JP6804249B2 - Coating device, coating method, and organic EL display - Google Patents

Description

The present invention relates to a coating device, a coating method, and an organic EL display.

Conventionally, an organic light emitting diode (OLED: Organic Light Emitting Diode), which is a light emitting diode utilizing light emission of organic EL (Electroluminescence), is known. An organic EL display using an organic light emitting diode has advantages such as thinness, light weight, low power consumption, and excellent response speed, viewing angle, and contrast ratio. For this reason, it has been attracting attention in recent years as a next-generation flat panel display (FPD).

The organic light emitting diode has an anode formed on the substrate, a cathode provided on the side opposite to the substrate with reference to the anode, and an organic layer provided between the anode and the cathode. The organic layer has, for example, a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, and an electron injection layer in this order from the anode side to the cathode side. An inkjet coating device is used to form the light emitting layer and the like. This coating device coats a droplet of a coating liquid containing a light emitting material on a substrate. A light emitting layer is formed by drying and firing the coating layer (see, for example, Patent Document 1).

As the light emitting layer, for example, a red light emitting layer containing a red light emitting material that emits red light, a green light emitting layer containing a green light emitting material that emits green light, and a blue light emitting layer containing a blue light emitting material that emits blue light are formed. The coating liquid used for forming these light emitting layers is applied to the openings of the preformed banks. The bank is formed using, for example, a photoresist and is patterned into a predetermined pattern by a photolithography process. The bank separates the coating liquid for the red light emitting layer, the coating liquid for the green light emitting layer, and the coating liquid for the blue light emitting layer to prevent mixing of these coating liquids.

Japanese Unexamined Patent Publication No. 2016-779666

FIG. 1 is a plan view showing a drawing pattern drawn by a coating device according to a conventional example. In FIG. 1, the same hatching is applied to the regions where the light emitting materials are the same. Further, in FIG. 1, the X direction and the Y direction are horizontal directions orthogonal to each other, and the Z direction is a vertical direction orthogonal to the X direction and the Y direction. The Y direction is a line direction in which a plurality of nozzles for ejecting droplets of the same coating liquid are lined up. On the other hand, the X direction is a scanning direction orthogonal to the Y direction. The line direction and the scan direction may intersect with each other and may not be orthogonal to each other.

The organic EL display has, for example, a red light emitting region 2R that emits red light, a green light emitting region 2G that emits green light, and a blue light emitting region 2B that emits blue light for each pixel. Adjacent light emitting regions are separated by a bank 5, and the bank 5 surrounds all the light emitting regions one by one.

The red light emitting region 2R, the green light emitting region 2G, and the blue light emitting region 2B are repeatedly arranged in this order at intervals in the X direction to form the light emitting region group 3. The light emitting region groups 3 are arranged at intervals in the Y direction intersecting the X direction. Therefore, light emitting regions that emit light of the same color are repeatedly arranged in the Y direction at intervals.

The coating device ejects droplets from the nozzles toward the opening of the bank 5 while changing the position of the substrate in the X direction with respect to the plurality of nozzles arranged in the Y direction.

In recent years, in order to increase the pixel density of an organic EL display, it has been required to reduce the area of a light emitting region which is a sub-pixel. Therefore, the dimension of the light emitting region in the X direction is approaching the diameter of the droplet ejected from the nozzle.

Conventionally, the tolerance of the landing position of the droplet in the X direction is narrow, and when the landing position of the droplet in the X direction deviates slightly from the target position, the coating liquid overflows from the opening of the bank 5 and different types of coating liquid are mixed. I had something to do.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a coating device capable of alleviating a tolerance of a droplet landing position in a scanning direction.

In order to solve the above problems, according to one aspect of the present invention,
A discharge unit including a plurality of heads in which a plurality of nozzles are provided side by side in the first direction, a substrate holding portion for holding a substrate, and the ejection unit and the substrate holding portion in a second direction intersecting the first direction are relative to each other. It has a moving mechanism to move it
The discharge unit discharges droplets of the luminescent material from the nozzle toward the opening of the bank previously formed in the substrate held by the substrate holding portion.
The bank includes, as the openings, a first opening, a second opening, and a third opening into which droplets of luminescent materials that emit light of different colors are injected.
The first opening, the second opening, and the third opening are arranged in a predetermined order in the second direction.
The first opening has a smaller size in the second direction than the second opening and the third opening.
The thickness of the partition wall that separates the second opening and the third opening that are adjacent to each other in the second direction is greater than the thickness of each of the two partition walls that sandwich the first opening in the second direction. also rather small,
Provided is a coating device having a control unit that controls the discharge unit and the movement mechanism, and controls the injection of the droplet into the first opening, the second opening, and the third opening .

According to one aspect of the present invention, there is provided a coating device capable of alleviating the tolerance of the landing position of the droplet in the scanning direction.

It is a top view which shows the drawing pattern drawn by the coating apparatus by a conventional example. It is a top view which shows the organic EL display by one Embodiment. It is sectional drawing which shows the main part of the organic EL display by one Embodiment. It is a flowchart which shows the manufacturing method of the organic light emitting diode by one Embodiment. It is sectional drawing which shows the substrate which formed the coating layer by one Embodiment. It is sectional drawing which shows the substrate which dried the coating layer of FIG. 5 under reduced pressure. It is a top view which shows the substrate processing system by one Embodiment. It is a top view which shows the coating apparatus by one Embodiment. It is a side view which shows the coating apparatus by one Embodiment. It is a top view which shows the drawing pattern drawn by the coating apparatus by one Embodiment. It is a top view which shows the drawing pattern by 1st modification. It is a top view which shows the drawing pattern by 2nd modification.

Hereinafter, embodiments for carrying out the present invention will be described with reference to the drawings. In each drawing, the same or corresponding configurations are designated by the same or corresponding reference numerals and the description thereof will be omitted.

<Organic EL display>
FIG. 2 is a plan view showing an organic EL display according to an embodiment. In FIG. 2, the circuit of one unit circuit 11 is enlarged and shown.

The organic EL display includes a substrate 10, a plurality of unit circuits 11 arranged on the substrate 10, a scanning line drive circuit 14 provided on the substrate 10, and a data line drive circuit 15 provided on the substrate 10. .. The unit circuit 11 is provided in a region surrounded by the plurality of scanning lines 16 connected to the scanning line driving circuit 14 and the plurality of data lines 17 connected to the data line driving circuit 15. The unit circuit 11 includes a TFT layer 12 and an organic light emitting diode 13.

