KR20180033093A - Coating apparatus, coating method, and organic el display - Google Patents

Abstract

The present invention is intended to provide a coating apparatus capable of mitigating an allowable error of an impact location of a droplet in a scan direction. The coating apparatus comprises: a discharge unit including a plurality of heads where a plurality of nozzles are installed in parallel in a first direction; a substrate maintaining portion maintaining a substrate; and a moving equipment relatively moving the discharge unit and the substrate maintaining portion in a second direction crossing the first direction, wherein the discharge unit discharges a droplet used in formation of a light emission layer toward each opening portion of a bank that is pre-formed in the substrate maintained in the substrate maintaining portion, the light emission layer has a light emission area group in which a plurality of light emission areas emitting different colors are arranged at intervals in a predetermined sequence in the second direction, and at least one opening portion is lying across the light emission areas which are adjacent to each other at intervals in the second direction and emit an identical color.

Description

TECHNICAL FIELD [0001] The present invention relates to a coating apparatus, a coating method, and an organic EL display,

The present invention relates to a coating apparatus, a coating method and an organic EL display.

2. Description of the Related Art Conventionally, an organic light emitting diode (OLED), which is a light emitting diode using light emission of an organic EL (electroluminescence), is known. The organic EL display using the organic light emitting diode is advantageous in that it is thin and lightweight, low in power consumption, and excellent in response speed, viewing angle, and contrast ratio. For this reason, it has recently attracted attention as a next-generation flat panel display (FPD).

The organic light emitting diode has an anode formed on a substrate, a cathode provided on the opposite side of the substrate with respect to the anode, and an organic layer provided between the anode and the cathode. The organic layer has, for example, a hole injecting layer, a hole transporting layer, a light emitting layer, an electron transporting layer and an electron injecting layer in this order from the anode side to the cathode side. For forming the light-emitting layer and the like, an ink-jet coating device is used. This coating apparatus applies a droplet of a coating liquid containing a light emitting material onto a substrate. The coating layer is dried and baked to form a light emitting layer (see, for example, Patent Document 1).

As the light emitting layer, for example, a blue light emitting layer including a red light emitting layer including a red light emitting material emitting red light, a green light emitting layer including a green light emitting material emitting green light, and a blue light emitting material emitting blue light is formed. The coating liquid used for forming these light emitting layers is applied to the openings of the banks that have been formed in advance. The bank is formed using, for example, a photoresist, and patterned in a predetermined pattern by a photolithography process. The bank separates the coating liquid for the red luminescent layer, the coating liquid for the green luminescent layer and the coating liquid for the blue luminescent layer to prevent these coating liquids from being mixed.

Japanese Patent Application Laid-Open No. 2016-77966

1 is a plan view showing a painting pattern drawn by a coating apparatus according to a conventional example. In Fig. 1, the same hatching is applied to the same region of the light emitting material. 1, the X direction and the Y direction are horizontal directions orthogonal to each other, and the Z direction is a vertical direction orthogonal to the X direction and the Y direction. The Y direction is a line direction in which a plurality of nozzles for ejecting droplets of the same coating liquid are arranged. On the other hand, the X direction is a scanning direction orthogonal to the Y direction. Further, the line direction and the scan direction need only be intersecting, and may not be orthogonal.

The organic EL display has, for example, a red light emitting region 2R emitting red light, a green light emitting region 2G emitting green light, and a blue light emitting region 2B emitting blue light for each pixel. Neighboring light emitting regions are separated by the bank 5, and the bank 5 surrounds all the light emitting regions one by one.

The red light emitting region 2R, the green light emitting region 2G, and the blue light emitting region 2B are arranged in this order at intervals in the X direction to form the light emitting region group 3. The light emitting region groups 3 are arranged at intervals in the Y direction crossing the X direction. Therefore, the light emitting regions emitting light in the same color are repeatedly arranged in the Y direction.

The application device discharges droplets from the nozzles toward the openings of the banks 5 while changing positions of the substrates in the X direction with respect to a plurality of nozzles arranged in the Y direction.

In recent years, in order to increase the pixel density of the organic EL display, it is required to reduce the area of the light emitting region which is a subpixel. Therefore, the dimension in the X direction of the luminescent region is close to the diameter of the droplet discharged from the nozzle.

If the tolerance of the landing position of the droplet in the X direction is narrow and the landing position of the droplet in the X direction is shifted slightly from the target position, the coating liquid is discharged from the opening of the bank 5, Mixed.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and it is an object of the present invention to provide a coating apparatus which can alleviate a tolerance of a landing position of a liquid droplet in a scanning direction.

In order to solve the above problems, according to one aspect of the present invention,

A substrate holding unit for holding a substrate; and a controller for relatively moving the discharging unit and the substrate holding unit in a second direction intersecting the first direction, wherein the discharging unit includes a plurality of nozzles arranged in parallel in the first direction, And a movement mechanism

The ejection unit discharges droplets used for forming the light emitting layer from the nozzles toward the respective openings of the bank previously formed in the substrate held by the substrate holding unit,

The light emitting layer has a light emitting region group in which a plurality of light emitting regions emitting light of different colors are arranged in an interval in the second direction in a predetermined order,

At least one of the openings extends over a plurality of luminescent regions which are adjacent to each other with an interval in the second direction and emit light of the same color.

According to one aspect of the present invention, there is provided a coating apparatus capable of mitigating a tolerance of a landing position of a liquid droplet in a scanning direction.

1 is a plan view showing a painting pattern drawn by a coating apparatus according to a conventional example.
2 is a plan view showing an organic EL display according to an embodiment.
3 is a cross-sectional view showing a main part of an organic EL display according to an embodiment.
4 is a flowchart showing a method of manufacturing an organic light emitting diode according to an embodiment.
5 is a cross-sectional view showing a substrate on which a coating layer according to one embodiment is formed.
6 is a cross-sectional view showing a substrate obtained by drying the applied layer of Fig. 5 under reduced pressure.
7 is a plan view showing a substrate processing system according to one embodiment.
8 is a plan view showing a coating apparatus according to an embodiment.
9 is a side view showing a coating apparatus according to an embodiment.
10 is a plan view showing a painting pattern drawn by a coating apparatus according to an embodiment.
11 is a plan view showing a drawing pattern according to the first modification.
12 is a plan view showing a drawing pattern according to the second modification.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, modes for carrying out the present invention will be described with reference to the drawings. In the drawings, the same or corresponding components are denoted by the same or corresponding reference numerals, and a description thereof will be omitted.

≪ Organic EL display &

2 is a plan view showing an organic EL display according to an embodiment. 2, the circuit of one unit circuit 11 is shown in an enlarged manner.

