JP2006260778A - Substrate treatment device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate treatment device capable of eliminating unevenness of thickness of a functional layer which is formed by injecting a liquid composition containing at least one kind of solvent and a functional material dispersed or dissolved in the solvent. <P>SOLUTION: A liquid drop injection device 45 which injects each liquid composition for forming a positive electrode transporting layer and red, green, and blue luminous layers to form a functional layer on an element substrate SS is housed in a chamber 31. Then, a vaporizer 35 which vaporizes an organic solvent L constituting each liquid composition and makes inside of the chamber 31 into an atmosphere of the organic solvent L is provided. Further, the chamber 31 is connected to a drying furnace 50 through a transfer tube T. Then, after making the atmosphere inside the chamber 31 into a state of atmosphere with a vapor pressure of the organic solvent L of 80% or more by driving the vaporizer 35, the liquid drop injection device 45 is driven and each liquid composition is coated. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a substrate processing apparatus.

  In recent years, organic electroluminescence displays (hereinafter referred to as “organic EL displays”) have attracted attention as flat panel displays that replace liquid crystal displays. Since the organic EL display is a spontaneous emission type display that uses an organic electroluminescence element (hereinafter referred to as “organic EL element”) as a light emitting element, it does not use a backlight unlike a liquid crystal display, and thus can reduce power consumption. Etc. are mentioned.

  The light emitting material in this type of organic EL display (hereinafter referred to as “organic EL material”) is generally classified into a high molecular weight organic material and a low molecular weight organic material. There has been proposed a droplet discharge method in which a liquid is dissolved or dispersed in a predetermined solvent to form droplets, which are discharged from a nozzle of a droplet discharge head and applied onto a substrate. In this method, after applying droplets on a substrate, a vacuum drying process is performed to evaporate the solvent in the droplets to form a functional layer (such as a light emitting layer or a hole transport layer) made of the organic material. Turn into. According to this droplet discharge method, the diameter of the droplet can be reduced to the order of μm, so that high-definition patterning of the functional layer is possible.

  However, in the droplet discharge method, the evaporation of the micro liquid applied on the substrate is extremely fast, and at the end (upper end, lower end, right end, left end) of the application region on the substrate, it is applied to the central region of the substrate. Generally, it begins to dry quickly because the partial pressure of the solvent molecules evaporated from the liquid is low. In addition, when active driving is performed using a thin film transistor (TFT) element, the pixel arrangement may not be equally spaced in the X and Y directions due to the shape and arrangement of the TFT element region, wiring, and the like. A difference occurs in the local vapor solvent molecular partial pressure around the formed droplet. Such a difference in the drying time of the organic material liquid applied on the pixel causes unevenness in the film thickness of the functional layer within the pixel and between the pixels. Such film thickness unevenness causes display unevenness such as luminance unevenness and emission color unevenness.

Therefore, by providing dummy pixels with the same shape and pitch as the display pixels around the display pixel area, the application area is widened, and an organic material liquid is also applied to the periphery of the display pixel area. It has been proposed to make the molecular partial pressure uniform (Patent Document 1).
JP 2002-222695 A

However, even if the method as described above is employed, the thickness unevenness of the functional layer in the pixel and between the pixels cannot be sufficiently suppressed.
Accordingly, an object of the present invention is to eliminate unevenness in the thickness of the functional layer formed by discharging a liquid composition containing at least one kind of solvent and a functional material dispersed or dissolved in the solvent. An object of the present invention is to provide a substrate processing apparatus that can be used.

The substrate processing apparatus of the present invention includes a droplet discharge head, and discharges a liquid composition in which at least one functional material for forming a functional layer is dispersed or dissolved in a solvent from the droplet discharge head. A film forming chamber containing a droplet discharge device that is applied to form the functional layer; and a vaporizing unit that vaporizes the at least one solvent and supplies the solvent into the film forming chamber.

  According to this, since the atmosphere in the vicinity of the substrate is composed of at least one solvent constituting the liquid composition, the solvent of the liquid composition applied on the substrate does not evaporate immediately. And after apply | coating a liquid composition on a board | substrate, the film thickness of the functional layer formed can be made uniform by drying and removing the solvent apply | coated by the drying chamber, for example. In addition, since the atmosphere in the vicinity of the substrate is configured with the solvent constituting the liquid composition, condensation of the solvent occurs on the substrate. For this reason, the wettability with respect to a liquid composition can be improved.

The substrate processing apparatus may include an exhaust unit for exhausting the film formation chamber and a gas supply unit for supplying an inert gas to the film formation chamber.
According to this, it is possible to replace the atmosphere in the film forming chamber from the air to the atmosphere composed of the solvent in a short time by driving the vaporizing means after exhausting the air atmosphere in the film forming chamber. Further, the partial pressure of the solvent atmosphere in the vicinity of the substrate can be controlled by controlling the exhaust amount and the supply amount of the inert gas.

The substrate processing apparatus may include a vapor pressure measuring unit that measures the vapor pressure in the film forming chamber.
According to this, the vapor pressure in the film forming chamber is measured. And by determining the timing to start discharging the liquid composition by driving the droplet discharge device according to the result, the film thickness of the functional layer is made uniform and the wettability to the liquid composition is improved. Can be made.