The TFT layer 12 has a plurality of TFTs (Thin Film Transistors). One TFT has a function as a switching element, and the other TFT has a function as a current control element for controlling the amount of current flowing through the organic light emitting diode 13. The TFT layer 12 is operated by the scanning line driving circuit 14 and the data line driving circuit 15 to supply a current to the organic light emitting diode 13. The TFT layer 12 is provided for each unit circuit 11, and the plurality of unit circuits 11 are independently controlled. The TFT layer 12 may have a general configuration and is not limited to the configuration shown in FIG.

The drive method of the organic EL display is an active matrix method in this embodiment, but may be a passive matrix method.

FIG. 3 is a cross-sectional view showing a main part of the organic EL display according to the embodiment. As the substrate 10, a transparent substrate such as a glass substrate or a resin substrate is used. A TFT layer 12 is formed on the substrate 10. A flattening layer 18 for flattening the step formed by the TFT layer 12 is formed on the TFT layer 12.

The flattening layer 18 has an insulating property. A contact plug 19 is formed in the contact hole penetrating the flattening layer 18. The contact plug 19 electrically connects the anode 21 as a pixel electrode formed on the flat surface of the flattening layer 18 and the TFT layer 12. The contact plug 19 may be made of the same material as the anode 21 and may be formed at the same time.

The organic light emitting diode 13 is formed on the flat surface of the flattening layer 18. The organic light emitting diode 13 has an anode 21 as a pixel electrode, a cathode 22 as a counter electrode provided on the opposite side of the substrate 10 with respect to the pixel electrode, and an organic layer formed between the anode 21 and the cathode 22. It has 23 and. By operating the TFT layer 12, a voltage is applied between the anode 21 and the cathode 22, and the organic layer 23 emits light.

The anode 21 is formed of, for example, ITO (Indium Tin Oxide) and transmits light from the organic layer 23. The light transmitted through the anode 21 passes through the substrate 10 and is taken out to the outside. The anode 21 is provided for each unit circuit 11.

The cathode 22 is formed of, for example, aluminum or the like, and reflects light from the organic layer 23 toward the organic layer 23. The light reflected by the cathode 22 passes through the organic layer 23, the anode 21, and the substrate 10 and is taken out to the outside. The cathode 22 is common to the plurality of unit circuits 11.

The organic layer 23 has, for example, a hole injection layer 24, a hole transport layer 25, a light emitting layer 26, an electron transport layer 27, and an electron injection layer 28 in this order from the anode 21 side to the cathode 22 side. When a voltage is applied between the anode 21 and the cathode 22, holes are injected from the anode 21 into the hole injection layer 24, and electrons are injected from the cathode 22 into the electron injection layer 28. The holes injected into the hole injection layer 24 are transported to the light emitting layer 26 by the hole transport layer 25. Further, the electrons injected into the electron injection layer 28 are transported to the light emitting layer 26 by the electron transport layer 27. Then, holes and electrons are recombined in the light emitting layer 26, the light emitting material of the light emitting layer 26 is excited, and the light emitting layer 26 emits light.

As the light emitting layer 26, for example, as shown in FIG. 10, a red light emitting layer 26R, a green light emitting layer 26G, and a blue light emitting layer 26B are formed. The red light emitting layer 26R is formed of a red light emitting material that emits red light, the green light emitting layer 26G is formed of a green light emitting material that emits green light, and the blue light emitting layer 26B is formed of a blue light emitting material that emits blue light. The red light emitting layer 26R, the green light emitting layer 26G, and the blue light emitting layer 26B are formed in the opening 31 of the bank 30.

The bank 30 separates the coating liquid for the red light emitting layer 26R, the coating liquid for the green light emitting layer 26G, and the coating liquid for the blue light emitting layer 26B to prevent mixing of these coating liquids. The bank 30 has an insulating property and fills a contact hole penetrating the flattening layer 18.

<Manufacturing method of organic light emitting diode>
FIG. 4 is a flowchart showing a method for manufacturing an organic light emitting diode according to an embodiment.

First, in step S101, the anode 21 as a pixel electrode is formed. For example, a thin-film deposition method is used to form the anode 21. The anode 21 is formed on the flat surface of the flattening layer 18 for each unit circuit 11. A contact plug 19 may be formed together with the anode 21.

In the following step S102, the bank 30 is formed. The bank 30 is formed using, for example, a photoresist, and is patterned into a predetermined pattern by a photolithography process. The anode 21 is exposed at the opening 31 of the bank 30.

In the following step S103, the hole injection layer 24 is formed. An inkjet method or the like is used to form the hole injection layer 24. By applying the coating liquid for the hole injection layer 24 on the anode 21 by the inkjet method, the coating layer L is formed as shown in FIG. By drying and firing the coating layer L, the hole injection layer 24 is formed as shown in FIG.

In the following step S104, the hole transport layer 25 is formed. Similar to the formation of the hole injection layer 24, an inkjet method or the like is used to form the hole transport layer 25. A coating layer is formed by applying the coating liquid for the hole transport layer 25 on the hole injection layer 24 by an inkjet method. The hole transport layer 25 is formed by drying and firing the coating layer.

In the following step S105, the light emitting layer 26 is formed. Similar to the formation of the hole injection layer 24 and the hole transport layer 25, an inkjet method or the like is used to form the light emitting layer 26. A coating layer is formed by applying the coating liquid for the light emitting layer 26 on the hole transport layer 25 by an inkjet method. The light emitting layer 26 is formed by drying and firing the coating layer.

As the light emitting layer 26, for example, a red light emitting layer 26R, a green light emitting layer 26G, and a blue light emitting layer 26B are formed. The red light emitting layer 26R, the green light emitting layer 26G, and the blue light emitting layer 26B are formed in the opening 31 of the bank 30. The bank 30 separates the coating liquid for the red light emitting layer 26R, the coating liquid for the green light emitting layer 26G, and the coating liquid for the blue light emitting layer 26B to prevent mixing of these coating liquids.

In the following step S106, the electron transport layer 27 is formed. For example, a thin-film deposition method is used to form the electron transport layer 27. Since the electron transport layer 27 may be common to the plurality of unit circuits 11, it may be formed not only on the light emitting layer 26 in the opening 31 of the bank 30 but also on the bank 30.