The organic EL display includes a substrate 10, a plurality of unit circuits 11 arranged on the substrate 10, a scanning line driving circuit 14 provided on the substrate 10, And a data line driving circuit 15 installed therein. A unit circuit 11 is provided in a region surrounded by a plurality of scanning lines 16 connected to the scanning line driving circuit 14 and a plurality of data lines 17 connected to the data line driving circuit 15. The unit circuit 11 includes a TFT layer 12 and an organic light emitting diode 13.

The TFT layer 12 has a plurality of TFTs (Thin Film Transistors). One TFT has a function as a switching element and the other TFT has a function as a current control element for controlling the amount of current flowing through the organic light emitting diode 13. [ The TFT layer 12 is operated by the scanning line driving circuit 14 and the data line driving circuit 15 to supply current to the organic light emitting diode 13. [ The TFT layer 12 is provided for each unit circuit 11, and a plurality of unit circuits 11 are independently controlled. Note that the TFT layer 12 may have a general structure and is not limited to the structure shown in Fig.

The driving method of the organic EL display is an active matrix method in the present embodiment, but may be a passive matrix method.

3 is a cross-sectional view showing a main part of an organic EL display according to an embodiment. As the substrate 10, a transparent substrate such as a glass substrate or a resin substrate is used. On the substrate 10, a TFT layer 12 is formed. On the TFT layer 12, a planarization layer 18 for planarizing a step formed by the TFT layer 12 is formed.

The planarization layer 18 has an insulating property. A contact plug 19 is formed in the contact hole passing through the planarization layer 18. The contact plug 19 electrically connects the anode 21 as the pixel electrode formed on the flat surface of the planarization layer 18 and the TFT layer 12. [ The contact plug 19 can be formed simultaneously with the same material as the anode 21.

The organic light emitting diode 13 is formed on the flat surface of the planarization layer 18. The organic light emitting diode 13 includes an anode 21 as a pixel electrode, a cathode 22 as a counter electrode provided on the opposite side of the substrate 10 with respect to the pixel electrode, And an organic layer 23 formed between the organic layer 23 and the organic layer 23. By operating the TFT layer 12, a voltage is applied between the anode 21 and the cathode 22, and the organic layer 23 emits light.

The anode 21 is formed of, for example, ITO (Indium Tin Oxide) or the like, and transmits light from the organic layer 23. The light transmitted through the anode 21 is transmitted through the substrate 10 and taken out to the outside. The positive electrode 21 is provided for each unit circuit 11.

The cathode 22 is formed of, for example, aluminum or the like, and reflects light from the organic layer 23 toward the organic layer 23. The light reflected by the cathode 22 passes through the organic layer 23, the anode 21, and the substrate 10 and is taken out to the outside. The cathode 22 is common to a plurality of unit circuits 11.

The organic layer 23 includes a hole injection layer 24, a hole transport layer 25, a light emitting layer 26, an electron transport layer 27, and an electron injection layer 28 ) In this order. When a voltage is applied between the anode 21 and the cathode 22, holes are injected into the hole injection layer 24 from the anode 21 and electrons are injected from the cathode 22 into the electron injection layer 28. The holes injected into the hole injection layer 24 are transported to the light emission layer 26 by the hole transport layer 25. The electrons injected into the electron injection layer 28 are transported to the emission layer 26 by the electron transport layer 27. Thus, holes and electrons are recombined in the light emitting layer 26 to excite the light emitting material of the light emitting layer 26, and the light emitting layer 26 emits light.

A red luminescent layer 26R, a green luminescent layer 26G and a blue luminescent layer 26B are formed as the luminescent layer 26, for example, as shown in Fig. The red light emitting layer 26R is formed of a red light emitting material that emits red light, the green light emitting layer 26G is formed of a green light emitting material that emits green light, and the blue light emitting layer 26B is formed of a blue light emitting material that emits blue light . The red light emitting layer 26R, the green light emitting layer 26G and the blue light emitting layer 26B are formed in the openings 31 of the banks 30.

The bank 30 separates the coating liquid for the red luminescent layer 26R, the coating liquid for the green luminescent layer 26G and the coating liquid for the blue luminescent layer 26B to prevent these coating liquids from being mixed. The bank 30 has an insulating property and buries a contact hole penetrating through the planarization layer 18. [

≪ Method for producing organic light emitting diode &

4 is a flowchart showing a method of manufacturing an organic light emitting diode according to an embodiment.

First, in step S101, a positive electrode 21 is formed as a pixel electrode. For forming the anode 21, for example, a vapor deposition method is used. The positive electrode 21 is formed for each unit circuit 11 on the flat surface of the planarization layer 18. [ The contact plug 19 may be formed together with the anode 21.

In the succeeding step S102, the bank 30 is formed. The bank 30 is formed using, for example, a photoresist, and is patterned in a predetermined pattern by a photolithography process. The positive electrode 21 is exposed at the opening 31 of the bank 30. [

Subsequently, in step S103, the hole injection layer 24 is formed. For forming the hole injection layer 24, an ink jet method or the like is used. The coating liquid for the hole injection layer 24 is applied on the anode 21 by the inkjet method to form the coating layer L as shown in Fig. By drying and firing the coating layer L, the hole injection layer 24 is formed as shown in Fig.

In the succeeding step S104, the hole transporting layer 25 is formed. As in the formation of the hole injection layer 24, an ink-jet method or the like is used to form the hole transport layer 25. A coating layer is formed by applying a coating liquid for the hole transport layer 25 on the hole injection layer 24 by the inkjet method. The coating layer is dried and fired to form the hole transport layer 25.

In the succeeding step S105, the light emitting layer 26 is formed. As in the formation of the hole injection layer 24 and the hole transport layer 25, an ink jet method or the like is used for forming the light emitting layer 26. [ A coating layer is formed by applying a coating liquid for the light emitting layer 26 onto the hole transport layer 25 by the ink jet method. The coating layer is dried and fired to form the light emitting layer 26.

As the light emitting layer 26, for example, a red light emitting layer 26R, a green light emitting layer 26G and a blue light emitting layer 26B are formed. The red light emitting layer 26R, the green light emitting layer 26G and the blue light emitting layer 26B are formed in the openings 31 of the banks 30. The bank 30 separates the coating liquid for the red luminescent layer 26R, the coating liquid for the green luminescent layer 26G and the coating liquid for the blue luminescent layer 26B to prevent these coating liquids from being mixed.

In the succeeding step S106, the electron transport layer 27 is formed. The electron transport layer 27 is formed, for example, by a vapor deposition method or the like. The electron transport layer 27 can be formed not only on the light emitting layer 26 in the opening 31 of the bank 30 but also on the bank 30 because the electron transporting layer 27 may be common to a plurality of unit circuits 11 .

Subsequently, in step S107, the electron injection layer 28 is formed. The electron injection layer 28 is formed, for example, by a vapor deposition method or the like. The electron injection layer 28 is formed on the electron transport layer 27. The electron injection layer 28 may be common to a plurality of unit circuits 11.

