JP6804249B2 - 塗布装置、塗布方法、および有機ｅｌディスプレイ - Google Patents

塗布装置、塗布方法、および有機ｅｌディスプレイ Download PDF

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Publication number
JP6804249B2
JP6804249B2 JP2016186192A JP2016186192A JP6804249B2 JP 6804249 B2 JP6804249 B2 JP 6804249B2 JP 2016186192 A JP2016186192 A JP 2016186192A JP 2016186192 A JP2016186192 A JP 2016186192A JP 6804249 B2 JP6804249 B2 JP 6804249B2
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opening
light emitting
substrate
layer
coating
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JP2016186192A
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Japanese (ja)
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JP2018049804A (ja
Inventor
太田　義治
義治 太田
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Priority to JP2016186192A priority Critical patent/JP6804249B2/ja
Priority to KR1020170120291A priority patent/KR102390719B1/ko
Priority to CN201710863834.9A priority patent/CN107871827B/zh
Publication of JP2018049804A publication Critical patent/JP2018049804A/ja
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
    • H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
    • H10K71/135—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing using ink-jet printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/122—Pixel-defining structures or layers, e.g. banks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/123—Connection of the pixel electrodes to the thin film transistors [TFT]
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Electroluminescent Light Sources (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP2016186192A 2016-09-23 2016-09-23 塗布装置、塗布方法、および有機ｅｌディスプレイ Active JP6804249B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2016186192A JP6804249B2 (ja) 2016-09-23 2016-09-23 塗布装置、塗布方法、および有機ｅｌディスプレイ
KR1020170120291A KR102390719B1 (ko) 2016-09-23 2017-09-19 도포 장치, 도포 방법 및 유기 el 디스플레이
CN201710863834.9A CN107871827B (zh) 2016-09-23 2017-09-22 涂敷装置、涂敷方法和有机el显示器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016186192A JP6804249B2 (ja) 2016-09-23 2016-09-23 塗布装置、塗布方法、および有機ｅｌディスプレイ

Publications (2)

Publication Number Publication Date
JP2018049804A JP2018049804A (ja) 2018-03-29
JP6804249B2 true JP6804249B2 (ja) 2020-12-23

Family

ID=61762258

Family Applications (1)

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JP2016186192A Active JP6804249B2 (ja) 2016-09-23 2016-09-23 塗布装置、塗布方法、および有機ｅｌディスプレイ

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Country Link
JP (1) JP6804249B2 (ko)
KR (1) KR102390719B1 (ko)
CN (1) CN107871827B (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11574979B2 (en) * 2018-03-30 2023-02-07 Sharp Kabushiki Kaisha Display device
CN110081849B (zh) * 2018-04-24 2021-01-29 广东聚华印刷显示技术有限公司 墨水材料的膜厚测量方法
JP2019194960A (ja) * 2018-05-02 2019-11-07 東京エレクトロン株式会社 塗布装置、塗布方法および有機ｅｌディスプレイ
JP2023102911A (ja) 2022-01-13 2023-07-26 東京エレクトロン株式会社 塗布処理装置、塗布処理方法および記憶媒体

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001313172A (ja) * 2000-02-25 2001-11-09 Seiko Epson Corp 有機エレクトロルミネッセンス白色光源、及びその製造方法
JP4317113B2 (ja) * 2003-10-30 2009-08-19 三星モバイルディスプレイ株式會社 平板表示装置の製造方法
JP4978438B2 (ja) * 2007-11-21 2012-07-18 セイコーエプソン株式会社 成膜方法
JP2010080220A (ja) * 2008-09-25 2010-04-08 Hitachi Displays Ltd 表示装置
JP4775493B2 (ja) * 2010-01-29 2011-09-21 住友化学株式会社 発光装置
KR102072077B1 (ko) * 2013-04-15 2020-02-03 삼성디스플레이 주식회사 유기 발광 표시 장치 및 그 제조 방법
JP6594863B2 (ja) * 2014-05-23 2019-10-23 株式会社Ｊｏｌｅｄ 有機ｅｌ表示パネル及び有機ｅｌ表示装置
JP6338507B2 (ja) * 2014-10-16 2018-06-06 東京エレクトロン株式会社 液滴吐出装置、液滴吐出方法、プログラム及びコンピュータ記憶媒体
JP2017042708A (ja) * 2015-08-26 2017-03-02 セイコーエプソン株式会社 液滴吐出方法、プログラム、有機ｅｌ装置の製造方法、カラーフィルターの形成方法

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Publication number Publication date
KR102390719B1 (ko) 2022-04-26
KR20180033078A (ko) 2018-04-02
JP2018049804A (ja) 2018-03-29
CN107871827B (zh) 2021-09-03
CN107871827A (zh) 2018-04-03

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