In this substrate processing apparatus, the film forming chamber may be connected to a drying chamber for drying the liquid composition via a substrate transfer means for transferring the substrate.
According to this, a functional film having a desired film thickness is formed by repeating a series of processes such as discharging a liquid composition in a film forming chamber and applying it onto a substrate, then carrying it into a drying chamber and drying it. can do. As a result, even if the region where the liquid composition lands differs for each substrate, the functional layer having a desired film thickness can be obtained by changing the number of repetitions of the series of steps described above for each substrate. Can be formed.

In the substrate processing apparatus according to any one of the above, the droplet discharge device may have an explosion-proof structure.
According to this, for example, when the solvent is an organic material, the atmosphere in the vicinity of the droplet discharge device is an atmosphere composed of the organic material. If there is a possibility that sparks may scatter and explode in the atmosphere near the droplet discharge device due to static electricity of the droplet discharge device, the influence of the explosion around the droplet discharge device can be suppressed.

In this substrate processing apparatus, the substrate may be an electro-optical substrate constituting an electro-optical device in which a plurality of electro-optical elements are formed in a matrix.
According to this, an image having an excellent display quality with no luminance unevenness in each pixel by using, for example, an organic EL display having a functional layer formed by using a droplet discharge device. Can be manufactured.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a front view of an organic EL display as an example of an electro-optical device manufactured using the substrate processing apparatus of the present invention.

As shown in FIG. 1, the organic EL display 1 includes a display unit 2 and a flexible circuit board 3 connected to the lower side of the display unit 2 (in the direction of arrow Y in FIG. 1).

  The display unit 2 includes a substrate S. In the present embodiment, the substrate S is made of glass having optical transparency. As shown in FIG. 1, the substrate S includes a substantially rectangular coating region 4 in the center thereof. The application area 4 includes an effective display area 4A and a dummy area 4B, and a dummy area 4B is arranged around the effective display area 4A.

  As shown in FIG. 1, m × n pixels 5 are formed in a matrix in the application region 4. A pair of scanning line driving circuits 7 and an inspection circuit 8 are formed on the substrate S in an area 6 (hereinafter referred to as “non-application area”) other than the application area 4.

  Further, in the coating region 4, a group of m pixels 5 in one row direction (X arrow direction), and a group of n pixels 5 in one column direction (Y arrow direction) are arranged at equal pitches in the row direction and the column direction. Is formed. In each pixel 5, a red organic EL element 9R, a green organic EL element 9G, and a blue organic EL element 9B are arranged along the X arrow direction in FIG. 1, and the red organic EL element 9R and the green organic EL element 9G. The blue organic EL elements 9B are arranged in this order. That is, the organic EL elements 9R, 9G, and 9B for each color are red organic EL element 9R, green organic EL element 9G, blue organic EL element 9B, along the X arrow direction (row direction) in FIG. The organic EL element for red 9R, the organic EL element for green 9G,... Are repeatedly arranged in this order. In addition, organic EL elements 9R, 9G, and 9B of the same color are arranged along the direction of the arrow Y (column direction) in FIG.

  Of the mxn pixels 5 formed in the application region 4, each color organic EL element 9R, 9G, 9B of the pixel 5 formed in the effective display region 4A emits red light. An organic EL element for red, an organic EL element for green that emits green light, and an organic EL element for blue that emits blue light. On the other hand, each color organic EL element 9R, 9G, 9B of the pixel 5 formed in the dummy region 4B is a so-called dummy organic EL element that does not emit any color light. Therefore, only the pixels 5 formed in the effective display area 4A are display pixels contributing to display, and the pixels 5 formed in the dummy area 4B are dummy pixels not contributing to display.

  In the following, for convenience of explanation, among the pixels 5 formed in the effective display area 4A, the groups of pixels 5 arranged so as to be adjacent to the dummy area 4B, that is, ends (upper and lower ends) in the effective display area 4A. , Right end, left end) are denoted by reference numeral “5a”, and the pixel 5 disposed at the center in the effective display area 4A is denoted by reference numeral “5b”. In particular, in the case where it is not necessary to limit the position where the arrangement is performed, the position is indicated by a symbol “5”.

FIG. 2 is a cross-sectional view of the organic EL display 1 taken along the line aa in FIG. 1, and includes a pixel 5 in the dummy area 4B and a pixel 5a disposed at the upper end of the effective display area 4A.
As shown in FIG. 2, each color organic EL element 9 </ b> R, 9 </ b> G, 9 </ b> B is formed on a circuit forming layer Sa formed on the substrate S. The circuit forming layer Sa is a circuit element such as a thin film transistor (TFT) 10 that supplies driving power to the organic EL elements 9R, 9G, and 9B for each color, or a scanning line driving circuit 7 or an inspection circuit 8 formed in the non-application region 6. This is a layer in which part or all of the circuit elements constituting the layer are formed.

A bank 11 that partitions the organic EL elements 9R, 9G, and 9B in a matrix is formed in a region corresponding to the coating region 4 on the circuit formation layer Sa.
The surface of the bank 11 has liquid repellency. The bank 11 may be made of a material originally having liquid repellency, for example, a fluorine resin. Moreover, even if it does not have liquid repellency, it may be formed by patterning an organic resin such as a commonly used acrylic resin or polyimide resin and making the surface liquid repellent by CF ₄ plasma treatment or the like. . Further, the height of the bank 11 is sufficient if it is about 1 to 2 μm.