In the succeeding step S108, the cathode 22 is formed. The cathode 22 is formed, for example, by a vapor deposition method or the like. The cathode 22 is formed on the electron injection layer 28. The cathode 22 may be common to a plurality of unit circuits 11. [

When the driving method of the organic EL display is a passive matrix method instead of the active matrix method, the cathode 22 is patterned in a predetermined pattern.

By the above process, the organic light emitting diode 13 is manufactured. The substrate processing system 100 is used to form the hole injection layer 24, the hole transport layer 25 and the light emitting layer 26 in the organic layer 23.

<Substrate Processing System>

7 is a plan view showing a substrate processing system according to an embodiment. The substrate processing system 100 performs the respective processes corresponding to steps S103 to S105 in Fig. 4 to form the hole injection layer 24, the hole transport layer 25, and the light emitting layer 26 on the anode 21. The substrate processing system 100 has a loading station 110, a processing station 120, an unloading station 130, and a controller 140.

The loading station 110 loads a cassette C containing a plurality of substrates 10 from the outside and sequentially takes out the plurality of substrates 10 from the cassette C. [ The TFT layer 12, the planarization layer 18, the anode 21, the bank 30, and the like are formed on each substrate 10 in advance.

The loading station 110 includes a cassette placing table 111 for placing the cassette C, a conveying path 112 provided between the cassette placing table 111 and the processing station 120, And a substrate carrying body (113) provided on the substrate. The substrate carrying body 113 carries the substrate 10 between the cassette C disposed in the cassette placing table 111 and the processing station 120.

The processing station 120 forms a hole injecting layer 24, a hole transporting layer 25 and a light emitting layer 26 on the anode 21. The processing station 120 includes a hole injection layer forming block 121 for forming the hole injection layer 24, a hole transport layer formation block 122 for forming the hole transport layer 25, And a light emitting layer forming block 123.

The hole injection layer forming block 121 is formed by coating a coating liquid for the hole injection layer 24 on the anode 21 to form a coating layer and drying and firing the coating layer to form the hole injection layer 24 . The coating liquid for the hole injection layer (24) includes an organic material and a solvent. The organic material may be either a polymer or a monomer. In the case of the monomer, it may be polymerized by firing to be a polymer.

The hole injection layer forming block 121 includes a coating device 121a, a buffer device 121b, a reduced pressure drying device 121c, a heat treatment device 121d and a temperature control device 121e. The application device 121a discharges the droplets of the coating liquid for the hole injection layer 24 toward the opening 31 of the bank 30. [ The buffer device 121b temporarily holds the substrate 10 waiting for processing. The reduced-pressure drying apparatus 121c low-pressure-dries the coated layer applied by the coating device 121a to remove the solvent contained in the coated layer. The heat treatment apparatus 121d heat-treats the coated layer that has been dried by the reduced-pressure drying apparatus 121c. The temperature adjusting device 121e adjusts the temperature of the substrate 10 subjected to the heat treatment by the heat treatment device 121d to a predetermined temperature, for example, a normal temperature.

The inside of the application device 121a, the buffer device 121b, the heat treatment device 121d, and the temperature control device 121e is maintained in the atmosphere. The reduced-pressure drying apparatus 121c converts the inside atmosphere into an atmospheric atmosphere and a reduced-pressure atmosphere.

The arrangement and number of the coating devices 121a, the buffer device 121b, the reduced pressure drying device 121c, the heat treatment device 121d and the temperature control device 121e in the hole injection layer formation block 121, Can be arbitrarily selected.

Further, the hole injection layer forming block 121 includes substrate transfer devices CR1 to CR3 and transfer devices TR1 to TR3. The substrate transport apparatuses CR1 to CR3 transport the substrate 10 to each adjacent apparatus. For example, the substrate transport device CR1 transports the substrate 10 to the adjacent application device 121a and the buffer device 121b. The substrate transport apparatus CR2 transports the substrate 10 to an adjacent vacuum drying apparatus 121c. The substrate transport apparatus CR3 transports the substrate 10 to the adjacent thermal processing apparatus 121d and the temperature regulating apparatus 121e. The transfer devices TR1 to TR3 sequentially transfer the substrate W between the loading station 110 and the substrate transfer device CR1, between the substrate transfer device CR1 and the substrate transfer device CR2, And is disposed between the substrate transfer apparatuses CR3 and relay the substrate 10 therebetween. The inside of the substrate transfer apparatuses CR1 to CR3 and the transfer apparatuses TR1 to TR3 are maintained in the atmosphere.

A transfer device TR4 for relaying the substrate 10 therebetween is provided between the substrate transfer device CR3 of the hole injection layer forming block 121 and the substrate transfer device CR4 of the hole transfer layer forming block 122 Respectively. The interior of the delivery device TR4 is maintained in the atmosphere.

The hole transport layer forming block 122 is formed by forming a coating layer by applying a coating liquid for the hole transport layer 25 on the hole injection layer 24 and drying and firing the coating layer to form the hole transport layer 25 do. The coating liquid for the hole transport layer 25 includes an organic material and a solvent. The organic material may be either a polymer or a monomer. In the case of the monomer, it may be polymerized by firing to be a polymer.

The hole transport layer forming block 122 includes a coating device 122a, a buffer device 122b, a reduced pressure drying device 122c, a heat treatment device 122d and a temperature control device 122e. The coating device 122a discharges a droplet of the coating liquid for the hole transport layer 25 toward the opening 31 of the bank 30. [ The buffer device 122b temporarily holds the substrate 10 waiting for processing. The reduced-pressure drying apparatus 122c low-pressure-dries the applied layer applied by the application device 122a to remove the solvent contained in the applied layer. The heat treatment apparatus 122d heat-treats the coated layer dried by the reduced-pressure drying apparatus 122c. The temperature adjusting device 122e adjusts the temperature of the substrate 10 subjected to the heat treatment by the heat treatment device 122d to a predetermined temperature, for example, a normal temperature.

The inside of the application device 122a and the buffer device 122b are maintained in an atmospheric environment. On the other hand, in order to suppress deterioration of the organic material of the hole transporting layer 25, the heat treatment apparatus 122d and the temperature regulating apparatus 122e are maintained in an atmosphere of low oxygen and low dew point inside. The reduced-pressure drying apparatus 122c converts the atmosphere inside the atmosphere into a low-oxygen and low-boiling atmosphere and a reduced-pressure atmosphere.

Here, the low-oxygen atmosphere refers to an atmosphere having an oxygen concentration lower than that of the atmosphere, for example, an oxygen concentration of 10 ppm or less. The atmosphere of the low dew point is an atmosphere having a dew point lower than the atmosphere, for example, an atmosphere having a dew point temperature of -10 캜 or lower. The atmosphere of low oxygen and low dew point is formed of an inert gas such as nitrogen gas.

The arrangement and number of the coating device 122a, the buffer device 122b, the reduced pressure drying device 122c, the heat treatment device 122d and the temperature control device 122e in the hole transport layer formation block 122, The atmosphere can be arbitrarily selected.