In the following step S107, the electron injection layer 28 is formed. For example, a thin-film deposition method is used to form the electron injection layer 28. The electron injection layer 28 is formed on the electron transport layer 27. The electron injection layer 28 may be common to the plurality of unit circuits 11.

In the following step S108, the cathode 22 is formed. For the formation of the cathode 22, for example, a vapor deposition method or the like is used. The cathode 22 is formed on the electron injection layer 28. The cathode 22 may be common to a plurality of unit circuits 11.

When the driving method of the organic EL display is not the active matrix method but the passive matrix method, the cathode 22 is patterned in a predetermined pattern.

The organic light emitting diode 13 is manufactured by the above steps. Among the organic layers 23, the substrate processing system 100 is used for forming the hole injection layer 24, the hole transport layer 25, and the light emitting layer 26.

<Board processing system>
FIG. 7 is a plan view showing a substrate processing system according to an embodiment. The substrate processing system 100 performs each process corresponding to steps S103 to S105 in FIG. 4 to form a hole injection layer 24, a hole transport layer 25, and a light emitting layer 26 on the anode 21. The substrate processing system 100 includes a carry-in station 110, a processing station 120, a carry-out station 130, and a control device 140.

The carry-in station 110 carries in a cassette C accommodating a plurality of boards 10 from the outside, and sequentially takes out the plurality of boards 10 from the cassette C. A TFT layer 12, a flattening layer 18, an anode 21, a bank 30, and the like are formed in advance on each substrate 10.

The carry-in station 110 includes a cassette mounting table 111 on which the cassette C is mounted, a transport path 112 provided between the cassette mounting table 111 and the processing station 120, and a substrate carrier 113 provided in the transport path 112. The substrate carrier 113 conveys the substrate 10 between the cassette C mounted on the cassette mounting table 111 and the processing station 120.

The processing station 120 forms a hole injection layer 24, a hole transport layer 25, and a light emitting layer 26 on the anode 21. The processing station 120 includes a hole injection layer forming block 121 that forms the hole injection layer 24, a hole transport layer forming block 122 that forms the hole transport layer 25, and a light emitting layer forming block 123 that forms the light emitting layer 26. To be equipped.

The hole injection layer forming block 121 forms a hole injection layer 24 by applying a coating liquid for the hole injection layer 24 on the anode 21 to form a coating layer, and drying and firing the coating layer. To do. The coating liquid for the hole injection layer 24 contains an organic material and a solvent. The organic material may be either a polymer or a monomer. In the case of a monomer, it may be polymerized by firing to form a polymer.

The hole injection layer forming block 121 includes a coating device 121a, a buffer device 121b, a vacuum drying device 121c, a heat treatment device 121d, and a temperature control device 121e. The coating device 121a discharges droplets of the coating liquid for the hole injection layer 24 toward the opening 31 of the bank 30. The buffer device 121b temporarily accommodates the substrate 10 waiting to be processed. The vacuum drying device 121c dries the coating layer coated by the coating device 121a under reduced pressure to remove the solvent contained in the coating layer. The heat treatment apparatus 121d heat-treats the coating layer dried by the vacuum drying apparatus 121c. The temperature control device 121e adjusts the temperature of the substrate 10 heat-treated by the heat treatment device 121d to a predetermined temperature, for example, room temperature.

The inside of the coating device 121a, the buffer device 121b, the heat treatment device 121d, and the temperature control device 121e is maintained in an atmospheric atmosphere. The vacuum drying device 121c switches the internal atmosphere between an atmospheric atmosphere and a reduced pressure atmosphere.

In the hole injection layer forming block 121, the arrangement, number, and internal atmosphere of the coating device 121a, the buffer device 121b, the vacuum drying device 121c, the heat treatment device 121d, and the temperature control device 121e can be arbitrarily selected.

Further, the hole injection layer forming block 121 includes substrate transport devices CR1 to CR3 and delivery devices TR1 to TR3. The substrate transport devices CR1 to CR3 transport the substrate 10 to each adjacent device. For example, the substrate transfer device CR1 transfers the substrate 10 to the adjacent coating device 121a and buffer device 121b. The substrate transfer device CR2 transfers the substrate 10 to the adjacent vacuum drying device 121c. The substrate transfer device CR3 conveys the substrate 10 to the adjacent heat treatment device 121d and temperature control device 121e. The delivery devices TR1 to TR3 are provided in order between the carry-in station 110 and the board transfer device CR1, between the board transfer device CR1 and the board transfer device CR2, and between the board transfer device CR2 and the board transfer device CR3. The substrate 10 is relayed between them. The inside of the substrate transfer devices CR1 to CR3 and the delivery devices TR1 to TR3 is maintained in an atmospheric atmosphere.

Between the substrate transfer device CR3 of the hole injection layer forming block 121 and the substrate transfer device CR4 of the hole transport layer forming block 122, a delivery device TR4 that relays the substrate 10 between them is provided. The inside of the delivery device TR4 is maintained in an atmospheric atmosphere.

The hole transport layer forming block 122 is formed by applying a coating liquid for the hole transport layer 25 on the hole injection layer 24 to form a coating layer, and drying and firing the coating layer to form a hole transport layer. 25 is formed. The coating liquid for the hole transport layer 25 contains an organic material and a solvent. The organic material may be either a polymer or a monomer. In the case of a monomer, it may be polymerized by firing to form a polymer.

The hole transport layer forming block 122 includes a coating device 122a, a buffer device 122b, a vacuum drying device 122c, a heat treatment device 122d, and a temperature control device 122e. The coating device 122a discharges droplets of the coating liquid for the hole transport layer 25 toward the opening 31 of the bank 30. The buffer device 122b temporarily accommodates the substrate 10 waiting to be processed. The vacuum drying device 122c dries the coating layer coated by the coating device 122a under reduced pressure to remove the solvent contained in the coating layer. The heat treatment apparatus 122d heat-treats the coating layer dried by the vacuum drying apparatus 122c. The temperature control device 122e adjusts the temperature of the substrate 10 heat-treated by the heat treatment device 122d to a predetermined temperature, for example, room temperature.

The inside of the coating device 122a and the buffer device 122b is maintained in an atmospheric atmosphere. On the other hand, the heat treatment device 122d and the temperature control device 122e suppress the deterioration of the organic material of the hole transport layer 25, so that the inside is maintained in an atmosphere of low oxygen and low dew point. The vacuum drying device 122c switches the internal atmosphere between a low oxygen and low dew point atmosphere and a reduced pressure atmosphere.