  Further, pixel electrodes 12 are formed on the bottoms of the concave regions defined by the banks 11 on the circuit forming layer Sa. On each pixel electrode 12, in this embodiment, a functional layer 16 is formed by laminating a hole transport layer 14 and light emitting layers 15R, 15G, and 15B in this order. Each pixel electrode 12 formed in the effective display area 4 </ b> A is electrically connected to the corresponding thin film transistor 10 through the contact hole 13. On the other hand, each pixel electrode 12 formed in the dummy region 4B is not formed with a corresponding thin film transistor.

  Each of the light emitting layers 15R, 15G, and 15B is made of an organic light emitting material. Of the light emitting layers 15R, 15G, and 15B, the light emitting layer 15R is a light emitting layer that can emit red light, and the light emitting layer 12G is a light emitting layer that can emit green light. Reference numeral 12B denotes a light emitting layer capable of emitting blue light. For convenience of explanation, the substrate on which the circuit forming layer Sa, the bank 11 and the pixel electrode 12 are formed is referred to as an element substrate SS.

  As shown in FIG. 2, each hole transport layer 14 is formed in close contact with the entire surface of the pixel electrode 12. This is also formed in close contact on each pixel electrode 12 of the pixel 5 in another region (not shown). Further, the light emitting layers 15R, 15G, and 15B formed on each hole transport layer 14 are also formed in close contact with the entire surface of the corresponding hole transport layer 14. This is also formed in close contact on the hole transport layers 14 of the pixels 5 in other regions (not shown). Furthermore, the film thickness of each hole transport layer 14 and the light emitting layers 15R, 15G, and 15B is uniform in each concave region. This also applies to the concave regions of the pixels 5 in other regions not shown. That is, the film thicknesses of the hole transport layers 14 and the light emitting layers 15R, 15G, and 15B in all the pixels 5 formed in the coating region 4 and between the pixels 5 are not uneven.

A cathode 18 is formed over the entire surface of the functional layer 13. A part of the cathode 18 is formed so as to cover the uncoated region 6.
The pixel electrode 12, the hole transport layer 14, the red light emitting layer 15R, and the cathode 18 are laminated to constitute the red organic EL element 9R shown in FIG. In addition, the pixel electrode 12, the hole transport layer 14, the green light emitting layer 15G, and the cathode 18 are laminated to form a green organic EL element 9G. Similarly, the pixel electrode 12, the hole transport layer 14, the blue light emitting layer 15B, and the cathode 18 are laminated to constitute a blue organic EL element 9B.

A sealing member 19 is formed on the outer peripheral edge of the circuit forming layer Sa so as to cover the entire surface of the cathode 18.
Further, as shown in FIG. 1, a pair of scanning line driving circuits 7 are arranged in the non-application area 6 so as to sandwich the application area 4. Each scanning line driving circuit 7 outputs a scanning signal for selecting a desired group of pixels 5 in the n-row pixels 5 group. Further, as shown in FIG. 1, an inspection circuit 8 is formed in the non-application area 6 on the side opposite to the Y arrow direction from the application area 4. The inspection circuit 8 is driven before the organic EL display 1 is shipped, and is a circuit for inspecting whether or not each color organic EL element 9R, 9G, 9B is normally driven.

  On the other hand, a data line driving circuit 20 and a control circuit 21 are formed on the flexible circuit board 3. The data line driving circuit 20 outputs the data signals of the organic EL elements 9R, 9G, and 9B for the respective colors to the group of pixels 5 in the row selected by the scanning signal output from the scanning line driving circuit 7. The data signal is supplied to the thin film transistor 10 (see FIG. 2) via a wiring (not shown), and the carrier density injected into the light emitting layers 15R, 15G, and 15B for each color from the pixel electrode 12 through the hole transport layer 14 is determined. It is a signal to be determined. The emission luminance of each color organic EL element 9R, 9G, 9B is determined by this data signal.

The control circuit 21 generates various control signals for controlling the driving of each scanning line driving circuit 7 and the data line driving circuit 20, and outputs the generated control signals to the respective driving circuits 7 and 20.

  In the organic EL display 1 configured as described above, the scanning line driving circuit 7 and the data line driving circuit 20 are driven and controlled by various control signals output from the control circuit 21, and the organic EL elements 9 R and 9 R of each pixel 5 are controlled. The emission brightness of 9G and 9B is controlled. As a result, a desired image is displayed on the display area 4A.

Next, an example of a method for manufacturing the organic EL display 1 having the above-described configuration will be described with reference to FIGS.
FIG. 3 is a schematic view of a film forming apparatus used for manufacturing the organic EL display 1. As shown in FIG. 3, a film forming apparatus 30 as a substrate processing apparatus includes a chamber 31 as a film forming chamber. The chamber 31 includes a first pipe 32 and a second pipe 33 on its side wall 31A. The first and second pipes 32 and 33 are connected to a vaporizer 35 as vaporizer.

  The vaporizer 35 includes a container 36 filled with the organic solvent L. The organic solvent L is a solvent that disperses or dissolves the functional material constituting the functional layer 16 described above. Specifically, an organic solvent that disperses or dissolves a known hole transport layer material constituting the hole transport layer 14 or each known light emitting material constituting each of the light emitting layers 15R, 15G, and 15B. In form, it is a liquid organic solvent used in common for the various functional materials.

  In addition, the vaporizer 35 includes a compressor 37. The compressor 37 is connected to the first pipe 32, sucks the atmosphere (gas) in the chamber 31, sends the gas to the container 36, and bubbles the organic solvent L filled in the container 36. As a result, the organic solvent L is vaporized and supplied to the chamber 31 via the second pipe 33.