The hole transport layer forming block 122 includes substrate transfer devices CR4 to CR6 and transfer devices TR5 to TR6. The substrate transfer devices CR4 to CR6 transfer the substrates 10 to respective adjacent devices. The transfer devices TR5 to TR6 are arranged in order between the substrate transfer device CR4 and the substrate transfer device CR5 and between the substrate transfer device CR5 and the substrate transfer device CR6, The substrate 10 is relayed.

The interior of the substrate transfer device CR4 is maintained in an atmospheric environment. On the other hand, the interior of the substrate transport apparatuses CR5 to CR6 is maintained in an atmosphere of low oxygen and low dew point. This is because the interior of the reduced-pressure drying apparatus 122c adjacent to the substrate transport apparatus CR5 is switched to a low-oxygen and low-dew point atmosphere and a reduced-pressure atmosphere. This is because the inside of the heat treatment device 122d and the temperature control device 122e provided adjacent to the substrate transfer device CR6 is maintained in an atmosphere of low oxygen and low dew point.

The delivery device TR5 is configured as a load lock device for switching the atmosphere inside the atmosphere between an atmospheric atmosphere and an atmosphere of low oxygen and low dew point. This is because the reduced-pressure drying apparatus 122c is installed adjacent to the downstream side of the delivery device TR5. On the other hand, the inside of the transfer device TR6 is maintained in an atmosphere of low oxygen and low dew point.

A transfer device TR7 for relaying the substrate 10 is provided between the substrate transfer device CR6 of the hole transport layer forming block 122 and the substrate transfer device CR7 of the light emitting layer forming block 123 . The inside of the substrate transfer device CR6 is maintained in an atmosphere of low oxygen and low dew point, and the inside of the substrate transfer device CR7 is maintained in an atmosphere. Therefore, the delivery device TR7 is configured as a load lock device for switching the atmosphere inside the atmosphere between the atmosphere of the low-oxygen and low-dew point and the atmosphere.

The light emitting layer forming block 123 forms a light emitting layer 26 by applying a coating liquid for the light emitting layer 26 onto the hole transporting layer 25 to form a coating layer and drying and firing the formed coating layer. The coating liquid for the light emitting layer 26 includes an organic material and a solvent. The organic material may be either a polymer or a monomer. In the case of the monomer, it may be polymerized by firing to be a polymer.

The light emitting layer forming block 123 is provided with a coating device 123a, a buffer device 123b, a reduced pressure drying device 123c, a heat treatment device 123d and a temperature control device 123e. The coating device 123a discharges a droplet of the coating liquid for the light emitting layer 26 toward the opening 31 of the bank 30. [ The buffer device 123b temporarily holds the substrate 10 waiting for processing. The reduced-pressure drying apparatus 123c removes the solvent contained in the coating layer by drying under reduced pressure the coating layer applied by the coating apparatus 123a. The heat treatment apparatus 123d heat-treats the coated layer dried by the reduced-pressure drying apparatus 123c. The temperature adjusting device 123e adjusts the temperature of the substrate 10 subjected to the heat treatment by the heat treatment device 123d to a predetermined temperature, for example, a normal temperature.

The interior of the application device 123a and the buffer device 123b is maintained in an atmospheric environment. On the other hand, in order to suppress deterioration of the organic material of the light emitting layer 26, the heat treatment device 123d and the temperature adjusting device 123e are maintained in an atmosphere of low oxygen and low dew point. The reduced-pressure drying apparatus 123c converts the atmosphere inside the atmosphere into a low-oxygen and low-boiling atmosphere and a reduced-pressure atmosphere.

The arrangement and number of the coating devices 123a, the buffer device 123b, the reduced pressure drying device 123c, the heat treatment device 123d and the temperature control device 123e in the light emitting layer forming block 123, Can be arbitrarily selected.

Further, the light emitting layer forming block 123 includes substrate transfer devices CR7 to CR9 and transfer devices TR8 to TR9. The substrate transport apparatuses CR7 to CR9 transport the substrate 10 to each adjacent apparatus. The transfer devices TR8 to TR9 are arranged in order between the substrate transfer device CR7 and the substrate transfer device CR8 and between the substrate transfer device CR8 and the substrate transfer device CR9, The substrate 10 is relayed.

The interior of the substrate transfer device CR7 is maintained in an atmospheric environment. On the other hand, the interior of the substrate transport apparatuses CR8 to CR9 is maintained in an atmosphere of low oxygen and low dew point. This is because the interior of the reduced-pressure drying apparatus 123c adjacent to the substrate transfer device CR8 is switched to a low-oxygen and low-boiling atmosphere and a reduced-pressure atmosphere. This is because the inside of the heat treatment device 123d and the temperature control device 123e provided adjacent to the substrate transfer device CR9 is maintained in an atmosphere of low oxygen and low dew point.

The delivery device TR8 is configured as a load lock device for switching the atmosphere inside the atmosphere between the atmospheric atmosphere and the atmosphere of low oxygen and low dew point. This is because the reduced-pressure drying apparatus 123c is installed adjacent to the downstream side of the delivery device TR8. The interior of the delivery device TR9 is maintained in an atmosphere of low oxygen and low dew point.

A transfer device TR10 for relaying the substrate 10 is provided between the substrate transfer device CR9 of the light emitting layer forming block 123 and the transferring station 130. [ The inside of the substrate transport apparatus CR9 is maintained in an atmosphere of low oxygen and low dew point, and the inside of the carry-out station 130 is maintained in an atmosphere. Therefore, the delivery device TR7 is configured as a load lock device for switching the atmosphere inside the atmosphere between the atmosphere of the low-oxygen and low-dew point and the atmosphere.

The dispensing station 130 sequentially accommodates the plurality of substrates 10 in the cassette C to carry out the cassette C to the outside. The dispensing station 130 includes a cassette placing table 131 for placing the cassette C, a conveying path 132 provided between the cassette placing table 131 and the processing station 120, And a substrate carrying body 133 mounted on the substrate carrier. The substrate carrying body 133 conveys the substrate 10 between the processing station 120 and the cassette C disposed on the cassette placement table 131.

The control device 140 includes a CPU (Central Processing Unit) 141 and a computer including a storage medium 142 such as a memory and stores a program (also referred to as a recipe) stored in the storage medium 142 as a CPU (141), thereby realizing various processes.

The program of the control device 140 is stored in the information storage medium and installed from the information storage medium. Examples of the information storage medium include a hard disk (HD), a flexible disk (FD), a compact disk (CD), a magnet optical disk (MO), a memory card and the like. Further, the program may be downloaded from the server via the Internet and installed.