Here, the low oxygen atmosphere means an atmosphere having an oxygen concentration lower than that of the atmosphere, for example, an atmosphere having an oxygen concentration of 10 ppm or less. The low dew point atmosphere means an atmosphere in which the dew point temperature is lower than the atmosphere, for example, an atmosphere in which the dew point temperature is −10 ° C. or lower. The atmosphere of low oxygen and low dew point is formed by an inert gas such as nitrogen gas.

In the hole transport layer forming block 122, the arrangement, number, and internal atmosphere of the coating device 122a, the buffer device 122b, the vacuum drying device 122c, the heat treatment device 122d, and the temperature control device 122e can be arbitrarily selected.

Further, the hole transport layer forming block 122 includes substrate transport devices CR4 to CR6 and delivery devices TR5 to TR6. The substrate transport devices CR4 to CR6 transport the substrate 10 to each adjacent device. The delivery devices TR5 to TR6 are provided in order between the board transfer device CR4 and the board transfer device CR5, and between the board transfer device CR5 and the board transfer device CR6, and relay the board 10 between them.

The inside of the substrate transfer device CR4 is maintained in an atmospheric atmosphere. On the other hand, the inside of the substrate transport devices CR5 to CR6 is maintained in an atmosphere of low oxygen and low dew point. This is because the inside of the vacuum drying device 122c adjacent to the substrate transfer device CR5 can be switched between a low oxygen and low dew point atmosphere and a reduced pressure atmosphere. This is also because the inside of the heat treatment device 122d and the temperature control device 122e provided adjacent to the substrate transfer device CR6 is maintained in an atmosphere of low oxygen and low dew point.

The delivery device TR5 is configured as a load lock device that switches the internal atmosphere between the atmospheric atmosphere and the atmosphere of low oxygen and low dew point. This is because the vacuum drying device 122c is installed next to the delivery device TR5 on the downstream side. On the other hand, the inside of the delivery device TR6 is maintained in an atmosphere of low oxygen and low dew point.

A transfer device TR7 that relays the substrate 10 between the substrate transfer device CR6 of the hole transport layer forming block 122 and the substrate transfer device CR7 of the light emitting layer forming block 123 is provided. The inside of the substrate transfer device CR6 is maintained in an atmosphere of low oxygen and low dew point, and the inside of the substrate transfer device CR7 is maintained in an atmosphere of air. Therefore, the delivery device TR7 is configured as a load lock device that switches the atmosphere inside the delivery device TR7 between a low oxygen and low dew point atmosphere and an atmospheric atmosphere.

The light emitting layer forming block 123 forms the light emitting layer 26 by applying the coating liquid for the light emitting layer 26 on the hole transport layer 25 to form the coating layer, and drying and firing the formed coating layer. The coating liquid for the light emitting layer 26 contains an organic material and a solvent. The organic material may be either a polymer or a monomer. In the case of a monomer, it may be polymerized by firing to form a polymer.

The light emitting layer forming block 123 includes a coating device 123a, a buffer device 123b, a vacuum drying device 123c, a heat treatment device 123d, and a temperature control device 123e. The coating device 123a discharges the droplets of the coating liquid for the light emitting layer 26 toward the opening 31 of the bank 30. The buffer device 123b temporarily accommodates the substrate 10 waiting to be processed. The vacuum drying device 123c dries the coating layer coated by the coating device 123a under reduced pressure to remove the solvent contained in the coating layer. The heat treatment apparatus 123d heat-treats the coating layer dried by the vacuum drying apparatus 123c. The temperature control device 123e adjusts the temperature of the substrate 10 heat-treated by the heat treatment device 123d to a predetermined temperature, for example, room temperature.

The inside of the coating device 123a and the buffer device 123b is maintained in an atmospheric atmosphere. On the other hand, the heat treatment device 123d and the temperature control device 123e suppress the deterioration of the organic material of the light emitting layer 26, so that the inside is maintained in an atmosphere of low oxygen and low dew point. The vacuum drying device 123c switches the internal atmosphere between a low oxygen and low dew point atmosphere and a reduced pressure atmosphere.

In the light emitting layer forming block 123, the arrangement, number, and internal atmosphere of the coating device 123a, the buffer device 123b, the vacuum drying device 123c, the heat treatment device 123d, and the temperature control device 123e can be arbitrarily selected.

Further, the light emitting layer forming block 123 includes substrate transport devices CR7 to CR9 and delivery devices TR8 to TR9. The substrate transport devices CR7 to CR9 transport the substrate 10 to each adjacent device. The delivery devices TR8 to TR9 are provided in order between the board transfer device CR7 and the board transfer device CR8, and between the board transfer device CR8 and the board transfer device CR9, and relay the board 10 between them.

The inside of the substrate transfer device CR7 is maintained in an atmospheric atmosphere. On the other hand, the inside of the substrate transport devices CR8 to CR9 is maintained in an atmosphere of low oxygen and low dew point. This is because the inside of the vacuum drying device 123c adjacent to the substrate transfer device CR8 can be switched between a low oxygen and low dew point atmosphere and a reduced pressure atmosphere. This is also because the inside of the heat treatment device 123d and the temperature control device 123e provided adjacent to the substrate transfer device CR9 is maintained in an atmosphere of low oxygen and low dew point.

The delivery device TR8 is configured as a load lock device that switches the internal atmosphere between the atmospheric atmosphere and the atmosphere of low oxygen and low dew point. This is because the vacuum drying device 123c is installed next to the delivery device TR8 on the downstream side. The inside of the delivery device TR9 is maintained in an atmosphere of low oxygen and low dew point.

Between the substrate transfer device CR9 of the light emitting layer forming block 123 and the carry-out station 130, a delivery device TR10 that relays the substrate 10 between them is provided. The inside of the substrate transfer device CR9 is maintained in an atmosphere of low oxygen and low dew point, and the inside of the carry-out station 130 is maintained in an atmosphere of air. Therefore, the delivery device TR7 is configured as a load lock device that switches the atmosphere inside the delivery device TR7 between a low oxygen and low dew point atmosphere and an atmospheric atmosphere.

The carry-out station 130 sequentially stores the plurality of boards 10 in the cassette C, and carries out the cassette C to the outside. The unloading station 130 includes a cassette mounting table 131 on which the cassette C is mounted, a transport path 132 provided between the cassette mounting table 131 and the processing station 120, and a substrate carrier 133 provided in the transport path 132. The substrate transfer body 133 conveys the substrate 10 between the processing station 120 and the cassette C mounted on the cassette mounting table 131.