  Further, the side wall 31A of the vaporizer 35 is provided with a third pipe 38 and a fourth pipe 39. The third pipe 38 is connected to an exhaust fan F serving as an exhaust means, and is a pipe for exhausting the atmosphere (gas) in the chamber 31. Between the exhaust fan F and the chamber 31, a control valve B for controlling the exhaust amount of the atmosphere (gas) in the chamber 31 exhausted through the third pipe 38 is provided. The fourth pipe 39 is connected to a gas supply unit 40 as a gas supply means for supplying nitrogen gas as an inert gas. The gas supply unit 40 includes a gas cylinder filled with nitrogen gas, a regulator for controlling the flow rate of the nitrogen gas, and the like. The fourth pipe 39 supplies the nitrogen gas from the gas supply unit 40 into the chamber 31.

  Furthermore, a known vapor pressure measuring means 41 for measuring the vapor pressure of the organic solvent L in the chamber 31 is provided on the side wall 31B of the vaporizer 35. The vapor pressure measuring means 41 includes a control circuit (not shown), and when the vapor pressure of the organic solvent L in the chamber 31 is equal to or lower than a preset value, the vaporizer 35 is driven to cause the vapor of the organic solvent L to enter the chamber 31. It is supposed to be supplied. In this embodiment, when the vapor pressure of the organic solvent L in the chamber 31 is 80% or less, the gas supply unit 40 is driven to supply the vapor of the organic solvent L to the chamber 31. Furthermore, the side wall 31 </ b> C of the vaporizer 35 is provided with a large opening 42 that opens the chamber 31. A door 43 is provided in the opening 42.

A droplet discharge device 45 is accommodated in the chamber 31 having such a configuration. The droplet discharge device 45 is formed by dispersing or dissolving a mounting table 46 provided on the base D, a plurality of droplet discharge heads 47 having a plurality of nozzles (not shown), and various functional materials in the organic solvent L. A liquid composition storage unit 48 that stores the supplied liquid composition and supplies it to the droplet discharge head 47 is provided.

  The mounting table 46 fixes the element substrate SS so that the surface on which the bank 11 is formed in FIG. Furthermore, the mounting table 46 is movable with respect to the base D in the direction of the arrow Y, that is, along the direction perpendicular to the paper surface. That is, the mounting table 46 can control the relative positions of the element substrate SS and the nozzles of the droplet discharge head 47 with respect to the direction indicated by the arrow Y (the direction perpendicular to the paper surface) (see FIG. 1).

  Each droplet discharge head 47 is connected so as to be movable on a rail Lo constructed along the direction of the arrow X in FIG. The rail Lo is fixed to the base D. Therefore, the droplet discharge head 47 scans the element substrate SS along the direction of the arrow X in FIG.

  The mounting table 46 and the droplet discharge head 47 are driven in cooperation, so that the relative position between the element substrate SS and the droplet discharge head 47 is two-dimensionally controlled in the X arrow direction and the Y arrow direction. To do. Thereby, the nozzle of the droplet discharge head 47 can be moved to a position facing each pixel electrode 12 on the element substrate SS.

  Each droplet discharge head 47 discharges a liquid composition for forming the hole transport layer 14 constituting the functional layer 16 and a liquid composition for forming the red light emitting layer 15R. A head, a head for discharging the liquid composition for forming the green light emitting layer 15G, and a head for discharging the liquid composition for forming the blue light emitting layer 15B are prepared (see FIG. 2).

  The film forming apparatus 30 includes a drying furnace 50 as a drying chamber. The drying furnace 50 is connected to the chamber 31 via the transport pipe T. A transfer manipulator 51 as a transfer means is provided between the chamber 31 and the drying furnace 50 across the transfer pipe T. The transfer manipulator 51 removes the element substrate SS on the mounting table 46 from the mounting table 46 by, for example, vacuum suction, holds the element substrate SS, and carries it into the drying furnace 50 through the transfer tube T. The element substrate SS in the drying furnace 50 is carried into the chamber 31 through the transport pipe T and fixed on the mounting table 46.

  The drying furnace 50 includes a pump P. By driving the pump P with the door 43 closed, the inside of the drying furnace 50 is decompressed, and the element substrate SS disposed in the drying furnace 50 is vacuum-dried.

  Next, a method for manufacturing the organic EL display 1 will be described with reference to FIGS. In the organic EL display 1, the functional layer 16 is formed by the film forming apparatus 30 of the present invention, and the formation method of each layer other than the functional layer 16 is formed by a known method. Therefore, the method for forming various layers other than the functional layer 16 is simplified in description.

First, as shown in FIG. 4, after cleaning the substrate S, a thin film transistor (TFT) 10 and various wirings are formed at predetermined positions on the substrate S. At this time, the thin film transistor (TFT) 10 is formed using, for example, a known low-temperature polycrystalline silicon process. Thereafter, an interlayer insulating layer such as silicon oxide is formed, a contact hole 13 for connecting to the thin film transistor (TFT) 10 is formed in the formed interlayer insulating layer, and then, corresponding to each thin film transistor (TFT) 10 A pixel electrode 12 is formed at the position. The pixel electrode 12 is formed by using a known film formation method such as sputtering, and pattern formation is performed using a photolithography process. Further, a photosensitive polyimide resin or the like is applied on the pixel electrode 12 and the circuit formation layer Sa, and the bank 11 is formed so as to surround the pixel electrode 12 by a photolithography process. In this way, the bank 11 is formed so as to partition the pixel electrode 12 in the coating region 4. Thereafter, each pixel electrode 12 is subjected to hydrophilic treatment such as oxygen plasma treatment. Thereby, the hydrophilicity of the pixel electrode 12 can be improved and surface modification can be performed. Further, the bank 11 is made liquid-repellent by plasma treatment with a fluorine-based gas to form an element substrate SS having a cross-sectional structure as shown in FIG.