Next, a substrate processing method using the substrate processing system 100 configured as described above will be described. When the cassette C accommodating the plurality of substrates 10 is placed on the cassette placement table 111, the substrate transfer body 113 sequentially moves the cassettes C from the cassette C on the cassette placement table 111 And is conveyed to the hole injection layer forming block 121. [

The hole injection layer forming block 121 is formed by applying a coating liquid for the hole injection layer 24 on the anode 21 to form a coating layer and drying and firing the formed coating layer to form the hole injection layer 24, . The substrate 10 on which the hole injection layer 24 is formed is transferred from the hole injection layer formation block 121 to the hole transport layer formation block 122 by the transfer device TR4.

The hole transport layer forming block 122 is formed by applying a coating liquid for the hole transport layer 25 on the hole injection layer 24 to form a coating layer and drying and firing the formed coating layer to form the hole transport layer 25 . The substrate 10 on which the hole transporting layer 25 is formed is transferred from the hole transporting layer forming block 122 to the light emitting layer forming block 123 by the transfer device TR7.

The light emitting layer forming block 123 forms a light emitting layer 26 by applying a coating liquid for the light emitting layer 26 onto the hole transporting layer 25 to form a coating layer and drying and firing the formed coating layer. The substrate 10 on which the light emitting layer 26 is formed is transferred from the light emitting layer forming block 123 to the carry-out station 130 by the transfer device TR10.

The substrate carrier 133 of the unloading station 130 accommodates the substrate 10 received from the transfer device TR10 in a predetermined cassette C on the cassette placement table 131. Thus, the processing of the series of substrates 10 in the substrate processing system 100 is completed.

The substrate 10 is taken out from the carry-out station 130 to the outside while being accommodated in the cassette C. The electron transport layer 27, the electron injection layer 28, the cathode 22, and the like are formed on the substrate 10 which is carried out to the outside.

<Coating Apparatus and Coating Method>

Next, the coating device 123a of the light emitting layer forming block 123 will be described with reference to Figs. 8 to 9. Fig. 8 is a plan view showing a coating apparatus according to an embodiment. 9 is a side view showing a coating apparatus according to an embodiment. In the following drawings, the X direction and the Y direction are a horizontal direction orthogonal to each other, and the Z direction is a vertical direction orthogonal to the X direction and the Y direction. The Y direction is a line direction in which a plurality of nozzles for ejecting droplets of the same coating liquid are arranged, and corresponds to the first direction described in the claims. On the other hand, the X direction is a scanning direction orthogonal to the Y direction, and corresponds to the second direction described in the claims. Further, the line direction and the scan direction need only be intersecting, and may not be orthogonal.

The coating apparatus 123a includes an XYθ stage 150 holding the substrate 10, a liquid droplet discharging unit 160 discharging liquid droplets toward the substrate 10, and a liquid droplet discharging unit And a maintenance unit 170 for holding the maintenance unit 170. The XYθ stage 150 and the maintenance unit 170 are installed side by side in the Y direction. A Y-axis guide 180 is installed between the upper side of the XY &amp;thetas; stage 150 and the upper side of the maintenance unit 170. [ The liquid droplet discharging unit 160 can be moved in the Y direction along the Y-axis guide 180. [ As the driving unit for moving the liquid droplet discharging unit 160 in the Y direction, a linear motor or the like is used.

The XYθ stage 150 has a chuck 151 for holding the substrate 10 and a chuck driver 152 for moving the chuck 151. The chuck 151 holds the substrate 10 with the application surface for applying the droplets of the substrate 10 facing upward. As the chuck 151, for example, a vacuum chuck is used, but an electrostatic chuck or the like may be used. The chuck 151 corresponds to the substrate holding portion described in the claims. The chuck driving unit 152 includes an X direction driving unit 153 for moving the chuck 151 in the X direction, a Y direction driving unit 154 for moving the chuck 151 in the Y direction, And a rotation driving unit 155 for rotating. The chuck driver 152 corresponds to the moving mechanism described in the claims.

The liquid droplet discharging unit 160 is moved between a position for discharging the liquid droplet toward the substrate 10 from above the XYθ stage 150 and a position for receiving the processing for maintaining the function by the maintenance unit 170 It becomes possible. The liquid droplet discharging units 160 are arranged in a plurality of (for example, ten in FIG. 8) in the Y direction. The plurality of droplet ejecting units 160 may be independently moved in the Y direction or may be moved integrally in the Y direction.

Each of the droplet ejection units 160 has a carriage 161 and a plurality of heads 162 mounted on the lower surface of the carriage 161. [ Each head 162 is provided with at least one row of nozzles composed of a plurality of nozzles 163 arranged in the Y direction. A plurality of nozzles 163 provided in the same head 162 eject droplets of the same coating liquid. A nozzle 163 for discharging a droplet of the coating liquid for the red luminescent layer 26R, a nozzle 163 for discharging a liquid droplet of the coating liquid for the green luminescent layer 26G, The nozzles 163 for ejecting liquid droplets are provided on a separate head 162.

The maintenance unit 170 performs a process of maintaining the function of the droplet ejection unit 160 to eliminate ejection failure of the droplet ejection unit 160. [ The maintenance unit 170 has a wiping unit 171 for wiping off the periphery of the discharge port of the nozzle and a suction unit 172 for sucking the droplet from the discharge port of the nozzle. The suction unit 172 also blocks the discharge port of the idle nozzle and prevents clogging by drying.

Next, a coating method using the coating device 123a having the above-described structure will be described. The following operation of the application device 123a is controlled by the control device 140. [ Although the control device 140 is provided separately from the coating device 123a in Fig. 7, it may be provided as a part of the coating device 123a.

First, when the substrate 10 carried in from the outside of the coating device 123a is placed on the chuck 151, the chuck 151 holds the substrate 10. Subsequently, the position of the chuck 151 is corrected by the chuck driver 152 based on the image of the alignment mark on the substrate 10. Thereafter, the chuck drive unit 152 moves the chuck 151 in the X direction to pass under the liquid droplet ejection unit 160. In the meantime, the liquid droplet discharging unit 160 discharges droplets toward the substrate 10. The chuck driver 152 moves the chuck 151 again in the X direction and passes under the liquid droplet ejecting unit 160 after changing the position of the chuck 151 in the Y direction. In the meantime, the liquid droplet discharging unit 160 discharges droplets toward the substrate 10. By repeating this, the coating device 123a draws a predetermined pattern on the substrate 10. [ The substrate 10 on which the drawing operation has been completed is removed from the chuck 151 and carried out from the inside of the coating device 123a to the outside. Subsequently, the next substrate 10 is carried into the inside of the coating device 123a from the outside, and the coating device 123a draws a predetermined pattern on the substrate 10. The maintenance of the function of the liquid discharge unit 160 by the maintenance unit 170 is appropriately performed during replacement of the substrate 10. [

The coating device 123a having the above configuration moves the chuck 151 holding the substrate 10 to draw a predetermined pattern on the substrate 10 but discharges droplets toward the substrate 10 Or both the chuck 151 and the liquid droplet discharging unit 160 may be moved. The application device 123a only needs to be able to move the chuck 151 and the droplet ejection unit 160 relatively.

