018151282A (ja) 2018-09-27
CN111982017A (zh) 2020-11-24
TW201833508A (zh) 2018-09-16
CN108571936A (zh) 2018-09-25
KR20190017841A (ko) 2019-02-20
KR20180105046A (ko) 2018-09-27
KR102109948B1 (ko) 2020-05-12
CN111982017B (zh) 2023-05-02
KR102046158B1 (ko) 2019-11-18
KR20190138766A (ko) 2019-12-16
TWI642900B (zh) 2018-12-01

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