  Next, the element substrate SS is fixed to the mounting table 46 of the droplet discharge device 45 (see FIG. 3). Then, the door 43 is closed and the vapor pressure measuring means 41 is driven. Further, the exhaust fan F is driven and the control valve B is operated to exhaust the atmosphere (gas) in the chamber 31. At this time, when the vapor pressure of the organic solvent L in the chamber 31 is 80% or less, the compressor 37 is driven based on the control signal from the vapor pressure measuring means 41 and the vapor of the organic solvent L is supplied to the chamber 31. Is done.

  Further, the gas supply unit 40 is driven to supply nitrogen gas to the chamber 31 via the fourth pipe 39. As shown in FIG. 3, the fourth pipe 39 extends to the vicinity of the droplet discharge device 45. For this reason, the partial pressure of the vapor pressure of the organic solvent L in the vicinity of the droplet discharge device 45 can be controlled to a desired value by controlling the flow rate of the nitrogen gas.

  After a while, the vapor pressure of the organic solvent L in the chamber 31 becomes 80% or more. In this state, the droplet discharge device 45 is driven. First, the droplet discharge head 47 that discharges the liquid composition Lp for forming the hole transport layer 14 is selected. Then, the positions of the mounting table 46 and the droplet discharge head 47 are controlled so that the nozzles of the head 47 face the pixel electrodes 12 in the initial position (for example, the pixel electrodes 12 in the first row and the first column). Match. In this state, as shown in FIG. 5, the liquid composition Lp in the form of droplets is ejected from the nozzles of the droplet ejection head 47 to apply the liquid composition Lp onto the pixel electrodes 12.

  Subsequently, the liquid droplet ejection composition 47 is ejected from the nozzles of the head 47 while scanning the liquid droplet ejection head 47 by a predetermined pitch along the direction of the arrow X in FIG. The liquid composition Lp is applied on each pixel electrode 12.

  Thereafter, the droplet discharge head 47 is returned to the initial position. Then, the mounting table 46 is driven to shift the position of the mounting table 46 by one line. Then, in the same manner as described above, the liquid composition Lp is sequentially ejected onto each pixel electrode 12, and the liquid composition Lp is applied onto the pixel electrode 12. Thereafter, the liquid composition Lp is applied to all the pixel electrodes 12 on the element substrate SS by repeatedly performing the same process as described above.

  At this time, since the vapor pressure of the organic solvent L in the chamber 31 is 80%, the liquid composition L11 applied on the pixel electrode 12 does not evaporate immediately and maintains a liquid state. The atmosphere near the element substrate SS is controlled so that the partial pressure of the organic solvent L is sufficiently high. Therefore, condensation of the organic solvent L occurs on the pixel electrode 12 when the liquid composition Lp is applied. For this reason, the wettability with respect to the liquid composition L11 on the pixel electrode 12 is improved, and the applied liquid composition Lp spreads over the entire surface of the pixel electrode 12.

  Thereafter, the transfer manipulator 51 is operated to remove the element substrate SS on the mounting table 46 from the mounting table 46. Subsequently, the door 43 is opened, and the element substrate SS is carried into the drying furnace 50 through the transfer pipe T. Thereafter, the door 43 is closed to make the chamber 31 and the drying furnace 50 independent. And the 2nd pump P2 is driven and the inside of the drying furnace 50 is pressure-reduced. Then, the organic solvent L in the liquid composition Lp applied to the entire surface of each pixel electrode 12 of the element substrate SS is evaporated all at once to form the hole transport layer 14 (see FIG. 6).

Next, the pump P2 is stopped, and an air release valve (not shown) is opened to bring the furnace 50 into an air atmosphere. Then, the element substrate SS including the hole transport layer 14 disposed in the drying furnace 50 is removed by operating the atmospheric transfer manipulator 51. Subsequently, the door 43 is opened, and the element substrate SS is again placed on the placement table 46 of the droplet discharge device 45 in the chamber 31 through the transport tube T. Thereafter, the door 43 is closed to make the chamber 31 and the drying furnace 50 independent.

  The state is maintained until the vapor pressure of the organic solvent L in the chamber 31 reaches 80%. Next, the droplet discharge device 45 is driven. At this time, the droplet ejection head 47 that ejects the liquid composition LR for forming the red light emitting layer 15R is selected, and the positions of the mounting table 46 and the droplet ejection head 47 are controlled to The nozzle is adjusted to a position facing the hole transport layer 14 formed on the pixel electrode 12 (for example, the pixel electrode 12 in the first row and the first column) at the initial position. Then, as shown in FIG. 7, the liquid composition LR in the form of droplets is ejected from the nozzles of the droplet ejection head 47 to apply the liquid composition LR on the hole transport layer 14. Subsequently, the droplet discharge head 47 scans each predetermined pitch along the direction of the arrow X in FIG. 7 and discharges the liquid composition LR in the form of droplets from the nozzles of the head 47 to obtain 3 for one row. The liquid composition LR is applied on each hole transport layer 14.