&Lt; Drawing pattern drawn by the application device &

Next, a drawing pattern drawn by the coating device 123a will be described with reference to Fig. 10 is a plan view showing a painting pattern drawn by a coating apparatus according to an embodiment. In Fig. 10, the same hatching is applied to the same region of the light emitting material.

The organic EL display has, for example, a red light emitting layer 26R, a green light emitting layer 26G, and a blue light emitting layer 26B as the light emitting layer 26. [ The red light emitting layer 26R is formed of a red light emitting material that emits red light, the green light emitting layer 26G is formed of a green light emitting material that emits green light, and the blue light emitting layer 26B is formed of a blue light emitting material that emits blue light .

The red light emitting layer 26R emits red light in a region where holes supplied from the anode 21 and electrons supplied from the cathode 22 are recombined. And a region emitting red light is referred to as a red light emitting region 261R. The red light emitting region 261R substantially overlaps with the anode 21 as a pixel electrode when seen in plan view.

Similarly, the green light emitting layer 26G emits green light in a region where holes supplied from the anode 21 and electrons supplied from the cathode 22 are recombined. A region emitting green light is referred to as a green light emitting region 261G. The green light emitting region 261G substantially overlaps with the anode 21 as a pixel electrode when seen in plan view.

The blue light emitting layer 26B emits blue light in a region where the holes supplied from the anode 21 and the electrons supplied from the cathode 22 are recombined. And a region emitting blue light is referred to as a blue light emitting region 261B. The blue light emitting region 261B substantially overlaps with the anode 21 as a pixel electrode when seen in plan view.

The organic EL display has, for example, a red light emitting region 261R, a green light emitting region 261G, and a blue light emitting region 261B for each pixel. These luminescent regions emit light independently for each anode 21. The amount of light emission is adjusted by the voltage between the anode 21 and the cathode 22.

The red light emitting region 261R, the green light emitting region 261G and the blue light emitting region 261B are arranged in the X direction at intervals in a predetermined order to form the light emitting region group 262. [ The light emitting region groups 262 are arranged at intervals in the Y direction crossing the X direction. Therefore, in the Y direction, a plurality of light emitting regions emitting light of the same color are arranged.

Each of the heads 162 of the liquid discharge unit 160 is provided with a nozzle 163 for discharging droplets of the same coating liquid toward a plurality of light emitting regions arranged at intervals in the Y direction and emitting light of the same color, Are arranged side by side in the Y direction. A plurality of nozzles 163 provided in the same head 162 eject droplets of the same coating liquid.

The coating device 123a relatively moves the liquid droplet discharging unit 160 and the chuck 151 in the X direction and moves the opening 31 of the bank 30 previously formed on the substrate 10 held by the chuck 151, The droplet is applied from the nozzle 163. The coating device 123a moves the chuck 151 to move the droplet discharging unit 160 and the chuck 151 but may move the droplet discharging unit 160 or both of them.

The bank 30 has the red opening 31R, the green opening 31G and the blue opening 31B as the opening 31. [ The red light emitting layer 26R is formed in the red opening portion 31R and the green light emitting layer 26G is formed in the green opening portion 31G and the blue light emitting layer 26B is formed in the blue opening portion 31B. The red opening 31R, the green opening 31G and the blue opening 31B are arranged in the X direction at intervals in a predetermined order.

The area ratios of the red light emitting region 261R, the green light emitting region 261G and the blue light emitting region 261B are appropriately set in accordance with the respective light emitting characteristics and the light emitting lifetime. For example, a light emitting efficiency is good and a light emitting luminance per unit area is higher, the smaller the area is.

10, the area of the red light emitting region 261R is the smallest, the area of the green light emitting region 261G is the second smallest, and the area of the blue light emitting region 261B is the largest. These light emitting regions have the same dimensions YR, YG and YB in the Y direction, but differ in dimensions XR, XG and XB in the X direction.

Here, YR denotes the dimension of the red light emitting region 261R in the Y direction, YG denotes the dimension of the green light emitting region 261G in the Y direction, and YB denotes the dimension in the Y direction of the blue light emitting region 261B. YR, YG and YB are the same.

XR denotes the dimension of the red light emitting region 261R in the X direction, XG denotes the dimension of the green light emitting region 261G in the X direction, and YB denotes the dimension in the X direction of the blue light emitting region 261B. XR is smaller than XG, and XG is smaller than XB.

Therefore, in FIG. 10, the red light emitting region 261R, the blue light emitting region 261B, the green light emitting region 261G, the green light emitting region 261G, the blue light emitting region 261B, The light emitting region group 262 is formed by repeating the arrangement in the X direction in order. The order in which the red light emitting region 261R, the blue light emitting region 261B, and the green light emitting region 261G are arranged in the two pixels neighboring in the X direction is reversed. Each blue light emitting region 261B is sandwiched in the X direction by a red light emitting region 261R and a green light emitting region 261G.

The bank 30 includes a red opening portion 31R that spans a plurality of red light emitting regions 261R neighboring at an interval in the X direction. Therefore, it is easy to cause the droplet to land on the red opening portion 31R while relatively moving the droplet discharge unit 160 and the chuck 151 in the X direction. Therefore, compared to the conventional case, the tolerance of the liquid drop position of the coating liquid for the red light emitting layer 26R in the X direction can be relaxed.

In addition, the bank 30 includes a green opening 31G that spans a plurality of green light emitting regions 261G neighboring at an interval in the X direction. Therefore, it is easy to cause the droplet to land on the green opening portion 31G while relatively moving the droplet discharge unit 160 and the chuck 151 in the X direction. Therefore, compared to the conventional art, the tolerance of the liquid dropping position of the coating liquid for the green light emitting layer 26G in the X direction can be relaxed.

As described above, the banks 30 of the present embodiment include the openings 31 that span a plurality of light emitting regions which are adjacent to each other with an interval in the X direction and emit light of the same color. Therefore, it is easy to cause the liquid droplet to land on the opening 31 while relatively moving the liquid droplet discharging unit 160 and the chuck 151 in the X direction. Therefore, the tolerance of the landing position of the liquid droplet in the X direction can be relaxed as compared with the conventional case.

The red light emitting region 261R of the present embodiment is adjacent to the green light emitting region 261G at intervals in the X direction because the dimension in the X direction is smaller than that of the green light emitting region 261G. Further, a red opening 31R is formed so as to extend over a plurality of red light emitting regions 261R adjacent to each other with an interval in the X direction. Therefore, the tolerance of the landing position of the liquid droplet in the X direction can be further relaxed.

The green light emitting region 261G of the present embodiment is adjacent to the blue light emitting region 261B at an interval in the X direction because the dimension in the X direction is smaller than that of the blue light emitting region 261B. A green opening 31G is formed so as to extend over a plurality of green light emitting regions 261G neighboring with an interval in the X direction. Therefore, the tolerance of the landing position of the liquid droplet in the X direction can be further relaxed.

