CN100523716C - 复色超分辨差动共焦测量方法与装置 - Google Patents
复色超分辨差动共焦测量方法与装置 Download PDFInfo
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- CN100523716C CN100523716C CNB2007103014237A CN200710301423A CN100523716C CN 100523716 C CN100523716 C CN 100523716C CN B2007103014237 A CNB2007103014237 A CN B2007103014237A CN 200710301423 A CN200710301423 A CN 200710301423A CN 100523716 C CN100523716 C CN 100523716C
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CNB2007103014237A CN100523716C (zh) | 2007-12-27 | 2007-12-27 | 复色超分辨差动共焦测量方法与装置 |
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CN101182992A CN101182992A (zh) | 2008-05-21 |
CN100523716C true CN100523716C (zh) | 2009-08-05 |
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Families Citing this family (17)
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CN102735670B (zh) * | 2012-06-29 | 2014-10-29 | 浙江大学 | 一种基于双针孔的超分辨显微方法和装置 |
US8654352B1 (en) * | 2012-08-08 | 2014-02-18 | Asm Technology Singapore Pte Ltd | Chromatic confocal scanning apparatus |
CN103217107B (zh) * | 2013-03-29 | 2015-11-25 | 深圳市华星光电技术有限公司 | 精密测长机及其光量干涉排除方法和装置 |
CN103630087B (zh) * | 2013-12-19 | 2016-02-17 | 哈尔滨工业大学 | 基于空间平移变换的数字差动共焦测量装置与方法 |
CN105675152B (zh) * | 2014-11-17 | 2019-03-19 | 中国航空工业第六一八研究所 | He-Ne激光圆偏振激光增益介质色散特性测量系统及方法 |
CN106323163B (zh) * | 2015-07-10 | 2019-03-08 | 上海微电子装备(集团)股份有限公司 | 一种表面3d检测装置及检测方法 |
CN105547145B (zh) * | 2015-11-30 | 2019-02-05 | 哈尔滨工业大学 | 一种超分辨结构探测共焦相干成像装置及其成像方法 |
CN105547144B (zh) * | 2015-11-30 | 2019-02-05 | 哈尔滨工业大学 | 一种超分辨结构探测阵列共焦相干成像装置及其成像方法 |
CN105928458B (zh) * | 2016-07-06 | 2018-07-06 | 中国科学院生物物理研究所 | 三维指向稳定系统 |
JP6819376B2 (ja) * | 2017-03-14 | 2021-01-27 | オムロン株式会社 | 変位計測装置 |
CN210136351U (zh) * | 2018-08-24 | 2020-03-10 | 台湾东电化股份有限公司 | 光学元件驱动机构 |
US11156636B2 (en) | 2018-09-30 | 2021-10-26 | National Institute Of Metrology, China | Scanning probe having micro-tip, method and apparatus for manufacturing the same |
CN110967330B (zh) * | 2018-09-30 | 2022-12-02 | 中国计量科学研究院 | 微区共焦拉曼光谱探测系统 |
CN111307268B (zh) * | 2020-03-11 | 2021-01-01 | 北京理工大学 | 激光共焦/差动共焦振动参数测量方法 |
CN111220090A (zh) * | 2020-03-25 | 2020-06-02 | 宁波五维检测科技有限公司 | 一种线聚焦差动彩色共焦三维表面形貌测量系统及方法 |
CN112857210B (zh) * | 2021-03-09 | 2023-03-17 | 哈尔滨工业大学 | 基于阵列式探测器的单光束三自由度外差激光干涉仪 |
CN113654482B (zh) * | 2021-08-30 | 2024-06-28 | 东北大学秦皇岛分校 | 一种基于色差和谱域干涉的光学3d成像装置及方法 |
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