The control device 140 is composed of a computer including a CPU (Central Processing Unit) 141 and a storage medium 142 such as a memory, and causes the CPU 141 to execute various processes by causing the CPU 141 to execute a program (also called a recipe) stored in the storage medium 142. To realize.

The program of the control device 140 is stored in the information storage medium and installed from the information storage medium. Examples of the information storage medium include a hard disk (HD), a flexible disk (FD), a compact disk (CD), a magnet optical desk (MO), a memory card, and the like. The program may be downloaded and installed from the server via the Internet.

Next, a substrate processing method using the substrate processing system 100 having the above configuration will be described. When the cassette C accommodating the plurality of substrates 10 is mounted on the cassette mounting table 111, the substrate carrier 113 sequentially takes out the substrate 10 from the cassette C on the cassette mounting table 111, and the hole injection layer forming block 121. Transport to.

The hole injection layer forming block 121 forms a coating layer by applying a coating liquid for the hole injection layer 24 on the anode 21, and the formed coating layer is dried and fired to form the hole injection layer 24. Form. The substrate 10 on which the hole injection layer 24 is formed is delivered from the hole injection layer forming block 121 to the hole transport layer forming block 122 by the delivery device TR4.

The hole transport layer forming block 122 is formed by applying a coating liquid for the hole transport layer 25 on the hole injection layer 24 to form a coating layer, and the formed coating layer is dried and fired to transport holes. The layer 25 is formed. The substrate 10 on which the hole transport layer 25 is formed is delivered from the hole transport layer forming block 122 to the light emitting layer forming block 123 by the delivery device TR7.

The light emitting layer forming block 123 forms the light emitting layer 26 by applying the coating liquid for the light emitting layer 26 on the hole transport layer 25 to form the coating layer, and drying and firing the formed coating layer. The substrate 10 on which the light emitting layer 26 is formed is delivered from the light emitting layer forming block 123 to the carry-out station 130 by the delivery device TR10.

The board carrier 133 of the unloading station 130 stores the board 10 received from the delivery device TR10 in a predetermined cassette C on the cassette mounting table 131. As a result, a series of processing of the substrate 10 in the substrate processing system 100 is completed.

The substrate 10 is carried out from the carry-out station 130 in a state of being housed in the cassette C. An electron transport layer 27, an electron injection layer 28, a cathode 22, and the like are formed on the substrate 10 carried out to the outside.

<Applying device and coating method>
Next, the coating device 123a of the light emitting layer forming block 123 will be described with reference to FIGS. 8 to 9. FIG. 8 is a plan view showing a coating apparatus according to an embodiment. FIG. 9 is a side view showing a coating apparatus according to one embodiment. In the drawings below, the X and Y directions are horizontal directions that are orthogonal to each other, and the Z direction is a vertical direction that is orthogonal to the X and Y directions. The Y direction is a line direction in which a plurality of nozzles for ejecting droplets of the same coating liquid are lined up, and corresponds to the first direction described in the claims. On the other hand, the X direction is a scanning direction orthogonal to the Y direction and corresponds to the second direction described in the claims. The line direction and the scan direction may intersect with each other and may not be orthogonal to each other.

The coating device 123a includes, for example, an XYθ stage 150 that holds the substrate 10, a droplet ejection unit 160 that ejects droplets toward the substrate 10, and a maintenance unit 170 that maintains the functions of the droplet ejection unit 160. .. The XYθ stage 150 and the maintenance unit 170 are provided side by side in the Y direction. A Y-axis guide 180 is bridged between the upper part of the XYθ stage 150 and the upper part of the maintenance unit 170. The droplet ejection unit 160 is movable in the Y direction along the Y-axis guide 180. A linear motor or the like is used as a driving unit for moving the droplet ejection unit 160 in the Y direction.

The XYθ stage 150 has a chuck 151 for holding the substrate 10 and a chuck driving unit 152 for moving the chuck 151. The chuck 151 holds the substrate 10 with the coating surface on which the droplets of the substrate 10 are applied facing upward. As the chuck 151, for example, a vacuum chuck is used, but an electrostatic chuck or the like may be used. The chuck 151 corresponds to the substrate holding portion described in the claims. The chuck drive unit 152 includes an X-direction drive unit 153 that moves the chuck 151 in the X direction, a Y-direction drive unit 154 that moves the chuck 151 in the Y direction, a rotation drive unit 155 that rotates the chuck 151 around the Z axis, and the like. Have. The chuck drive unit 152 corresponds to the moving mechanism described in the claims.

The droplet ejection unit 160 is movable between a position where droplets are ejected toward the substrate 10 above the XYθ stage 150 and a position where processing for maintaining the function by the maintenance unit 170 is received. A plurality of droplet ejection units 160 (for example, 10 in FIG. 8) are arranged in the Y direction. The plurality of droplet ejection units 160 may be independently moved in the Y direction, or may be integrally moved in the Y direction.

Each droplet ejection unit 160 has a carriage 161 and a plurality of heads 162 provided on the lower surface of the carriage 161. Each head 162 is provided with at least one row of nozzles composed of a plurality of nozzles 163 arranged in the Y direction. A plurality of nozzles 163 provided on the same head 162 discharge droplets of the same coating liquid. Nozzle 163 that ejects droplets of coating liquid for red light emitting layer 26R, nozzle 163 that ejects droplets of coating liquid for green light emitting layer 26G, and droplets of coating liquid for blue light emitting layer 26B are ejected. The nozzle 163 and the nozzle 163 are provided on separate heads 162.

The maintenance unit 170 performs a process of maintaining the function of the droplet ejection unit 160, and eliminates the ejection defect of the droplet ejection unit 160. The maintenance unit 170 includes a wiping unit 171 that wipes the periphery of the nozzle discharge port, and a suction unit 172 that sucks droplets from the nozzle discharge port. The suction unit 172 also plays a role of closing the discharge port of the nozzle in the dormant state and suppressing clogging due to drying.

Next, a coating method using the coating device 123a having the above configuration will be described. The following operations of the coating device 123a are controlled by the control device 140. Although the control device 140 is provided separately from the coating device 123a in FIG. 7, it may be provided as a part of the coating device 123a.