  Thereafter, the droplet discharge head 47 is returned to the initial position. Then, the position of the mounting table 46 is controlled to be shifted by one line. Then, in the same manner as described above, the liquid composition LR is sequentially discharged onto each of the three hole transport layers 14. Thereafter, the liquid composition LR is applied on each of the three hole transport layers 14 on the element substrate SS by repeatedly performing the same process as described above.

  At this time, since the vapor pressure of the organic solvent L in the chamber 31 is 80%, the atmosphere in the chamber 31 is sufficiently filled with the mist of the organic solvent L as described above. Therefore, the applied liquid composition LR does not evaporate immediately and is in a liquid state. Further, since the atmosphere near the element substrate SS is composed of the organic solvent L, condensation of the organic solvent L occurs on the hole transport layer 14 when the liquid composition LR is applied. For this reason, the wettability with respect to the liquid composition LR on the hole transport layer 14 is improved, and the applied liquid composition LR spreads over the entire surface of the hole transport layer 14.

  Thereafter, the transfer manipulator 51 is operated to remove the element substrate SS on the mounting table 46 from the mounting table 46. Subsequently, the door 43 is opened, and the element substrate SS is carried into the drying furnace 50 through the transfer pipe T. Thereafter, the door 43 is closed to make the chamber 31 and the drying furnace 50 independent. And the pump P2 is driven and the inside of the drying furnace 50 is pressure-reduced. Then, the organic solvent L in the liquid composition LR applied to the entire surface of the hole transport layer 12 of the element substrate SS is evaporated all at once to form the red light emitting layer 12R.

  Next, the pump P2 is stopped, the atmosphere release valve is opened, and the inside of the furnace 50 is opened to the atmosphere. Then, the air transport manipulator 51 is operated in the drying furnace 50, and the element substrate SS including the hole transport layer 14 and the red light emitting layer 15R disposed in the drying furnace 50 is removed. Subsequently, the door 43 is opened, and the element substrate SS is again placed on the placement table 46 of the droplet discharge device 45 in the chamber 31 through the transport tube T. Thereafter, the door 43 is closed to make the chamber 31 and the drying furnace 50 independent.

The state is maintained until the vapor pressure of the organic solvent L in the chamber 31 reaches 80%. Next, the droplet discharge device 45 is driven. At this time, the droplet discharge head 47 that discharges the liquid composition LG for forming the green light emitting layer 15G is selected. Then, the positions of the mounting table 46 and the droplet discharge head 47 are controlled so that the nozzles of the head 47 are adjacent to the pixel electrode 12 (for example, the pixel electrode 12 in the first row and the first column) in the row direction. The hole transport layer 14 is aligned with a position facing the hole transport layer 14 (for example, the hole transport layer 14 in the first row and the second column). Then, as shown in FIG. 8, the liquid composition LG in the form of droplets is discharged from the nozzles of the droplet discharge head 47, and the liquid composition LG is applied onto the hole transport layer 14. Subsequently, the droplet discharge head 47 is scanned at predetermined pitches along the direction of the arrow X in FIG. 8, and the liquid composition LG in the form of droplets is discharged from the nozzles of the head 47 and 3 for one row. The liquid composition LG is applied on each hole transport layer 14.

Thereafter, the liquid composition LG is applied on each of the three hole transport layers 14 on the element substrate SS by performing the same as described above.
At this time, since the vapor pressure of the organic solvent L in the chamber 31 is 80%, the applied liquid composition LG does not evaporate immediately and is in a liquid state as described above. Further, since the atmosphere near the element substrate SS is composed of the organic solvent L, condensation of the organic solvent L occurs on the hole transport layer 14 when the liquid composition LG is applied. For this reason, the wettability with respect to the liquid composition LG on the hole transport layer 14 is improved, and the applied liquid composition LG spreads over the entire surface of the hole transport layer 14.

  Thereafter, the transfer manipulator 51 is operated to remove the element substrate SS on the mounting table 46 from the mounting table 46. Subsequently, the door 43 is opened, and the element substrate SS is carried into the drying furnace 50 through the transfer pipe T. Thereafter, the door 43 is closed to make the chamber 31 and the drying furnace 50 independent. And the pump P2 is driven and the inside of the drying furnace 50 is pressure-reduced. Then, the organic solvent L in the liquid composition LG applied to the entire surface of the hole transport layer 14 of the element substrate SS is evaporated all at once to form the green light emitting layer 15G.

  Next, the pump P is stopped, a predetermined valve is opened, and the furnace 50 is opened to the atmosphere. Then, the air transport manipulator 51 is operated in the drying furnace 50 to remove the element substrate SS including the hole transport layer 14 and the red and green light emitting layers 12R and 12G disposed in the drying furnace 50. Subsequently, the door 43 is opened, and the element substrate SS is again placed on the placement table 46 of the droplet discharge device 45 in the chamber 31 through the transport tube T. Thereafter, the door 43 is closed to make the chamber 31 and the drying furnace 50 independent.