Since the blue light emitting region 261B is larger in the X direction than the red light emitting region 261R and the green light emitting region 261G, the liquid droplet discharging unit 160 and the chuck 151 are relatively moved in the X direction , It is easy to land a liquid droplet inside. Therefore, a plurality of blue light emitting regions 261B may not be adjacent to each other with an interval in the X direction. Each blue light emitting region 261B is sandwiched in the X direction by a red light emitting region 261R and a green light emitting region 261G.

<Drawing Pattern According to First Modification>

11 is a plan view showing a drawing pattern according to the first modification. In Fig. 11, the same hatching is applied to the same region of the light emitting material. In this modified example, an opening portion that spans a plurality of light emitting regions which are adjacent to each other with an interval in the X direction and which emit light of the same color, and which spans a plurality of light emitting regions which are adjacent to each other with an interval in the Y direction and emit light of the same color Which is different from the above-described embodiment. Hereinafter, differences will be mainly described.

The red opening portion 31R extends over a plurality of red light emitting regions 261R adjacent to each other at intervals in the X direction. Therefore, as in the case of the above-described embodiment, it is possible to alleviate the tolerance of the adhered position of the droplet of the coating liquid for the red light emitting layer 26R in the X direction.

Incidentally, the nozzles 163 for discharging droplets of the coating liquid for the red light emitting layer 26R are arranged in the Y direction.

Therefore, in this modification, the red opening portion 31R also extends to a plurality of red light emitting regions 261R neighboring at intervals in the Y direction. Since the number of nozzles 163 for discharging droplets toward one red opening portion 31R is larger than in the prior art, the error of the discharge amount of each nozzle 163 is dispersed, and the total amount of discharge amount is likely to be equal each time. Further, the number of choices of the nozzles 163 for discharging droplets toward one red opening portion 31R increases, and the nozzles 163 with good controllability of the discharge amount can be selectively used. Thus, the thicknesses of the plurality of red light emitting layers 26R can be made uniform.

The green opening 31G extends over a plurality of neighboring green light emitting regions 261G at intervals in the X direction. Therefore, as in the case of the above-described embodiment, it is possible to alleviate the tolerance of the liquid droplet landing position of the coating liquid for the green light emitting layer 26G in the X direction.

Incidentally, the nozzles 163 for discharging droplets of the coating liquid for the green light emitting layer 26G are arranged in the Y direction.

Therefore, in this modification, the green opening 31G also extends to a plurality of green light emitting regions 261G neighboring at intervals in the Y direction. Since the number of nozzles 163 for ejecting droplets toward one green opening 31G is larger than in the prior art, the error in the ejection amount of each nozzle 163 is dispersed, and the total amount of ejection amount is likely to become equal each time. Further, the number of choices of the nozzles 163 for discharging liquid droplets toward one green opening portion 31G increases, and the nozzles 163 having good controllability of the discharge amount can be selectively used. Thus, the thickness of the plurality of green light emitting layers 26G can be made uniform.

Further, in this modification, the blue opening portion 31B extends over a plurality of blue light emitting regions 261B neighboring each other at intervals in the Y direction. Since the number of the nozzles 163 for discharging liquid drops toward one blue opening portion 31B is larger than that in the related art, the error of the discharge amount of each nozzle 163 is dispersed and the total amount of discharge amount is likely to be equal each time. In addition, the number of choices of the nozzles 163 for discharging the droplets toward one blue opening portion 31B increases, and the nozzles 163 with good controllability of the discharge amount can be selectively used. Thus, the thicknesses of the plurality of blue light emitting layers 26B can be made uniform.

&Lt; Drawing pattern according to the second modified example &

12 is a plan view showing a drawing pattern according to the second modification. In Fig. 12, the same hatching is applied to the same region of the light emitting material. In this variation, the embodiment and the first modification are different in that a plurality of openings are formed in a stripe shape. Hereinafter, differences will be mainly described.

In this modified example, the red opening portion 31R extends over a plurality of red light emitting regions 261R neighboring each other at intervals in the Y direction, and extends from the red light emitting region 261R at one end in the Y direction to the other Y Emitting area 261R at the end of the direction. The thickness of the plurality of red luminescent layers 26R can be made more uniform.

In this modified example, the green opening 31G extends over a plurality of green light emitting regions 261G neighboring at intervals in the Y direction, and extends from the green light emitting region 261G at one end in the Y direction to the other To the green light emitting region 261G at the Y-direction end. The thickness of the plurality of green light emitting layers 26G can be made more uniform.

In this modification, the blue opening portion 31B extends over a plurality of blue light emission regions 261B neighboring each other at intervals in the Y direction and extends from the blue light emission region 261B at one end in the Y direction, To the blue light emitting region 261B at the Y direction end. The thickness of the plurality of blue light emitting layers 26B can be made more uniform.

In the above-described embodiment, the first modification and the second modification, the red color corresponds to the first color described in the claims, the green color corresponds to the second color described in the claims, and the blue color corresponds to the third color Respectively.

Likewise, in the above-described embodiment, the first modification, and the second modification, the red light emission region 261R is formed in the first light emission region described in the claims, the green light emission region 261G is formed in the The blue light emitting region 261B corresponds to the second light emitting region, and the blue light emitting region 261B corresponds to the third light emitting region described in the claims.

As described above, the area ratio of the red light emitting region 261R, the green light emitting region 261G, and the blue light emitting region 261B is appropriately set in accordance with the respective light emitting characteristics, the light emitting lifetime, and the like. Therefore, the magnitude relationship between the dimension XR, XG, and XB in the X direction of these light emitting regions is not particularly limited, and XR, XG, and XB may be the same.

However, for each light emitting region, the dimensions XR, XG, and XB in the X direction may be smaller than the dimensions YR, YG, and YB in the Y direction. That is, XR may be less than YR, XG may be less than YG, and XB may be less than YB. In this case, since the dimension in the X direction is smaller than the dimension in the Y direction, it is significant to alleviate the tolerance of the landing position in the X direction.

The order of the red light emitting region 261R, the green light emitting region 261G, and the blue light emitting region 261B arranged in the X direction is not limited to the order of FIGS. 10 to 12. At least one light emitting region which is adjacent to each other with an interval in the X direction and emits light of the same color may be used.

The combination of light emission colors is not limited to the three primary colors of red, green, and blue. For example, yellow, which is an intermediate color between red and green, and / or cyan, which is an intermediate color between green and blue, may be used in addition to these three primary colors. The larger the number of combinations of luminous colors, the wider the range of color coordinates that can be displayed.

Although the embodiments of the application device and the like have been described above, the present invention is not limited to the embodiments and the like, and various modifications and improvements can be made within the scope of the present invention described in the claims.