First, when the substrate 10 carried in from the outside of the coating device 123a is placed on the chuck 151, the chuck 151 holds the substrate 10. Subsequently, the position correction of the chuck 151 is performed by the chuck driving unit 152 based on the image obtained by capturing the alignment mark of the substrate 10. After that, the chuck drive unit 152 moves the chuck 151 in the X direction and passes under the droplet ejection unit 160. During that time, the droplet ejection unit 160 ejects droplets toward the substrate 10. After that, the chuck drive unit 152 changes the position of the chuck 151 in the Y direction, moves the chuck 151 again in the X direction, and passes under the droplet ejection unit 160. During that time, the droplet ejection unit 160 ejects droplets toward the substrate 10. By repeating this, the coating device 123a draws a predetermined pattern on the substrate 10. The substrate 10 for which drawing has been completed is removed from the chuck 151 and carried out from the inside of the coating device 123a to the outside. Subsequently, the next substrate 10 is carried into the inside from the outside of the coating device 123a, and the coating device 123a draws a predetermined pattern on the substrate 10. The process of maintaining the function of the droplet ejection unit 160 by the maintenance unit 170 is appropriately performed during the replacement of the substrate 10.

The coating device 123a having the above configuration moves the chuck 151 holding the substrate 10 in order to draw a predetermined pattern on the substrate 10, but the droplet ejection unit 160 that ejects droplets toward the substrate 10 is provided. It may be moved, or both the chuck 151 and the droplet ejection unit 160 may be moved. The coating device 123a only needs to be able to move the chuck 151 and the droplet ejection unit 160 relatively.

<Drawing pattern drawn by the coating device>
Next, the drawing pattern drawn by the coating device 123a will be described with reference to FIG. FIG. 10 is a plan view showing a drawing pattern drawn by the coating apparatus according to the embodiment. In FIG. 10, the same hatching is applied to the regions where the light emitting materials are the same. Further, in FIG. 10, for comparison, the drawing pattern according to the conventional example of FIG. 1 is shown by a two-dot chain line.

The organic EL display has, for example, a red light emitting layer 26R, a green light emitting layer 26G, and a blue light emitting layer 26B as the light emitting layer 26. The red light emitting layer 26R is formed of a red light emitting material that emits red light, the green light emitting layer 26G is formed of a green light emitting material that emits green light, and the blue light emitting layer 26B is formed of a blue light emitting material that emits blue light.

The red light emitting layer 26R emits red light in the region where the holes supplied from the anode 21 and the electrons supplied from the cathode 22 are recombined. The region that emits red light is called the red light emitting region 261R. The red light emitting region 261R substantially overlaps with the anode 21 as a pixel electrode in a plan view.

Similarly, the green light emitting layer 26G emits green light in the region where the holes supplied from the anode 21 and the electrons supplied from the cathode 22 recombine. The region that emits green light is called a green emission region 261G. The green light emitting region 261G substantially overlaps with the anode 21 as a pixel electrode in a plan view.

Further, the blue light emitting layer 26B emits blue light in a region where the holes supplied from the anode 21 and the electrons supplied from the cathode 22 are recombined. The region that emits blue light is referred to as a blue light emitting region 261B. The blue light emitting region 261B substantially overlaps with the anode 21 as a pixel electrode in a plan view.

The organic EL display has, for example, a red light emitting region 261R, a green light emitting region 261G, and a blue light emitting region 261B for each pixel. These light emitting regions emit light independently for each anode 21. The amount of light emitted is adjusted by the voltage between the anode 21 and the cathode 22.

The red light emitting region 261R, the green light emitting region 261G, and the blue light emitting region 261B are arranged in a predetermined order at intervals in the X direction to form a light emitting region group 262. The light emitting region groups 262 are arranged at intervals in the Y direction intersecting the X direction. Therefore, a plurality of light emitting regions that emit light of the same color are arranged at intervals in the Y direction.

Each head 162 of the droplet ejection unit 160 is provided so that droplets of the same coating liquid can be ejected at the same time toward a plurality of emission regions that are arranged at intervals in the Y direction and emit light in the same color. , A plurality of nozzles 163 are provided side by side in the Y direction. A plurality of nozzles 163 provided on the same head 162 discharge droplets of the same coating liquid.

The coating device 123a moves the droplet ejection unit 160 and the chuck 151 relatively in the X direction, and the liquid is discharged from the nozzle 163 toward the opening 31 of the bank 30 formed in advance on the substrate 10 held by the chuck 151. Apply the drops. The coating device 123a moves the chuck 151 in order to move the droplet ejection unit 160 and the chuck 151, but the droplet ejection unit 160 may be moved or both may be moved.

The bank 30 has a red opening 31R, a green opening 31G, and a blue opening 31B as the openings 31. The red light emitting layer 26R is formed in the red opening 31R, the green light emitting layer 26G is formed in the green opening 31G, and the blue light emitting layer 26B is formed in the blue opening 31B. The red opening 31R, the green opening 31G, and the blue opening 31B are arranged in a predetermined order at intervals in the X direction.

By the way, the area ratio of the red opening 31R, the green opening 31G, and the blue opening 31B is appropriately set according to the light emitting characteristics, the light emitting life, and the like of each light emitting material. For example, the higher the luminous efficiency and the higher the luminous brightness per unit area, the smaller the area.

In FIG. 10, the area of the red opening 31R is the smallest, the area of the green opening 31G is the second smallest, and the area of the blue opening 31B is the largest. These light emitting regions have the same dimensions YR, YG, and YB in the Y direction, but different dimensions XR, XG, and XB in the X direction.

Here, YR represents the dimension of the red opening 31R in the Y direction, YG represents the dimension of the green opening 31G in the Y direction, and YB represents the dimension of the blue opening 31B in the Y direction. YR, YG, and YB are the same.

Further, XR represents the dimension of the red opening 31R in the X direction, XG represents the dimension of the green opening 31G in the X direction, and YB represents the dimension of the blue opening 31B in the X direction. XR is smaller than XG and XB, and XG is smaller than XB.

Since the green opening 31G and the blue opening 31B are larger in the X direction than the red opening 31R, the droplet ejection unit 160 and the chuck 151 are relatively moved in the X direction and inside the opening 31G. It is easy to land the droplets.

Therefore, in the present embodiment, as shown by the solid line in FIG. 10, the thickness TGB of the partition wall that separates the green opening 31G and the blue opening 31B in the X direction is narrowed, and the red opening 31R is set in the X direction. The TGB is made smaller than the thickness TRG and TRB of the two partition walls sandwiched between the two partition walls. As shown by the alternate long and short dash line in FIG. 10, the dimension XR of the red opening 31R in the X direction can be increased by the smaller TGB as compared with the case where TRG or TRB and TGB are the same. Therefore, it is easy to land the droplet on the red opening 31R while relatively moving the droplet ejection unit 160 and the chuck 151 in the X direction. Therefore, as compared with the conventional case, the tolerance of the landing position of the droplet in the X direction can be relaxed.

