JP6810427B2 - 誘電体磁器組成物および電子部品 - Google Patents
誘電体磁器組成物および電子部品 Download PDFInfo
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- 239000000203 mixture Substances 0.000 title claims description 83
- 229910052573 porcelain Inorganic materials 0.000 title claims description 52
- 239000013078 crystal Substances 0.000 claims description 81
- 230000005621 ferroelectricity Effects 0.000 claims description 14
- 239000002245 particle Substances 0.000 claims description 14
- 229910052712 strontium Inorganic materials 0.000 claims description 12
- 229910052715 tantalum Inorganic materials 0.000 claims description 10
- 229910052746 lanthanum Inorganic materials 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- 229910052779 Neodymium Inorganic materials 0.000 claims description 4
- 229910052788 barium Inorganic materials 0.000 claims description 4
- 229910052684 Cerium Inorganic materials 0.000 claims description 3
- 229910052777 Praseodymium Inorganic materials 0.000 claims description 3
- 229910052791 calcium Inorganic materials 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 3
- 229910052758 niobium Inorganic materials 0.000 claims description 3
- 229910052708 sodium Inorganic materials 0.000 claims description 3
- 229910052721 tungsten Inorganic materials 0.000 claims description 3
- 239000012071 phase Substances 0.000 description 83
- 239000000843 powder Substances 0.000 description 25
- 238000004458 analytical method Methods 0.000 description 23
- 150000002500 ions Chemical class 0.000 description 18
- 238000013507 mapping Methods 0.000 description 16
- 230000000052 comparative effect Effects 0.000 description 11
- 238000000034 method Methods 0.000 description 10
- 230000010287 polarization Effects 0.000 description 10
- 239000002243 precursor Substances 0.000 description 9
- 239000012298 atmosphere Substances 0.000 description 8
- 238000005121 nitriding Methods 0.000 description 8
- 230000004044 response Effects 0.000 description 8
- 238000000137 annealing Methods 0.000 description 7
- 229910052757 nitrogen Inorganic materials 0.000 description 7
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 6
- 238000010304 firing Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 6
- 238000000851 scanning transmission electron micrograph Methods 0.000 description 6
- 239000003990 capacitor Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 5
- 238000009413 insulation Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000000465 moulding Methods 0.000 description 5
- 229910001427 strontium ion Inorganic materials 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000000523 sample Substances 0.000 description 4
- 238000005245 sintering Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000003746 solid phase reaction Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 230000007704 transition Effects 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- DHMQDGOQFOQNFH-UHFFFAOYSA-N Glycine Chemical compound NCC(O)=O DHMQDGOQFOQNFH-UHFFFAOYSA-N 0.000 description 2