  The state is maintained until the vapor pressure of the organic solvent L in the chamber 31 reaches 80%. Next, the droplet discharge device 45 is driven. At this time, the droplet discharge head 47 that discharges the liquid composition LB for forming the blue light emitting layer 15B is selected. Then, the positions of the mounting table 46 and the droplet discharge head 47 are controlled, and the nozzles of the head 47 are adjacent in the row direction of the pixel electrode 12 (for example, the pixel electrode 12 in the first row and the first column) at the initial position. The hole transport layer 14 (for example, the hole transport layer 14 in the first row and the third column) is disposed at a position facing the hole transport layer 14. Then, as shown in FIG. 9, the liquid composition LB in the form of droplets is ejected from the nozzles of the droplet ejection head 47, and the liquid composition LB is applied onto the hole transport layer 14. Subsequently, the droplet discharge head 47 is scanned at a predetermined pitch, and the liquid composition LB in the form of droplets is discharged from the nozzles of the head 47 so that each of the three hole transport layers 14 for one row is discharged. The liquid composition LB is applied to the surface.

Thereafter, the liquid composition LB is applied on each of the three hole transport layers 14 on the element substrate SS by performing the same as described above.
At this time, since the vapor pressure of the organic solvent L in the chamber 31 is 80%, the applied liquid composition LB does not immediately evaporate but is in a liquid state. Further, since the atmosphere in the vicinity of the element substrate SS is composed of the organic solvent L, condensation of the organic solvent L occurs on the hole transport layer 14 when the liquid composition LB is applied. For this reason, the wettability with respect to the liquid composition LB on the hole transport layer 14 is improved, and the applied liquid composition LB spreads over the entire surface of the hole transport layer 14.

Thereafter, the transfer manipulator 51 is operated to remove the element substrate SS on the mounting table 46 from the mounting table 46. Subsequently, the door 43 is opened, and the element substrate SS is carried into the drying furnace 50 through the transfer pipe T. Thereafter, the door 43 is closed to make the chamber 31 and the drying furnace 50 independent.
And the pump P2 is driven and the inside of the drying furnace 50 is pressure-reduced. Then, the organic solvent L in the liquid composition LB applied to the entire surface of the hole transport layer 14 of the element substrate SS is evaporated all at once to form the blue light emitting layer 12B.

  Thus, as shown in FIG. 10, the functional layer 16 including the hole transport layer 14 and the red, green, or blue light emitting layers 15R, 15G, and 15B is formed on each pixel electrode 12. The

  Subsequently, a LiF layer, a Ca layer, an Al layer, and the like are stacked on the bank 11 and the light emitting layers 15R, 15G, and 15B by a vapor deposition method or the like to form the cathode 18. Thereafter, the display unit 2 is sealed by the sealing member 19. Furthermore, the display part 2 and the flexible circuit board 3 manufactured separately are connected.

As described above, the present embodiment has the following effects.
(1) According to the present embodiment, the hole transport layer 14 constituting the functional layer 16 and the red, green, and blue light emitting layers 15R, 15G, and 15B are formed in the chamber 31 on the element substrate SS. A droplet discharge device 45 for discharging each of the liquid compositions Lp, LR, LG, LB was housed. And the vaporizer 35 which vaporizes the organic solvent L which comprises each liquid composition Lp, LR, LG, LB and makes the atmosphere of the organic solvent L in the chamber 31 was provided. Further, the chamber 31 was connected to the drying furnace 50 through the transport pipe T.

  Then, the vaporizer 35 is driven to bring the atmosphere in the chamber 31 into an atmosphere in which the vapor pressure of the organic solvent L is 80% or higher, and then the droplet discharge device 45 is driven to drive each liquid composition Lp, LR, LG, and LB were applied. Therefore, it is possible to prevent the applied liquid compositions Lp, LR, LG, LB from evaporating immediately after being applied. Thereafter, the organic substrate L in the liquid compositions Lp, LR, LG, and LB applied by carrying the element substrate SS into the drying furnace 50 is removed, and each of the hole transport layers 14 and red, green, and blue is used. The light emitting layers 15R, 15G, and 15B are formed.

  Therefore, each liquid composition Lp, LR, LG, LB is removed all at once regardless of the position and order of application, so that each hole transport layer 14 and the red, green and blue light emitting layers 15R, The film thicknesses of 15G and 15B are uniform with no unevenness within all the pixels 5 and between the pixels 5.

Further, at the time of application, condensation of the organic solvent L occurs on the pixel electrode 12 or the like at the application position. Therefore, the wettability of the applied liquid compositions Lp, LR, LG, LB is improved, so that the hole transport layer 14 to be formed is formed on the entire surface of the pixel electrode 12, and the red, green and blue light emitting layers 15R, 15G and 15B can be formed in close contact with the entire surface of the corresponding hole transport layer 14.
(2) According to the present embodiment, the chamber 31 includes the exhaust means for exhausting the atmosphere (gas) in the chamber 31 and the gas supply unit 40 for supplying nitrogen gas, which is an inert gas, into the chamber 31. Prepared. Then, after the air atmosphere in the chamber 31 is exhausted by the exhaust means, the atmosphere in the chamber 31 can be replaced with the atmosphere constituted by the organic solvent L in a short time by driving the vaporizer 35. Moreover, the partial pressure of the atmosphere of the organic solvent L in the vicinity of the element substrate SS can be controlled by controlling the exhaust amount and the supply amount of nitrogen gas.
(3) According to this embodiment, the vapor pressure measuring means 41 for measuring the vapor pressure of the organic solvent L in the chamber 31 is provided on the side wall 31B of the vaporizer 35. When the vapor pressure of the organic solvent L in the chamber 31 is 80% or less, the vaporizer 35 is driven to supply nitrogen gas to the chamber 31. Therefore, it is possible to reliably prevent the applied liquid compositions L11, LR, LG, and LB from evaporating immediately after being applied.
(4) According to the present embodiment, the chamber 31 and the drying furnace 50 are connected to the opening 42 formed in the side wall 31 </ b> C via the transport pipe T. Then, after applying desired liquid compositions Lp, LR, LG, and LB on the element substrate SS in the chamber 31, the element substrate SS is transferred to the drying furnace 50 via the transfer tube T and dried. The transport layer 14 or the red, green, and blue light emitting layers 15R, 15G, and 15B are formed. And after drying, it carried in into the chamber 31 again and applied desired liquid composition Lp, LR, LG, LB on the element substrate SS. Therefore, the various layers 14, 15R, 15G, and 15B can be formed without taking out the element substrate SS to the outside.