<Drawing pattern according to the first modification>
In the above embodiment, the green opening 31G has a smaller size in the X direction than the blue opening 31B. On the other hand, in this modification, the green opening 31G and the blue opening 31B have the same dimensions in the X direction. The differences will be mainly described below.

FIG. 11 is a plan view showing a drawing pattern according to the first modification. In FIG. 11, the same hatching is applied to the regions where the light emitting materials are the same. Further, in FIG. 11, for comparison, the drawing pattern according to the conventional example of FIG. 1 is shown by a two-dot chain line. As shown in FIG. 11, XR is smaller than XG and XB, and XG and XB are the same.

Similar to the above embodiment, the green opening 31G and the blue opening 31B are larger in the X direction than the red opening 31R, so that the droplet ejection unit 160 and the chuck 151 are relatively located in the X direction. It is easy to land a droplet inside it while moving it.

Therefore, also in this modification, as shown by the solid line in FIG. 11, the thickness TGB of the partition wall that separates the green opening 31G and the blue opening 31B in the X direction is narrowed, and the red opening 31R is X. The TGB is made smaller than the thickness TRG and TRB of the two partition walls sandwiched in the direction. As shown by the alternate long and short dash line in FIG. 11, the dimension XR of the red opening 31R in the X direction can be increased by the smaller TGB as compared with the case where TRG or TRB and TGB are the same. Therefore, it is easy to land the droplet on the red opening 31R while relatively moving the droplet ejection unit 160 and the chuck 151 in the X direction. Compared with the conventional case, the tolerance of the landing position of the droplet in the X direction can be relaxed.

<Drawing pattern according to the second modification>
In the above embodiment and the above first modification, each opening 31 stays in one light emitting region. On the other hand, in this modification, the openings 31 are adjacent to each other at intervals in the Y direction and span a plurality of light emitting regions that emit light in the same color. Hereinafter, the differences will be mainly described with reference to FIG. FIG. 12 is a plan view showing a drawing pattern according to the second modification. In FIG. 12, the same hatching is applied to the regions where the light emitting materials are the same. Further, in FIG. 12, for comparison, the drawing pattern according to the conventional example of FIG. 1 is shown by a two-dot chain line.

One red opening 31R straddles a plurality of adjacent red light emitting regions 261R at intervals in the Y direction, and from the red light emitting region 261R at one end in the Y direction to the red light emitting region 261R at the other end in the Y direction. Straddles up to. Since the number of nozzles 163 that eject droplets toward one red opening 31R is larger than in the past, the error in the ejection amount of each nozzle 163 is dispersed, and the total ejection amount tends to be the same each time. .. Further, the options of the nozzle 163 for ejecting the droplet toward the one red opening 31R are increased, and the nozzle 163 having good controllability of the ejection amount can be selectively used. With these, the thickness of the plurality of red light emitting layers 26R can be made uniform.

Similarly, one green opening 31G straddles a plurality of adjacent green light emitting regions 261G at intervals in the Y direction, and from the green light emitting region 261G at one end in the Y direction to the green at the other end in the Y direction. It straddles up to the light emitting region 261G. Since the number of nozzles 163 that eject droplets toward one green opening 31G is larger than in the past, the error in the ejection amount of each nozzle 163 is dispersed, and the total ejection amount tends to be the same each time. .. Further, the options of the nozzle 163 for ejecting droplets toward the one green opening 31G are increased, and the nozzle 163 having good controllability of the ejection amount can be selectively used. With these, the thickness of the plurality of green light emitting layers 26G can be made uniform.

One blue opening 31B extends over a plurality of adjacent blue light emitting regions 261B at intervals in the Y direction, and from the blue light emitting region 261B at one end in the Y direction to the blue light emitting region 261B at the other end in the Y direction. Straddles up to. Since the number of nozzles 163 that eject droplets toward one blue opening 31B is larger than in the conventional case, the error in the ejection amount of each nozzle 163 is dispersed, and the total ejection amount tends to be the same each time. .. Further, the options of the nozzle 163 for ejecting the droplet toward the one blue opening 31B are increased, and the nozzle 163 having good controllability of the ejection amount can be selectively used. With these, the thickness of the plurality of blue light emitting layers 26B can be made uniform.

The red opening 31R, the green opening 31G, and the blue opening 31B are repeatedly arranged in this order at intervals in the X direction to form a striped pattern. As described above, when each opening 31 is long in the Y direction, position controllability in the X direction is particularly required.

Therefore, also in this modification, as shown by the solid line in FIG. 12, the thickness TGB of the partition wall that separates the green opening 31G and the blue opening 31B in the X direction is narrowed, and the red opening 31R is X. The TGB is made smaller than the thickness TRG and TRB of the two partition walls sandwiched in the direction. As shown by the alternate long and short dash line in FIG. 12, the dimension XR of the red opening 31R in the X direction can be increased by the smaller TGB as compared with the case where TRG or TRB and TGB are the same. Therefore, it is easy to land the droplet on the red opening 31R while relatively moving the droplet ejection unit 160 and the chuck 151 in the X direction. Compared with the conventional case, the tolerance of the landing position of the droplet in the X direction can be relaxed.

The opening 31 may extend over a plurality of adjacent light emitting regions at intervals in the Y direction, and may not extend from the light emitting region at one end in the Y direction to the light emitting region at the other end in the Y direction. Good. The number of light emitting regions that one opening 31 spans is not particularly limited.

In the above-described embodiment, the first modification, and the second modification, the red opening 31R is described in the claims, and the green opening 31G is described in the claims. The blue opening 31B corresponds to each of the two openings and the third opening described in the claims.

As described above, the area ratio of the red opening 31R, the green opening 31G, and the blue opening 31B is appropriately set according to the light emitting characteristics and the light emitting life of each light emitting material. .. Therefore, the magnitude relation of the dimensions XR, XG, and XB of these openings 31 in the X direction is not particularly limited as long as any one of them is smaller than the other two.