For example, the organic EL display is a bottom emission type in which light from the light emitting layer 26 is taken out from the substrate 10 side in the above embodiment, but light from the light emitting layer 26 is taken out from the side opposite to the substrate 10 Or a top emission type.

In the case of the top emission type, the substrate 10 may not be a transparent substrate, or may be an opaque substrate. This is because the light from the light emitting layer 26 is taken out from the side opposite to the substrate 10.

In the case of the top emission type, the anode 21, which is a transparent electrode, is used as an opposing electrode, and the cathode 22 is used as a pixel electrode provided for each unit circuit 11. The electron injection layer 28, the electron transport layer 27, the light emitting layer 26, and the hole transport layer 25 are formed on the cathode 22, since the arrangement of the anode 21 and the cathode 22 is reversed. And a hole injection layer 24 are formed in this order.

The organic layer 23 is formed by laminating the hole injecting layer 24, the hole transporting layer 25, the light emitting layer 26, the electron transporting layer 27, the electron transporting layer 27, and the electron transporting layer 27 from the anode 21 side to the cathode 22 side in the above- And the injection layer 28 in this order, but at least the light emitting layer 26 is required. The organic layer 23 is not limited to the structure shown in Fig.

10 to 12, the area of the red light emitting region 261R at the left end of the drawing is preferably the same as the area of the other red light emitting region 261R.

10: substrate 13: organic light emitting diode
21: anode 22: cathode
23: organic layer 26: light emitting layer
26R: red luminescent layer 26G: green luminescent layer
26B: blue light emitting layer 261R: red light emitting region
261G: green light emitting region 261B: blue light emitting region
262: Light emitting region group 31:
31R: red opening 31G: green opening
31B: blue opening 100: substrate processing system
123a: application device 151: chuck
152: chuck driving unit 160: droplet discharging unit
161: carriage 162: head
163: Nozzles

Claims (12)

In the coating device,
A substrate holding unit for holding a substrate; and a controller for relatively moving the discharging unit and the substrate holding unit in a second direction intersecting the first direction, wherein the discharging unit includes a plurality of nozzles arranged in parallel in the first direction, And a movement mechanism
The ejection unit discharges droplets used for forming the light emitting layer from the nozzles toward the respective openings of the bank previously formed in the substrate held by the substrate holding unit,
The light emitting layer has a light emitting region group in which a plurality of light emitting regions emitting light of different colors are arranged in an interval in the second direction in a predetermined order,
Wherein at least one of the openings extends over a plurality of light emitting regions which are adjacent to each other with an interval in the second direction and emit light of the same color. The method according to claim 1,
Wherein the light emitting region group includes a first light emitting region emitting light of a first color and a second light emitting region emitting light of a second color different from the first color,
Wherein the first light emitting region has a smaller dimension in the second direction than the second light emitting region,
Wherein at least one of the openings extends over a plurality of the first luminescent regions which are adjacent to each other with an interval in the second direction and emit light of the same color. 3. The method of claim 2,
The light emitting region group further includes a third light emitting region emitting light of a third color different from the first color and the second color,
The second light emitting region is smaller in dimension in the second direction than the third light emitting region,
Wherein at least one of the openings extends over a plurality of the second luminescent regions which are adjacent to each other with an interval in the second direction and emit light of the same color. 4. The method according to any one of claims 1 to 3,
A plurality of the light emitting region groups are arranged in the first direction at intervals,
Wherein at least one of the openings extends over a plurality of the light emitting regions which are adjacent to each other with an interval in the second direction and emit light of the same color and which are adjacent to each other at intervals in the first direction, And the light emitting region extends over the light emitting region. In the application method,
A discharge unit including a plurality of nozzles in which a plurality of nozzles are arranged side by side in a first direction and a substrate holding unit for holding a substrate relatively move in a second direction crossing the first direction,
And a step of discharging droplets used for forming the light emitting layer from the nozzles toward the respective openings of the bank previously formed in the substrate held by the substrate holding portion,
The light emitting layer has a light emitting region group in which a plurality of light emitting regions emitting light of different colors are arranged in an interval in the second direction in a predetermined order,
Wherein at least one of the openings extends over a plurality of luminescent regions which are adjacent to each other with an interval in the second direction and emit light of the same color. 6. The method of claim 5,
Wherein the light emitting region group includes a first light emitting region emitting light of a first color and a second light emitting region emitting light of a second color different from the first color,
Wherein the first light emitting region has a smaller dimension in the second direction than the second light emitting region,
Wherein at least one of the openings extends over a plurality of the first luminescent regions which are adjacent to each other with an interval in the second direction and emit light of the same color. The method according to claim 6,
The light emitting region group further includes a third light emitting region emitting light of a third color different from the first color and the second color,
The second light emitting region is smaller in dimension in the second direction than the third light emitting region,
Wherein at least one of the openings extends over a plurality of the second luminescent regions which are adjacent to each other with an interval in the second direction and emit light of the same color. 8. The method according to any one of claims 5 to 7,
A plurality of the light emitting region groups are arranged in the first direction at intervals,
Wherein at least one of the openings extends over a plurality of the light emitting regions which are adjacent to each other with an interval in the second direction and emit light of the same color and which are adjacent to each other at intervals in the first direction, And the light emitting region extends over the light emitting region. In organic EL displays,
A pixel electrode provided on the substrate; a counter electrode provided on the opposite side of the substrate with respect to the pixel electrode; a light emitting layer provided between the pixel electrode and the counter electrode; And a bank including an opening to be filled,
Wherein the light emitting layer has a light emitting region group in which a plurality of light emitting regions emitting light of different colors are arranged in a predetermined order in a predetermined order at intervals,
Wherein at least one of the openings extends over a plurality of luminescent regions which are adjacent to each other with an interval in the predetermined direction and emit light of the same color. 10. The method of claim 9,
Wherein the light emitting region group includes a first light emitting region emitting light of a first color and a second light emitting region emitting light of a second color different from the first color,
Wherein the first light emitting region has a smaller dimension in the predetermined direction than the second light emitting region,
Wherein at least one of the openings extends over a plurality of the first luminescent regions which are adjacent to each other with an interval in the predetermined direction and emit light of the same color. 11. The method of claim 10,
The light emitting region group further includes a third light emitting region emitting light of a third color different from the first color and the second color,
The second light emitting region has a smaller dimension in the predetermined direction than the third light emitting region,
Wherein at least one of the openings extends over a plurality of the second luminescent regions which are adjacent to each other with an interval in the predetermined direction and emit light of the same color. 12. The method according to any one of claims 9 to 11,
Wherein a plurality of the light emitting region groups are arranged at intervals in a direction intersecting with the predetermined direction,
At least one of the openings extends over a plurality of the light emitting regions which are adjacent to each other with an interval in the predetermined direction and emit light of the same color and are adjacent to each other in the direction crossing the predetermined direction, And a plurality of said light emitting regions to emit light.

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