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 2
- 229910002113 barium titanate Inorganic materials 0.000 description 2
- 230000001747 exhibiting effect Effects 0.000 description 2
- 239000004615 ingredient Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 description 1
- 239000004471 Glycine Substances 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000001354 calcination Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000003985 ceramic capacitor Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 201000003373 familial cold autoinflammatory syndrome 3 Diseases 0.000 description 1
- BDAGIHXWWSANSR-NJFSPNSNSA-N hydroxyformaldehyde Chemical compound O[14CH]=O BDAGIHXWWSANSR-NJFSPNSNSA-N 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 229910000018 strontium carbonate Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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Description
前記AがSr,Ba,Ca,La,Ce,Pr,Nd,Naから選ばれる1種類以上の元素であり、
前記BがTa,Nb,Ti,Wから選ばれる1種類以上の元素であることが好ましい。
Aout>Ain
Bout<Bin
であることが好ましい。
=2×4/5+3×1/5
=2.2 ・・・式(1)
=5×4/5+4×1/5
=4.8 ・・・式(2)
次に、誘電体磁器組成物の製造方法について説明する。以下、Aサイト原子をSr、Bサイト原子をTaとする場合について説明するが、他の種類の原子を用いる場合でも同様である。
本実施例では、ペロブスカイト型SrTaO2N粉末を製造する際に固相反応法を用いた。
実施例1の前記断面に対し、EPMAを用いて、最表面を含む視野50μm×50μmの範囲でSr,Ta,O,Nの各元素について、マッピング画像を作成した。結果を図2A〜図5Aに示す。前記マッピング画像より最表面2aと内部2bとの境界を目視にて決定した。実施例1では最表層2aの深さは約8μmとなった。また、最表面を0μmとし、最表層2aに含まれる深さ0〜8μmの部分、および、内部2bに含まれる深さ20〜50μmの部分のそれぞれについて水平方向にライン分析を行った。結果を図2B〜図5Bに示す。さらに、前記マッピング画像の任意の部分から垂直方向にライン分析を行った。結果を図2C〜図5Cに示す。
最表層のa/b,o/2,nは焼結体を切断した断面においてEPMAライン分析を用いて測定した。最表層と内部との境界は前記マッピング画像から目視にて決定した。結果を表1に示す。
圧電応答の評価にはAFMとXRDとを用いた。更にAFMのモードの一つである圧電応答顕微鏡(PRM:Piezo−Response Microscope)を用いた。
実施例1および比較例1のコンデンサ試料について比誘電率εを測定した。比誘電率εは、コンデンサ試料に対し、基準温度20℃において、インピーダンスアナライザにて、周波数400Hz、入力信号レベル(測定電圧)500mVrmsの条件下で測定された静電容量から算出した(単位なし)。結果を表3に示す。
実施例1および比較例1のコンデンサ試料について焼結体密度を測定した。理論密度を100%とした場合の割合を焼結体密度とした。本実施例では80%以上を良好とした。
実施例1の誘電体磁器組成物について、FIB(Focused Ion Beam:集束イオンビーム)を用いて表面部分の強誘電体層を取り出し、薄片化した。その後、倍率180万倍でSTEM分析を行い、結晶粒子相11a,11bおよび結晶粒界相13を観察した。STEM画像を図6に示す。なお、結晶粒子相11aと結晶粒界相13との界面を界面15aとし、結晶粒子相11bと結晶粒界相13との界面を界面15bとした。
1b・・・電圧+10Vの部位
2a・・・最表層
2b・・・内部
11a,11b・・・結晶粒子相
13・・・結晶粒界相
15a,15b・・・界面
Claims (7)
- 主組成がペロブスカイト型酸窒化物であって強誘電性を示す多結晶体を有し、
前記ペロブスカイト型酸窒化物の主組成が組成式A a B b O o N n (a+b+o+n=5)で表され、
前記AがSr,Ba,Ca,La,Ce,Pr,Nd,Naから選ばれる1種類以上の元素であり、
前記BがTa,Nb,Ti,Wから選ばれる1種類以上の元素であり、
a/b>1およびo/2>n≧0.7である領域を最表層のみに有することを特徴とする誘電体磁器組成物。 - 前記多結晶体が焼結体である請求項1に記載の誘電体磁器組成物。
- 前記誘電体磁器組成物が複数の結晶粒子相と、前記結晶粒子相の間に存在する結晶粒界相とを有する請求項1または2に記載の誘電体磁器組成物。
- 前記結晶粒子相に存在するAサイトイオンの濃度をAin(モル%)、前記結晶粒子相に存在するBサイトイオンのモル濃度をBin(モル%)、前記結晶粒界相に存在するAサイトイオンのモル濃度をAout(モル%)、前記結晶粒界相に存在するBサイトイオンのモル濃度をBout(モル%)とする場合に、
Aout>Ain
Bout<Bin
である請求項3に記載の誘電体磁器組成物。 - 前記結晶粒界相の組成と比較して、前記結晶粒子相の組成がABO2Nにより近いことを特徴とする請求項3または4に記載の誘電体磁器組成物。
- 前記結晶粒子相と前記結晶粒界相との間で結晶格子に連続性がある請求項3〜5のいずれかに記載の誘電体磁器組成物。
- 請求項1〜6のいずれかに記載の誘電体磁器組成物を有する電子部品。
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