However, for each light emitting region, the dimensions XR, XG, and XB in the X direction may be smaller than the dimensions YR, YG, and YB in the Y direction. That is, XR may be smaller than YR, XG may be smaller than YG, and XB may be smaller than YB. In this case, since the dimension in the X direction is smaller than the dimension in the Y direction, it is significant to relax the tolerance of the landing position in the X direction.

The order in which the red opening 31R, the green opening 31G, and the blue opening 31B are arranged at intervals in the X direction is not limited to the order shown in FIGS. 10 to 12. For example, the red opening 31R, the blue opening 31B, and the green opening 31G may be arranged in this order at intervals in the X direction.

The combination of emission colors is not limited to the three primary colors of red, green, and blue. For example, in addition to these three primary colors, yellow, which is an intermediate color between red and green, and / or cyan, which is an intermediate color between green and blue, may be used. The larger the number of emission color combinations, the wider the range of color coordinates that can be displayed.

Although the embodiments of the coating apparatus and the like have been described above, the present invention is not limited to the above-described embodiments, and various modifications and improvements can be made within the scope of the gist of the present invention described in the claims. is there.

For example, the organic EL display is a bottom emission method in which the light from the light emitting layer 26 is taken out from the substrate 10 side in the above embodiment, but a top emission method in which the light from the light emitting layer 26 is taken out from the side opposite to the substrate 10 may be used. ..

In the case of the top emission method, the substrate 10 does not have to be a transparent substrate and may be an opaque substrate. This is because the light from the light emitting layer 26 is taken out from the side opposite to the substrate 10.

In the case of the top emission method, the anode 21 which is a transparent electrode is used as a counter electrode, and the cathode 22 is used as a pixel electrode provided for each unit circuit 11. In this case, since the arrangement of the anode 21 and the cathode 22 is reversed, the electron injection layer 28, the electron transport layer 27, the light emitting layer 26, the hole transport layer 25, and the hole injection layer 24 are placed in this order on the cathode 22. Is formed by.

In the above embodiment, the organic layer 23 includes the hole injection layer 24, the hole transport layer 25, the light emitting layer 26, the electron transport layer 27, and the electron injection layer 28 in this order from the anode 21 side to the cathode 22 side. It has, but at least it may have a light emitting layer 26. The organic layer 23 is not limited to the configuration shown in FIG.

10 Substrate 13 Organic light emitting diode 21 Anode 22 Cathode 23 Organic layer 26 Light emitting layer 26R Red light emitting layer 26G Green light emitting layer 26B Blue light emitting layer 261R Red light emitting area 261G Green light emitting area 261B Blue light emitting area 262 Light emitting area group 30 Bank 31 Opening 31R Opening for red 31G Opening for green 31B Opening for blue 100 Substrate processing system 123a Coating device 151 Chuck 152 Chuck drive 160 Droplet ejection unit 161 Carrying 162 Head 163 Nozzle

Claims (11)

A discharge unit including a plurality of heads in which a plurality of nozzles are provided side by side in the first direction, a substrate holding portion for holding a substrate, and the ejection unit and the substrate holding portion in a second direction intersecting the first direction are relative to each other. It has a moving mechanism to move it
The ejection unit ejects droplets of the luminescent material from the nozzle toward the opening of the bank previously formed in the substrate held by the substrate holding portion.
The bank includes, as the openings, a first opening, a second opening, and a third opening into which droplets of luminescent materials that emit light of different colors are injected.
The first opening, the second opening, and the third opening are arranged in a predetermined order in the second direction.
The first opening has a smaller size in the second direction than the second opening and the third opening.
The thickness of the partition wall that separates the second opening and the third opening that are adjacent to each other in the second direction is greater than the thickness of each of the two partition walls that sandwich the first opening in the second direction. also rather small,
A coating device having a control unit that controls the discharge unit and the movement mechanism, and controls the injection of the droplets into the first opening, the second opening, and the third opening . The coating device according to claim 1, wherein the second opening has a smaller dimension in the second direction than the third opening. The coating device according to claim 1, wherein the second opening and the third opening have the same dimensions in the second direction. Claims 1 to 1, wherein the first opening, the second opening, and the third opening are adjacent to each other at intervals in the first direction and span a plurality of light emitting regions that emit light in the same color. The coating apparatus according to any one of 3. A discharge unit including a plurality of heads in which a plurality of nozzles are provided side by side in the first direction and a substrate holding portion for holding the substrate are relatively moved in a second direction intersecting the first direction.
A step of ejecting droplets of a light emitting material from the nozzle toward an opening of a bank previously formed in the substrate held by the substrate holding portion is provided.
The bank includes, as the openings, a first opening, a second opening, and a third opening into which droplets of luminescent materials that emit light of different colors are injected.
The first opening, the second opening, and the third opening are arranged in a predetermined order in the second direction.
The first opening has a smaller size in the second direction than the second opening and the third opening.
The thickness of the partition wall that separates the second opening and the third opening that are adjacent to each other in the second direction is greater than the thickness of each of the two partition walls that sandwich the first opening in the second direction. Small, application method. The coating method according to claim 5, wherein the second opening has a smaller dimension in the second direction than the third opening. The coating method according to claim 5, wherein the second opening and the third opening have the same dimensions in the second direction. Claims 5 to 5, wherein the first opening, the second opening, and the third opening are adjacent to each other at intervals in the first direction and span a plurality of light emitting regions that emit light in the same color. The coating method according to any one of 7. A substrate, a pixel electrode provided on the substrate, a counter electrode provided on a side opposite to the substrate with reference to the pixel electrode, a light emitting layer provided between the pixel electrode and the counter electrode, and the above. It has a bank containing an opening into which a light emitting layer is formed, and has a bank.
The bank includes, as the opening, a first opening, a second opening, and a third opening in which the light emitting materials of the light emitting layer are different from each other.
The first opening, the second opening, and the third opening are arranged in a predetermined direction in a predetermined order.
The first opening has a smaller size in the predetermined direction than the second opening and the third opening.
The thickness of the partition wall that separates the second opening and the third opening that are adjacent to each other in the predetermined direction is smaller than the thickness of each of the two partition walls that sandwich the first opening in the predetermined direction. Ku,
The first opening, the second opening, and the third opening are organic , which are adjacent to each other and emit light in the same color at intervals in a direction intersecting the predetermined direction. EL display. The organic EL display according to claim 9, wherein the second opening has a smaller dimension in the predetermined direction than the third opening. The organic EL display according to claim 9, wherein the second opening and the third opening have the same dimensions in the predetermined direction.

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