Further, the various layers 14, 15R, 15G, and 15B can be divided into a plurality of times instead of being formed by a series of steps such as one application → drying. As a result, even if the shape of the element substrate SS is different, the various layers 14, 15R, 15G, and the like having a desired film thickness can be obtained by performing the coating → drying process in multiple steps. 15B can be formed.
(5) According to the present embodiment, each functional layer 16 formed on the substrate S constituting the organic EL display 1 can be made uniform within the pixels 5 or between the pixels 5. As a result, it is possible to manufacture an organic EL display that displays an image with excellent display quality without luminance unevenness for each pixel 5.

In addition, embodiment of invention is not limited to the said embodiment, You may implement as follows.
In the above embodiment, the droplet discharge device 45 is accommodated in the chamber 31. However, only the periphery of the droplet discharge head 47, the element substrate SS and the mounting table 46 is sealed, and only the inside thereof is sealed. It may be an explosion-proof structure that can be an atmosphere of vapor of the organic solvent L. By using the droplet discharge device 45 having such an explosion-proof structure, the drive mechanism, the circuit, the wiring, and the like can be prevented from directly touching the solvent atmosphere, so that the ignition to the solvent atmosphere can be prevented. Moreover, it is good also as a format which covers the whole such apparatus with the container of nitrogen atmosphere. By doing in this way, invasion of oxygen in the atmosphere into the solvent atmosphere can be prevented, and ignition to the solvent atmosphere can be prevented.

  In the above embodiment, the electro-optical device is adapted to the organic EL display 1 which is a flat panel display, but is not limited to this, and is used for forming a conductive member constituting another electro-optical device. Also good.

The top view of the organic electroluminescent display manufactured using the film-forming apparatus of this invention. Sectional drawing of an organic electroluminescent display. 1 is a schematic configuration diagram of a film forming apparatus. The figure for demonstrating the manufacturing method of an organic electroluminescent display. Similarly, the figure for demonstrating the manufacturing method of an organic electroluminescent display. Similarly, the figure for demonstrating the manufacturing method of an organic electroluminescent display. Similarly, the figure for demonstrating the manufacturing method of an organic electroluminescent display. Similarly, the figure for demonstrating the manufacturing method of an organic electroluminescent display. Similarly, the figure for demonstrating the manufacturing method of an organic electroluminescent display. Similarly, the figure for demonstrating the manufacturing method of an organic electroluminescent display.

Explanation of symbols

L: organic solvent as solvent, LP, LR, LG, LB ... liquid composition, P1: first pump as exhaust means, S: substrate as electro-optical substrate, 1 ... organic EL as electro-optical device Display, 9R, 9G, 9B ... red organic EL element as electro-optical element, green organic EL element and blue organic EL element 9B, 16 ... functional layer, 30 ... film forming apparatus as substrate processing apparatus, 31 ... A chamber as a film forming chamber, 35 ... a vaporizer as a vaporizer, 40 ... a gas supply unit as a gas supply means, 41 ... a vapor pressure measuring means, 45 ... a droplet discharge device, 47 ... a droplet discharge head, 50 ... A drying furnace as a drying chamber, 51... A manipulator as a substrate transfer means.

Claims (6)

A liquid composition comprising a droplet discharge head, wherein a liquid composition in which at least one functional material for forming a functional layer is dispersed or dissolved in a solvent is discharged from the droplet discharge head and applied onto a substrate, and the functional layer A film forming chamber containing a droplet discharge device for forming
Vaporization means for vaporizing the at least one solvent and supplying it to the film formation chamber. The substrate processing apparatus according to claim 1,
An exhaust means for exhausting the film formation chamber;
A substrate processing apparatus comprising gas supply means for supplying an inert gas to the film formation chamber. The substrate processing apparatus according to claim 1 or 2,
A substrate processing apparatus comprising vapor pressure measuring means for measuring the vapor pressure in the film forming chamber. The substrate processing apparatus according to claim 1 or 2,
The substrate processing apparatus, wherein the film forming chamber is connected to a drying chamber for drying the liquid composition via a substrate transfer means for transferring the substrate. In the substrate processing apparatus according to any one of claims 1 to 4,
The substrate processing apparatus, wherein the droplet discharge device has an explosion-proof structure. The substrate processing apparatus according to any one of claims 1 to 5,
The substrate processing apparatus, wherein the substrate is an electro-optical substrate constituting an electro-optical device in which a plurality of electro-optical elements are formed in a matrix.

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